Brooks Instrument SLAMf Series User manual
Installation & Operation Manual
SLAMf Series
Mass Flow Controllers & Meters
Installation Manual SLAMf Series
Brooks Instrument
Essential Instructions
Read before proceeding!
Brooks Instrument designs, manufactures and tests its products to meet many national and international standards. These products must
instructions must be adhered to and integrated into your safety program when installing, operating and maintaining Brooks Instrument
products.
• Read all instructions prior to installing, operating and servicing the product. If this instruction manual is not the correct manual, please
WARNING: Do not operate this instrument in excess of the specications listed in the Instruction and Operation Manual.
Failure to heed this warning can result in serious personal injury and / or damage to the equipment.
• Follow all warnings, cautions and instructions marked on and supplied with the product.
WARNING: Prior to installation ensure this instrument has the required approval ratings to meet local and national codes.
Failure to heed this warning can result in serious personal injury and/ or damage to the equipment.
national codes. Connect all products to the proper electrical and pressure sources.
• Please make sure that the process line pressure is removed prior to service. When replacement parts are required, ensure that
improper operation.
• Ensure that all equipment doors are closed and protective covers are in place to prevent electrical shock and personal injury, except
WARNING: For liquid ow devices, if the inlet and outlet valves adjacent to the devices are to be closed for any reason ,the
devices must be completely drained. Failure to do so may result in thermal expansion of the liquid that can rupture the device
and may cause personal injury.
European Pressure Equipment Directive (PED)
Equipment Directive (PED).
European Electromagnetic Compatibility (EMC)
Quality of the signal cable, cable glands and connectors:
you provide your own signal cable you should use a cable which is overall completely screened with a 100% shield.
“D” or “Circular” type connectors used should be shielded with a metal shield. If applicable, metal cable glands must be used providing cable screen
The shield should be terminated to an earth ground. Card Edge Connectors are standard non-metallic. The cables used must be screened with 100%
ESD (Electrostatic Discharge)
CAUTION: This instrument contains electronic components that are susceptible to damage by static electricity. Proper handling proce-
dures must be observed during the removal, installation or other handling of internal circuit boards or devices.
Handling Procedure:
1. Power to unit must be removed.
removed or adjusted.
installation. Removed boards must immediately be placed in protective container for transport, storage or return to factory.
Comments
-
destroy these devices. Damaged components, even though they appear to function properly, exhibit early failure.
Section 1 Introduction
................................................................................................................................................... 1
Purpose ................................................................................................................................................ 1
....................................................................................................................................... 1
Biotech Option ...................................................................................................................................... 5
.............................................................................................................. 5
Reference Conditions ...........................................................................................................................
.......................................................................................................................
Fast Response Performance................................................................................................................ 8
............................................................................................................................. 8
............................................................................................................................. 8
Communication Interfaces................................................................................................................... 10
...................................................................................................................... 10
.................................................................................................................... 11
DeviceNet Communications ................................................................................................................
...........................................
....................................................................................
Section 2 Installation
General................................................................................................................................................
Receipt of Equipment ..........................................................................................................................
.........................................................................................................
..................................................................................................................................
Transit Precautions..............................................................................................................................
.........................................................................................................................
Gas Connections .................................................................................................................................
In-Line Filter.........................................................................................................................................
........................................................................
..............................................
...............................................................................................................
......................................................
.............................................
Electrical Interface for Communications ..............................................................................................
...............................................................
Protective Earth Connections: .............................................................................................................
.............................................................................................
..............................................................................................
............................................................................................................................
Contents
Installation Manual SLAMf Series
Brooks Instrument
Section 3 Operation
Operating Procedure ..........................................................................................................................
Features ..............................................................................................................................................
............................................................................................................
Communications Features...................................................................................................................
.................................................................................
DeviceNet Communications Features .................................................................................................
......................................................................................................
.........................................................................
Alarms (Analog versions only).............................................................................................................
...................................................................
Diagnostic Alarms (Analog versions only) ..........................................................................................
General Alarms (Analog versions only) ...............................................................................................
.............................................................................................................
..................................................................................................................................
................................................................................................................................
............................................................................................................
.......................................................................................................................
Adaptive Control ..................................................................................................................................
.......................................................................................................................................
......................................................................................................................
Section 4 Maintenance & Troubleshooting
.....................................................................................................
Troubleshooting Analog or Digital .......................................................................................................
...................................................................................................................................
Cleaning Procedures ..........................................................................................................................
Calibration Procedure..........................................................................................................................
Warranty, Local Sales/Service Contact Information ...............................................................Back Cover
Contents
Installation Manual SLAMf Series
Brooks Instrument
Contents
Table
Number
........................................................................................
