BOC Edwards EXT200/200/30 User manual

B756-00-880 Issue A Original
Instruction Manual
EXT200/200/30 Split Flow Compound Turbomolecular Pump
98/37/EC
89/336/EEC
73/023/EEC
Description Item Number
24 Volt EXT200/200/30 Compound Turbomolecular Pump B756-11-991
80 Volt EXT200/200/30 Compound Turbomolecular Pump B756-10-000
24 Volt EXT200/200/30 Cartridge Compound Turbomolecular Pump B756-15-991
80 Volt EXT200/200/30 Cartridge Compound Turbomolecular Pump B756-15-000

^%, BOC EDWARDS
Declaration
ofConformity
We, BOCEdwards,
ManorRoyal,
Crawley,
WestSussex,RH102LW,UK
declareunderoursoleresponsibilitythattheproduct(s)
8756-10-000
8756-1
1
-000
8756-11
-991
EXT200/200/30
80V
EXT200/200/3080V
EXr200120013024v
to whichthisdeclarationrelatesisin conformitywith the followingstandard(s)
or other normativedocument(s)
EN292
EN1
01
2-2
EN61010-1.
EN61326
(lmmunity,
ClassBEmissions)
SafetyofMachinery:Basic
Concepts,
GeneralPrinciples
for Design.
CompressorsandVacuumPumps
- SafetyRequirements
Part2.
SafetyRequirementsfor ElectricalEquipment
for Measurement
ControlandLaboratory
Use.
ElectricalEquipmentfor Measurement,Control
andLaboratoryUse
- EMCRequirements.
The
pumps
complywith
EN61010-1wheninstalledin
accordance
with
the
instructionmanualsupplied
with
the
pumps.
following
theprovisions
of
73l023|EEC
89i336iEEC
98137IEC
LowVoltageDirective.
Electromagnetic
Compatibility
Directive.
MachineryDirective,
it{usre?s3 CnAvrEY
Dr,
l. D. Watson,SeniorTechnicalManager Dateand
Place
VacuumEquipmentandExhaustManagementProductDivisions
This
product
has
been
manufactured
underaquality system
registeredtolSO9001
ffi.ffi aoc HDwARas
o
r
co
O
o

^% BOC EDWARDS
Declaration
of
Incorporation
We, BOCEdwards,
ManorRoyal,
Crawley,
WestSussex,
RH10
ZLW,UK
declare
underour
soleresponsibility
thatthe
machine(s)
EXTCompound
Turbomolecular
Pumps:
8756-15-000 EXT200/200/30
cartridge
80V
8756-15-991 EXf2001200130
cartridge
24V
to whichthisdeclaration
relatesis
intended
to beincorporated
intootherequipment
and
notto function
independantly.
Themachine(s)
isinconformity
withthefollowing
standard(s)
or other
normative
document(s).
EN292 SafetyofMachinery:
Basic
Concepts,
General
Principles
for Design.
EN1012-2 Compressors
and
VacuumPumps
-Safety
Requirements
Part2.
EN61010-1. Safety
Requirements
forElectrical
Equipment
forMeasurement
Control
andLaboratoryUse.
EN61326 ElectricalEquipment
forMeasurement,
Control
(lmmunity, and
LaboratoryUse
- EMC
Requirements.
ClassB
Emissions)
The
pumps
comply
withEN61010-1
wheninstalled
in
accordance
withthe
instruction
manualsupplied
with
the
pumps.
Themachine(s)
must
notbe
put
intoservice,
untiltheequipment
into
whichit is
incorporated,
hasbeen
brought
Intoconformity
with
theprovisions
ofthe
MachinerySafety
Directive
98/37/EC,
ELTr.rrrQ,
2od3 qrAr.lr.t\/
Dr,L D, Watson,Senior
Technical
Manager
VacuumEquipment
and ExhaustManagement
ProductDivisions
This
product
hasbeen
manufacturedunder
a quality system
registered
tolSO9001
EHs Dateand
Place
ffilf ffi*t HtrtYARps
:
r
6
o
o

