Balzers QMG421C User manual

EBAL2'ERS
Operating Instructions
QMG 421
Quadrupole mass spectrometers QMG 421C
Control units QMS 421
and QMS 421C
QMS 421
QMS421C
BK 800 170 BE ist edition, 3rd addendum: 09, 92 1

BALZEFt¾
Table of contents
1. Important information 54. Description 11
1,1 About these operating instructions 54.1 Basic concept 11
1.2 Safety information 54.2 Front panel 13
1.3 Protection from static electricity 54.2.1 Display 14
4.2.1.1 Measured value output (Measure display) 14
1.4 Explanation of symbols 54.2.1.2 Parameter entry (Setup display) 15
1.5 Validity 54.2.3 Contrast 16
4.2.4 Number pad 16
2. Introduction 65. Operation 17
2,1 Features 65.1 Initial start up 17
2.2 System overview 65.1.1 Mains power connection 17
2.2.1 System components in the 400 family 65.1.2 Configuration entries 17
2.2.2 System components in the 125 family 65.1.4 Optimizing the emission current limit values 18
2.2.3 Options 85,1.5 Aligning the quadrupole electronics 18
2.2.4 Expansion units 85.1.6 After adjustments to the measuring system or
component replacement 18
3. Installation 95.2 Function groups 19
31Mains power connection 95.2.1 <channels> function group 20
5.2.L1 <select> function 20
3.2 Options to the OC 421 95.2,1.2 <detect> function 20
5.2.1.3 <mass> function 21
3.2.1 Installing /removing optional boards 95.2.1.4 <amplif> function 21
3.3 Additional modules 95.2.1,5 <aux> function 21
3.3.1 Installing and removing modules 95.2.1.6 <output> function 22
5.2.1,7 <trip> function 22
3.4 Installing the QMS in a19" rack 10 5.2.1.8 <integ> function 23
3.5 Setting up the OMS as abench unit 10 5.2.2 <general> function group 24
5.2.2.1 <dildo> function 24
3.6 Periphery components 10 5.2.2.2 <config> function 24
.5.2.2.3 <error> function 25
3.7 Cabimg 10 5.2.3 <ion source> function group 26
3.8 Special applications 10 6.2,3,1 <emiss> function 26
5.2.3.2 <v1...v6> function 26
3.8.1 Test sockets 10 5.2.3.3 <v7...> function 27
3.8.2 <ctrl> multipoint connector 10 5,2.4 <operation> function group 28
3,8.3 <AO> connector 10 5.2.4.1 <sem hv> function 28
3.8.4 <RS232> and<LAN> connectors 10 5.2.4.2 <ionsrc> function 28
5.2.4.3 <cycle> function 29
5.2.4.4 <sem> function 29
5.2,4.5 <filam> function 29
5.2.4.6 <run/halt> function 30
5.2.5 Parameters 31
2Table of conten soMs421eg.opm

