BOC Edwards EXT555H User manual

NRA-266-880 Issue A Original
98/37/EC
89/336/EEC
73/023/EEC
Instruction Manual
EXT555H

Jun 01 Issue A
EXT555H
PAGE
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1 INTRODUCTION 1
1.1 Scope and definitions 1
2TECHNICALDATA 3
2.1 General 3
2.2 Pumping media 3
2.2.1 Pumps without gas purge 4
2.2.2 Pumps with gas purge 4
2.3 Vent gas specification and vent control data 4
2.4 Purge gas specification 5
2.5 Water cooling 5
2.6 Materials exposed to gases pumped 6
3 INSTALLATION 9
3.1 Unpack and inspect 9
3.2 Typical installation 9
3.3 Connection to the vacuum system 9
3.3.1 Inlet screens (supplied fitted) 9
3.3.2 Inlet connection 11
3.3.3 Backing connection 11
3.3.4 Interstage connection (Hi pump variants only) 13
3.4 Vent options, vent valve connection and control 13
3.5 Purge gas connection 15
3.5.1 Connect the purge gas 15
3.5.2 Recommended purge gas flow 15
3.6 Electrical installation 15
3.7 Cooling 15
3.7.1 Introduction 15
3.7.2 Forced air cooling 17
3.7.3 Water cooling 17
4 OPERATION 19
4.1 Start up 19
4.2 Stand-by 19
4.3 Shut-down 19
4.4 Safety interlocks and control system 19
4.5 Bakeout (conflat only) 20
5MAINTENANCE 21
5.1 Introduction 21
5.2 Bearing maintenance 21
5.3 Clean the pump 21
5.4 Fault finding 21
6 STORAGE AND DISPOSAL 25
CONTENTS
Section Title Page
dcs/0112

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6.1 Storage 25
6.2 Disposal 25
7 SERVICE, SPARES AND ACCESSORIES 27
7.1 Introduction 27
7.2 Service 27
7.3 Spares 27
7.3.1 ISX inlet-screen 27
7.3.2 Inlet-strainer (EXT555Hi pump only) 28
7.3.3 Inlet-flange seals 28
7.4 Accessories 28
7.4.1 Installation 28
7.4.2 EXC controller 28
7.4.3 Pump-to-controller cable 30
7.4.4 EXDC drive modules 30
7.4.5 BX bakeout band (conflat only) 30
7.4.6 FL20K foreline trap 31
7.4.7 TAV vent-valve and vent-port adaptor 31
7.4.8 ACX air-cooler 31
7.4.9 WCX water-cooler 32
7.4.10 Vibration isolators 32
7.4.11 PRX purge-restrictor 32
7.4.12 VRX vent-restrictor 33
ILLUSTRATIONS
Figure Title Page
1 Typical pumping system 10
2 Diagram of inlet screen - remove screws 'A' in order
to remove the inlet screen. Do not remove screws 'B' 12
3 Maximum rate of pressure rise when venting 14
4 Dimensions and features of EXT555H pumps 16
5 Installation of EXT555H optional accessories and spares 29
CONTENTS (continued)
Section Title Page

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1 General information 3
2 Vent gas and vent control data 4
3 Purge gas specification 5
4 Cooling water specification 5
5Technicaldata 6
6 List of items supplied 9
7 Vent restrictor orifice diameter (with atmospheric
pressure at the inlet) 13
8 Fault finding 22
9ISXinlet-screen 27
10 Inlet-strainer (EXT555Hi pump only) 28
11 Inlet-flange seals 28
12 EXC controller 28
13 Pump-to-controller cable 30
14 EXDC drive modules 30
15 BX bakeout band 30
16 FL20K foreline trap 31
17 TAV vent-valve and vent-port adaptor 31
18 ACX air-cooler 31
19 WCX water-cooler 32
20 Vibration isolators 32
21 PRX purge-restrictor 32
22 VRX vent-restrictor 33
ASSOCIATED PUBLICATIONS
Publication Title Publication Number
EXC120/120E/300/300M Turbomolecular Pump Controllers D396-14-880G
EXC250E/250L Turbomolecular Pump Controllers D396-36-880A
EXDC Turbomolecular Pump Drive Modules D396-40-880E
TABLES
Table Title Page