Jun 03 Issue A
EXT200/200/30 Split Flow Compound Turbomolecular Pump
PAGE
i
i
1 INTRODUCTION 1
1.1 Scope and definitions 1
2TECHNICALDATA 3
2.1 General 3
2.2 Pumping media 3
2.3 Vent gas specification and vent control data 4
2.4 Materials exposed to gases pumped 6
3 INSTALLATION 9
3.1 Unpack and inspect 9
3.2 Typical installation 9
3.3 Connection to the vacuum system 9
3.3.1 Mechanical fixing 10
3.3.2 Inlet-screens (supplied fitted) 10
3.3.3 Inlet connection and orientation 11
3.3.4 Backing connection 12
3.4 Vent options, vent valve connection and control 12
3.5 Electrical installation 13
3.5.1 EXDC controllers 13
3.5.2 EXC controllers 13
3.6 Cooling 13
3.6.1 Introduction 13
3.6.2 Forced-air cooling 13
4OPERATION 15
4.1 Start-up 15
4.2 Shut-down 15
4.3 Safety interlocks and control system 15
4.3.1 EXDC controllers 15
4.3.2 EXC controllers 16
5 MAINTENANCE 17
5.1 Introduction 17
5.2 Bearing maintenance 17
5.3 Cleaning the pump 17
5.4 Fault finding 17
6 STORAGE AND DISPOSAL 21
6.1 Storage 21
6.2 Disposal 21
7 SERVICE, SPARES AND ACCESSORIES 23
CONTENTS
Section Title Page
dcs/0156/0203

Issue A Jun 03
EXT200/200/30 Split Flow Compound Turbomolecular Pump
ii
PAGE
ii
7.1 Introduction 23
7.2 Service 23
7.3 Spares 23
7.3.1 Inlet-screens 23
7.3.2 Inlet-flange seals 23
7.4 Accessories 24
7.4.1 Installation 24
7.4.2 EXDC drive modules 24
7.4.3 EXC controllers 24
7.4.4 Pump-to-controller cables 24
7.4.5 TAV vent-valve and vent-port adaptor 24
7.4.6 ACX air-cooler 24
7.4.7 VRX vent-restrictor 24
INDEX 27
RETURN OF BOC EDWARDS EQUIPMENT
ILLUSTRATIONS
Figure Title Page
1 Dimensions of the EXT200/200/30 split flow pump (units in mm) 7
2 Opening procedures for packaging 9
3 EXT200/200/30 split flow system 9
4 Correct installation of inlet-screen 10
5 Mounting attitude of the EXT200/200/30 split flow pump 11
6 Installation of optional accessories 26
CONTENTS (continued)
Section Title Page

Jun 03 Issue A
EXT200/200/30 Split Flow Compound Turbomolecular Pump
PAGE
iii
iii
1 General data 3
2 Vent gas and vent control data 4
3 Technical data 4
4 List of items supplied 10
5 Vent-restrictor orifice diameter
(with atmospheric pressure at the inlet of the vent-valve) 12
6 Fault finding 18
7Spares 23
8 EXDC drive modules 24
9 EXC controllers 24
10 Pump-to-controller cable 25
11 TAV vent-valve and vent-port adaptor 25
12 ACX air-cooler 25
13 VRX vent-restrictor 25
ASSOCIATED PUBLICATIONS
Publication Title Publication Number
EXDC Turbomolecular Pump Drive Modules D396-40-880 Issue C
TABLES
Table Title Page

Issue A Jun 03
EXT200/200/30 Split Flow Compound Turbomolecular Pump
PAGE
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iv
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Jun 03 Issue A
EXT200/200/30 Split Flow Compound Turbomolecular Pump
INTRODUCTION
PAGE
1
1
1INTRODUCTION
1.1 Scope and definitions
This manual provides installation, operation,
maintenance and storage instructions for the BOC
Edwards EXT200/200/30 Split Flow Compound
Molecular Pump. Covering both the 24 V and 80 V
variants. Please read and follow all instructions in
this manual.
The EXT200/200/30 Split Flow Compound
Molecular Pump is designed for use with a BOC
Edwards EXDC or EXC Controller. Read this
manual and the instruction manual supplied with
your controller before you attempt to install or
operate the equipment. The controller manual
contains details of electrical installation.
Important safety information in this manual is
highlighted as WARNING and CAUTION
instructions; please obey these instructions. The use
of WARNINGS and CAUTIONS is defined below.
In accordance with the recommendations of
EN61010, the following warning symbols may
appear on the pump or its accessories:
Warning - refer to accompanying
documentation.
Warning - risk of electric shock.
WARNING
Warnings are given where failure to
observe the instruction could result
in injury or death to people.
CAUTION
Cautions are given where failure to observe the
instruction could result in damage to the
equipment, associated equipment or process.
Warning - hot surfaces.
The units used throughout this manual conform to
the SI international system of units of measurement.
Also throughout this manual, wherever flow rates
are specified, the abbreviation 'sccm' is used to mean
standard cm3min-1: this is a flow of 1 cm3min-1 at an
ambient temperature of 0 oC and a pressure of
1013 mbar (1.013 x 105Pa).