EIALZERS
6. Measuringwith the QMS 421 63 7. Technicaldata 85
6.1 Operatingmodes 63 7.1 General 85
6.1.1 SCAN 63 7.2 Basic unit 85
6.1.2 SAMPLE 63 7.2.1 Console 86
6.1.3 PEAK 64 7.2.2 Ouadrupole controller 86
6.1.4 Integral spectrum 65 7.2.2.1 Measurement operation (Cycle) 86
6.2 Adjust 65 7,2.2,2 lon detection 86
7,2.2.3 External input 8
6.2.1 Coarse search 65 7.2.2.4 lon sources SS
6.2.2 Fine adjustment 67 7,2.2,5 Measured data collection 89
6.3 Analog measured values 68 7.2.2.6 Integrator 90
7.2.2.7 Switching functions 90
6.3.1 Connectors 68 7.2.2.8 Interfaces 90
6.3.2 Overview of the output signals 88 7.2,2.9 Connectors on the QC 421 92
6.3.3 Output format 70 7.2.2,10 Signal description 93
6.3.4 Connecting recording instruments 74
6.3.4.1 Oscilloscope 74 8. Error messages, Troubleshooting 94
6,3,4.2 Strip chart recorder 74
6.3.4.3 x/y oscilloscope 75 8.1 Service and repair 94
6.3.4.4 Plotter 75 8.2 information on operation 94
6,4 Switching functions 76
6,4.1 Absolute switching functions 76 8.3 Warnings 94
6.4.2 Hysteresis switching functions 77 8.3.1 Warnings on the CS 421 console 94
8.3.2 Wamings from the QC 421 quadrupole
6.5 Integrator 79 controller 94
6.5.1 Forming the integral value 79 8.4 Error messages 95
6.5.2 Integrator operation 79 8.4.1 Error messages from the CS 421 console 95
6.5.3 Integrator background (I-UGND) 79 8.4.2 Error messages from the QC 421 quadrupole
6.6 Using the digital output module 79 controller 95
6.7 Measurementoperation 79 8.5 Troubleshooting 96
6.7.1 lon counting operation 79 8.5.1 General malfunctions 96
6.7.1.1 Measured value display 79 8.5.2 Malfunctions in the control unit 101
6,7.1.2 Adjusting CP-LEV 80
6,7.1.3 lon polarity 80
6.7.2 Chopper Lock in (CLA) 80 9. Maintenance 103
6.7.2.1 Using the CLA for process gas analysis 80 9.1 Periodic maintenance 103
6,7.2.2 Measurement setup 80
6.7.2.3 Operation and signal processing 80 9.1.1 Control unít 103
6.7.3 Quadrupole multiplexer (QMU) 81 9.1.2 Periphery components 103
6.7.4 External input 82
6,7.5 Degas operation 82 10. Spare parts, accessories 104
6.8 Measurementsequence 82 10.1 Control unit 104
6,8.1 Halt 62 10.2 Expansion units 104
6.8.2 Single channel operation (mono channel) 82
6.8.3 Multichannel operation (multi channel) 82 10.3 Power connection cable 105
6.8.3.1 Settling 83
6.9 Simulation 84
6.9.1 Simulating atroubleshooting operation 84
Table of contents 3

Appendix 106
A: Configurations 106
B: System cabling 107
B1: Electrometer operation 107
B2: lon counting operation 108
B3: Cable overview 109
C: System cabling 110
C1: Electrometer operation 110
C2: lon counting operation 113
C3: Cable overview 113
C4: Using the OMU 112 and QMN 112 114
CB: Cable overview 114
D: Default parametervalues 115
D1: <channels> -Parameter 115
D2: <general> -Parameter 116
D3: <ion source> -Parameter 116
D4: <operation> -Parameter 117
E: Adjust 118
ET: Status messages for coarse search 118
E2: Status messages for fine adjustment 120
F: Installing /removingoptions in and from the
OC 421 121
G: Converting the unit for other mains powers122
H: Glossary 123
J: Bibliography 124
KStichwortverzeichnis 126
4Table of contents QMS421gg.opm

BAL2'EFW
1. Important information
1.1 About these operating instructions 1.4 Explanationof symbols
These operating instructions e×plain basic principles of The brackets surrounding certain terms have the
operation as well as installation, operation, maintenance following meaning:
and troubleshooting for the OMG 421. They also
contains pertinent information on the QMS 421 and <..... >This is the exact lettering on the
QMS 421 Ccontrollelement (key, potentiometer,
This manual is based on the information in the color measurement socket, etc.)
leaflet [2] and the catalog sheet (3). « .... » Display, reaction (text on screen, display,
illuminated LED, etc.)
Information necessary for using the OMS 421 interface
are contained in aseparate manual [6]. »..... «Operating mode, effect (»run«, etc )
Additional modules and periphery components are also .. )Literature reference
described in seaparate operating instructions (see This information only pertains to the 400
appendix J). familîy of quadrupole mass spectrometers
(OMG 421-4).
This information only pertains to the 125
. , familiy of quadrupole mass spectrometers
1.2 Safety mformation (OMG 421-1).
AII texts in these operating instructions containing
information on equipment and personnel safety are
marked with this triangular warning symbol $.This 1.5 Validity
safety information must be communicated to other
users. These operating instructions apply to units with the
following software versions. The version in your unit can
be taken from the information given in section 5.2.5.
NOTE: Gives information on possible measu-
rement errors. for all control units:
<config> «TEST> «QMS» «PRG-NR» BG 509 790 -
CAUTION: Gives information on incorrect hand- <config> «TEST» «DSP» «PRG-NR» BG 509 789 -
ling that could cause damage to the and for control units with consoles;
measurement instrument or peripheral <config> «TEST» «CS 421» «PRG-NR» BG 509 787 -
units. If the second-to-last letter is farther into the alphabet
CDANGER: Wams of the danger of injury or fatal than the letter in the above numbers, the module may
injury for the person workinG on the contain added features, but these operating instructions
unit and/or third parties, still apply.
1.3 Protection from static electricity
CAUTION: The individual electronic components
are delicate, and thus appropriate
measures must be taken to protect
them from static elect<icity. Store
plug-in pc boards in antistatic bags or
containers.
Damage resulting from incorrect hand-
ling may lead to arevocation of the
guarantee,
opm important information 5

