Allwin21 GaSonics AURA 1000 User manual

Allwin21 Corporation
GaSonics AURA 1000 Stripper
with
Allwin21
AW1008 Upgrade Kit
Operator’s Manual
Allwin21 Corporation
220 Cochrane Circle, Morgan Hill, CA 95037

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ALLWIN21 CORPORATION
GASONICS AURA 1000
AUTOMATED STRIPPER SYSTEM
WITH
ALLWIN21
AW1008 UPGRADE KIT
OPERATOR’S MANUAL
Allwin21 Corporation
220 Cochrane Circle
Morgan Hill, California, 95037

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Document #: A9-0726-01 Rev. A2
Written by: Rick Forney
August, 2009
SERVICE INFORMATION
Customer technical support is available from Allwin21 Corporation to provide information not
included in this manual. The Customer Support Department is open Monday through Friday,
9:00 a.m. to 5:00 p.m., Pacific Time.
Field service support and parts are available from Allwin21 Corporation. The office is open
Monday through Friday, 9:00 a.m. to 5:00 p.m., Pacific Time.
Allwin21 Corporation
Customer Service
Phone: [phone]
Fax: [phone]
Email: [e-mail]
Document Disclaimer
Swagelok is a trademark of Crawford Fitting Company.
VCR is a trademark of Cajon Company.
Equipe® is a registered trademark of Equipe Technologies, Inc.
GaSonics® is a registered trademark of GaSonics International Corporation.
Pentium® is a registered trademark of the Intel Corporation.
Copyright 2006 – 2009 by Allwin21 Corporation. All rights reserved.
Allwin21 Corporation makes no representations or warranties with respect to this Manual, except
as outlined in the product warranty. Further, Allwin21 reserves the right to make changes in the
specifications of the product described within this Manual at any time without notice and without
obligation to Allwin21 Corporation.
No part of this document may be reproduced in any form without the express, written permission
of Allwin21 Corporation.

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WARRANTY
Allwin21 Corporation warranty labor, if necessary, will be provided during normal business
hours of 9:00 AM to 5:00 PM, Monday through Friday.
To receive field service or parts replacement during a system warranty period, the customer shall
promptly provide to Allwin21 Corporation details of any product or component thought to be
defective and request a Return Material Authorization (RMA). Within fourteen (14) days after
receipt of the RMA number from Allwin21 Corporation, the customer shall return the defective
product or component to Allwin21 Corporation freight paid. As soon as is practicable after issue
of the RMA, Allwin21 Corporation shall repair/replace and return any product/component found
to be defective.
Repaired/replaced and returned products and components will be warranted as above for the
duration of the warranty period of the defective product, and shall be comprised of new or
re-worked components. Returned product not subject to warranty shall be disposed of at
customer’s cost and subject to customer’s instructions.
Items not covered under the warranty include, but are not limited to:
Quartzware
Consumable parts
O-rings and gaskets
Fuses
Thermocouples
Mass Flow Meter
Allwin21 Corporation products are normally intended to be used in a semiconductor processing
environment in accordance with the functional, environmental, and operational standards
published by Allwin21 Corporation or generally accepted in the industry. Allwin21 Corporation
shall have no warranty obligation with respect to any product which has been modified or
altered, or with respect to data contained in any product returned to Allwin21 Corporation by the
customer without written approval.
Allwin21 Corporation liability to the customer or anyone claiming through or on behalf of the
customer with respect to any claim or loss arising out of the purchase and/or sale of any
Allwin21 Corporation product shall be limited to the original purchase price amount of the

