BOC Edwards iH Series User manual

A533-50-880
Issue D
Manor Royal, Crawley, West Sussex, RH10 9LW, K
Telephone: [phone] Fax: [phone]
http://www.bocedwards.com
iH Dry Pumping Systems
Instruction Manual

Declaration
ofConform
ity
We, BOCEdwards,
ManorRoyal,
Crawley,
West Sussex RH10
2LW.UK
declareunderoursoleresponsibilitythatthe
product(s)
iHDryPumping
Systemswith
thefollowingcomponents:
iH Dry Pumping
Systems
460V,
60H2,3-phase
200/208V,
5Ol6OHz,3-phase
380/415V,
50H2,
3-phase
230V,60H2,3-phase
iHFDry PumpingSystems
460V,60H2,3-phase
200/208V,5Ol60H2,
3-phase
380/415V,50H2,3-phase
230V,
60H2,3-phase
iH80 iH600 iH't000
4533-s0-908 A533-51-908 A533-52-908
As33-s0-94s A533-51-945 A533-52-945
As33-s0-946 A533-51-946 A533-52-946
A533-50-957A533-51-957A533-52-957
iH80F iH600F iH1000F
A533-57-908 A533-58-908 A533-59-908
A533-57-945 A533-58-945 4533-59-945
A533-57-946 A533-58-946 A533-59-946
As33-s7-9s7 A533-58-957 As33-s9-957
A505-34-000
A505-35-000
A505-39-000
A505-40-000
A505-53-000
A505-56-000
iH AlternativeNitrogenandCooling-WaterConnectionKits
iH InterfaceModuleFittingKit
iH EnclosureExtractionFan(ForiH80andiH600
Systemsonly)
iH/iLBoosterPumpPressureControlKit
iH/iL InterstagePort ConnectionKit
iH/iLLightdutyExhaustCheckValve
to whichthis declarationrelatesisin conformitywith the followingstandard(s)
or other normativedocument(s):
EN60204-1:1997
EN61326:1997
(lndustrial
location
Class
A Emissions)
ENl012-2:1996
sEMrs2-93A
EN13463-1:2001
followingtheprovisions of
73t023tEEC
89/336/EEC
94t9tEC
98t37tEC
ElectricalSafety;Machines
ElectricalEquipmentfor Measurement,ControlandLaboratory
Use
- EMC
Requirements.
CompressorsandVacuumPumps
- SafetyRequirements,
Part2:Vacuum Pumps.
SafetyGuidelinesfor SemiconductorManufacturingEquipment.
Non ElectricalEquipmentfor PotentiallyExplosiveAtmospheres.
LowVoltageDirective.
ElectromagneticCompatibilityDirective.
Equipment
for usein PotentiallyExplosiveAtmospheres(ATEX Directive)
(Category
3GD)IntemalAtmospheres Only.
MachinerySafetyDirective.
5H"^
DrJ. D. Wotson,TechnicolDirector
VocuumEquipment
ond ExhaustMonogementProdua Divisions
@^n.
DoteandPloce
This
produa
hosbeenmanufacturedundero quolity systemregisteredto tSO9001
(Il
o
@
N
N
N
^&% BOC EDWARDS

A533-50-880 Issue D
Setup Password
iH Dry Pumpin Systems - Setup Password
The setup password for this equipment is preset as follows:
SETUP PASSWORD: 202
You can remove this sheet from the instruction manual and retain it in a safe place to prevent
unauthorised access to the setup menus in the iH system.

P601-00-550
Issue A
Amendment to
A533-40-880
A533-50-880
A533-81-880
iH Dry Vacuum Pumping system
1. Scope of Amendment
This amendment corrects the information given in the iH instruction
manuals listed above.
2. Correction
The low warning should read 31.8 and not 38 as currently stated in the
following places:
•A533-40-880, Pages 2 – 17 and Tables 2 – 6.
•A533-50-880, Pages 2 – 18 and Tables 2 – 6.
•A533-81-880, Pages 2 – 14 and Tables 2 – 6.

