BOC Edwards STP-A2203 Series User manual

MT-41E-002-A
BOC Edwards Japan Limited
Nov. 2003
Copyright 2003 BOC Edwards Japan Limited. All rights reserved. Printed in Japan.
STP-A2203 Series
Turbomolecular Pump
INSTRUCTION MANUAL
(Second Edition- a)
Read through the Safety Precautions and
each section of this Manual carefully before
using the STP pump.
Keep this Manual in a place where you can
q
uickl
y
access it at an
y
time.

STP-A2203 Series Instruction Manual
SAFETY PRECAUTIONS
The Safety Precautions in this Manual constitute guidelines to protect
operators, the STP pump and its peripheral equipment.
To avoid personal injury and prevent product and/or peripheral equipment
damage, observe the Safety Precautions as well as the general safety rules
(your country’s laws, regulations, safety standards and so on).
If the equipment is used in a manner not specified by BOC Edwards, the
protection provided by the equipment may be impaired.
The following symbols are used in this manual:
Death or Serious Personal Injury
Failure to follow the guidelines marked with this symbol may result in
death or serious personal injury.
Minor Personal Injury, Product and/or Peripheral equipment Damage
Failure to follow the guidelines marked with this symbol may result in
minor personal injury, product and/or peripheral equipment damage.
NOTICE
Items you must follow during operation and maintenance.
ATTENTION : refer to this manual.
Symbols as Marked on the Equipment
BOC Edwards Japan Limited (hereafter called BOC Edwards) cannot
perfectly anticipate circumstances of all of hazards or problems. The
scope of anticipation is limited to the precautions included in the
and specified in this manual.
1

STP-A2203 Series Instruction Manual
◇ The STP pump is provided with a high-speed rotor. Secure the STP
pump according to the specified method. Failure to do so may lead
to serious personal injury, product and/or peripheral equipment
damage if any abnormality/error occurs in the rotor.
◇ The STP pump operates at high temperatures while the baking heater
or the Temperature Management System (TMS) unit is in operation.
NEVER touch the STP pump and its peripheral equipment while the
baking heater or TMS unit is in operation.
Operators can burn hands.
◇ Execute the following to prevent an accident caused by the gas.
• Check the properties of the gas to be used, referring to the
Material Safety Data Sheet (MSDS) you obtain from the gas
supplier. (explosive・combustible・toxic・corrosive, etc) And, keep
MSDS and a safety advice of gas supplier.
• Warn of the danger of the gas with the warning label when the use
gas is hazardous chemical materials.
• Always execute gas purge in the pump with the inert gas, and then
exhaust residual gases thoroughly from the STP pump when
removing the STP pump from the vacuum equipment.
• Secure safety by wearing personal protective equipment when
using the gas which might influence damage health. In addition,
take appropriate measure for depending upon the properties of the
gas to be used.
◇ Exhaust residual gas thoroughly when disposing of the STP pump.
If the STP pump is used for any toxic or reactive gas, always clean
the STP pump and dispose of it as industrial waste in accordance
with guidelines given by the national and/or local government.
Residual gas in the STP pump may cause an accident which, for
certain gases, may involve serious injury or death.
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STP-A2203 Series Instruction Manual
◇ NEVER use any gas that is not specified as usable in this Manual.
The use of such gas may corrode the STP pump and damage it.
◇ A hazardous live voltage may exist at connector that marked .
DO NOT touch the terminal. Doing so may result in electric shock.
When operating connection/disconnection to connector, always
power OFF the STP pump (Switch the breaker "OFF").
◇ Always check the STP pump has stopped, then turn OFF the primary
power (switch the breaker "OFF") before proceeding to any of the
following operations. Failure to do so may cause the STP pump to
rotate accidentally, which may injure operators seriously or result in
electric shock. Moreover, do not remove the connecter while the
pump is rotating. The voltage might be output to connector
according to the rotational speed, and it causes the electric shock or
the failure.
• Connect or disconnect cables;
• Perform maintenance such as replacement of fuses;
• Perform inspections such as deposit and/or the air cooling fan; or
• Perform investigations into probable causes and action/measures
taken in the event of occurrence of a problem.
◇ Do not perform the insulation test (insulation resistance test and
withstand voltage test) to the STP control unit and STP pump.