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Jun 01 Issue A
EXT555H
INTRODUCTION
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1INTRODUCTION
1.1 Scope and definitions
This manual provides installation, operation,
maintenance and storage instructions for the BOC
Edwards EXT555H compound turbo-molecular
pumps. Please read and follow all the instructions in
this manual.
The EXT555H pump is designed for use with a BOC
Edwards EXC or EXDC controller. Read this
manual and the instruction manual supplied with
your controller before you attempt to install or
operate the equipment. The controller manual
contains details of electrical installation.
Important safety information in this manual is
highlighted as WARNING and CAUTION
instructions. Please obey these instructions. The use
of warnings and cautions is defined below.
In accordance with the recommendations of
EN61010, the following warning symbols may
appear on the pump or its accessories:
Warning - refer to accompanying
documentation.
Warning - risk of electric shock.
WARNING
Warnings are given where failure to
observe the instruction could result
in injury or death to people.
CAUTION
Cautions are given where failure to observe the
instruction could result in damage to the
equipment, associated equipment or process.
Warning - hot surfaces.
The units used throughout this manual conform to
the SI system of units of measurement. Also,
throughout this manual, wherever flow rates are
specified, the abbreviation 'sccm' is used to mean
standard cm3min-1: this is a flow of 1cm3min-1 at an
ambient temperature of 0 °C and a pressure of
1013 mbar (1.013 x 105Pa).

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TECHNICAL DATA
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2TECHNICALDATA
2.1 General
General items Reference data
Performance See Table 5
Dimensions and features See Figure 4
Maximum inlet flange temperature 80 °C
Maximum magnetic field
EXT555H DN160CF 3 mT horizontal, 5 mT vertical
EXT555H ISO160 2.5 mT horizontal, 5 mT vertical
Installation category EN61010 part 1, category 1
Pollution degree EN61010 part 1, category 2
Equipment type Fixed equipment, for indoor use only
Operating altitude up to 3000 m
Ambient temperature 5 °C - 35 °C (air cooled)
5 °C - 40 °C (water cooled)
Relative humidity 10 - 95% non condensing
Table 1 - General information
2.2 Pumping media
WARNING
Vent dangerous gases and gas
mixtures safely. Do not expose
people to these gases.
WARNING
Do not use EXT555H pumps to
pump explosive gas mixtures as the
pumps are not suitable for this
purpose.
WARNING
On an Hi variant, gas pumped
through the interstage port will mix
with gas pumped through the pump
inlet. Ensure that the gases will not
react or combine to form dangerous
gases and substances.
Note: Concentrations of gases may be modified by
the compression of the pump.
CAUTION
Do not use an EXT555H pump to pump gases
containing more than 20% oxygen unless a bearing
purge is applied as stated in Section 2. If you do the
lubricant will be damaged and the pump will fail
prematurely.
CAUTION
Do not use the EXT555H pump to pump mercury
vapour, and do not allow mercury to come into
contact with the pump. If you do, the rotor may
corrode and fail.

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TECHNICAL DATA
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2.2.1 Pumps without gas purge
The pumps are designed to pump the following
residual gases normally used in high vacuum systems:
•air
•nitrogen
•carbon dioxide
•carbon monoxide
•krypton
•helium
•neon
•argon
•hydrogen
•ethane
•propane
•butane
•methane
You can use the pumps to pump oxygen and water
vapour subject to the following conditions:
•Oxygen
The oxygen concentration must be less than
20% by volume unless a bearing purge is
applied as detailed in Section 2.2.2.
•Water vapour
You must ensure that vapour does not
condense inside the pump - refer to
Section 3.7.3.
If you wish to pump a gas not previously listed,
contact your supplier for advice. If you do not
contact your supplier you may invalidate the
warranty on the pump.
The pumps are not suitable for pumping aggressive
or corrosive gases.
2.2.2 Pumps with gas purge
When purged with an inert gas the pumps can be
used to pump oxygen in concentrations above 20%
by volume.
2.3 Vent gas specification and vent
control data
Although the pump may be vented to atmosphere,
relatively high air humidity may greatly increase the
subsequent pump-down time. To reduce pump-
down times you should vent the pump with dry,
clean gases.
Vent gas system items Reference data
Vent gas Dry air, nitrogen, argon or other inert gases
Maximum dew point at atmospheric pressure -22 °C
Maximum size of particulate 1 micron
Maximum concentration of oil 0.1 parts per million
Time for rotational speed to reach 50% >15 seconds
Maximum allowed rate of pressure rise see Figure 3
Table 2 - Vent gas and vent control data