CONTENTS
Section Title Pa e
1 INTRODUCTION 1-1
1.1 Scope and definitions 1-1
1.2 ATEX directive implications 1-3
1.3 The iH system 1-4
1.3.1 iH-F variants 1-4
1.4 Safety 1-5
1.5 The HCDP dry pump 1-5
1.6 The HCDP as system 1-5
1.7 The HCMB mechanical booster pump (iH600/iH1000 only) 1-6
1.8 Temperature control system 1-8
1.8.1 HCDP pump temperature control system 1-8
1.8.2 HCMB pump temperature control system (iH600/iH1000 only) 1-10
1.9 Exhaust system 1-10
1.10 Electrical system 1-11
1.10.1 Introduction 1-11
1.10.2 Electrics box 1-11
1.10.3 Electronics module 1-16
1.10.4 Gas module 1-16
1.11 Controls and indicators 1-18
1.12 Control functions 1-20
1.12.1 Priority of control 1-20
1.12.2 Setpoints, warnin and alarm conditions 1-21
1.12.3 Safety sensors 1-22
1.13 Pump display terminal 1-22
1.14 Drip tray 1-25
1.15 Seismic brackets 1-25
1.16 Labels 1-25
1.17 Exhaust enclosure 1-25
1.18 iH Disconnect box (accessory) 1-26
1.18.1 Start control 1-30
1.18.2 Emer ency off control 1-30
1.18.3 Brownout protection 1-30
1.18.4 Circuit protection 1-30
1.19 iH Photohelic switch/ au e (accessory) 1-30
1.20 Accessories 1-30
2 TECHNICAL DATA 2-1
2.1 General 2-1
2.2 Performance 2-1
2.3 Temperature control system 2-1
2.4 Coolin -water supply 2-7
2.5 Lubrication 2-14
2.5.1 HCDP pump 2-14
2.5.2 HCMB pump (iH600/iH1000 only) 2-14
iH Dry Pumping Systems i
dcs/0200/0704

Section Title Pa e
2.6 Electrical data 2-14
2.7 Gas system 2-15
2.8 Materials in contact with process ases 2-16
2.9 Fire safety 2-16
2.10 Resource conservation 2-17
2.11 Default setpoints 2-17
2.12 Connections 2-18
2.13 Tracer as analysis 2-19
2.14 Disconnect box (accessory) 2-20
2.14.1 General 2-20
2.14.2 Operatin conditions 2-20
2.14.3 Electrical data 2-20
2.15 Item numbers 2-20
3 INSTALLATION 3-1
3.1 Safety 3-1
3.2 Installation checklist 3-2
3.3 Unpack and inspect 3-3
3.4 Remove the enclosure panels 3-5
3.5 Reconfi ure the nitro en and/or water connections (if required) 3-7
3.6 Locate the iH system 3-7
3.7 Check the pump oil-level(s) 3-9
3.7.1 iH80 systems 3-9
3.7.2 iH600/iH1000 systems 3-11
3.8 Install or replace the pump display terminal and optional accessories
(if necessary) 3-11
3.8.1 Install the pump display terminal 3-11
3.8.2 Install optional accessories 3-11
3.9 Connect the iH inlet to your vacuum system 3-12
3.10 Connect the iH exhaust outlet to your exhaust-extraction system 3-14
3.11 Connect to your factory extraction system (optional) 3-15
3.12 Connect the nitro en supply 3-16
3.13 Leak test the system 3-16
3.14 Install additional safety equipment (optional) 3-18
3.15 Connect to your emer ency stop circuit (optional) 3-20
3.16 Electrical supply and RF earth ( round) connections 3-22
3.16.1 Reconfi ure the iH system for your electrical supply
(if necessary) 3-22
3.16.2 Reconfi ure the pump(s) for your electrical supply (if necessary) 3-24
3.16.3 Connect the electrical supply to the iH system 3-26
3.16.4 Connect an additional RF earth (optional) 3-27
3.17 Refit the enclosure panels 3-28
3.18 Connect the coolin -water hoses 3-28
3.19 Adjust the intersta e pur e flow rates if necessary 3-29
3.20 Commission the iH system 3-29
3.20.1 Switch on an iH80/iH1000 system 3-29
ii iH Dry Pumping Systems