When performing the insulation test to your equipment, turn "OFF"
the STP control unit. The varistor for the power supply line
protection is installed to the STP control unit. DO NOT perform the
insulation test with the varistor installed. Doing so may result in
product damage.
◇ When "emergency off" (EMO) circuit is installed in the vacuum
equipment, consider the following to stop the STP pump safely when
the EMO circuit operates.
• When the EMO circuit operates, atmosphere might be introduced
in the STP pump depending upon the backing pump. Unite the
exhaust gas system to prevent atmosphere from being introduced
into the STP pump when the EMO circuit operates. (example: shut
the valve) When atmosphere is introduced into the STP pump,
the touch down bearing may not operate normally.
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STP-A2203 Series Instruction Manual
◇ When removing or installing the pump or at maintenance and
inspection, follow the precautions below. Failure to do so might
hurt your back or cause injuries due to occurrence of an accident
such as fall.
• Use a crane or the like when lifting the heavy product of 18kg or
more.
• When lifting by hands for unavoidable reason, two or more people
must always conduct it.
• When lifting STP control unit with handles, support bottom of STP
control unit, do not have only handle.
◇ Install the STP control unit not only by fitting it with the front panel
fitting screws but also by supporting it from the bottom side.
Fitting the STP control unit with the screws only cannot sustain its
weight, and therefore resulting in product damage.
◇ Always use the STP pump and STP control unit with same model
name, which are specified on their own nameplate. If you plan to
use the units having different model names, an error massage is
indicated and they may not be used. In the latter case, contact our
Service office. If you plan to use the units having the same model
name but different serial numbers, an error message is indicated
when they are used without tuning. And, the tuning is necessary
when the length of the STP connection cable is changed. They may
not function normally when they are used without tuning. Once
tuning is completed, re-tuning is not required unless the
configuration (the STP pump serial number, the STP control unit
serial number, and the STP connection cable length) is changed.
◇ Use the STP connection cable that BOC Edwards has specified.
The use of different cables may result in product damage.
◇ Connect the cables securely. NEVER bend nor place heavy objects
on the cable. Doing so may result in electric shock or product
damage.
◇ NEVER remove the splinter shield from the STP pump. Doing so
may result in product damage.
◇ DO NOT put foreign objects into the STP pump. Doing so may
result in product damage.
◇ Always use the power voltage specified on the nameplate for the
primary power voltage of the STP control unit. Wire the power cable
securely. Incorrect wiring may result in electric shock or product
damage.
◇ The wipes used for clean the flange of the pump might become
hazardous waste depending upon the solvent (alcohol). Dispose of
the contaminated wipes appropriately according to the regulations of
each national and/or local government.
4

STP-A2203 Series Instruction Manual
◇ NEVER turn OFF the primary power (DO NOT switch the breaker
"OFF") while the STP pump is rotating. Doing so may result in
product damage.
◇ Perform investigations into probable causes and remove them before
restarting the STP pump in the event of the occurrence of a problem.
The use of the abnormal STP pump may result in product damage.
◇ DO NOT move the STP pump and the STP control unit while the STP
pump is in operation. Doing so may result in product damage.
5

STP-A2203 Series Instruction Manual
INTRODUCTION
Thank you very much for purchasing BOC Edwards’ turbomolecular pump.
The turbomolecular pump is designed to be installed in the vacuum equipment to
exhaust gases from it.
This manual covers all items necessary to ensure safe installation, operation and
maintenance of the following series of the STP-A2203 turbomolecular pump:
Model Name Specification
•STP-A2203C High-throughput type, chemical specific *1
•STP-A2203CV High-throughput type, chemical specific,
TMS unit*2 attached
For the specifications of other models of the STP-A2203 pump series, contact
BOC Edwards.
The above STP-A2203 pump series is collectively referred to as the "STP pump."