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TECHNICAL DATA
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2.4 Purge gas specification
Purge gas system items Reference data
Purge gas Dry nitrogen, argon or other inert gases
Maximum dew point at atmospheric pressure -22 °C
Maximum size of particulates 1 micron
Maximum concentration of oil 0.1 parts per million
Allowable purge gas flow (when required) 20 to 150 sccm (0.33 to 2.48 mbar l s-1, 33 to 248
Pa l s-1)
Recommended purge gas flow 25 sccm (0.42 mbar l s-1, 42 Pa l s-1)
Maximum allowable purge gas supply pressure 2 bar gauge (29 psig, 3 x 105Pa)
Table 3 - Purge gas specification
2.5 Water cooling
The following water cooling specification
corresponds to a typical high quality drinking water
specification. Check with your water supply
authority if you are in doubt about the quality of
your supply.
Cooling water system items Reference data
Quality Mechanically clean and optically with no deposits
or turbidity
pH value 6.0 to 8.0
Maximum calcium carbonate concentration 75 parts per million
Maximum chloride concentration 100 parts per million
Minimum oxygen concentration 4 parts per million
Recommended water cooling flow rate (at 15 °C) 15 l hr-1
Water temperature See Table 5
Maximum water pressure 5 bar (gauge), 73.5 psig, 6 x 105Pa
Materials exposed to cooling water Copper, brass, braise
Table 4 - Cooling water specification

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2.6 Materials exposed to gases pumped
The following materials and component types are
exposed to the gases pumped: aluminium alloys,
stainless steels, fluoroelastomer and nitrile 'O' rings,
hydrocarbon lubricant, rare earth magnets, silicon
nitride, phenolic resin and carbon fibre epoxy resin.
Parameter EXT555H Notes
Mass EXT555H ISO160 13.4 kg
Mass EXT555H DN160CF 21.2 kg
Main inlet flange DN160ISO-K/DN160CF
Outlet flange DN25NW
Interstage port (Hi variants) DN25NW
Vent port 1/8 inch BSP
Purge port 1/8 inch BSP
Inlet pumping speed *
N2 540 l s-1
He 580 l s-1
H2 500 l s-1
Ar 510 l s-1
Interstage pumping speed *
N2 8 l s-1
He 6 l s-1
H2 8 l s-1
Ar 10 l s-1
Inlet compression ratio **
N2 >1010 Pb < 20 mbar
He 108Pb < 12 mbar
H2 106Pb < 7 mbar
Ar >1010 Pb < 20 mbar
Critical backing pressure †
N2 > 20 mbar
H2 9 mbar
He 20 mbar
Ar > 20 mbar
Table 5 - Technical data

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Ultimate pressure
CF
ISO
<10-10 mbar
<2 x 10-9 mbar
Minimum backing pump
displacement
12 m3 h-1
Recommended backing pump RV12
Maximum continuous inlet
pressure (light gas pumping) ††
Forced air cooled, 30 °C ambient 1 x 10-3 mbar
Forced air cooled, 35 °C ambient 5 x 10-4 mbar
Water cooling at 15 °C2x10
-3 mbar
Maximum continuous inlet
pressure (argon pumping) ††
Forced air cooled, 30 °C ambient 2 x 10-4 mbar
Forced air cooled, 35 °C ambient 2 x 10-4 mbar
Water cooling at 15 °C3x10
-4 mbar Water cooling while pumping high
concentrations of argon is not
recommended
Maximum continuous backing
pressure (light gas pumping) ††
Forced air cooled, 30 °C ambient 12 mbar
Forced air cooled, 35 °C ambient 7.5 mbar
Water cooling at 15 °C15mbar
Maximum continuous backing
pressure (argon) ††
Forced air cooled, 30 °C ambient 5 mbar
Forced air cooled, 35 °C ambient 3.5 mbar
Water cooling at 15 °C 8 mbar Water cooling while pumping high
concentrations of argon is not
recommended
Operating attitude Any
Nominal rotational speed 50000 rpm
Start time to 90% speed:
EXC250 < 8 minutes
EXC300 < 8 minutes
EXDC160 < 8 minutes
Parameter EXT555H Notes
Table 5 - Technical data (continued)