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EXT200/200/30 Split Flow Compound Turbomolecular Pump
PAGE
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Jun 03 Issue A
EXT200/200/30 Split Flow Compound Turbomolecular Pump
TECHNICAL DATA
PAGE
3
3
2 TECHNICAL DATA
2.1 General
The pump is designed to pump the following residual
gases normally used in high-vacuum systems:
•Air
• Carbon monoxide
•Neon
•Ethane
•Methane
•Nitrogen
•Krypton
•Argon
•Propane
• Carbon dioxide
• Helium
•Hydrogen
•Butane
You can use the pump to pump oxygen and water
vapour, subject to the following conditions:
• Oxygen – The oxygen concentration must be
less than 20% by volume.
• Water vapour - You must ensure that vapour
does not condense inside the pump.
General items Reference data
Performance Refer to Table 3
Dimensions Refer to Figure 1
Maximum inlet-flange temperature 70 oC
Maximum magnetic field 5 mT
Installation category EN61010 part 1, Category 1
Pollution degree EN61010 part 1, Category 2
Table 1 - General data
2.2 Pumping media
Note: Concentrations of gases may be modified by
the compression of the pump.
WARNING
Vent dangerous gases and gas
mixtures safely. Do not expose
people to these gases.
WARNING
Do not use the EXT200/200/30 Split
Flow pump to pump explosive gas
mixtures as the pump is not suitable
for this purpose.
CAUTION
Do not use the EXT200/200/30 Split Flow pump to
pump gases containing more than 20% oxygen. If
you do, the lubricant will polymerise and the pump
will fail prematurely.

Issue A Jun 03
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EXT200/200/30 Split Flow Compound Turbomolecular Pump
TECHNICAL DATA
4
If you wish to pump a gas not in the list above,
contact your supplier for advice. If you do not
contact your supplier, you may invalidate the
warranty on the pump. The pumps are not suitable
for pumping aggressive or corrosive gases.
2.3 Vent gas specification and vent
control data
Although the pump may be vented to atmosphere,
high relative humidity of the air may greatly increase
the subsequent pump-down time. To reduce pump-
down times you should vent the pump with dry,
clean gases.
Vent items Reference data
Vent gas Dry air, nitrogen, argon or other inert gases
Maximum dew point at atmospheric pressure -22 oC
Maximum size of particulate 1 µm
Maximum concentration of oil 0.1 parts per million
Time for rotational speed to reach 50% >15 sec
Table 2 - Vent gas and vent control data
Parameter EXT200/200/30 Notes
Mass 10.62 kg
Main inlet-flange Rectangular 96 x 60 mm
Side inlet-flange Rectangular 96 x 60 mm
Interstage inlet-flange Rectangular 96 x 20 mm
Outlet-flange DN25NW
Vent-port 1/8 inch BSP
Main inlet pumping speed
N2#‡* 159 l s-1 Pb < 5 mbar (500 Pa)
He#‡* 180 l s-1 Pb < 1 mbar (100 Pa)
H2#‡* 155 l s-1 Pb < 0.5 mbar (50 Pa)
Table 3 - Technical data

Jun 03 Issue A
EXT200/200/30 Split Flow Compound Turbomolecular Pump
TECHNICAL DATA
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5
Side inlet pumping speed
N2#‡* 217 l s-1 Pb < 5 mbar (500 Pa)
Pi = 5 x 10-3 mbar (0.5 Pa)
He#‡* 195 l s-1 Pb < 1 mbar (100 Pa)
Pi = 5 x 10-3 mbar (0.5 Pa)
H2#‡* 137 l s-1 Pb < 0.5 mbar (50 Pa)
Pi = 5 x 10-3 mbar (0.5 Pa)
Interstage pumping speed‡
N2#‡* 28 l s-1 Pb = 5 mbar (500 Pa)
Pi = 5 x 10-1 mbar (50 Pa)
He#‡* 28 l s-1 Pb = 5 mbar (500 Pa)
Pi = 5 x 10-1 mbar (50 Pa)
H2#‡* 24 l s-1 Pb = 5 mbar (500 Pa)
Pi = 5 x 10-1 mbar (50 Pa)
Compression ratio from the backing port
to the main inlet
N2>1 x 107
He 1 x 106
H22.8 x 104
Compression ratio from the side inlet to
the main inlet
N25.5 x 103
He 2.5 x 102
H25 x 101
Maximum backing pressure+
N212.6 mbar (1260 Pa)
He 7.7 mbar (770 Pa)
H22 mbar (200 Pa)
Minimum backing pump displacement 0.6 m3h-1
Maximum continuous inlet pressure - air-
cooling at 35 oC ambient§ * Air-cooling is beneficial to the EXDC controller
Main inlet 2 x 10-4 mbar
(2 x 10-2 Pa)
Results applicable to
B756-10-000
Side inlet 2 x 10-3 mbar
(2 x 10-1 Pa)
Pb = 6.25 mbar (625 Pa)
Interstage inlet 3.5 x 10-2 mbar
(3.5 Pa)
Parameter EXT200/200/30 Notes
Table 3 - Technical data (continued)