*1: Chemical specific: STP pump with anti-corrosive treatment
(responding to chlorine, fluorine or other system gases)
*2: TMS: Temperature Management System
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STP-A2203 Series Instruction Manual
APPLIED STANDARDS
The STP pump conforms to the following directives and standards:
◇ Applied Directives
・ EC Machinery Directive
・ EC Electromagnetic Compatibility Directive
・ EC Low Voltage Directive
◇ Applied Standards
・ EN1012-2
・ EN61010-1
・ EN55011 (class A)
・ EN61000-6-2
◇ Applied Standards (Only a some model)*1
・ UL3101-1, 1993 (Electrical Equipment for Laboratory Use; Part 1 : General
Requirements)
PRECAUTIONS
1) No part of this manual may be reproduced in any form by any means without
prior written permission from BOC Edwards.
2) BOC Edwards pursues a policy of continuing improvement in design and
performance of this product. The right is, therefore, reserved to vary
specifications and design without notice. Understand that the product you
purchased and its contents including specifications described in this manual
may differ.
REQUEST
If you find inaccuracies or errors in this manual, advise distributor or the nearest
Service office.
*1 : Contact BOC Edwards about recognized model.
7

STP-A2203 Series Instruction Manual
LIMITED WARRANTY
This WARRANTY applies to the customer to whom BOC Edwards has delivered
this product.
1. WARRANTY PERIOD:
BOC Edwards warrants this product against defects for a period of two (2)
years from the date of delivery or during the period specified in the
agreement made by and between the customer and BOC Edwards.
2. ITEM WARRANTED:
1) This warranty applies only to the product delivered from BOC Edwards
to the customer.
2) If any defect is found during this period, BOC Edwards will, at its option,
repair or recondition the product free of charge. The costs for repair or
replacement of the product after the warranty period has passed will be
at your own charge.
3. DISCLAIMER:
BOC Edwards makes no warranty with respect to any damage occurred
due to any of the following during the warranty period:
1) Handling, operation or maintenance other than that specified herein;
2) Failure to follow any of the warnings or cautions enumerated under
or ;
3) Installation, operation or maintenance using parts which are not
specified by BOC Edwards;
4) Maintenance personnel other than those authorized by BOC
Edwards or Service office have disassembled, reconditioned, or
tampered the product;
5) Defect resulting from the not-specified use of the product.
6) When the product is used under special conditions without
obtaining the written consent of BOC Edwards (Particular gases,
strong magnetic field and the radiation are added to the product.);
7) Defect resulting from deposit;
8) Water cooling system defect resulting from water quality used;
9) Defect resulting from the installation of the product (Exclude the
installation by authorized personnel.)
10) Deterioration in the external because of use (Discoloration,
scratches and so forth)
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STP-A2203 Series Instruction Manual
9
11) Product damage occurred during transport or other factors not
attributable to BOC Edwards;
12) Product breakage or damage due to natural disasters, fire or other
external factors;
13) Deterioration in the basic performance due to the use of the product
beyond limits of the use;
14) Any direct, incidental or consequential damage resulting from the
use of the product;
15) When continuously operated without overhaul after the WARNING
indication ("WARNING" message) on the LCD display;
16) Overhaul and replacement of maintenance parts;
4. SPARE PARTS: ●Fuse and air cooling fan for control unit
●Touch down bearing
●Heater

STP-A2203 Series Instruction Manual
TABLE OF CONTENTS
SAFETY PRECAUTION
INTRODUCTION
PRECAUTIONS
REQUEST
LIMITED WARRANTY
1 Precautions for Safe Operation of the STP Pump.............................................. 1-1
1.1 Usable Gases...................................................................................................................... 1-1
1.2 Maintenance and Inspection Precautions........................................................................... 1-1
1.3 Labels.................................................................................................................................. 1-1
2 Operation Principle of the STP Pump................................................................. 2-1
3 Unpacking .......................................................................................................... 3-1
3.1 Unpacking the STP Pump and the STP Control Unit ......................................................... 3-1
3.2 Accessories......................................................................................................................... 3-2
4 Installation of the STP Pump.............................................................................. 4-1
4.1 Name and Function of Each Part........................................................................................ 4-1
4.2 Precautions Before Installation ........................................................................................... 4-3
4.2.1 Operating Environment .......................................................................................... 4-3
4.2.2 Installation Area ..................................................................................................... 4-4
4.2.3 Bench .....................................................................................................................4-4
4.3 How to Install the STP Pump .............................................................................................. 4-6
4.3.1 Cleaning the Seal................................................................................................... 4-7
4.3.2 STP Pump Installation Positions............................................................................ 4-8
4.3.3 How to Secure the STP Pump ............................................................................... 4-9
4.3.4 Vacuum Piping ..................................................................................................... 4-13
4.3.5 Connecting the Purge Port................................................................................... 4-15
4.3.6 Connecting the Cooling Water Valve (For use with TMS unit only) .................... 4-16