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product. In no event shall Allwin21 Corporation be liable for consequential damages, losses, or
reprocurement costs arising out of the purchase and/or sale of any Allwin21 Corporation product,
and an action to recover the purchase or to compel such replacement or adjustment shall be
customer's sole remedy under the Uniform Commercial Code or otherwise.
All claims must be reported to Allwin21 Corporation before the end of the warranty period.
Allwin21 Corporation may not honor claims for repair or replacement if reported after the
warranty has expired. Allwin21 Corporation has no means of determining whether repair or
replacement was covered by terms of this warranty. All claims must be reported promptly. The
burden of proof will be the responsibility of the customer or its agent, and all associated costs
will be borne by the same.
In order to honor a warranty for any Allwin21 system, the customer is required to perform the
recommended preventive maintenance (PM) on the system. Allwin21 Corporation will perform
PM training during system start-up. PM contracts are available from Allwin21 Corporation at an
additional charge.
Buyer will be granted a personal, non-transferable, non-exclusive perpetual license to use only
the number of copies of the software that are provided by the Seller and only on the equipment
on which it was originally installed, loaded, or mounted by the Seller. Without Seller's consent,
Buyer may not copy the software for any purpose. Buyer may not remove the software or
attempt to execute the software on any other equipment than the equipment on which the
software was originally loaded, installed, or mounted.
Buyer shall not, whether through the use of disassemblers or any other means, attempt to reverse
engineer, decompile, disassemble, or derive any source code from the software. Buyer shall not
permit any third party to do so. Buyer shall not cause the software to be destroyed, disabled, or
modified in its operation. Any attempt to do any of the things defined in this paragraph shall be a
material breach of this Agreement and shall immediately entitle Seller to exercise any remedy
herein or available at law or in equity.
THE FOREGOING IS THE SOLE WARRANTY OFFERED BY ALLWIN21 CORPORATION
WITH RESPECT TO ITS PRODUCTS AND COMPONENTS. ALLWIN21 CORPORATION
MAKES NO OTHER WARRANTY OF ANY KIND WHATSOEVER, EXPRESS OR
IMPLIED. ALL IMPLIED WARRANTIES OF MERCHANTABILITY AND/OR FITNESS
FOR A PARTICULAR PURPOSE ARE HEREBY DISCLAIMED AND EXCLUDED BY
ALLWIN21 CORPORATION.

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PREFACE
INTENDED AUDIENCE
This manual has been written for technicians and process development engineers working with
the Allwin21 System. It provides an overview of the system and its operation, as well as specific
operating instructions. It also includes minor service and some troubleshooting procedures.
MANUAL CONVENTIONS
MENUS,BUTTONS,COMMANDS AND MODES
The following font conventions are used in this manual.
Bold
Software screen selections are represented in bold type.
Italic
Screen names are shown in italic type.
First Letter Capitalized
Operating modes are shown in normal type with the first letter capitalized.
For example:
“Select Recipe from the Main Menu screen to enter the Recipe Programming mode.”

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TABLE OF CONTENTS
SERVICE INFORMATION....................................................................................III
WARRANTY ......................................................................................................IV
PREFACE...........................................................................................................VI
TABLE OF CONTENTS ......................................................................................VII
LIST OF FIGURES..............................................................................................IX
1. INTRODUCTION.........................................................................................1
1.1 System Overview................................................................................................. 1
1.1.1 System Description .......................................................................1
1.2 System Features................................................................................................... 2
1.3 Software Overview .............................................................................................. 2
2. THEORY OF OPERATION...........................................................................3
2.1 Operation............................................................................................................. 3
2.1.1 System Electronic Components.....................................................3
2.1.2 Main Computer.............................................................................3
2.1.3 Touch Screen Display ...................................................................3
2.1.4 Interface / Interlock Board ............................................................3
2.1.5 Plasma Generator..........................................................................4
2.1.6 AC Power Distribution..................................................................4
2.2 Infrared Heat Source............................................................................................ 4
2.3 Pneumatic/Mechanical Components .................................................................... 5
2.3.1 Vacuum System............................................................................5
2.3.2 Mass Flow Controllers (MFC's) ....................................................5
2.3.3 Pneumatic System.........................................................................6
2.3.4 Plasma System..............................................................................6
3. SAFETY PRECAUTIONS..............................................................................7
3.1 Overview............................................................................................................. 7
3.2 Notes, Cautions and Warnings ............................................................................. 8
3.3 Safety Features .................................................................................................... 9
3.4 Gas Handling..................................................................................................... 10