ESALZERS
2. Introduction
2.1 Features
-Modular system for flexbile adaptation to awide va-
riety of applications
-64 measurement channels, with individual parameter
programming
-Single or multichannel operation
-All parameters can be programmed manually, via the
RS-232-C interface, or via the field bus interface
-Each channel can carry out switching functions
-Expansion with avariety of modules possible
2.2 System overview
Abasic distinction is made between two families of in-
struments (see [2] ):
[_4oo_) The 400 family of quadrupole mass spectrome- The 125 family of quadrupole mass spectrome-
ters (OMG 421-4) are suited both for measu- ters (OMG 421-1) is suited for measurements in
rements in the lower mass ranges (to 341 amu) the lower mass range to 200 amu. The 6 mm
when the highly stable 16 mm rod system is rod system is used here,
used, and up into the higher mass ranges (to This family of instruments is also described in
2048 amu) when the 8 mm rod system is this document.
used.
This family of instruments is descibed in this
document,
2.2.1 System components in the 400 family 2.2.2 System componentsin the 125 family
QMS 421 control unit OMS 421 control unit
The basic ver- The basic ver-
'sion control unit sion control unit
must contain .. must contain
the following othe following
modules, ,modules.
Electrometer lon counter Electrometer Ion counter
Detector operation operation Detector operation operation
QC 421 QC 421 QC 421 QC 421
without option with IC 421 option without option with IC 421 option
iS 420 IS 420
Faraday
90° SEM HV 420 or HV 420 or
HV 421 HV 421
90° CD-SEM HV 421
6Introduction QMS421gg.opm

EMI..ZERG
LeJ ¯l
QMH 400 /OMH 410 RF generator OME 125 quadrupole electronics
The RF generator produces the The quadrupole electronics
radio frequency voltage re- contain the ion source supply
quired for mass separation. It and the radio frequency
must be selected according to voltage generator required for
the information in Appendix A. mass separation. When an
SEM is used, the OME 125
must a(so contain the corre-
Electrometer lon counter sponding high voltage supply,
operation operation
×xElectrometer Ion counter
operation operation
×X
OMA 400 analyzer
The analyzer comprises the
ion source, mass filter and the OMA 125 analyzer
ion detector. The type of ion The analyzer comprises the
source must be chosen ac ion source, mass filter and the
-- cording to the application iion detector. The type of ion
(compare Appendix A). source must be chosen ac-
Different ion detector systems functioning according to cording to the application
different detection principles are available: (compare Appendix A).
Electrometer lon counter
Detector operation operation Electrometer ton counter
Detector operation operation
Faraday xFaraday ×
90° SEM xx90° SEV xx
90° CD-SEM ×Channeltron ×
EP 112 electrometer preamplifier EP 112 electrometer preamplifier
The electrometer preamplifier has
the function of amplifying the ion The electrometer preamplifier has
(Faraday) or electron current (SEM) the function of amplifying the ion
and converting it to avoltage. (Faraday) or electron current (SEM)
and converting it to avoltage.
Electrometer Ion counter Electrometer Ion counter
Detector operation operation Detector operation operation
Faraday maximum 1unit Faraday maximum 1unit
90° SEM maximum 2units optionally 1for ad-
ditional measure- 90° SEM maximum 1unit
ments (Faraday) Channeltron maximum 1unit
90° CD-SEM maximum 2units
CP 400 counter preamplifier
CP 400 counter preamplifier The counter preamplifier gene-
.rates discrete counting pulses
The counter preamplifier gene- from the electron current impul-
rates discrete counting pulses ses coming from the SEM.
sreomcohmeir
ro thurrSentimpul-
Electrometer Ion counter
Electrometer Ion counter operation operation
operation operation -×
X
OMS42190.opm introduction 7

