Allwin21 GaSonics AURA 1000 User manual

Allwin21 Corporation
GaSonics AURA 1000 Stripper
with
Allwin21
AW1008 Upgrade Kit
Operator’s Manual
Allwin21 Corporation
220 Cochrane Circle, Morgan Hill, CA 95037

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ALLWIN21 CORPORATION
GASONICS AURA 1000
AUTOMATED STRIPPER SYSTEM
WITH
ALLWIN21
AW1008 UPGRADE KIT
OPERATOR’S MANUAL
Allwin21 Corporation
220 Cochrane Circle
Morgan Hill, California, 95037

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Document #: A9-0726-01 Rev. A2
Written by: Rick Forney
August, 2009
SERVICE INFORMATION
Customer technical support is available from Allwin21 Corporation to provide information not
included in this manual. The Customer Support Department is open Monday through Friday,
9:00 a.m. to 5:00 p.m., Pacific Time.
Field service support and parts are available from Allwin21 Corporation. The office is open
Monday through Friday, 9:00 a.m. to 5:00 p.m., Pacific Time.
Allwin21 Corporation
Customer Service
Phone: [phone]
Fax: [phone]
Email: [e-mail]
Document Disclaimer
Swagelok is a trademark of Crawford Fitting Company.
VCR is a trademark of Cajon Company.
Equipe® is a registered trademark of Equipe Technologies, Inc.
GaSonics® is a registered trademark of GaSonics International Corporation.
Pentium® is a registered trademark of the Intel Corporation.
Copyright 2006 – 2009 by Allwin21 Corporation. All rights reserved.
Allwin21 Corporation makes no representations or warranties with respect to this Manual, except
as outlined in the product warranty. Further, Allwin21 reserves the right to make changes in the
specifications of the product described within this Manual at any time without notice and without
obligation to Allwin21 Corporation.
No part of this document may be reproduced in any form without the express, written permission
of Allwin21 Corporation.

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WARRANTY
Allwin21 Corporation warranty labor, if necessary, will be provided during normal business
hours of 9:00 AM to 5:00 PM, Monday through Friday.
To receive field service or parts replacement during a system warranty period, the customer shall
promptly provide to Allwin21 Corporation details of any product or component thought to be
defective and request a Return Material Authorization (RMA). Within fourteen (14) days after
receipt of the RMA number from Allwin21 Corporation, the customer shall return the defective
product or component to Allwin21 Corporation freight paid. As soon as is practicable after issue
of the RMA, Allwin21 Corporation shall repair/replace and return any product/component found
to be defective.
Repaired/replaced and returned products and components will be warranted as above for the
duration of the warranty period of the defective product, and shall be comprised of new or
re-worked components. Returned product not subject to warranty shall be disposed of at
customer’s cost and subject to customer’s instructions.
Items not covered under the warranty include, but are not limited to:
Quartzware
Consumable parts
O-rings and gaskets
Fuses
Thermocouples
Mass Flow Meter
Allwin21 Corporation products are normally intended to be used in a semiconductor processing
environment in accordance with the functional, environmental, and operational standards
published by Allwin21 Corporation or generally accepted in the industry. Allwin21 Corporation
shall have no warranty obligation with respect to any product which has been modified or
altered, or with respect to data contained in any product returned to Allwin21 Corporation by the
customer without written approval.
Allwin21 Corporation liability to the customer or anyone claiming through or on behalf of the
customer with respect to any claim or loss arising out of the purchase and/or sale of any
Allwin21 Corporation product shall be limited to the original purchase price amount of the

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product. In no event shall Allwin21 Corporation be liable for consequential damages, losses, or
reprocurement costs arising out of the purchase and/or sale of any Allwin21 Corporation product,
and an action to recover the purchase or to compel such replacement or adjustment shall be
customer's sole remedy under the Uniform Commercial Code or otherwise.
All claims must be reported to Allwin21 Corporation before the end of the warranty period.
Allwin21 Corporation may not honor claims for repair or replacement if reported after the
warranty has expired. Allwin21 Corporation has no means of determining whether repair or
replacement was covered by terms of this warranty. All claims must be reported promptly. The
burden of proof will be the responsibility of the customer or its agent, and all associated costs
will be borne by the same.
In order to honor a warranty for any Allwin21 system, the customer is required to perform the
recommended preventive maintenance (PM) on the system. Allwin21 Corporation will perform
PM training during system start-up. PM contracts are available from Allwin21 Corporation at an
additional charge.
Buyer will be granted a personal, non-transferable, non-exclusive perpetual license to use only
the number of copies of the software that are provided by the Seller and only on the equipment
on which it was originally installed, loaded, or mounted by the Seller. Without Seller's consent,
Buyer may not copy the software for any purpose. Buyer may not remove the software or
attempt to execute the software on any other equipment than the equipment on which the
software was originally loaded, installed, or mounted.
Buyer shall not, whether through the use of disassemblers or any other means, attempt to reverse
engineer, decompile, disassemble, or derive any source code from the software. Buyer shall not
permit any third party to do so. Buyer shall not cause the software to be destroyed, disabled, or
modified in its operation. Any attempt to do any of the things defined in this paragraph shall be a
material breach of this Agreement and shall immediately entitle Seller to exercise any remedy
herein or available at law or in equity.
THE FOREGOING IS THE SOLE WARRANTY OFFERED BY ALLWIN21 CORPORATION
WITH RESPECT TO ITS PRODUCTS AND COMPONENTS. ALLWIN21 CORPORATION
MAKES NO OTHER WARRANTY OF ANY KIND WHATSOEVER, EXPRESS OR
IMPLIED. ALL IMPLIED WARRANTIES OF MERCHANTABILITY AND/OR FITNESS
FOR A PARTICULAR PURPOSE ARE HEREBY DISCLAIMED AND EXCLUDED BY
ALLWIN21 CORPORATION.