Section Title Pa e
3.20.2 Confi ure and switch on an iH600 system 3-30
3.21 Install the disconnect box (accessory) 3-32
3.21.1 Unpack and inspect 3-32
3.21.2 Mountin 3-33
3.21.3 Electrical installation 3-33
3.21.4 Main electrical supply 3-34
3.21.5 Cable connections 3-35
3.22 Install photohelic switch/ au e (accessory) 3-38
3.22.1 Unpack and inspect 3-38
3.22.2 Mountin 3-38
3.22.3 Pipin connections 3-38
3.22.4 Cable connections 3-40
4 PUMP DISPLAY TERMINAL MENUS AND DISPLAY FORMATS 4-1
4.1 Introduction 4-1
4.2 General operation 4-2
4.3 The CANCEL button 4-2
4.4 Display text and variable text 4-3
4.5 Wrap-around 4-4
4.6 Timeout 4-4
4.7 Menu structure 4-4
4.8 Example 4-4
5 OPERATION 5-1
5.1 Introduction 5-1
5.2 ATEX directive implications 5-2
5.2.1 Introduction 5-2
5.2.2 Flammable/pyrophoric materials 5-2
5.2.3 Gas pur es 5-3
5.3 Confi ure the system (optional) 5-3
5.4 Chan e the display format 5-4
5.4.1 Chan e the normal display 5-4
5.4.2 Chan e the display units 5-5
5.5 Take and release control 5-5
5.6 Start-up 5-6
5.7 Check the nitro en pressure and adjust if necessary 5-7
5.8 Monitor the status of the iH system 5-7
5.9 Warnin and alarm indications 5-8
5.10 Manual shut-down 5-9
5.11 Automatic shut-down 5-11
5.12 Emer ency stop 5-12
5.13 Restart the HCMB pump after automatic pump shut-down
(iH600/iH1000 only) 5-12
5.14 Restart the iH system after emer ency stop or automatic shut-down 5-13
5.15 Operation of iH system components 5-14
5.16 Operation of the load-lock pump 5-15
iH Dry Pumping Systems iii

Section Title Pa e
5.17 Disconnect box and photohelic switch/ au e (accessories) 5-15
5.17.1 Normal startup 5-15
5.17.2 Restart after fault 5-15
5.17.3 Shutdown 5-16
5.17.4 Local EMO 5-16
5.17.5 Remote EMO 5-16
5.17.6 Photohelic au e 5-16
5.17.7 Brownout 5-16
6 MAINTENANCE 6-1
6.1 Safety 6-1
6.2 Correct use of tube fittin s 6-2
6.2.1 Fit a tube fittin 6-2
6.2.2 Reconnect a tube fittin 6-4
6.3 Maintenance frequency 6-4
6.4 Inspect the connections, pipelines, cables and fittin s 6-4
6.5 Check the pur e as flow rates 6-5
6.6 Inspect and clean the exhaust-pipe, elbow and check-valve 6-5
6.6.1 Dismantle, clean and refit the exhaust-pipe and elbow 6-5
6.6.2 Clean and refit the check-valve (if fitted) 6-7
6.7 Check the HCMB pump oil-level (iH600/iH1000 only) 6-9
6.8 Check the HCDP pump oil-level 6-10
6.9 Chan e the HCDP pump oil 6-11
6.10 Chan e the HCMB pump oil (iH600/iH1000 only) 6-12
6.11 Zero the as module flow transducer 6-13
6.12 Adjust the pump display terminal display viewin an le 6-13
6.13 Replace a fuse 6-14
6.14 Replace the pump display terminal 6-14
6.15 Relocate the iH system for maintenance 6-15
6.16 Check for free rotation of the HCDP pump 6-16
6.17 Fault findin 6-17
6.17.1 Warnin and alarm messa e fault findin 6-17
6.17.2 Other fault findin 6-17
6.18 Disconnect box and photohelic switch/ au e (accessories) 6-19
6.18.1 Introduction 6-20
6.18.2 Fault findin 6-20
6.18.3 Fuse replacement 6-20
7 STORAGE AND DISPOSAL 7-1
7.1 Stora e 7-1
7.2 Disposal 7-1
7.3 Transportation 7-2
iv iH Dry Pumping Systems