5 Gas Suction, Cooling and Baking the STP Pump .............................................. 5-1
5.1 Gas Suction......................................................................................................................... 5-1
5.1.1 How to Introduce a Purge Gas............................................................................... 5-1
5.2 Cooling the STP Pump........................................................................................................5-2
5.2.1 Water Cooling Method ........................................................................................... 5-2
5.3 Baking the STP Pump.........................................................................................................5-3
5.3.1 Attaching a Baking Heater ..................................................................................... 5-3
6 Installation of the STP Control Unit .................................................................... 6-1
6.1 Name and Function of Each Part........................................................................................ 6-1
6.1.1 Front Panel............................................................................................................. 6-1
6.1.2 Rear Panel ............................................................................................................. 6-4
6.2 Precautions Before Installation ........................................................................................... 6-5
6.2.1 Operating Environment .......................................................................................... 6-5
6.2.2 Insulation Test........................................................................................................ 6-5
6.2.3 Installation Area ..................................................................................................... 6-6
6.3 Attaching the STP Control Unit to a Rack........................................................................... 6-7
6.4 Cable Connection................................................................................................................ 6-8
6.4.1 Name and Dimensions of Each Cable................................................................... 6-8
6.4.2 How to Connect the Cables ................................................................................... 6-9
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STP-A2203 Series Instruction Manual
6.5 Connecting to Semiconductor Equipment ........................................................................ 6-11
6.5.1 Connecting to Power............................................................................................ 6-11
6.5.2 Emergency Off Circuit (EMO Circuit)................................................................... 6-11
7 How to Start/Stop the STP Pump....................................................................... 7-1
7.1 Before Starting .................................................................................................................... 7-1
7.2 Start Procedures ................................................................................................................. 7-2
7.3 Stop Procedures ................................................................................................................. 7-2
7.4 Manual Operation................................................................................................................ 7-3
7.4.1 Powering ON.......................................................................................................... 7-3
7.4.2 Starting the STP Pump .......................................................................................... 7-3
7.4.3 Stopping the STP Pump ........................................................................................ 7-4
7.4.4 Starting the STP Pump after Stopping................................................................... 7-4
7.4.5 Powering OFF ........................................................................................................ 7-4
7.4.6 Starting the STP Pump after a Safety Function Operates..................................... 7-4
7.5 Remote Operation............................................................................................................... 7-5
7.5.1 Powering ON.......................................................................................................... 7-5
7.5.2 Starting/Stopping the STP Pump ........................................................................... 7-5
7.5.3 Starting the STP Pump after Stopping................................................................... 7-6
7.5.4 Powering OFF ........................................................................................................ 7-6
7.5.5 Starting the STP Pump after a Safety Function Operates..................................... 7-6
7.6 Operating the TMS Unit (For use with the TMS unit only) .................................................. 7-7
7.6.1 Starting/Stoping...................................................................................................... 7-7
7.6.2 Temperature Control.............................................................................................. 7-7
8 Remote Input/Output Signal Connector.............................................................. 8-1
8.1 Input Signal Pins ................................................................................................................. 8-1
8.2 Output Signal Pins .............................................................................................................. 8-4
9 Adjustment Methods .......................................................................................... 9-1
9.1 Tuning ................................................................................................................................. 9-1
9.1.1 Tuning Method ....................................................................................................... 9-1
9.1.2 Each of data after tuning........................................................................................ 9-2
9.2 Confirmation Mode.............................................................................................................. 9-4
9.3 Parameter Set Mode ........................................................................................................... 9-6