BALZERS
2.2.3 Options 2.2.4 Expansion units
The GC 421 quadrupole controller can be equipped with The quadrupote mass spectrometer functions can be ex-
an additional pc board -either the AO 421 or the IC 421 panded with modules and components plugged into free
-on request. slots (see section 7.2). Please refer to separate operating
instructions for detailed descriptions of the expansion
AO 421 analog output board possibilities (see appendix J),
The AO 421 has 12 channels for Chopper Lock-In operation
analog output of measured values CLA 400 chopper lock-in-amplifier
Lock-in amplifier with integrated
chopper drive, suited for the Bal-
zers piezochopper.
Electrometer lon counter
operation operation Electrometer Ion counter
operation operation
Xx
1C 421 ion counter board inputloutput modules
This module contains the circuits
necessary for ion counting Al 421 analog input module
operation plus the same 12 analog DI 420 digital input module
output channels contained in the DO 420 digital output module
AO 421. The analog input module has 16 chan-
nels for analog signal inputs.
The digital input module has amaxi-
mum of 32 channels for digital signal
inputs.
Electrometer Ion counter The digital output module has 32
operation operation digital output channels
× × Electrometer or ion counting operation
Al 421 maximum 1unit
DI 420 maximum 2units
DO 420 maximum 3units
Total pressure measurement
Pi 420 Pirani module
PE 420 Cold cathode module
Pirani measurement card for two gauge
heads. For total pressure measurement
in the coarse and medium vacuum
range.
Cold cathode measurement card for
one gauge head, For total pressure
measurement in the high vacuum
range.
Electrometer or ion counting operation
Pl 420 maximum 1unit
PE 420 maximum 1unit
8Introduction aMssage.opm

E3ALZERS
3. Installation
DANGER: Whenever it is likely that the protec. 3.2 Options to the OC 421
tion has been irnpaired, the apparatus
shall be made inoperative and be se- The basic OC 421 quadrupole controller comprises the
cured against any unintended opera- processor and the signal processing pc boards. It can
tion. The protection is likely to be im. also be equipped with either an AO 421 analog output
paired if, for example, the apparatus board or an IC 421 ion counter board as an option.
-shows visible damage,
-fails to perform the intended measu- 3.2.1 Installing Iremoving optional boards
rements.
-has been sujected to prolonged The installation and removal of optional boards is descri-
storage under unfavourable condi- bed in Appendix F.
tions.
-has been sujected to severe transport
stresses. 3.3 Additional modules
3.1 Mains power connection CAUTION: Empty slots must always be covered
with dummy backplates to assure
CAUTION: Before plugging the OMS 421 into proper ventilation (see section 10,1).
your local mains power supply, check
that the local supply agrees with the 3.3.1 Installing and removing modules
mains power voltage data on the
OMS 421 nameplate. If it does not, if you want to install or remove accessory modules, pro-
you must convert the operating vot. ceed as follows:
tage setting for the unit as described -Turn off the control unit and wait at least one minute.
in Appendix G.
-Disconnect all cables, disconnecting the mains power
DANGER: The mains plug shall only be inserted cable last,
in asocket outlet provided with apro- -Unscrew the dummy backplate(s) /module(s).
tective earth contact. The protective
action shall not be negated by the use -Plug in the new module(s) /unplug the old module(s).
of an extension cord without apro- RT NOTE: If you are installing new modules, be
tective conductor, sure to set their addresses correctly,
To ensure continuous protective
grounding, connect the mains power Module Address octal
cable before connecting any other IS 420 175 540
cables, and in the same way discon-
nect the mains power cable last after I-fV 420 175 400
all other cables have been disconnec- HV 421 175 404
ted· Al 421 174 400
lf you intend to fabricate your own power cable, you will DI 420 1st module 174 600
need an Europa apparatus plug (see section 10.3), 2nd module 174 604
Protective ground DO 420 ist module 174 700
2nd module 174 704
... 3rd module 174 710
-- Live LPi 420 174 000
PE 420 174 100
Neutral line NRefer to the operating instructions
for the module for instructions on
if the unit is to be installed in arack, the mains power setting the address (see appendix JL
supply must be conducted via aswitched power dist<ibu- -Secure the module(s) /backplate(s) in place by tighte-
tor. ning the fixation screws
CAUT10N: The fixation screws must be cor-
rectly tightened to assure proper
functioning.
QMS421gg.opm ÍOStaÌÏatÍOn 9