Section Title Pa e
8 SERVICE, SPARES AND ACCESSORIES 8-1
8.1 Introduction 8-1
8.2 Service 8-1
8.3 Spares 8-1
8.4 Orderin accessories 8-2
8.4.1 Exhaust Temperature Sensor 8-2
8.4.2 Active Gau e Connection Kit 8-2
8.4.3 iH600 Pressure Control Kit 8-2
8.4.4 iH Enclosure Extraction Fan Kit 8-3
8.5 Other accessories 8-3
8.5.1 iTIM 8-3
8.5.2 iM Interface and Communications Modules 8-3
8.5.3 iH Sin le Pumpset Monitor and iH Fabworks 8-4
8.5.4 iH PC Interface Kits 8-4
8.5.5 iH Alternative Connections Kits 8-4
8.5.6 iH Alternative Exhaust Kit 8-4
8.5.7 iH Nitro en Flow Switch 8-4
8.5.8 iH Pump Display Module 8-5
8.5.9 iH Pump Display Module Extension Cables 8-5
8.5.10 iH Pump Display Terminal Extension Cables 8-5
8.5.11 iH Disconnect Box 8-5
8.5.12 iH Photohelic Switch/Gau e Kit 8-5
RETURN OF BOC EDWARDS EQUIPMENT
Illustrations
Fi ure Title Pa e
1-1 The iH system (iH1000 shown, with side panels removed) 1-7
1-2 Schematic dia ram of the HCDP pump as system 1-9
1-3 Schematic dia ram of the iH80/iH600 electrical systems 1-13
1-4 Schematic dia ram of the iH1000 electrical system 1-15
1-5 Services and electrical connections on the rear of the iH system 1-17
1-6 Electrical components (shown without enclosure for clarity) 1-19
1-7 Controls and indicators on the dashboard 1-20
1-8 Front panel of the pump display terminal 1-24
1-9 Disconnect box eneral arran ement 1-26
1-10 Label positions on HCDP and HCMB 1-27
1-11 Label positions on iH system enclosures 1-28
2-1 iH80 dimensions (mm) 2-3
2-2 iH600 dimensions (mm) 2-4
2-3 iH1000 dimensions (mm) 2-5
2-4 Services connections dimensions (mm) 2-6
iH Dry Pumping Systems v

Illustrations (continued)
Fi ure Title Pa e
2-5 Centres of mass dimensions (mm) and mass distribution 2-8
2-6 Typical pumpin speed and pump power curves for an iH80 2-9
2-7 Typical pumpin speed and pump power curves for an iH600 at 50Hz 2-10
2-8 Typical pumpin speed and pump power curves for an iH600 at 60Hz 2-11
2-9 Typical pumpin speed and pump power curves for an iH1000 at 50Hz 2-12
2-10 Typical pumpin speed and pump power curves for an iH1000 at 60Hz 2-13
3-1 Remove the iH system from the pallet 3-5
3-2 Liftin -bolt positions 3-6
3-3 Remove/refit the enclosure panels 3-8
3-4 HCDP headplate coolin -water manifold (as supplied) 3-10
3-5 System arran ement to reduce effective footprint (if required) 3-13
3-6 Fit the pump display terminal 3-17
3-7 Leak-test port positions 3-19
3-8 Reconfi ure the iH system for your electrical supply (iH80/iH600 only) 3-21
3-9 Reconfi ure the pump-motor terminal-boxes (iH80/iH600 only) 3-23
3-10 Connect the electrical supply cable to the connector matin -half 3-25
3-11 Disconnect box mountin hei ht requirements 3-33
3-12 Disconnect box electrical schematic 3-34
3-13 Disconnect box sub-panel eneral arran ement 3-36
3-14 Disconnect box cable connections 3-37
3-15 Photohelic spoolpiece 3-39
3-16 Photohelic au e pipin connections 3-40
4-1 Front panel of the pump display terminal 4-2
4-2 Menu lo ic 4-6
4-3 Switch on menu 4-7
4-4 Switch off menu 4-8
4-5 Normal menu 4-9
4-6 Status menu 4-10
4-7 Control menu 4-12
4-8 Setup menu 4-13
4-9 Run til crash menu 4-16
4-10 Units menu 4-17
4-11 Normal display menu 4-18
4-12 Service menu 4-19
4-13 Serial menu 4-21
4-14 Zero sensors menu 4-22
4-15 Gas valve control menu 4-23
4-16 Manual menu 4-24
4-17 View Status menu 4-27
4-18 Messa es menu 4-29
4-19 Warnin and alarm messa es menu 4-30
6-1 Fit a tube fittin 6-3
6-2 Reti hten a tube fittin 6-3
vi iH Dry Pumping Systems

