Allwin21 Tegal 90Xe Owner's manual

Allwin21 Corporation
Tegal 90Xe
Upgrade
Chapter 1:
Installation Supplement
to the
Tegal90X Manual
Allwin21 Corporation
220 Cochrane Circle, Morgan Hill CA 95037
www.Allwin21.com

069-0710-02 Rev. C Tegal AW-90Xe TTW Installation Supplement
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Document #: 069-0710-02 Rev. C
Written by: Tuo Shen
August, 2017
SERVICE INFORMATION
Customer technical support is available from Allwin21 Corporation to provide information not included
in this manual. The Customer Support Department is open Monday through Friday, 9:00 a.m. to
6:00 p.m., Pacific Time.
Field Service support and parts are available from Allwin21 Corporation. The office is open Monday
through Friday, 9:00 a.m. to 6:00 p.m., Pacific Time.
Allwin21 Corporation
Customer Service
Phone: [phone]
Fax: [phone]
Email: [email protected]
Document Disclaimer
TEGAL is a trademark of TEGAL Corporation.
Swagelok is a trademark of Crawford Fitting Company.
VCR is a trademark of Cajon Company.
Pentium® is a registered trademark of the Intel Corporation.
Allwin21 is a registered trademark of the Allwin21 Corporation.
Allwin21 Corporation makes no representations or warranties with respect to this Manual, except as
outlined in the product warranty. Further, Allwin21 reserves the right to make changes in the
specifications of the product described within this Manual at any time without notice and without
obligation to Allwin21 Corporation.
Statement of Confidentiality
The information contained herein is confidential to and the property of Allwin21 Corporation. It may not
be reproduced nor disclosed in whole or in part by any method without the prior written permission of
Allwin21 Corporation. All software is copyrighted and the property of Allwin21 Corporation.
Copyright 2006 – 2017 by Allwin21 Corporation. All rights reserved.

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WARRANTY
Allwin21 Corporation warranty labor, if necessary, will be provided during normal business hours of 9:00
AM to 6:00 PM , Monday through Friday, except certain holidays.
To receive Field Service or parts replacement during a system warranty period, the customer shall
promptly provide to Allwin21 Corporation details of any product or component thought to be defective
and request a Return Material Authorization (RMA). Within fourteen (14) days after receipt of the RMA
number from Allwin21 Corporation, the customer shall return the defective product or component to
Allwin21 Corporation freight paid. As soon as is practicable after issue of the RMA, Allwin21
Corporation shall repair/replace and return any product/component found to be defective.
Repaired/replaced and returned products and components will be warranted as above for the duration of
the warranty period of the defective product, and shall be comprised of new or re-worked components.
Returned product not subject to warranty shall be disposed of at customer’s cost and subject to customer’s
instructions.
Items not covered under the warranty include, but are not limited to:
Quartzware
Consumable parts
O-rings and gaskets
Fuses
Mass Flow Meter
Allwin21 Corporation products are normally intended to be used in a semiconductor processing
environment in accordance with the functional, environmental, and operational standards published by
Allwin21 Corporation or generally accepted in the industry. Allwin21 Corporation shall have no warranty
obligation with respect to any product which has been modified or altered, or with respect to data
contained in any product returned to Allwin21 Corporation by the customer without written approval.
Allwin21 Corporation liability to the customer or anyone claiming through or on behalf of the customer
with respect to any claim or loss arising out of the purchase and/or sale of any Allwin21 Corporation
product shall be limited to the original purchase price amount of the product. In no event shall Allwin21
Corporation be liable for consequential damages, losses, or reprocurement costs arising out of the
purchase and/or sale of any Allwin21 Corporation product, and an action to recover the purchase or to
compel such replacement or adjustment shall be customer's sole remedy under the Uniform Commercial
Code or otherwise.
All claims must be reported to Allwin21 Corporation before the end of the warranty period. Allwin21
Corporation may not honor claims for repair or replacement if reported after the warranty has expired.
Allwin21 Corporation has no means of determining whether repair or replacement was covered by terms

