Allwin21 Tegal 90Xe Owner's manual

Allwin21 Corporation
Tegal 90Xe
Upgrade
Chapter 1:
Installation Supplement
to the
Tegal90X Manual
Allwin21 Corporation
220 Cochrane Circle, Morgan Hill CA 95037
www.Allwin21.com

069-0710-02 Rev. C Tegal AW-90Xe TTW Installation Supplement
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Document #: 069-0710-02 Rev. C
Written by: Tuo Shen
August, 2017
SERVICE INFORMATION
Customer technical support is available from Allwin21 Corporation to provide information not included
in this manual. The Customer Support Department is open Monday through Friday, 9:00 a.m. to
6:00 p.m., Pacific Time.
Field Service support and parts are available from Allwin21 Corporation. The office is open Monday
through Friday, 9:00 a.m. to 6:00 p.m., Pacific Time.
Allwin21 Corporation
Customer Service
Phone: [phone]
Fax: [phone]
Email: [email protected]
Document Disclaimer
TEGAL is a trademark of TEGAL Corporation.
Swagelok is a trademark of Crawford Fitting Company.
VCR is a trademark of Cajon Company.
Pentium® is a registered trademark of the Intel Corporation.
Allwin21 is a registered trademark of the Allwin21 Corporation.
Allwin21 Corporation makes no representations or warranties with respect to this Manual, except as
outlined in the product warranty. Further, Allwin21 reserves the right to make changes in the
specifications of the product described within this Manual at any time without notice and without
obligation to Allwin21 Corporation.
Statement of Confidentiality
The information contained herein is confidential to and the property of Allwin21 Corporation. It may not
be reproduced nor disclosed in whole or in part by any method without the prior written permission of
Allwin21 Corporation. All software is copyrighted and the property of Allwin21 Corporation.
Copyright 2006 – 2017 by Allwin21 Corporation. All rights reserved.

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WARRANTY
Allwin21 Corporation warranty labor, if necessary, will be provided during normal business hours of 9:00
AM to 6:00 PM , Monday through Friday, except certain holidays.
To receive Field Service or parts replacement during a system warranty period, the customer shall
promptly provide to Allwin21 Corporation details of any product or component thought to be defective
and request a Return Material Authorization (RMA). Within fourteen (14) days after receipt of the RMA
number from Allwin21 Corporation, the customer shall return the defective product or component to
Allwin21 Corporation freight paid. As soon as is practicable after issue of the RMA, Allwin21
Corporation shall repair/replace and return any product/component found to be defective.
Repaired/replaced and returned products and components will be warranted as above for the duration of
the warranty period of the defective product, and shall be comprised of new or re-worked components.
Returned product not subject to warranty shall be disposed of at customer’s cost and subject to customer’s
instructions.
Items not covered under the warranty include, but are not limited to:
Quartzware
Consumable parts
O-rings and gaskets
Fuses
Mass Flow Meter
Allwin21 Corporation products are normally intended to be used in a semiconductor processing
environment in accordance with the functional, environmental, and operational standards published by
Allwin21 Corporation or generally accepted in the industry. Allwin21 Corporation shall have no warranty
obligation with respect to any product which has been modified or altered, or with respect to data
contained in any product returned to Allwin21 Corporation by the customer without written approval.
Allwin21 Corporation liability to the customer or anyone claiming through or on behalf of the customer
with respect to any claim or loss arising out of the purchase and/or sale of any Allwin21 Corporation
product shall be limited to the original purchase price amount of the product. In no event shall Allwin21
Corporation be liable for consequential damages, losses, or reprocurement costs arising out of the
purchase and/or sale of any Allwin21 Corporation product, and an action to recover the purchase or to
compel such replacement or adjustment shall be customer's sole remedy under the Uniform Commercial
Code or otherwise.
All claims must be reported to Allwin21 Corporation before the end of the warranty period. Allwin21
Corporation may not honor claims for repair or replacement if reported after the warranty has expired.
Allwin21 Corporation has no means of determining whether repair or replacement was covered by terms