EIALZERS
-Connecting the mains power cable first, make the cable
connections. 3.8.1 Test sockets
-Turn the unit(s) on again <sync> Signal for triggering arecording instrument
<elm> Output signal from the prefiltered electrometer
preamplifier
3.4 Installing the OMS in a19" rack <mon> Measured value from the selected measure-
The QMS 421 can be installed in aD1N 41 494 19" ment channel or from the sequential measure-
rack, ment signal output
<scan> Analog signal that is afunction of the mass
DANGER: If the unit is to be installed in arack' number. Used for recording spectra on astrip
it must not lower the protection level chart recorder.
of the rack (protection against foreign
objects and water) e.g.
DIN VDE 0113 regulations for switch 3.8.2 <ctrl> multipoint connector
cabinets when in place. The signals relayed via this connector are:
CAUTION: The temperature inside the rack must 'ELM OUT'
not exceed +40 °C. Take care that
air can freely circulate through the Electrometer preamplifier output signal. This is the
built-in fans. same signal that is present at the <elm> test socket.
'EXT IN'
When <detect> «TYPE» :«EXTERN» is entered, an
3.5 Setting up the OMS as abench unit external detector can be connected through here and
When the protective cover available as an option (see its input signal processed,
section 10.1) is mounted, the QMS 421 can be set up as 'EXT PROT'
abench unit, it has folding legs that allow it to be set at Extemal protection control input for the filament and
aslight angle for better viewing and easier access to the SEM supply, Its function is determined by the
front panet <ion src> «CTRL» «SEM+ FIL» sequence entered.
/CAUTION: When setting the QMS 421 up as a'INT START'
bench unit, be sure that air circulation
in through the cooling slots on the When <integ> «TRIG» :«EXTERN» is entered, the in-
side of the unit and out through the tegrator is started by the trigger signal coming via this
back of the unit is unhindered, pin.
'RUN IN'
Depending on the parameter setting for <cycle>
3Periptiery cornpOnents «TRIG», the measurement cycle is started by the trig-
ger signal coming via this pin,
install periphery components such as the analyzer, elec-
trometer preamplifier, etc. according to the separate ope Using an appropriate matching connector (refer to sec-
rating instructions for the components (see appendix J). tion 10.1), make aconnection cable suited to your appii-
cation. Refer to section 7,2.2.9 for the pin assignments.
3.7 Cabling 3.8.3 <AO> connector
if you do not want to use the AB 021 connection box
Cable the system as required for your particular OMG available as an accessory, you can fabricate you own
system version. Refer to Appendix Bor Cfor the correct connection cable using amatching multipoint connector
cabling for your version' (refer to section 10.1). Refer to section 7.2.2.10 for pin
assignments.
INOTE: Be sure the <polarity> switch on the
OME 125 is set to <+>. 3.8.4 <RS 232> and <LAN> connectors
For the pin assignment for the above connectors, please
refer to the separate opeating instructions for the inter-
3.8 Special applications faces (61.
The test sockets and <ctrl> and <AO> connectors are
of particular interest for certain applications. See section
6.3.
10 Installation QMs421eg.opm