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of this warranty. All claims must be reported promptly. The burden of proof will be the responsibility of
the customer or its agent, and all associated costs will be borne by the same.
In order to honor a warranty for any Allwin21 ststem, the customer is required to perform the
recommended preventive maintenance (PM) on the system. Allwin21 Corporation will perform PM
training during system start-up. PM contracts are available from Allwin21 Corporation at an additional
charge.
Buyer will be granted a personal, non-transferable, non-exclusive perpetual license to use only the
number of copies of the software that are provided by the Seller and only on the equipment on which it
was originally installed, loaded, or mounted by the Seller. Without Seller's consent, Buyer may not copy
the software for any purpose. Buyer may not remove the software or attempt to execute the software on
any other equipment than the equipment on which the software was originally loaded, installed, or
mounted.
Buyer shall not, whether through the use of disassemblers or any other means, attempt to reverse
engineer, decompile, disassemble, or derive any source code from the software. Buyer shall not permit
any third party to do so. Buyer shall not cause the software to be destroyed, disabled, or modified in its
operation. Any attempt to do any of the things defined in this paragraph shall be a material breach of this
Agreement and shall immediately entitle Seller to exercise any remedy herein or available at law or in
equity.
THE FOREGOING IS THE SOLE WARRANTY OFFERED BY ALLWIN21 CORPORATION WITH
RESPECT TO ITS PRODUCTS AND COMPONENTS. ALLWIN21 CORPORATION MAKES NO
OTHER WARRANTY OF ANY KIND WHATSOEVER, EXPRESSED OR IMPLIED. ALL IMPLIED
WARRANTIES OF MERCHANTABILITY AND/OR FITNESS FOR A PARTICULAR PURPOSE
ARE HEREBY DISCLAIMED AND EXCLUDED BY ALLWIN21 CORPORATION.

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PREFACE
INTENDED AUDIENCE
This installation supplement has been written to assist Facility Engineers and Technicians in the
installation of the Tegal 90Xe Through-The-Wall (TTW) system with the TTW Upgrade Kit. Building
Planners may also use this document to plan facilities for the system. Please read this document carefully
before installing the Tegal 90Xe TTW System with the TTW Upgrade Kit.
AW-901 TTW is used in this manual as a generic term meaning the plasma production etcher system
which could be a Tegal 901e TTW or 903e TTW system. The AW-TGL software can control these
machines. The machines may be refurbished or converted systems. The TTW upgrade kit contains all the
modifications Allwin21 performed on the AW-901 TTW including the AW-TGL software.
DOCUMENT CONVENTIONS
F ONT CONVENTIONS
The following font conventions are used in this manual.
Bold
Software screen selections are represented in bold type.
Italic
Screen names are shown in italic type.
First Letter Capitalized
Operating modes are shown in normal type with the first letter capitalized.
For example:
“Select Recipe from the Main Menu screen to enter the Recipe Programming mode.”

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TABLE OF CONTENTS
Service Information .................................................................................................i
Warranty................................................................................................................. ii
Preface.....................................................................................................................iv
Table of Contents ....................................................................................................v
Table of Figures.................................................................................................... vii
1. Introduction.....................................................................................................1
1.1 Overview ..............................................................................................................................1
1.2 Allwin21 Modifications........................................................................................................1
1.2.1 Control Interface Board .........................................................................................1
1.2.2 Equipe Robot Arm .................................................................................................2
1.2.3 Equipe Robot .........................................................................................................3
1.2.4 Wafer Alignment Station .......................................................................................3
1.2.5 RF Generator..........................................................................................................4
1.2.6 Cassette Holder ......................................................................................................5
1.2.7 Software Controller and Display ...........................................................................6
2. Safety Precautions ..........................................................................................8
2.1 Overview ..............................................................................................................................8
2.2 Notes, Cautions and Warnings .............................................................................................8
2.3 Utilities Inspection................................................................................................................9
2.4 System Operation ...............................................................................................................10
2.5 Maintenance .......................................................................................................................10
2.6 Gas Handling......................................................................................................................11
2.7 Hazards...............................................................................................................................12
2.7.1 Electrical Shock Hazards .....................................................................................12
2.7.2 Process Gas Hazards............................................................................................12
2.7.3 Process Byproduct Hazards .................................................................................12
2.7.4 Oxygen Hazards...................................................................................................13
2.7.5 Thermal Hazards..................................................................................................13
2.7.6 Mechanical Hazards.............................................................................................14
2.7.7 RF Radiation Hazards..........................................................................................14
3. Installation Requirements............................................................................16
3.1 Purchaser’s Responsibility .................................................................................................16
3.2 Installation process overview .............................................................................................16
3.2.1 Installation procedures.........................................................................................16
3.3 Allwin21 Service................................................................................................................17
3.3.1 Field Service Installation .....................................................................................17