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of this warranty. All claims must be reported promptly. The burden of proof will be the responsibility of
the customer or its agent, and all associated costs will be borne by the same.
In order to honor a warranty for any Allwin21 ststem, the customer is required to perform the
recommended preventive maintenance (PM) on the system. Allwin21 Corporation will perform PM
training during system start-up. PM contracts are available from Allwin21 Corporation at an additional
charge.
Buyer will be granted a personal, non-transferable, non-exclusive perpetual license to use only the
number of copies of the software that are provided by the Seller and only on the equipment on which it
was originally installed, loaded, or mounted by the Seller. Without Seller's consent, Buyer may not copy
the software for any purpose. Buyer may not remove the software or attempt to execute the software on
any other equipment than the equipment on which the software was originally loaded, installed, or
mounted.
Buyer shall not, whether through the use of disassemblers or any other means, attempt to reverse
engineer, decompile, disassemble, or derive any source code from the software. Buyer shall not permit
any third party to do so. Buyer shall not cause the software to be destroyed, disabled, or modified in its
operation. Any attempt to do any of the things defined in this paragraph shall be a material breach of this
Agreement and shall immediately entitle Seller to exercise any remedy herein or available at law or in
equity.
THE FOREGOING IS THE SOLE WARRANTY OFFERED BY ALLWIN21 CORPORATION WITH
RESPECT TO ITS PRODUCTS AND COMPONENTS. ALLWIN21 CORPORATION MAKES NO
OTHER WARRANTY OF ANY KIND WHATSOEVER, EXPRESSED OR IMPLIED. ALL IMPLIED
WARRANTIES OF MERCHANTABILITY AND/OR FITNESS FOR A PARTICULAR PURPOSE
ARE HEREBY DISCLAIMED AND EXCLUDED BY ALLWIN21 CORPORATION.

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PREFACE
INTENDED AUDIENCE
This installation supplement has been written to assist Facility Engineers and Technicians in the
installation of the Tegal 90Xe Through-The-Wall (TTW) system with the TTW Upgrade Kit. Building
Planners may also use this document to plan facilities for the system. Please read this document carefully
before installing the Tegal 90Xe TTW System with the TTW Upgrade Kit.
AW-901 TTW is used in this manual as a generic term meaning the plasma production etcher system
which could be a Tegal 901e TTW or 903e TTW system. The AW-TGL software can control these
machines. The machines may be refurbished or converted systems. The TTW upgrade kit contains all the
modifications Allwin21 performed on the AW-901 TTW including the AW-TGL software.
DOCUMENT CONVENTIONS
F ONT CONVENTIONS
The following font conventions are used in this manual.
Bold
Software screen selections are represented in bold type.
Italic
Screen names are shown in italic type.
First Letter Capitalized
Operating modes are shown in normal type with the first letter capitalized.
For example:
“Select Recipe from the Main Menu screen to enter the Recipe Programming mode.”

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TABLE OF CONTENTS
Service Information .................................................................................................i
Warranty................................................................................................................. ii
Preface.....................................................................................................................iv
Table of Contents ....................................................................................................v
Table of Figures.................................................................................................... vii
1. Introduction.....................................................................................................1
1.1 Overview ..............................................................................................................................1
1.2 Allwin21 Modifications........................................................................................................1
1.2.1 Control Interface Board .........................................................................................1
1.2.2 Equipe Robot Arm .................................................................................................2
1.2.3 Equipe Robot .........................................................................................................3
1.2.4 Wafer Alignment Station .......................................................................................3
1.2.5 RF Generator..........................................................................................................4
1.2.6 Cassette Holder ......................................................................................................5
1.2.7 Software Controller and Display ...........................................................................6
2. Safety Precautions ..........................................................................................8
2.1 Overview ..............................................................................................................................8
2.2 Notes, Cautions and Warnings .............................................................................................8
2.3 Utilities Inspection................................................................................................................9
2.4 System Operation ...............................................................................................................10
2.5 Maintenance .......................................................................................................................10
2.6 Gas Handling......................................................................................................................11
2.7 Hazards...............................................................................................................................12
2.7.1 Electrical Shock Hazards .....................................................................................12
2.7.2 Process Gas Hazards............................................................................................12
2.7.3 Process Byproduct Hazards .................................................................................12
2.7.4 Oxygen Hazards...................................................................................................13
2.7.5 Thermal Hazards..................................................................................................13
2.7.6 Mechanical Hazards.............................................................................................14
2.7.7 RF Radiation Hazards..........................................................................................14
3. Installation Requirements............................................................................16
3.1 Purchaser’s Responsibility .................................................................................................16
3.2 Installation process overview .............................................................................................16
3.2.1 Installation procedures.........................................................................................16
3.3 Allwin21 Service................................................................................................................17
3.3.1 Field Service Installation .....................................................................................17