Illustrations (continued)
Fi ure Title Pa e
6-3 Fit insulation jackets 6-7
6-4 Clean the exhaust check-valve 6-8
6-5 Try to turn the HCDP pump 6-18
6-6 System lockout/ta out procedures 6-19
Tables
Table Title Pa e
1-1 Safety sensors 1-22
2-1 Technical data 2-2
2-2 Full load current ratin s 2-15
2-3 Nitro en pur e flow rates: hi h as confi uration 2-16
2-4 Electrics box default setpoints 2-17
2-5 Electronics module default setpoints 2-17
2-6 Gas module default setpoints: hi h as confi uration 2-18
2-7 Test parameters 2-19
2-8 Test results 2-19
3-1 Installation checklist 3-2
3-2 Checklist of components 3-4
3-3 Pins in the iH tool interface module connector plu 3-20
3-4 Pins in the electrical supply connector 3-27
4-1 Menu structure 4-5
5-1 Confi uration store nominal as flows 5-4
5-2 Status menu sensor readin displays 5-10
6-1 Warnin messa es 6-21
6-2 Alarm messa es 6-26
6-3 Fault messa es 6-28
6-4 Fault parameters 6-29
6-5 Fault types 6-30
iH Dry Pumping Systemsvii

viii iH Dry Pumping System

1 INTRODUCTION
1.1 Scope and definitions
This manual provides installation, operation and maintenance instructions for the BOC
Edwards iH Dry Pumpin Systems. You must use the iH systems as specified in this manual.
Read this manual before you install and operate the iH system. Important safety information
is hi hli hted as WARNING and CAUTION instructions; you must obey these instructions.
The use of WARNINGS and CAUTIONS is defined below.
WARNING
Warnin s are iven where failure to observe the instruction could result in
injury or death to people.
CAUTION
Cautions are iven where failure to observe the instruction could result in dama e to the
equipment, associated equipment or process.
Throu hout this manual, pa e, fi ure and title numbers are in the form 'S-N', where 'S'
specifies the section and 'N' specifies the number of the pa e, fi ure or table in the section.
The units used throu hout this manual conform to the SI international system of units of
measurements. Also, throu hout this manual, wherever nitro en flow rates are specified, the
abbreviation 'slm' is used to mean 'standard l.min-1': this is a flow of 1 l.min-1 at an ambient
temperature of 0 oC and a pressure of 1013 mbar (1.013 x 105Pa).
NOTICE
The content of this manual may change from time to time without notice. BOC E war s accepts no
liability for any errors that may appear in this manual nor oes it make any expresse or implie
warranties regar ing the content. So far as is reasonably practicable BOC E war s has ensure that
its pro ucts have been esigne an constructe so as to be safe an without risks when properly
installe an use in accor ance with BOC E war s operating instructions. BOC E war s accepts no
liability for loss of profit, loss of market or any other in irect or consequential loss whatsoever.
Pro uct warranty an limit of liability are ealt with in BOC E war s stan ar terms an con itions
of sale or negotiate contract un er which this ocument is supplie .
iH Dry Pumping Systems 1-1