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3.3.2 Training................................................................................................................17
3.4 Site requirements................................................................................................................17
3.4.1 Facility Preparation..............................................................................................18
3.4.2 Space Requirements.............................................................................................18
3.4.3 Front cover specification......................................................................................18
3.5 Facilities .............................................................................................................................19
3.5.1 Utility Connections ..............................................................................................19
3.5.2 Electrical ..............................................................................................................19
3.5.3 Air Conditioning ..................................................................................................19
3.5.4 Robot vacuum ......................................................................................................20
3.5.5 Adequate Tubing Size..........................................................................................20
3.5.6 CDA (Pneumatic) ................................................................................................21
4. Setup...............................................................................................................24
4.1 Unpacking and Inspecting ..................................................................................................24
4.1.1 Uncrating .............................................................................................................24
4.1.2 Inspection.............................................................................................................25
4.1.3 Unpacking............................................................................................................25
4.2 Connecting facilities...........................................................................................................25
5. Initial Start Up ..............................................................................................28
5.1 Overview ............................................................................................................................28
5.2 Start-Up Procedure .............................................................................................................28
6. Robot Setup ...................................................................................................30
6.1 Initial Inspection of Equip Robot .......................................................................................30
6.1.1 Facilities Check....................................................................................................30
6.1.2 Robot Check ........................................................................................................30
6.1.3 System Visual Check ........................................................................................... 31
6.1.4 Clean System Check ............................................................................................31
6.1.5 Robot Alignment..................................................................................................31
6.1.6 Robot Vacuum .....................................................................................................31
6.1.7 Robot Maintenance ..............................................................................................31
6.2 Adjusting the Vacuum Sensor (Equip Robot) ....................................................................32
6.3 Safety Verification..............................................................................................................33
Appendix ................................................................................................................35
A: Problem Reporting..............................................................................................................35
B: How to Order / Return Equipment .....................................................................................37
C: Maintenance Plans..............................................................................................................42
D: Manual Revision History....................................................................................................43

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TABLE OF FIGURES
Figure 2-2: Equipe Robot Arm ..................................................................................................... 2
Figure 2-3: Equipe Robot.............................................................................................................. 3
Figure 2-4: Wafer Alignment Station ........................................................................................... 4
Figure 2-5: RF Generator Supply ................................................................................................. 5
Figure 2-6: Adjustable Cassette Holder........................................................................................ 5
Figure 2-7: Software Computer Controller................................................................................... 6
Figure 2-8: Display Panel with AW-TGL Software ..................................................................... 6
Figure 5-1: Gas Pressure and Flow Rate Relationship for Different Tube Diameters................ 20
Figure 5-2: Recommended Pneumatic Configuration ................................................................ 22
Figure 10-1: Robot Mechanical Parts ......................................................................................... 30
Figure 10-2: Adjusting the Vacuum Sensor................................................................................ 32