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PREFACE
INTENDED AUDIENCE
This manual has been written for technicians and process development engineers working with
the Allwin21 System. It provides an overview of the system and its operation, as well as specific
operating instructions. It also includes minor service and some troubleshooting procedures.
MANUAL CONVENTIONS
MENUS,BUTTONS,COMMANDS AND MODES
The following font conventions are used in this manual.
Bold
Software screen selections are represented in bold type.
Italic
Screen names are shown in italic type.
First Letter Capitalized
Operating modes are shown in normal type with the first letter capitalized.
For example:
“Select Recipe from the Main Menu screen to enter the Recipe Programming mode.”

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TABLE OF CONTENTS
SERVICE INFORMATION....................................................................................III
WARRANTY ......................................................................................................IV
PREFACE...........................................................................................................VI
TABLE OF CONTENTS ......................................................................................VII
LIST OF FIGURES..............................................................................................IX
1. INTRODUCTION.........................................................................................1
1.1 System Overview................................................................................................. 1
1.1.1 System Description .......................................................................1
1.2 System Features................................................................................................... 2
1.3 Software Overview .............................................................................................. 2
2. THEORY OF OPERATION...........................................................................3
2.1 Operation............................................................................................................. 3
2.1.1 System Electronic Components.....................................................3
2.1.2 Main Computer.............................................................................3
2.1.3 Touch Screen Display ...................................................................3
2.1.4 Interface / Interlock Board ............................................................3
2.1.5 Plasma Generator..........................................................................4
2.1.6 AC Power Distribution..................................................................4
2.2 Infrared Heat Source............................................................................................ 4
2.3 Pneumatic/Mechanical Components .................................................................... 5
2.3.1 Vacuum System............................................................................5
2.3.2 Mass Flow Controllers (MFC's) ....................................................5
2.3.3 Pneumatic System.........................................................................6
2.3.4 Plasma System..............................................................................6
3. SAFETY PRECAUTIONS..............................................................................7
3.1 Overview............................................................................................................. 7
3.2 Notes, Cautions and Warnings ............................................................................. 8
3.3 Safety Features .................................................................................................... 9
3.4 Gas Handling..................................................................................................... 10

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3.5 Hazards ............................................................................................................. 11
3.5.1 Electrical Shock Hazards ............................................................11
3.5.2 Process Gas Hazards ...................................................................11
3.5.3 Process Byproduct Hazards.........................................................12
3.5.4 Oxygen Hazards .........................................................................12
3.5.5 Thermal Hazards.........................................................................13
4. POWER-UP &POWER-DOWN.................................................................15
4.1 Overview........................................................................................................... 15
4.2 Utilities Inspection............................................................................................. 16
4.3 Front Control Panel ........................................................................................... 17
4.4 Power-Up Procedure.......................................................................................... 18
4.5 System Operation .............................................................................................. 19
4.6 Maintenance ...................................................................................................... 19
4.7 Power-Down Procedure..................................................................................... 20
5. BASIC OPERATION..................................................................................21
5.1 Overview........................................................................................................... 21
5.2 Software Features.............................................................................................. 22
5.3 Runnig a Lot...................................................................................................... 25
5.4 Stop Process ...................................................................................................... 29
5.5 Review the Process Data.................................................................................... 29
A. SYSTEM REQUIREMENTS........................................................................31
B. MANUAL REVISION HISTORY.................................................................32
INDEX ...............................................................................................................33

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LIST OF FIGURES
Figure 5.1: Process for Production screen, basic functions..................................................... 25
Figure 5.2: Process for Engineer screen................................................................................. 26
Figure 5.3: WTM Manual Operation..................................................................................... 27
Figure 5.4: Process Monitor screen ....................................................................................... 28

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