10 Safety Functions .............................................................................................. 10-1
10.1 Power Failure .................................................................................................................... 10-1
10.2 Abnormal State of Magnetic Bearing ................................................................................ 10-3
10.3 Excessive Vibration........................................................................................................... 10-3
10.4 Motor Driver Overload....................................................................................................... 10-3
10.5 Overheating Inside the STP Pump ................................................................................... 10-3
10.6 Overheating Inside the STP Control Unit.......................................................................... 10-4
10.7 Overspeed......................................................................................................................... 10-4
10.8 Abnormality/Error in the TMS Unit (for Use with the TMS Unit) ....................................... 10-4
11 Troubleshooting, Maintenance, and Inspection................................................ 11-1
11.1 Troubleshooting Immediately after an Abnormality/Error Occurs..................................... 11-1
11.1.1 Troubleshooting Power Failure ............................................................................ 11-1
11.1.2 Troubleshooting Other Abnormality/Error ............................................................ 11-1
11.2 When Error Message is Displayed on LCD ...................................................................... 11-2
11.2.1 Error Messages.................................................................................................... 11-2
11.3 Other Abnormalities .......................................................................................................... 11-8
11.3.1 Abnormalities When Powering ON ...................................................................... 11-8
11.3.2 Abnormalities When Performing the STP Pump Start Operation ........................ 11-8
11.3.3 Other Abnormalities ............................................................................................. 11-9
11.4 "WARNING" Message Display Function......................................................................... 11-10
11.4.1 First Damage Limit ............................................................................................. 11-10
11.4.2 Second Damage Limit........................................................................................ 11-11
11.4.3 CAUTION X_H, Y_H, X_B, Y_B, Z .................................................................... 11-11
11.5 "ERROR RECORD" Message Display Function ............................................................ 11-11
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STP-A2203 Series Instruction Manual
11.6 Maintenance and Inspection ........................................................................................... 11-12
11.6.1 Cleaning and Decontamination.......................................................................... 11-13
11.6.2 Inspecting the Deposit ....................................................................................... 11-14
11.6.3 Overhaul............................................................................................................. 11-15
11.6.4 Transporting for Repair or Overhaul .................................................................. 11-16
12 Storage and Disposal....................................................................................... 12-1
12.1 Storage of the STP Pump ................................................................................................. 12-1
12.2 Storage of the STP Control Unit ....................................................................................... 12-1
12.3 Disposal ............................................................................................................................ 12-2
13 Specifications ................................................................................................... 13-1
13.1 Specifications for the STP Pump ...................................................................................... 13-1
13.2 Specifications for the STP Control Unit............................................................................. 13-5
UNIT CONVERSION TABLE
ANNEX
MALFUNCTION INFORMATION
STP Series / Global Service Network
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STP-A2203 Series Instruction Manual
TABLES
Table 3.1 Accessories ................................................................................................................... 3-2
Table 3.2 Optional Accessories .................................................................................................... 3-2
Table 4.1 Tightening torque of bolt ................................................................................................. 4-9
Table 4.2 Maximum Torque predicted and Recommended securing bolt for inlet port flange..... 4-10
Table 4.3 Number of Claw Clamps by Size of Flange.................................................................. 4-11
Table 6.1 Connecting the Power Cable........................................................................................ 6-10
Table 7.1 Starting/Stopping the STP Pump during Remote Operation (REMOTE X7) ................ 7-5
Table 7.2 Reset Operation during Remote Operation (REMOTE X7) .......................................... 7-6
Table 8.1 REMOTE X7 Input Signal Pins ....................................................................................... 8-2
Table 8.2 REMOTE X7 Output Signal Pins .................................................................................... 8-4
Table 8.3 Rated Contacts for Relays CR1 to CR8 ......................................................................... 8-7
Table 9.1 Data List.......................................................................................................................... 9-2
Table 10.1 States of Lamps and REMOTE Output Signals at a Power Failure ........................... 10-2
Table 10.2 Operations of the STP Pump after a Power Recovery ............................................... 10-2
