Allwin21 AccuThermo AW810M User manual

Allwin21 Corporation
AccuThermo® AW810M
Rapid Thermal Process System
Technical Manual
Allwin21 Corporation
220 Cochrane Circle, Morgan Hill CA 95037
www.allwin21.com

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ALLWIN21
ACCUTHERMO® AW810M
RAPID THERMAL PROCESS SYSTEM
TECHNICAL MANUAL
Allwin21 Corporation
220 Cochrane Circle
Morgan Hill, CA 95037

A9-0716-01 rev. C AccuThermo® AW810M Technical Manual
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Document #: A9-0716-01 Rev. C.1
Written by: Rick Forney
September, 2011
SERVICE INFORMATION
Customer technical support is available from Allwin21 Corporation to provide information not included
in this manual. The Customer Support Department is open Monday through Friday, 9:00 a.m. to 6:00
p.m., Pacific Time.
Field service support and parts are available from Allwin21 Corporation. The office is open Monday
through Friday, 9:00 a.m. to 6:00 p.m., Pacific Time.
Allwin21 Corporation
Customer Service
Phone: [phone]
Fax: [phone]
Email: [email protected]
Document Disclaimer
Swagelok is a trademark of Crawford Fitting Company.
VCR is a trademark of Cajon Company.
Pentium® is a registered trademark of the Intel Corporation.
AccuThermo® is a registered trademark of Allwin21 Corporation.
Allwin21 Corporation makes no representations or warranties with respect to this Manual, except as
outlined in the product warranty. Further, Allwin21 reserves the right to make changes in the
specifications of the product described within this Manual at any time without notice and without
obligation to Allwin21 Corporation.
Statement of Confidentiality
The information contained herein is confidential to and the property of Allwin21 Corporation. It may not
be reproduced nor disclosed in whole or in part by any method without the prior written permission of
Allwin21 Corporation. All software is copyrighted and the property of Allwin21 Corporation.
Copyright 2006 – 2011 by Allwin21 Corporation. All rights reserved.

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WARRANTY
Allwin21 Corporation warranty labor, if necessary, will be provided during normal business hours of 9:00
AM to 6:00 PM, Monday through Friday, except certain holidays.
To receive field service or parts replacement during a system warranty period, the customer shall
promptly provide to Allwin21 Corporation details of any product or component thought to be defective
and request a Return Material Authorization (RMA). Within fourteen (14) days after receipt of the RMA
number from Allwin21 Corporation, the customer shall return the defective product or component to
Allwin21 Corporation freight paid. As soon as is practicable after issue of the RMA, Allwin21
Corporation shall repair/replace and return any product/component found to be defective.
Repaired/replaced and returned products and components will be warranted as above for the duration of
the warranty period of the defective product, and shall be comprised of new or re-worked components.
Returned product not subject to warranty shall be disposed of at customer’s cost and subject to customer’s
instructions.
Items not covered under the warranty include, but are not limited to:
Quartzware
Consumable parts
O-rings and gaskets
Fuses
Thermocouples
Susceptor
Mass Flow Meter
Allwin21 Corporation products are normally intended to be used in a semiconductor processing
environment in accordance with the functional, environmental, and operational standards published by
Allwin21 Corporation or generally accepted in the industry. Allwin21 Corporation shall have no warranty
obligation with respect to any product which has been modified or altered, or with respect to data
contained in any product returned to Allwin21 Corporation by the customer without written approval.
Allwin21 Corporation liability to the customer or anyone claiming through or on behalf of the customer
with respect to any claim or loss arising out of the purchase and/or sale of any Allwin21 Corporation
product shall be limited to the original purchase price amount of the product. In no event shall Allwin21
Corporation be liable for consequential damages, losses, or reprocurement costs arising out of the
purchase and/or sale of any Allwin21 Corporation product, and an action to recover the purchase or to
compel such replacement or adjustment shall be customer's sole remedy under the Uniform Commercial
Code or otherwise.