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3.5 Hazards ............................................................................................................. 11
3.5.1 Electrical Shock Hazards ............................................................11
3.5.2 Process Gas Hazards ...................................................................11
3.5.3 Process Byproduct Hazards.........................................................12
3.5.4 Oxygen Hazards .........................................................................12
3.5.5 Thermal Hazards.........................................................................13
4. POWER-UP &POWER-DOWN.................................................................15
4.1 Overview........................................................................................................... 15
4.2 Utilities Inspection............................................................................................. 16
4.3 Front Control Panel ........................................................................................... 17
4.4 Power-Up Procedure.......................................................................................... 18
4.5 System Operation .............................................................................................. 19
4.6 Maintenance ...................................................................................................... 19
4.7 Power-Down Procedure..................................................................................... 20
5. BASIC OPERATION..................................................................................21
5.1 Overview........................................................................................................... 21
5.2 Software Features.............................................................................................. 22
5.3 Runnig a Lot...................................................................................................... 25
5.4 Stop Process ...................................................................................................... 29
5.5 Review the Process Data.................................................................................... 29
A. SYSTEM REQUIREMENTS........................................................................31
B. MANUAL REVISION HISTORY.................................................................32
INDEX ...............................................................................................................33

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LIST OF FIGURES
Figure 5.1: Process for Production screen, basic functions..................................................... 25
Figure 5.2: Process for Engineer screen................................................................................. 26
Figure 5.3: WTM Manual Operation..................................................................................... 27
Figure 5.4: Process Monitor screen ....................................................................................... 28

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1. INTRODUCTION
Figure 1: 1111
1.1 SYSTEM OVERVIEW
The GaSonics AURA 1000 Stripper System with the Allwin21 Upgrade Kit (Allwin21
System) has been designed to be customer-installed and maintained. The Allwin21
System is a PC controlled photoresist stripping system. It strips the front and back
surfaces of a single wafer for short periods of time.
The Allwin21 System is a fully automated, cassette-to-cassette, single-wafer processing
system.
The Allwin21 System generates plasma of oxygen and/or other gasses in a reaction
chamber. This concentrated reactive mixture then flows downstream, reaching a state of
electrical neutrality. Although highly reactive, it is no longer electrically damaging to the
wafer. The mixture then enters the process chamber, where the dissociated oxygen reacts
with the photoresist and oxidizes the photoresist from the wafer.
The main component of the plasma reaction is atomic oxygen (normal oxygen consists of
two, atoms, while atomic oxygen consists of only one).
1.1.1 SYSTEM DESCRIPTION
The system is controlled by a Pentium class PC computer running the AW-ASH control
software, and interacts with the user through a touch screen display.
The system has two modules: The main unit contains the processing chamber, controller,
RF generator, and wafer handling system. The second unit contains the vacuum pump.
Allwin21 provides, as an option, the above two modules as an integrated system. The
vacuum pump is available from Allwin21 as a separate option.
The RF power used in the process is supplied by the RF generator. The process gasses used
in the system are metered through mass flow controllers calibrated for nitrogen (N2). A
correction factor is entered into the control software to compensate for the different
masses of gasses. A connection is provided for a vacuum pump for evacuating the
system to the operating pressure.
The computer permits the user to operate the machine manually or automatically through
a recipe programmable by the user.

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The equipment transfers photoresist-coated wafers from a send cassette on a platform to
the process chamber for stripping (ashing) photoresist, and then transfers them to a receive
cassette after processing and cooling.
1.2 SYSTEM FEATURES
Single wafer processing
One-to-four process gas MFC's
4", 5", and 6" wafer capability
Programmable process recipe control
Automatic wafer loader/unloader
Infrared heat source for process temperature control.
Downstream processing: No wafer radiation damage.
Soft-start vacuum system.
Equipped with hard-wired safety interlocks to prevent damage to the system or injury
to either the product or to personnel.
Front and backside photoresist removal
Automatic photo emission type end-point detection
In-line cassette-to-cassette.
Compact: 34” W x 36" D x 54” H
1.3 SOFTWARE OVERVIEW
The AW-ASH software is an advanced control software standard on the Allwin21
system. This document provides a general discussion of the function and calibration of
the control software.
The control software allows full control and diagnostics of the Allwin21 system. In
addition, it allows the creation of recipes for automated control of all aspects of the
process.