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Cooling method forced air / water
Ambient air temperature for
forced air cooling
0 °C - 35 °C
Minimum cooling water flow rate
(water at 15 °C)
15 l h-1
Water temperature 10 °C - 20 °C
Noise level at 1 metre <60 dBA
Recommended controllers EXC250, EXC300, EXDC160
Quiescent power consumption 35 W
* Pumping speeds are without inlet screen or inlet strainer (EXT555Hi)
Inlet screens and inlet strainers reduce pumping speed by about 20%
** Pb = backing pressure
†Pumping speed has dropped by 10%
†† Above this pressure the rotational speed of the pump drops below nominal
Parameter EXT555H Notes
Table 5 - Technical data (continued)

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3 INSTALLATION
3.1 Unpack and inspect
Take care when you unpack the pump to avoid
excessive shocks which could damage the bearings
and reduce the life of the pump. The pump is
supplied with the inlet and the outlet sealed to
prevent entry of dust and vapour. Do not remove
these seals until you are ready to install the pump on
your vacuum system.
Remove all the outer cardboard packaging and
check the pump. If the pump is damaged, notify your
supplier and carrier in writing within three days;
state the item number of the pump together with
your order number and your supplier's invoice
number. Retain all the packing materials for
inspection. Do not use the pump if it is damaged.
Check that your package contains the items listed in
Table 6. If any of these items is missing, notify your
supplier in writing within three days.
If the pump is not to be used immediately, store the
pump in suitable conditions as described in
Section 6.1.
It is advised that you retain all packing materials for
use should you return the pump for service.
WARNING
The EXT555H DN160CF pump
variant weighs 21 kg. Take care when
handling the pump and ensure that
you grip it firmly by the inlet flange
when manoeuvring it.
3.2 Typical installation
A typical pump system with an EXT555H pump is
shown in Figure 1.
The accessories available for the EXT555H pump
are detailed in Section 7.4. The accessories are
shown in Figure 5.
3.3 Connection to the vacuum system
Carefully remove the pump from packaging media
and connect to the vacuum system.
3.3.1 Inlet screens (supplied fitted)
WARNING
Install the pump on the vacuum
system before you connect the
controller to the power supply. This
will ensure that the pump cannot
operate and injure people during
installation.
WARNING
Removal of inlet screens will expose
people to the risk of injury from
sharp edges.
CAUTION
Removal of inlet screens could allow debris to fall
into the pump, which could cause serious damage
to the pump.
Qty Description
1 EXT555H turbomolecular pump
1 Inlet screen (fitted)
1 Inlet seal (trapped 'O' ring, co-seal or copper compression gasket)
1 Inlet strainer (EXT555Hi only, fitted in the interstage port)
Table 6 - List of items supplied

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Figure 1 - Typical pumping system
1. Alternative position for
vent-valve
2. Vacuum system
3. High-vacuum gauge
4. Inlet-screen
5. EXT pump
6. Backing valve
7. Vacuum gauge
8. Flexible bellows
9. Foreline trap
10. Rotary backing pump
11. Mist filter
12. Cooling water connectors
13. EXC controller
14. Air cooler
15. PRX10 purge restrictor
16. Regulated purge gas supply
17. Vent-valve