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All claims must be reported to Allwin21 Corporation before the end of the warranty period. Allwin21
Corporation may not honor claims for repair or replacement if reported after the warranty has expired.
Allwin21 Corporation has no means of determining whether repair or replacement was covered by terms
of this warranty. All claims must be reported promptly. The burden of proof will be the responsibility of
the customer or its agent, and all associated costs will be borne by the same.
In order to honor a warranty for any Allwin21 system, the customer is required to perform the
recommended preventive maintenance (PM) on the system. Allwin21 Corporation will perform PM
training during system start-up. PM contracts are available from Allwin21 Corporation at an additional
charge.
Buyer will be granted a personal, non-transferable, non-exclusive perpetual license to use only the
number of copies of the software that are provided by the Seller and only on the equipment on which it
was originally installed, loaded, or mounted by the Seller. Without Seller's consent, Buyer may not copy
the software for any purpose. Buyer may not remove the software or attempt to execute the software on
any other equipment than the equipment on which the software was originally loaded, installed, or
mounted.
Buyer shall not, whether through the use of disassemblers or any other means, attempt to reverse
engineer, decompile, disassemble, or derive any source code from the software. Buyer shall not permit
any third party to do so. Buyer shall not cause the software to be destroyed, disabled, or modified in its
operation. Any attempt to do any of the things defined in this paragraph shall be a material breach of this
Agreement and shall immediately entitle Seller to exercise any remedy herein or available at law or in
equity.
THE FOREGOING IS THE SOLE WARRANTY OFFERED BY ALLWIN21 CORPORATION WITH
RESPECT TO ITS PRODUCTS AND COMPONENTS. ALLWIN21 CORPORATION MAKES NO
OTHER WARRANTY OF ANY KIND WHATSOEVER, EXPRESSED OR IMPLIED. ALL IMPLIED
WARRANTIES OF MERCHANTABILITY AND/OR FITNESS FOR A PARTICULAR PURPOSE
ARE HEREBY DISCLAIMED AND EXCLUDED BY ALLWIN21 CORPORATION.

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PREFACE
INTENDED AUDIENCE
This manual has been written for technicians and process development engineers working with the
AccuThermo® AW810M Rapid Thermal Processing (RTP) System. It provides an overview of the
system operation and maintenance procedures, as well as a troubleshooting guide. Please read this
manual carefully before operating the AccuThermo® RTP System.
DOCUMENT CONVENTIONS
FONT CONVENTIONS
The following font conventions are used in this manual.
Bold
Software screen selections are represented in bold type.
Italic
Screen names are shown in italic type.
First Letter Capitalized
Operating modes are shown in normal type with the first letter capitalized.
For example:
“Select Recipe from the Main Menu screen to enter the Recipe Programming mode.”

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TABLE OF CONTENTS
Service Information .............................................................................................. iii
Warranty.................................................................................................................iv
Preface.....................................................................................................................vi
Table of Contents................................................................................................. vii
List of Figures.......................................................................................................xiv
1.Introduction.....................................................................................................1
1.1System Description...............................................................................................................1
1.2Features ................................................................................................................................2
1.3System Process Specifications .............................................................................................4
2.Safety Precautions ..........................................................................................7
2.1Overview..............................................................................................................................7
2.2Notes, Cautions and Warnings.............................................................................................8
2.3Safety Features .....................................................................................................................9
2.4Utilities Inspection..............................................................................................................10
2.5System Operation ...............................................................................................................11
2.6Maintenance .......................................................................................................................11
2.7Gas Handling......................................................................................................................12
2.8Hazards...............................................................................................................................13
2.8.1Electrical Shock Hazards.....................................................................................13
2.8.2Process Gas Hazards............................................................................................13
2.8.3Process Byproduct Hazards .................................................................................14
2.8.4Oxygen Hazards...................................................................................................14
2.8.5Thermal Hazards..................................................................................................15
3.Installation.....................................................................................................17
3.1Purchaser’s Responsibility .................................................................................................17
3.2Allwin21 Service................................................................................................................17
3.2.1Field Service Installation .....................................................................................17
3.2.2Training................................................................................................................17
3.3Installation Process Overview............................................................................................18
3.3.1Installation Procedures.........................................................................................18
3.3.2Required Tools.....................................................................................................19
3.4Installation Site Requirements............................................................................................20
3.4.1Facility Preparation..............................................................................................20
3.4.2Space Requirements.............................................................................................20
3.4.3Utility Connections..............................................................................................21
3.4.4Adequate Cooling ................................................................................................22
3.4.5Proper Tubing Size ..............................................................................................23
3.4.6Air Conditioning..................................................................................................24