The followin symbols may appear on the iH system:
Material Safety Data Sheets for BOC supplied chemicals can be attained by contactin : UK
[phone]; France [phone]; Germany [phone], or; USA
(transportation emer ency) [phone] (other inquiries) [phone];.
1-2 iH Dry Pumping Systems
Warnin - risk of electric shock
Warnin - hot surfaces
Warnin - static sensitive devices
Warnin - heavy object
Warnin - movin parts
present
Warnin - use protective
equipment
Warnin - refer to manual
PE -Protective earth ( round) RF earth ( round)
Warnin - risk of catastrophic failure

1. ATEX directive implications
•This equipment is desi ned to meet the requirements of Group II Cate ory 3 equipment in
accordance with Directive 94/9/EC of the European Parliament and the Council of 23rd
March 1994 on the approximation of the laws of the Member States concernin equipment and
protective systems intended for use in potentially explosive atmospheres. (The ATEX
Directive).
The ATEX Cate ory 3 applies in respect of potential i nition sources internal to the
equipment. An ATEX Cate ory has not been assi ned in respect of potential i nition sources
on the outside of the equipment as the equipment has not been desi ned for use where there
is an external potentially explosive atmosphere.
There is no potential source of i nition within the pump durin normal operation but there
may be potential sources of i nition under conditions of predicted and rare malfunction as
defined in the Directive. Accordin ly, althou h the pump is desi ned to pump flammable
materials and mixtures, operatin procedures should ensure that under all normal and
reasonably predicted conditions, these materials and mixtures are not within explosive
limits. Cate ory 3 is considered appropriate for the avoidance of i nition in the case of a rare
malfunction which allows flammable materials or mixtures to pass throu h the pump while
within their explosive limits.
•When flammable or pyrophoric materials are present within the equipment you must:
•Not allow air to enter the equipment.
•Ensure that the system is leak ti ht.
•Use an inert as pur e (for example, a nitro en pur e) to dilute any flammable ases or
vapours enterin the pump inlet, and/or use an inert as pur e to reduce the
concentration of flammable ases or vapours in the pump and in the exhaust pipeline to
less than one quarter of the ases' published lower explosive limits (LEL).
•For further information, please contact BOC Edwards: refer to the Addresses pa e at the end of
this manual for details of your nearest BOC Edwards company.
iH Dry Pumping Systems 1-3

1.3 The iH system
The iH system operates at pressures between atmospheric and ultimate vacuum with no
lubricatin or sealin fluid in the pumpin chamber(s). This ensures a clean pumpin system
without back-mi ration of oil into the system bein evacuated.
The iH80 system has an HCDP80 dry pump; the iH600 system has an HCDP80 dry pump,
with an HCMB600 mechanical booster pump fitted to the inlet of the HCDP80 pump; the
iH1000 system has an HCDP80 dry pump, with an HCMB1000 mechanical booster pump
fitted to the inlet of the HCDP80 pump. The HCDP80 pump is referred to as the HCDP
pump and the HCMB600 and HCMB1000 pumps are referred to as the HCMB pumps
throu hout the remainder of this manual.
Both the HCDP and HCMB pumps have enclosed, water-cooled motors. The iH system is
therefore suitable for applications in clean environments where fan coolin of motors is
unacceptable.
The iH system has a as system which introduces pur e as into the HCDP pump. This as
system is suitable for use on harsh duty processes. If you use the iH system on li ht or
medium duty processes, you can use the economiser as mode to reduce the consumption of
pur e nitro en by the pumpin system.
You can manually control the iH system throu h the Pump Display Terminal: see
Section 1.13. Alternatively, you can use your process tool or other control equipment to
control the operation of the iH system throu h an Interface Module accessory (refer to
Section 8.5.3), or throu h an iM Communications Module accessory (see Section 8.5.2), or you
can use the iH Sin le Equipment Monitor accessory to control the operation of the iH system
(refer to Section 8.5.4). The remainder of this manual describes the use of the Pump Display
Terminal to operate the iH system: for use of another accessory to operate the iH system, refer
to the instruction manual supplied with the accessory.
1.3.1 iH-F variants
All iH-F variants include an innovative Breach Sensor that reduces the risk of hazardous as
leaks durin run 'til crash. The iH-F Breach Sensor alerts the user, via the Pump Display
Terminal (PDT) and Fabworks, if installed, with the words `Warnin 7801 - O Rin ’
indicatin that the pump requires attention. Please refer to table of warnin s in Section 6 for
further details.
WARNING
The iHF Breach Sensor is not a safety device.
Failure to use normal control measures in the event of a leak could result in
injury to people and dama e to equipment.
The components of the iH system are described in the followin sections.
1-4 iH Dry Pumping Systems