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1. INTRODUCTION
Chapter 2: Chapter 1
1.1 OVERVIEW
This installation supplement manual is aimed to explain the changes and present the additional
requirements to the Tegal90Xe series with Allwin21 Corporation TTW Upgrade Kit. It is not a
replacement for the Tegal90Xe TTW manuals or its OEM manuals.
The AW-TGL software is an advanced control software standard on all Allwin21 converted AW-
901 TTW systems. It is also offered as an upgrade to the Tegal etching systems. Please refer to
the Allwin21 Tegal90Xe TTW Operation Manual for controlling the AW-TGL control software.
1.2 ALLWIN21 MODIFICATIONS
Allwin21 made several modifications to the original Tegal90Xe TTW system. Modifications are
made based on customer’s needs and the need to upgrade the original hardware and software
control.
1.2.1 CONTROL INTERFACE BOARD
The original Tegal90Xe TTW controls have been replaced by one control interface board
(2100-0901-048) from Allwin21. The one control board interfaces with all of the devices and
boards in the system and to the computer, which runs the AW-TGL control software.

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Figure 2-1: Control Interface Board
1.2.2 EQUIPE ROBOT ARM
There are two types of Equipe robot arms, a straight robot arm with vacuum and a fork robot arm
with vacuum. Based on customer’s needs, one of the two Equipe robot arm types is included with
the system.
Due to the difference in shape for the robot arm, the straight robot arm requires the chuck to be
rotated 180º from the original manufacturing chuck position. The fork robot arm however does
not require the chuck to be rotated.
Figure 2-2: Equipe Robot Arm

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1.2.3 EQUIPE ROBOT
The Equipe robot replaced the shuttle system for wafer transportation. The wafer cassette to
cassette system was removed, and replace with just a single cassette as both the source and
destination. The Equipe robot handles the loading, and unloading of wafers between the cassette,
process chuck, and alignment station.
Equipe robot controller is included with the Equipe robot. It controls the robot movement location
and speed. Refer to Section 6 Robot Setup for additional information on how to calibrate and
teach the Equipe robot.
Figure 2-3: Equipe Robot
1.2.4 WAFER ALIGNMENT STATION
Allwin21 installed a wafer alignment station that allows the proper alignment of wafer size 3, 4,
5, and 6 inches. Its purpose is to ensure every wafer is centered and the fact is position in the
same direction when processed to increase repeatability of results.
There are two types of alignment are performed at the alignment station. The top level of the
wafer alignment station center aligns the wafers. The bottom level ensures the wafer’s flat is
always aligned in the same position.

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Figure 2-4: Wafer Alignment Station
1.2.5 RF GENERATOR
Based on customer’s requirement, an appropriate wattage RF plasma generator is included with
the Allwin21 machine. The RF generator generates microwave, which excites the gas molecules
inside the chamber to produce plasma. The following RF generator is used:
MKS/ENI Elite 300
The unit is air cooled using a built in fan located at the rear of the unit. Make sure the generator
receive proper venting and no obstruction blocks its air flow.

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This unit is preinstalled and only needed to be powered on.
Figure 2-5: RF Generator Supply
1.2.6 CASSETTE HOLDER
Allwin21 has installed a new cassette holder. It replaced the two cassette elevators from the
original shuttle cassette to cassette system. The cassette holder can be adjusted to fit wafer
carriers between 3 to 6 inches.
Figure 2-6: Adjustable Cassette Holder

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1.2.7 SOFTWARE CONTROLLER AND DISPLAY
The original Tegal90Xe controller has been completely removed and replaced with a modern
computer with advanced AW-TGL control software. The front monochrome display is no longer
used. However, a touch sensitive flat panel monitor is supplied with the AW-TGL system to
interface with computer.
Figure 2-7: Software Computer Controller
The system is controlled by menu commands from the AW-TGL control software. This software
allows a great deal of flexibility and control of the Allwin21 machine.
Figure 2-8: Display Panel with AW-TGL Software

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2. SAFETY PRECAUTIONS
Chapter 3: Chapter 2
2.1 OVERVIEW
This section provides information intended to prevent damage to the AW-901 TTW and injury to
operation and maintenance personnel. All hazards are not covered, only those most prevalent and
serious. Your full understanding of the capabilities and limitations of this equipment is necessary
for safe and efficient operation.