Table 10.3 Safety Functions ......................................................................................................... 10-6
Table 10.4 Safety Functions (When the TMS Unit is Used) ......................................................... 10-8
Table 11.1 Error Messages ............................................................................................................ 11-3
Table 11.2 Troubleshooting after Powering ON ............................................................................. 11-8
Table 11.3 Troubleshooting When Performing the STP Pump Start Operation............................. 11-8
Table 11.4 Troubleshooting While the STP Pump Is Rotating ....................................................... 11-9
Table 11.5 Cleaning and Decontamination .................................................................................. 11-13
Table 13.1 Specifications for the STP Pump .................................................................................. 13-1
Table 13.2 Specifications for the STP Control Unit ........................................................................ 13-5
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STP-A2203 Series Instruction Manual
14
FIGURES
Figure 2.1 Cross Sectional View of the STP Pump ....................................................................... 2-2
Figure 3.1 Example of Lifting the STP Pump ................................................................................. 3-2
Figure 4.1 Configuration of the STP Pump ...................................................................................... 4-2
Figure 4.2 Installation of the STP Pump to the Vacuum Equipment ............................................... 4-6
Figure 4.3 STP Pump Installation Positions .................................................................................... 4-8
Figure 4.4 Positions of the Outlet Port on the Horizontally or Slanted Installed STP Pump ........... 4-8
Figure 4.5 Example of securing the STP pump (When securing the inlet port with bolts).......... 4-10
Figure 4.6 Shape of Reduced Diameter Shank Bolts.................................................................... 4-11
Figure 4.7 Example of securing the STP pump
(When securing the inlet port flange with claw clamps) ............................................... 4-12
Figure 4.8 Example of securing the STP pump
(When installing the damper in the inlet port flange) .................................................... 4-12
Figure 4.9 Connecting the Purge Port ........................................................................................... 4-15
Figure 4.10 External Dimensions of Cooling Water Valve............................................................... 4-17
Figure 4.11 Piping of Cooling Water Valve...................................................................................... 4-18
Figure 5.1 Attaching Positions of the Cooling Unit and Baking Heater ......................................... 5-4
Figure 6.1 STP Control Unit Front Panel .........................................................................................6-3
Figure 6.2 STP Control Unit Rear Panel..........................................................................................6-4
Figure 6.3 Peripheral Space of the STP Control Unit...................................................................... 6-6
Figure 6.4 Example of Securing the STP Control Unit .................................................................... 6-7
Figure 6.5 External Dimensions of Each Cable ............................................................................... 6-8
Figure 7.1 STP Pump Operation Procedures ................................................................................ 7-8
Figure 8.1 REMOTE X7 Input Signal Pins....................................................................................... 8-3
Figure 8.2 REMOTE X7 Output Signal Pins .................................................................................... 8-6
Figure 9.1 Tuning Procedures ......................................................................................................... 9-3
Figure 9.2 Confirmation Mode Operation Method ........................................................................... 9-5
Figure 9.3 Parameter Setting Method.............................................................................................. 9-7
Figure 9.4 Remote Mode Setting Method........................................................................................ 9-8
Figure 13.1 External Appearance of the STP Pump........................................................................ 13-2
Figure 13.2 TMS Unit Assembly Drawing........................................................................................ 13-3
Figure 13.3 Label Affixing Positions for the STP Pump................................................................... 13-4
Figure 13.4 External Appearance of the STP Control Unit.............................................................. 13-6
Figure 13.5 Label Affixing Positions for the STP Control Unit ......................................................... 13-7

STP-A2203 Series Instruction Manual
1 Precautions for Safe Operation of the STP Pump
Installation
1.1 Usable Gases
The STP series models are chemical specific pumps: chlorine or fluorine system
gases can be used. When you use gases including alkaline metals, but excluding
Li, gases including Ga, Hg, In, or Sn, or HBr, contact BOC Edwards.
◇ To prevent an accident, confirm the characteristics of gases to be
used, referring to the Material Safety Data Sheet (MSDS) you obtain
from the gas supplier.
And, keep MSDS and a safety advice of gas supplier.
◇ Introduce a dry N2gas (purge gas) to protect the inside of the STP
pump when using reactive or corrosive. The use of reactive or
corrosive gas may result in product damage.
◇ Cool the STP pump to prevent the STP pump from overheating when
pumping gases.
1.2 Maintenance and Inspection Precautions
Perform any maintenance or inspection of the STP pump and the STP control
unit, following Section 11, "Troubleshooting, Maintenance and Inspection."
1.3 Labels
The following labels are affixed to the STP pump and STP control unit.
Read the contents of the labels before operation. For the positions of the labels,
see Section 13, "Label Affixing Position."