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Do not remove inlet screens unless you can be sure
that there is no danger that debris can fall into the
pump. If the inlet screens are removed, the pumping
speed through the inlet will increase by
approximately 20%.
To remove the inlet screen, undo the three screws
('A') which hold it down (Figure 2). If you need to
replace the inlet screen, do so by undoing these
screws, changing the inlet screen, and replacing the
screws. Ensure that screws are firmly tightened.
3.3.2 Inlet connection
Ensure that the EXT555H pump is securely fixed to
the vacuum system following the instructions below.
Make sure that the pump inlet and all components
fitted to the pump inlet are clean and dust free. If the
pump inlet is not kept clean the pump down time
may be increased.
Use the vacuum seal provided with the pump.
If you are using an EXT555H ISO160 pump, connect
it to the vacuum system using an ISO160 rotatable
flange with a full complement of bolts. Alternatively
use at least 8 claw clamps.
If you are using an EXT555H DN160CF, use a full
complement of 20 M8 bolts to attach the pump to
your vacuum system.
CAUTION
Do not remove the three screws which retain the
locking plate ('B' in Figure 3). If you do so the pump
settings may change and the pump may cease to
operate or have a shortened life.
WARNING
Ensure that the EXT555H pump is
securely fixed to the vacuum system
following the instructions below. If
you do not, and the pump seizes, the
stored energy of the rotor can cause
rapid movement of the pump, which
may cause injury to people and
further damage to equipment.
If the inlet flange of the EXT555H is not connected
to a rigid, firmly fixed vacuum system, ensure that
the base of the pump is fixed to a firm support.
Remove the four feet and secure the pump using
eight M8 screws through the tapped fixing holes in
the base of the pump. If you are using a WCX555
water cooling accessory, mount through the cooling
plate into the tapped holes on the base of the pump.
If the pump inlet is connected to the vacuum system
using a vibration isolator, use the tapped fixing holes
in the base of the pump to secure the pump to a firm
support as described above. Alternatively, fit
suitable restraints to prevent movement of the
pump and fracture of the vibration isolator in the
unlikely event of a seizure of the pump rotor.
The pump can be mounted in any orientation. If it is
mounted off-vertical, ensure that the backing port
points downwards to reduce the risk of
contamination from backing pump oil.
3.3.3 Backing connection
Use suitable vacuum tubing and connectors to
connect the NW flange of the backing port to your
backing pump. If necessary use flexible pipe or
bellows to reduce the transmission of vibration
from the backing pump to the EXT555H pump.
We recommend that you use a BOC Edwards RV
backing pump. The minimum size of the backing
pump required is given in Table 5. You may have to
use a larger backing pump if you run the pump at a
high inlet pressure or high throughput, or if you
purge the pump.
CAUTION
If you back the EXT555H pump with the interstage
of another turbomolecular pump, make sure that
the backing pressure does not fall below 5 x 10-4
mbar (5 x 10-2 Pa). Lower backing pressures will
increase the evaporation rate of the lubricant and
so will reduce the life of the bearings.

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INSTALLATION
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Figure 2 - Diagram of inlet screen - remove screws 'A' in order to remove the inlet screen. Do not remove
screws 'B'

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3.3.4 Interstage connection (Hi pump
variants only)
Use suitable vacuum tube and connectors to
connect the interstage port to your vacuum system
or to the outlet flange of another turbomolecular
pump. Leave the inlet strainer in the interstage port
unless you are sure that debris cannot be drawn into
the interstage port.
3.4 Vent options, vent valve connection
and control
To maintain the cleanliness of your vacuum system
we recommend that, whenever you switch the
pump off, you vent the pump or the vacuum system
when the speed of the EXT555H pump is between
full rotational speed and 50% of full rotational speed.
At and above 50% of full rotational speed the rotor
spins fast enough to suppress any hydrocarbon oil
from your backing pump. Venting may be
accomplished by one of the following methods:
•Use a TAV5 or TAV6 solenoid vent valve
accessory (see Section 7) in place of the
manual vent valve.
•Use a TAV5 or TAV6 solenoid vent valve
connected to a convenient flange on your
vacuum system.
•Use an alternative valve connected to your
vacuum system.
The maximum rate of pressure rise is given in
Figure 3.
When using the manual vent valve supplied you must
only open the vent valve when the rotational speed
of the EXT555H pump has fallen to 50% of full
rotational speed.
If you use a TAV vent valve or other solenoid vent
valve, you should only use the vent valve to vent the
pump from full speed if the vacuum system has a
volume of 20 litres or more. If the system has a
volume of less than 20 litres you should incorporate
a suitable restrictor (see below and Table 7).
Alternatively, if you are using an EXC controller to
operate the vent valve, you can configure the valve
so that it opens once the pump has reached 50% of
full rotational speed.
Do not vent from the backing line as this may lead
to contamination. If you vent into your vacuum
system, select a point upstream of the pump to
prevent oil backstreaming from the backing line.
CAUTION
You must ensure that your vacuum system cannot
suddenly be vented to atmosphere when the pump
is running at full rotational speed - if it does so then
the EXT555H pump may suffer a catastrophic
failure. As the inlet screen is not designed to
contain pump components in the event of a
catastrophic failure, subsequent damage may result
to the connected vacuum system.
CAUTION
If you vent the pump when it is at full rotational
speed and the rate of pressure rise is too high the
pump bearing life may be reduced.
Vacuum system volume (litres) Orifice diameter (mm)
< 20 < 1.0
< 10 < 0.7
< 5 < 0.5
< 2 < 0.35
Table 7 - Vent restrictor orifice diameter (with atmospheric pressure at the inlet)

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Figure 3 - Maximum rate of pressure rise when venting