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3.3.2 Training................................................................................................................17
3.4 Site requirements................................................................................................................17
3.4.1 Facility Preparation..............................................................................................18
3.4.2 Space Requirements.............................................................................................18
3.4.3 Front cover specification......................................................................................18
3.5 Facilities .............................................................................................................................19
3.5.1 Utility Connections ..............................................................................................19
3.5.2 Electrical ..............................................................................................................19
3.5.3 Air Conditioning ..................................................................................................19
3.5.4 Robot vacuum ......................................................................................................20
3.5.5 Adequate Tubing Size..........................................................................................20
3.5.6 CDA (Pneumatic) ................................................................................................21
4. Setup...............................................................................................................24
4.1 Unpacking and Inspecting ..................................................................................................24
4.1.1 Uncrating .............................................................................................................24
4.1.2 Inspection.............................................................................................................25
4.1.3 Unpacking............................................................................................................25
4.2 Connecting facilities...........................................................................................................25
5. Initial Start Up ..............................................................................................28
5.1 Overview ............................................................................................................................28
5.2 Start-Up Procedure .............................................................................................................28
6. Robot Setup ...................................................................................................30
6.1 Initial Inspection of Equip Robot .......................................................................................30
6.1.1 Facilities Check....................................................................................................30
6.1.2 Robot Check ........................................................................................................30
6.1.3 System Visual Check ........................................................................................... 31
6.1.4 Clean System Check ............................................................................................31
6.1.5 Robot Alignment..................................................................................................31
6.1.6 Robot Vacuum .....................................................................................................31
6.1.7 Robot Maintenance ..............................................................................................31
6.2 Adjusting the Vacuum Sensor (Equip Robot) ....................................................................32
6.3 Safety Verification..............................................................................................................33
Appendix ................................................................................................................35
A: Problem Reporting..............................................................................................................35
B: How to Order / Return Equipment .....................................................................................37
C: Maintenance Plans..............................................................................................................42
D: Manual Revision History....................................................................................................43

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TABLE OF FIGURES
Figure 2-2: Equipe Robot Arm ..................................................................................................... 2
Figure 2-3: Equipe Robot.............................................................................................................. 3
Figure 2-4: Wafer Alignment Station ........................................................................................... 4
Figure 2-5: RF Generator Supply ................................................................................................. 5
Figure 2-6: Adjustable Cassette Holder........................................................................................ 5
Figure 2-7: Software Computer Controller................................................................................... 6
Figure 2-8: Display Panel with AW-TGL Software ..................................................................... 6
Figure 5-1: Gas Pressure and Flow Rate Relationship for Different Tube Diameters................ 20
Figure 5-2: Recommended Pneumatic Configuration ................................................................ 22
Figure 10-1: Robot Mechanical Parts ......................................................................................... 30
Figure 10-2: Adjusting the Vacuum Sensor................................................................................ 32

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069-0710-02 Rev. A Tegal AW-90Xe Installation Supplement
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1. INTRODUCTION
Chapter 2: Chapter 1
1.1 OVERVIEW
This installation supplement manual is aimed to explain the changes and present the additional
requirements to the Tegal90Xe series with Allwin21 Corporation TTW Upgrade Kit. It is not a
replacement for the Tegal90Xe TTW manuals or its OEM manuals.
The AW-TGL software is an advanced control software standard on all Allwin21 converted AW-
901 TTW systems. It is also offered as an upgrade to the Tegal etching systems. Please refer to
the Allwin21 Tegal90Xe TTW Operation Manual for controlling the AW-TGL control software.
1.2 ALLWIN21 MODIFICATIONS
Allwin21 made several modifications to the original Tegal90Xe TTW system. Modifications are
made based on customer’s needs and the need to upgrade the original hardware and software
control.
1.2.1 CONTROL INTERFACE BOARD
The original Tegal90Xe TTW controls have been replaced by one control interface board
(2100-0901-048) from Allwin21. The one control board interfaces with all of the devices and
boards in the system and to the computer, which runs the AW-TGL control software.