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3.4.7Electrical..............................................................................................................25
3.4.8Cooling Air..........................................................................................................31
3.4.9Chamber Cooling Water......................................................................................33
3.4.10Process Gas........................................................................................................37
3.4.11Process Exhaust .................................................................................................39
3.4.12Pneumatic Air ....................................................................................................40
3.4.13Cabinet Exhaust.................................................................................................41
3.4.14Pyrometer Cooling Water..................................................................................42
3.5Unpacking and Inspecting the System................................................................................45
3.5.1Uncrating .............................................................................................................45
3.5.2System Inspection................................................................................................46
3.5.3Unpacking............................................................................................................46
3.6Installing the Computer......................................................................................................47
3.6.1Overview of the Computer...................................................................................47
3.6.2Interconnection of the Computer Assembly ........................................................48
3.6.3Connecting Computer to AccuThermo® RTP System........................................49
3.7Installing the Quartz Wafer Tray........................................................................................50
3.8Utility Check List...............................................................................................................51
4.Power-Up & Power-Down ...........................................................................57
4.1Overview............................................................................................................................57
4.2Utilities Inspection..............................................................................................................58
4.3Front Control Panel ............................................................................................................60
4.4Full Power-Up and Testing ................................................................................................62
4.4.1Initial Power-Up ..................................................................................................62
4.4.2Gas Setup Procedure............................................................................................65
4.4.3Manual Mode Tests..............................................................................................66
4.5Daily Power-Up..................................................................................................................68
4.6System Operation ...............................................................................................................70
4.7Full Power-Down ...............................................................................................................71
4.8Daily Power-Down.............................................................................................................72
5.Basic Operation.............................................................................................75
5.1Overview............................................................................................................................75
5.2Menu Organization.............................................................................................................77
5.3Using the Menu Screens.....................................................................................................79
5.4Process for Production Screen............................................................................................82
5.5Process for Engineer Screen...............................................................................................84
5.6Start a Process ....................................................................................................................86
5.7Process Finished.................................................................................................................89
5.8Stop Process .......................................................................................................................89
5.9Review the Process Data....................................................................................................90
6.Advanced Operation.....................................................................................93
6.1Selecting a Recipe ..............................................................................................................93
6.2Create and Modify a Recipe...............................................................................................94
6.3Recipe Editor......................................................................................................................96
6.3.1Recipe Header......................................................................................................97
6.3.2Data Entry Area .................................................................................................100
6.3.3Keyboard Short-Cuts .........................................................................................103
6.3.4Recipe Header Screen........................................................................................104

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6.4Optimizing the Temperature Profile.................................................................................106
6.4.1Recipe Parameters..............................................................................................106
6.4.2Recipe Lamp Zone Control................................................................................111
6.4.3Temperature Profile Stages................................................................................113
6.4.4Temperature Profile Optimization.....................................................................115
6.4.5Temperature Curves...........................................................................................120
6.4.6Troubleshooting the Temperature Control.........................................................123
6.4.7Process Control Alarms .....................................................................................127
6.5Troubleshooting the Process Control ...............................................................................129
7.Administration............................................................................................131
7.1File Administration...........................................................................................................131
7.1.1File Extensions...................................................................................................131
7.1.2Suggested ID Names..........................................................................................132
7.2Software Setup .................................................................................................................133
7.2.1Maintenance Menu ............................................................................................133
7.2.2System Setup......................................................................................................134
7.2.3Gas Setup...........................................................................................................138
7.2.4Factory Setup.....................................................................................................140
7.2.5Control Board Selection.....................................................................................143
7.2.6GEM/SECS II Management ..............................................................................144
7.2.7Security..............................................................................................................146
8.Theory of Operation...................................................................................151
8.1Lamps...............................................................................................................................151
8.1.1Lamp Intensity...................................................................................................151
8.1.2Interlocks ...........................................................................................................154
8.2Adequate Tube Size..........................................................................................................156
8.2.1Tube is Too Small..............................................................................................156
8.2.2Tube is Too Long...............................................................................................156
8.3Cooling.............................................................................................................................157
8.3.1Chamber Cooling...............................................................................................157
8.3.2Quartz Isolation Tube Cooling...........................................................................157
8.3.3Wafer Cooling....................................................................................................158
8.3.4Rate of Cooling..................................................................................................158
8.3.5Cooling Control .................................................................................................159
8.4Thermocouple...................................................................................................................160
8.5Pyrometer .........................................................................................................................161
8.5.1Optical Pyrometry..............................................................................................161
8.5.2The Extended Range Pyrometer (ERP) .............................................................161
8.6Temperature......................................................................................................................165
8.6.1What is Temperature?........................................................................................165
8.6.2Measuring Temperature.....................................................................................166
8.6.3Uniformity .........................................................................................................167
8.7LED Temperature Display ...............................................................................................168
8.8Gas Handling Subsystem..................................................................................................169
8.9GaAs, InP and Other Compound Semiconductor Processes............................................171
8.9.1Introduction........................................................................................................171
8.9.2Problems ............................................................................................................171
8.9.3Using the AW Control Software........................................................................172
8.9.4Summary............................................................................................................173