Issue A Jun 03
PAGE
6
EXT200/200/30 Split Flow Compound Turbomolecular Pump
TECHNICAL DATA
6
‡Pumping speeds are without inlet-screen.
Inlet-screens reduce speed by approximately 10% for main and side inlets and by approximately 4% at
interstage inlet.
#Pb = backing pressure,
Pi= Inlet pressure,
+Inlet pressure has risen to 10-3 mbar.
§Above this pressure, rotational speed drops below nominal.
†A larger backing pump may be required for maximum throughput.
* With an E2M28 backing pump.
Operating attitude Refer to Figure 5
Nominal rotational speed 60000 r min-1
Standby rotational speed 42000 r min-1 EXC controller only
Starting time to 90% speed
EXDC160 146 sec
EXC100E 309 sec
EXC120 248 sec
EXC300 161 sec
Cooling method Forced-air
Ambient air temperature (forced-air
cooling)
0 - 35 oC
Noise level (at 1 metre) < 50 dB(A)
Recommended controller EXDC160
EXDC160 maximum VA input 250 VA
Quiescent power 25 W
Recommended backing pump†RV3
Parameter EXT200/200/30 Notes
Table 3 - Technical data (continued)
2.4 Materials exposed to gases pumped
The following materials and component types are
exposed to the gases pumped: aluminium alloys,
stainless steels, fluoroelastomer and nitrile 'O' rings,
hydrocarbon lubricant, felt, rare earth magnets,
silicon nitride, phenolic resin and carbon-fibre
reinforced epoxy resin.

Jun 03 Issue A
EXT200/200/30 Split Flow Compound Turbomolecular Pump
TECHNICAL DATA
PAGE
7
7
Figure 1 - Dimensions of the EXT200/200/30 split flow pump (units in mm)
1. 4 slots 8.4 mm wide

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EXT200/200/30 Split Flow Compound Turbomolecular Pump
PAGE
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Jun 03 Issue A
EXT200/200/30 Split Flow Compound Turbomolecular Pump
INSTALLATION
PAGE
9
9
3INSTALLATION
3.1 Unpack and inspect
Take care when you unpack the pump to avoid
excessive shocks which could damage the bearings
and reduce the life of the pump. The pump is
supplied with the inlet and outlet sealed to prevent
entry of dust and vapour. Do not remove these seals
until you are ready to install the pump on your
vacuum system.
Fold down all outer cardboard packaging and check
the pump. If the pump is damaged, notify your
supplier and the carrier in writing within three days;
state the Item Number of the pump together with
your order number and your supplier’s invoice
number. Retain all packing materials for inspection.
Do not use the pump if it is damaged.
Check that your package contains the items listed in
Table 4. If any of these items is missing, notify your
supplier in writing within three days.
If the pump is not to be used immediately, store the
pump in suitable conditions as described in
Section 6.1.
It is advised to retain all packing materials; for use
should you return it for service.
The accessories available for the EXT200/200/30
Split Flow pump are detailed in Section 7.4; the
accessories are shown in Figure 6.
3.3 Connection to the vacuum system
Carefully remove the pump from packaging media
and connect to vacuum system.
WARNING
Install the pump in the vacuum
system before you connect the
controller to the power supply. This
will ensure that the pump cannot
operate and injure people during
installation.
WARNING
The impeller blades on an
EXT200/200/30 cartridge version are
exposed at both the side inlet and
main inlet of the pump. Therefore,
care must be taken during unpacking
and installation to avoid the ingress of
foreign objects and personal injury.
Figure 2 - Opening procedures for packaging
Figure 3 - EXT200/200/30 split flow system
* System variants include an EXDC160 controller.
3.2 Typical installation
A typical pumping system with an EXT200/200/30
pump is shown in Figure 3*.