1.4 Safety
All of the components of the iH system are fitted inside an enclosure. Panels of the enclosure
should only be removed for access durin maintenance and should at no time be removed by
the operator. Potential hazards on the iH system include electricity, hot surfaces, process
chemicals, Fomblin oil and nitro en and water under pressure. Detailed safety information is
iven in Section 3.1 (Installation), Section 6.1 (Maintenance) and BOC Edwards publication
no. P300-20-000 ‘Vacuum pump and vacuum system safety’.
1.5 The HCDP dry pump
The HCDP pump is a five-sta e, positive displacement rotary pump in which pairs of
intermeshin rotors (of different profiles mounted on common shafts) are held in correct
phase relation by a pair of timin - ears. The timin - ears and the adjacent an ular contact
bearin s are oil lubricated.
1.6 The HCDP gas system
The HCDP pump has a as system which is suitable for use in harsh processes, such as ion
implanters, PECVD (Plasma Enhanced Chemical Vapour Deposition), LPCVD nitride,
LPCVD TEOS and Silicides. The as system is also suitable for use in li ht or medium duty
processes.
The as system can be preset to operate in any one of the followin four confi urations: low
as; medium as; medium as and exhaust; hi h as. As supplied, the as system is preset
for the hi h as confi uration. To chan e the as system confi uration, refer to Section 5.3.
The as system has supply pipelines and components (such as valves), a Gas Module with a
distribution manifold, as pur e controls and sensors, and pipelines which deliver pur e
nitro en to the pur e points on the HCDP pump.
The as system provides the followin pur e flows to the HCDP pump:
•Shaft-seals pur e: this pur e flow is on whenever the HCDP pump is on.
•2/3-intersta e pur e and 3/4-intersta e pur e: these pur e flows are either both on or both
off. The pur e flows can be switched on or off by use of the Pump Display Terminal or by your
own control equipment.
•Exhaust-pur e: this pur e flow is on whenever the HCDP pump is on and the as system is
either in the hi h as confi uration, or in the medium as and exhaust confi uration.
•Inlet-pur e: this pur e flow is only used in hi h as confi uration. The pur e flow can be
switched on or off by use of the Pump Display Terminal or by your own control equipment.
Refer to Fi ure 1-2 which shows a schematic dia ram of the iH as system.
The pur e flow pressure is controlled by a pressure re ulator (26). A mass flow transducer
(25) measures the total flow of pur e as to the pump pur e points. A check-valve (27)
prevents the flow of process ases back into your nitro en supply pipeline.
iH Dry Pumping Systems 1-5

The 3/4-intersta e pur e and 2/3-intersta e pur e flows are switched on and off by the
solenoid-valves (17 and 18). The inlet-pur e, shaft-seals pur e and exhaust-pur e flows are
switched on and off by the solenoid-valves (22, 19 and 24). The 2/3-intersta e and
3/4-intersta e pur es solenoid-valve (21) operates in conjunction with the inlet-pur e
solenoid-valve (22), to provide reduced intersta e pur e flow when inlet-pur e is switched
on.
Variable restrictors (12 to 16 and 20) limit the pur e flow rates.
A pressure transducer (23) monitors the pressure of the shaft-seals pur e flow, and another
pressure-transducer (9) monitors the pressure in the exhaust pipeline. The outputs of the
pressure transducers are used to display the shaft-seals pur e and exhaust pressures on the
Pump Display Terminal.
If there is a pressure rise in the exhaust pipeline, the outputs of the exhaust pressure
transducer (9) will brin up warnin and alarm messa es before causin the iH system to be
shut down via the relay interlock circuit.
The dashboard has three pressure status LEDs (Fi ure 1-7, items 3, 5 and 6). These LEDs
show whether the nitro en supply pressure is too hi h, too low or is in the acceptable ran e:
refer to Section 5.7.
1.7 The HCMB mechanical booster pump (iH600/iH1000 only)
The HCMB pump is a positive displacement roots vacuum pump. The pump mechanism is
driven directly by a three-phase electric motor. The HMCB is fitted with a pressure relief
valve which decreases the differential pressure between the inlet and outlet of the booster
durin inlet transients, thereby enhancin the robustness of the iH system. The HCMB1000
pump in the iH1000 system is driven throu h an electrical inverter, which increases the speed
of the motor to 6000 r.min-1.
The HCMB pump is backed by the HCDP pump:
•The HCMB600 pump in an iH600 system operates at inlet pressures of 5 mbar (5 x 102Pa) and
below; when you start the HCDP pump, the iH system delays the start of the HCMB pump for
a preset time, to allow the HCDP pump to reduce the pressure in the process system to below
the maximum inlet pressure for the HCMB pump.
•The HCMB pump in an iH1000 system operates between atmospheric pressure and ultimate
vacuum; when you start the HCDP pump, the HCMB pump is also started.
1-6 iH Dry Pumping Systems