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2. THEORY OF OPERATION
Figure 2: 2222
2.1 OPERATION
2.1.1 SYSTEM ELECTRONIC COMPONENTS
The major components consist of the main computer, touch screen display module,
interface/interlock board, thermocouple, baratron meter, end point detector (optional), and
plasma generator.
2.1.2 MAIN COMPUTER
The main computer is the central control for all Allwin21 functions. The unit sequences
all mechanical and pneumatic functions, monitors sensors and the touch screen display,
calculates various quantities to derive operational parameters, stores process recipes, and
assists with troubleshooting when required.
2.1.3 TOUCH SCREEN DISPLAY
The touch screen display unit functions as the interface with the operator, accepting and
displaying data.
The unit is connected directly to the main computer.
2.1.4 INTERFACE / INTERLOCK BOARD
The Interface/Interlock Board is independent of the computer. It interfaces to the main
computer and receives and monitors critical function signals from sensors located throughout
the machine. All communication between the main computer and the machine passes through
this board. Depending on sensor status, the Interface/Interlock Board will allow operations
to process as required. If all signals are in a non-alert status, the computer will step through
the process normally. If an abnormal condition is detected, operation will be inhibited until
the abnormal condition is corrected. In addition, LED indicators, located on the Interlock
Board, illuminate to show both the sensor and instantaneous interlock status.

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2.1.5 PLASMA GENERATOR
The plasma generator is a part of the reaction chamber. A magnetron provides the
microwave energy via a waveguide to the ceramic/quartz reaction chamber, where the
plasma is created.
2.1.6 AC POWER DISTRIBUTION
208VAC 3-Phase power enters through a power/control enclosure at the rear of the system.
The enclosure contains all circuits utilizing a hazardous potential, including those still
active with circuit breakers off. A control transformer powers both the emergency off
interlocks and normal on/off functions. A small connector located at the rear of this
enclosure allows for connecting the EMO (Emergency Off) interlock serially to as many
safety interlock switches as required. Power to the rest of the system is through two
terminal strips located under the top clover of the enclosure.
Immediately above the power/control enclosure is a hinged panel, which contains:
The low voltage switching power supply.
The magnetron high voltage power supply.
Filament transformer.
Five solid-state relays.
One mechanical relay.
Thermocouple gauge power supply/amplifier.
Cabinet ventilation flange.
Circuit breaker box (located behind the front RF shield).
2.2 INFRARED HEAT SOURCE
Three lamps, located under the process chamber, provide thermal energy to speed difficult
processes using baked or implanted resists.
The lamps operate independently of each other, and are controlled by the computer process
program.
All three lamps are rated at 1000 watts. All lamps are used to rapidly heat the wafer and
maintain the temperature during the stripping process.

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2.3 PNEUMATIC/MECHANICAL COMPONENTS
The major pneumatic/mechanical components consist of the vacuum system, mass flow
controller(s), pneumatics, wafer handling system, and the plasma generation system.
Pneumatics are enabled only when the computer has determined that the system is in an
appropriately safe state.
2.3.1 VACUUM SYSTEM
The process chamber is evacuated in two stages: a soft-start valve opens to gently pull the
chamber down to around 20 torr through a manifold around the inside top of the
chamber; at 20 torr, the main vacuum valve opens to pull the chamber the rest of the way
down to process pressures. This two-stage evacuation prevents any particles that may
remain in the chamber from a previous process from being stirred up by the turbulence of a
rapid application of vacuum.
With the main vacuum valve open, the system is able to maintain operating pressure with
gas flows up to 10 LPM.
A baratron meter is used to derive the pressure signals that are displayed on the touch
screen and used to monitor the process.
2.3.2 MASS FLOW CONTROLLERS (MFC'S)
MFC's are used to enter process gasses into the plasma chamber. Setpoints for process
flows are entered into the recipe during setup, and displayed on the front panel during the
process. Both the setpoint and the actual value are available during the process.