Issue A Jun 03
PAGE
10
EXT200/200/30 Split Flow Compound Turbomolecular Pump
INSTALLATION
10
Qty Description Check ( )
1 EXT200/200/30 Split Flow Turbo Molecular pump
2 Large inlet-screen (fitted)
1 Small inlet-screen (fitted)
2 Large inlet seal ('O' ring)
1 Small inlet seal ('O' ring)
1 EXDC160 controller (fitted)*
* Only supplied with system variants.
Table 4 - List of items supplied
3.3.1 Mechanical fixing
Ensure the EXT200/200/30 Split Flow pump is
securely fixed to the vacuum system via its inlet-
flange.
3.3.2 Inlet-screens (supplied fitted)
Do not remove the inlet-screens unless you can be
sure that there is no danger that debris can fall into
the pump.
To remove an inlet-screen carefully extract it from
the inlet-flange using a bent wire hook. Once
removed, a screen is not reusable. Spares are
available (refer to Section 7).
WARNING
If the pump seizes, the stored energy
of the rotor can cause rapid
movement of the pump, which may
cause further damage and injury to
people.
WARNING
Removal of inlet-screens will expose
the risk of injury from sharp edges.
Figure 4 - Correct installation of inlet-screen
1. Inlet-screen
2. Inlet-flange

Jun 03 Issue A
EXT200/200/30 Split Flow Compound Turbomolecular Pump
INSTALLATION
PAGE
11
11
3.3.3 Inlet connection and orientation
The pump can be mounted in any attitude range
shown in Figure 5, from horizontal through to
vertical and upright (±2o), although it is most
commonly mounted horizontally.
CAUTION
Do not invert the pump.
Make sure that the pump's inlets and all components
fitted to the pump-inlets are clean and dust-free. If
the pump-inlets are not kept clean, the pump-down
time may be increased.
Use the 'O' rings supplied with the pump and use
four fixing bolts to connect the inlet-flange of the
pump to the vacuum system.
Figure 5 - Mounting attitude of the EXT200/200/30 split flow pump

Issue A Jun 03
PAGE
12
EXT200/200/30 Split Flow Compound Turbomolecular Pump
INSTALLATION
12
3.3.4 Backing connection
Use suitable vacuum tubing and connectors to
connect the NW flange of the backing-port to your
backing-pump. If necessary, use flexible pipe or
bellows to reduce the transmission of vibration
from the backing-pump to the EXT200/200/30 Split
Flow pump.
We recommend that you use a BOC Edwards RV
backing-pump. The minimum size of the backing-
pump required is given in Table 3. You may have to
use a larger backing-pump if you run the pump at a
high inlet pressure. The EXT200/200/30 is also
suitable for use with diaphragm backing-pumps
although the effect of higher backing pressure on the
pump's performance and cooling requirements
should be noted (refer to Table 1 and Section 3.6).
3.4 Vent options, vent valve connection
and control
To maintain the cleanliness of your vacuum system,
we recommend that, whenever you switch the
pump off, you vent the pump (or vacuum system)
when the speed of the EXT200/200/30 Split Flow
pump is between full rotational speed and 50% of full
rotational speed.
CAUTION
Do not use the EXT200/200/30 Split Flow pump
with a backing pressure below 5 x 10-4 mbar (5 x
10-2 Pa). Lower backing pressures will increase the
evaporation rate of the lubricating oil and so will
reduce the life of the bearings.
At and above 50%of full rotational speed, the rotor
spins fast enough to suppress any backstreaming of
hydrocarbon oil from your backing pump. Venting
may be accomplished by one of the following
methods:
• Use a TAV5 or TAV6 solenoid vent-valve
accessory (refer to Section 7) in place of the
manual vent-valve.
• Use a TAV5 or TAV6 solenoid vent-valve
connected to a convenient flange on your
vacuum system.
• Use an alternative valve connected to your
vacuum system.
However, if you manually vent the pump when it is
at full rotational speed and the rate of pressure rise
is too high, the pump life may be reduced. When
using the manual vent valve supplied, we
recommend that you either limit the vent or only
open the vent-valve after the EXT200/200/30 Split
Flow pump speed has fallen to 50%of full rotational
speed.
Do not vent from the backing line, this may lead to
contamination. If you vent into your vacuum system,
select a point upstream of the pump, to prevent oil
backstreaming from the backing line.
If you use the TAV5 or TAV6 vent-valve you can
control it using an EXC controller, or by other
methods. Table 5 gives an indication of the
appropriate orifice size to be fitted to the vent valve
for given vacuum system volumes in order that the
vent rate is kept within the limits given in Section 4.
Vacuum system
volume (l) Orifice diameter (mm)
< 20 < 1.0
< 10 < 0.7
< 5 < 0.5
< 2 < 0.35
Table 5 - Vent-restrictor orifice diameter (with atmospheric pressure at the inlet of the vent-valve)