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9.Maintenance & Diagnostics.......................................................................175
9.1Overview..........................................................................................................................175
9.2Preventative Maintenance (PM) Schedule .......................................................................177
9.2.1Daily Maintenance.............................................................................................177
9.2.2Weekly Maintenance .........................................................................................178
9.2.3Monthly Maintenance........................................................................................179
9.2.4Quarterly Maintenance.......................................................................................180
9.3Draining the Cooling Water .............................................................................................181
9.4Removing the Cabinet Cover ...........................................................................................182
9.5Quartzware (Tube and Tray)............................................................................................184
9.5.1Preventative Maintenance..................................................................................184
9.5.2Quartz Isolation Tube Removal and Installation ...............................................184
9.5.3Quartz Wafer Support Tray Removal and Installation ......................................193
9.5.4Quartz Wafer Support Tray Leveling ................................................................195
9.5.5Quartzware Cleaning .........................................................................................198
9.5.6Quartzware Storage............................................................................................201
9.6Susceptor..........................................................................................................................202
9.6.1Introduction........................................................................................................202
9.6.2Using the Susceptor ...........................................................................................203
9.6.3Care and Cleaning..............................................................................................205
9.7Calibration Menu..............................................................................................................206
9.8LED Display Calibration..................................................................................................208
9.9R40 Calibration ................................................................................................................210
9.10Thermocouple...................................................................................................................211
9.10.1Overview..........................................................................................................211
9.10.2Installing the Thermocouple............................................................................214
9.10.3Testing the Thermocouple ...............................................................................216
9.10.4Installing and Testing the TC Wafer................................................................216
9.10.5Thermocouple Calibration...............................................................................217
9.10.6Thermocouple Diagnostics ..............................................................................220
9.11Pyrometer .........................................................................................................................222
9.11.1Overview..........................................................................................................222
9.11.2Pyrometer Calibration......................................................................................223
9.11.3Pyrometer Diagnostics.....................................................................................240
9.11.4Checking the Pyrometer Calibration................................................................242
9.12Lamps...............................................................................................................................243
9.12.1Lamp Zone Control..........................................................................................243
9.12.2Lamp Diagnostics ............................................................................................247
9.12.3Verifying If the Lamps Are In Good Condition ..............................................249
9.12.4Identifying a Bad Lamp...................................................................................249
9.12.5Replacing a lamp .............................................................................................250
9.13Gas Control.......................................................................................................................251
9.13.1MFC Gas Flow Diagnostics.............................................................................251
9.13.2Gas Calibration ................................................................................................253
9.13.3Gas Leak Check Procedure..............................................................................255
9.14Chamber Calibration ........................................................................................................256
9.15Diagnostics & Testing......................................................................................................262
9.15.1Diagnostics Screen...........................................................................................263
9.15.2Manual Control Screen....................................................................................268
9.15.3Board Test Screen............................................................................................269