 WARNING
Only Allwin21 or qualified personnel should install, start up,
operate and/or repair the AW-901 TTW. Damage to the system
or injury to personnel could result if the preceding actions are
carried out by unqualified personnel.
Prior to applying power to or starting up the AW-901 TTW, follow these safety precautions:
•Check all utilities for proper connections. Connect only those gases specified for use
in the system.
•Make sure the cabinet doors and system covers are closed.
•Check the cabinet exhaust to make sure it is properly connected to the facility
scrubber. Ensure the facility scrubber is operating properly. Check the gas and
vacuum outlet for any restrictions.
2.2 NOTES, CAUTIONS AND WARNINGS
When operating and maintaining the AW-901 TTW, the following safety procedures and precau-
tions must be followed to avoid certain hazards. Observe all warnings and cautions. Their
purpose is to protect personnel from injury and long term health hazards and to protect the
machine from damage.
Pay special attention to notes, cautions and warnings located in appropriate areas in this manual.


 NOTE
Notes provide additional important information which requires
special attention.

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

 CAUTION
Cautions alert you to avoid system damage.


 WARNING
Warnings are given for personnel safety to prevent bodily harm.
2.3 UTILITIES INSPECTION
Inspect the system utility connections and sources before switching on the AW-901 TTW.
Visually inspect the following utilities to make sure connections are secure:
•Electrical power.
•Gas-handling inlets.
•Cooling water inlet and outlet for chamber cooling
•Clean Dry Air inlet for system pneumatics
•Process exhaust to the Scrubber
•Cabinet exhaust to the Scrubber
•RF cables (if there is an external RF Generator)
Check the Utilities Specifications section in the appendix for proper settings.


 CAUTION
Make sure the purge outlet is not restricted. This will cause the
process chamber to over pressurize and rupture the seals.
Check for possible water leaks at the cooling water inlet and water outlet connections.
If any of the utilities are disconnected or any connections appear to be leaking, correct the
problem. Make sure the house scrubber is operating if processing with hazardous gases or
processing wafer which outgas.

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

 NOTE
Before applying power to the system, the PC-controller
computer must be connected; the purge gas and cooling water
must be turned on.
2.4 SYSTEM OPERATION
During system operation, be aware of the following:
•The cooling subsystems must be used at all times and should be operational for at least 4
minutes following the last cycle.
•Experimental substrates contain unknown impurities which may outgas during processing.
•Emergency off (EMO) buttons are located at the front and rear of the system. In case of
emergency, use the EMO button to shut down the system.


 WARNING
Allwin21 cannot anticipate the number and variety of materials
a user may experiment with, and is not responsible for any
potential hazards which may result from wafer outgassing.
2.5 MAINTENANCE
During the maintenance operation, observe the following precautions:
•Do not use replacement parts not provided or recommended by Allwin21.


 WARNING
Allwin21 is not liable for any damage or injury which may
occur when unauthorized parts are used.
•Disconnect power to the system before performing any maintenance activity requiring the
removal of access covers.

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2.6 GAS HANDLING
Be aware of the following cautions when working with gasses in the AW-901 TTW:
•Only use gas that has been specified for use in the Tegal 90Xe TTW system. Refer to the
original Tegal 90Xe TTW installation manual for a comprehensive list of acceptable complex
process gases.


 CAUTION
Allwin21 is not liable for the use of gases not recommended by
the factory.
•Make sure the specified gases are connected to the proper inlets on the service panel.


 WARNING
Failure to properly connect the gas lines may result in
dangerous gas mixture that could cause harm to personnel
and/or the system.


 WARNING
There will be no chemical exposures during normal routine
maintenance. However, if the need arises that a gas valve has to
be changed, then it is the maintenance person’s responsibility to
follow all safety procedures for gas exposure.