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2.3.3 PNEUMATIC SYSTEM
Nitrogen or Clean Dry Air (CDA) is used to power the pneumatics system. This includes the
bellows valves used in the vacuum system.
The entire pneumatics system is enabled by a solenoid that is under computer control. The
solenoid only allows the system to pressurize when conditions are safe. This solenoid also
vents the pneumatics system upon power down.
On the robotic wafer handling system, there is also a house-vacuum connection on the rear
utility panel that is connected to the wafer handling system to supply the vacuum chuck.
2.3.4 PLASMA SYSTEM
The plasma generation system is based on microwave excitation of oxygen in a quartz or
ceramic plasma tube. The process gasses flow into one end of the tube, are turned into a
plasma as they pass through, and flow out the other end through an orifice. As this
"exhaust" of the plasma process enters the stripping chamber, it is a highly-reactive but
electrically inert gas that will not damage the wafer, yet will efficiently strip away even
the most heavily-implanted resist that may be placed in its path. To ensure that the entire wafer is stripped
evenly, a ceramic distribution plenum (or "showerhead") is located just below the orifice
to distribute the gas flow proportionally across the wafer surface.

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3. SAFETY PRECAUTIONS
Figure 3: 3333
3.1 OVERVIEW
This section provides information intended to prevent damage to the Allwin21 system
and injury to operation and maintenance personnel. All hazards are not covered, only
those most prevalent and serious. Your full understanding of the capabilities and
limitations of this equipment is necessary for safe and efficient operation.
WARNING
Only Allwin21 or qualified personnel should install, start
up, operate and/or repair the Allwin21 system. Damage to
the system or injury to personnel could result if the
preceding actions are carried out by unqualified
personnel.
Prior to applying power or starting up the system, follow these safety precautions:
Check all utilities for proper connections. Connect only those gases specified for use
in the system.
Make sure the cabinet doors and system covers are closed.
Check the scrubber exhaust to make sure it is properly connected to the facility
scrubber. Ensure the facility scrubber is operating properly. Check the gas outlet for
any restrictions.

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3.2 NOTES, CAUTIONS AND WARNINGS
When operating and maintaining the Allwin21 system, the following safety procedures
and precautions must be followed to avoid certain hazards. Observe all warnings and
cautions. Their purpose is to protect personnel from injury and long term health hazards
and to protect the machine from damage.
Pay special attention to notes, cautions and warnings located in appropriate areas in this
manual.
NOTE
Notes provide additional important information which
requires special attention.
CAUTION
Cautions alert you to avoid system damage.
WARNING
Warnings are given for personnel safety to prevent bodily
harm.

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3.3 SAFETY FEATURES
The Allwin21 system incorporates several features to prevent injury either to wafers or
personnel.
There is a watchdog timer on the interface board. This shuts the system down if the
communication between the computer and the system is interrupted or the software
freezes.
The RF system is interlocked to prevent their inadvertent operation with the door
open.
All hazardous voltages are removed from readily accessible areas with machine
power-off, even if the main circuit breaker is still on.
Waveguide design eliminates leakage of microwave energy.
The Emergency Off system can be extended to a customer-specified location, or tied
into a master system as desired.
Pneumatic: The pneumatics is used to operate the Positive Shut-off valves and the
chamber door. If there is no air pressure, the shut-off valves will close. If the power
is removed from the Allwin21 system, then the pneumatic gas valves close
automatically.

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3.4 GAS HANDLING
Be aware of the following cautions when working with gases in the Allwin21 system:
Only use gases that have been specified for use in the Allwin21 system. Typically
these include 02, CF4, N2.
CAUTION
Allwin21 Corp. is not liable for the use of gases not
recommended by the factory.
Make sure the specified gases are connected to the proper inlets on the rear panel.
WARNING
Failure to properly connect the gas lines may result in
dangerous gas mixture that could cause harm to personnel
and/or the system.
WARNING
There will be no chemical exposures during normal
routine maintenance. However, if the need arises that a
gas valve has to be changed, then it is the maintenance
person’s responsibility to follow all safety procedures for
gas exposure.