iH Dry Pumping System 1-7
Fi ure 1-1 - The iH system (iH1000 shown, with side panels removed)
1. Inlet
2. HCMB oil filler-plug *
3. Inverter enclosure ✝
4. HCMB pump-motor *
5. HCMB oil-level sight-glass *
6. Gas Module
7. HCDP pump-motor
8. HCDP oil filler-plug
9. Levelling-foot
10. Castor
11. HCDP oil-level sight-glass
12. HCDP pump
20. Elbow
21. NW40 trapped ‘O’ ring
22. NW40 clamping ring
23. Elbow insulation jacket
24. Clamps insulation jacket
25. Exhaust pipe insulation
jacket
26. Exhaust enclosure
27. Drip tray
28. Seismic bracket
29. Electronics Module
13. Nitrogen pressure regulator
14. Pump Display Terminal
15. Emergency stop switch
16. HCMB pump *
17. Outlet
18. Check-valve
19. Exhaust-pipe
* iH600/iH1000 only
✝iH1000 onlyInlet

1.8 Temperature control system
1.8.1 HCDP pump temperature control system
The headplate and the fourth sta e of the HCDP pump have a direct coolin system in which
water flows around these parts of the pump. All other sta es of the pump are air-cooled by
natural convection and radiation.
The pump-motor is cooled by water which flows throu h a coolin jacket which surrounds
the motor. The coolin -water supply and return pipelines are connected to the iH system by
connectors at one end of the iH system (Fi ure 1-5, items 2 and 3).
The coolin -water manifolds on the pump distribute the coolin -water to the pump coolin
circuit and to the pump-motor coolin circuit (and to the HCMB pump-motor coolin circuit,
on an iH600, and iH1000 system). The manifold on the pump headplate also houses a control
plu and a blankin plu , which are used to confi ure the coolin water system for optimal
operatin temperature. (See Section 3.5)
A surface temperature sensor (Fi ure 1-6, item 11) is fitted to the pump-body to measure the
temperature of the pump-body. The output of the thermocouple is monitored by the iH
control system: see Section 1.10.3.
For safety reasons, a shut down thermistor is fitted to the pump headplate manifold block. The
thermistor is a solid state device, which has a resistance that chan es with temperature. The
thermistor is connected to the iH control system and is used to provide warnin of coolin
system failure. It is also connected to the relay interlock circuit and will cause the iH system to be
shut down if the temperature exceeds 60° C.
A motor - protection thermistor is fitted to the pump-motor. This thermistor is a solid-state
device which has an electrical resistance of less than 750 Wat normal pump-motor operational
temperature. If the pump-motor is too hot, the electrical resistance rises quickly to 4000 Wor
more. The thermistor is connected to the relay interlock circuit and will cause the system to be
shut down if the pump-motor is too hot.
A water flow-switch is fitted in the pump-motor water manifold. The output of the flow-switch
is monitored by the iH control system and provides an indication of low water flow throu h the
pump.
1-8 iH Dry Pumping Systems