1) Caution Label
This label describes precautions for operating the STP pump and STP
control unit.
Follow these precautions.
◇必ず指定の型式のケーブ
ルを使用してください。
◇Use only designated type
of cables.
注意 CAUTION
!!
1-1

STP-A2203 Series Instruction Manual
Installation
2) Heavy Product Caution Label
This label is affixed to the product with a weight of 18 kg or more.
Follow the precautions of Section 2, "Unpacking" so as not to cause any
accident during handling.
重量物
ｋｇ
取扱注意
Heavy product
ｋｇ
Handle with
caution.
注意 CAUTION
!
!
3) STP Pump Installation Warning Label
This label describes installation of the STP pump.
Install the STP pump according to the precautions of Section 4, "Installation
of the STP Pump."
ポンプは取扱説明書の指示
に従い確実に固定してくだ
さい。
Install pump securely
according to instruction
manual.
警告
!
WARNING
!
4) STP Control Unit Safety Instruction Label
This label describes instructions before operating the STP control unit.
安全上の指示事項 SAFETY INSTRUCTIONS
使用前に取扱説明書を
お読みください。
Read instruction manual
before operation.
1-2

STP-A2203 Series Instruction Manual
Installation
5) Connector Caution Label
◇ This label describes lock of the connector.
◇ This label instructs operators to prevent the connectors from being
disconnected while the STP pump is in operation.
◇コネクタは確実に
ロックしてくださ
い。
◇ブレーカＯＮの時
はコネクタを外さ
ないでください。
◇Lock connector
secureiy.
◇Do not remove
connector while
breaker is ON.
注意
!CAUTION
!
6) Rotational Direction Instruction Label
This label describes the rotational direction of the STP pump.
The STP pump rotates in this direction.
ROTATION
7) High Voltage Device Caution Label
The STP control unit is equipped with a high voltage device. This label
warns operators to pay attention to the high voltage device.
8) Voltage Rating Label
This label describes the rated voltage of the STP control unit.
Use voltage specified in this label.
200~240V
200V specification
1-3

STP-A2203 Series Instruction Manual
1-4
Installation
9) Hot Surface Warning Label
This label instructs operators so as not to touch the hot surface of the STP
pump.
The use of the TMS unit may lead to a considerable rise in temperatures
outside the STP pump.
This label warns operators so as not to burn hands.
(only when using the TMS unit)
警告
高温部
やけどします。
触らないでく
ださい。
WARNING
Hot surface.
Can burn hands.
Do not touch.
!!

STP-A2203 Series Instruction Manual
2 Operation Principle of the STP Pump
Installation
The STP series pump is a series of a magnetically levitated turbomolecular
pumps, featuring the following:
• Oil free
• Low vibration
• High reliability
The STP pump is configured so that rotor blade (1) and stator blade (2) are
aligned alternately in the axial direction. Gas molecules are pumped from the
inlet port to the outlet port by the high speed rotation of the rotor.
The STP pump is configured with a screw channel pump and turbine blade
together in the lower side of rotor blade (1) for high-throughput even at a low
vacuum range (a few hundred Pa (a few Torr)).
Rotor blade (1) is supported by the magnetic bearing without mechanical contact.
Therefore, the STP pump requires no lubrication oil unlike conventional
turbomolecular pumps using ball bearings.
The magnetic bearing consists of 5 pairs of active magnetic bearings. The rotor
is supported in the radial direction by 4 pairs of radial direction active magnetic
bearings that consist of radial sensor (3) and radial electromagnet (4). A pair of
axial direction active magnetic bearings consists of axial sensor (5) and axial
electromagnet (6) to support the rotor in the axial direction. Because the rotor
is supported without mechanical contact, it can rotate at low vibration.
There is less heat generated from magnetic bearings because there is no friction.
Therefore the STP pump requires no cooling. However, the STP pump requires
water or air cooling during baking and gas pumping. Taking into consideration
a breakage of magnetic bearings, touch down bearings (7) and (8) coated with
solid lubrication have been installed. They do not contact with the rotor during
the rated operation.
A radial sensor, an axial sensor, a rotation speed sensor and a temperature
sensor always monitor the magnetic bearing as well as the rotor. If an
abnormality/error occurs, the rotor will stop.
2-1