...............................................................................................................
Biotech ..........................................................................................
........................................................................................... 5
..........................................................................................................
............................................................................................................
..........................................................................................................................
Figure
Number
1-1 General Wiring ............................................................................................................................ 8
...........................................................................
Change........................................................................................................................................
.................................................................. 10
............................................................................ 11
........................................................................
.............................................................................
1-8 Layout under the Top Cover ......................................................................................................
.....................................................................
.....................................................................................
1-11 Layout under the Top Cover .......................................................................................................
................................................................................................ 15
.................................................................................................................
....................................................................
..........................................................................
.............................................................................. 18
........................................................................ 18
.................................................
.....................................................................
......
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Installation Manual SLAMf Series
Brooks Instrument
Brooks Instrument
Scope
for your instrument.
Purpose
manual is intended to provide the user with all the information necessary to install,
following sections:
Introduction
Installation
Operation
Essential Instructions
Back Cover
Information
It is recommended that this manual be read in its entirety before attempting to operate
or repair these digital products.
Specications (Reference Tables 1-1, 1-2 and 1-3)
WARNING
listed below. Failure to heed this warning can result in serious
personal injury and or damage to the equipment.
of construction. Careful attention to metallurgy, engineered
materials and elastomeric materials is critical to safe operation.
SLAMf50/60 SLAMf51/61 SLAMf53/63 SLAMf64
PERFORMANCE
Full Scale Flow Range
(N2, Eq. 0 Deg C Ref)
0.003 - 50 slpm 15 - 150 slpm 100 - 1100 slpm >1100 - 2500 slpm 18– 2160 m3/hr
Devices (Includes linearity, excludes
calibration system measurement
uncertainty per SEMI E69)
±0.6% of S.P. (20-100% FS), ±0.12% FS (<20% FS) ±0.6% of FS N/A
Flow Accuracy (Includes linearity and
uncertainty per SEMI E69)
±0.9% of S.P. (20-100% FS), ±0.18% of F.S. (<20% FS) ±1.0% of FS ±1.0% of FS
Control Range N2, eq. 100:1 for FS from 1-50 slpm (50:1 for all other FS ows) N/A
0.20% S.P ±0.25% SP
Linearity Included in accuracy
Response Time
< 1 second < 3 seconds N/A
Zero Stability < + 0.2% FS per year
Zero: <0.05% of FS per °C Span: < 0.1% of SP per °C
<0.2% FS maximum deviation from specied accuracy after re-zeroing
Accuracy at calibration conditions ; accuracy spec valid across the full control range
RATINGS
-14 to 65oC (7 to 149oF)
5 psi/0.35 bar 10 psi/0.69 bar Min.: 7.5 psi/0.52 bar at 500 lpm
Min.: 14.5 psi/1.00 bar at 1000 lpm
Min.: 35.0 psi/2.41 bar at 2500 lpm
N/A
Application specic up
to 1500 psi/103.4 bar
50 psi/3.45 bar 290 psi/20.0 bar N/A
Leak Integrity (external) 1x10-9 atm. cc/sec He
Valve Shut Down (leak by) <1% of FS N/A
MECHANICAL
Valve Type Normally Closed, Normally Open, Meter N/A
316, 316/316L Stainless Steel, High Alloy, Stainless Steel, Viton® uoroelastomers, Buna-N, Kalrez®, Teon®/ Kalrez®, and
EPDM
DIAGNOSTICS
Status Lights MFC Health, Network Status
Alarms Control Valve Output, Flow Totalizer, Network Interruption, Over Temperature, Power Surge/Sag, Service Required
RS485 via 2.5mm jack
>1500 PSI DP as a Special Order
Product Specifications
Mass Flow Mass Flow Flow Ranges Maximum Operating PED Module H
Controller Meter N2 Eq. Ratings Pressure psi/bar Category
Model Model Min. F.S. Max. F.S. Standard Optional
SLAMf50 SLAMf60 0.003 50 slpm 1500 psi/103 bar 4500 psi/310 bar SEP
SLAMf51 SLAMf61 15 150 slpm 1500 psi/103 bar NA SEP
SLAMf53 SLAMf63 100 2500 slpm 1000 psi/70 bar NA 1 for all 150 lb anges
2 for all other connections
- SLAMf64 18 2160 m3/h Flow rate dependant 1-1/2” - 100 bar
2” & 3” - 85 bar
4” & 6” - 70 bar
8” - 50 bar
Sanitary ttings - Model code 5A, 5B, 5C, 5D & 5E rated to 500 psi Maximum Pressure (see Table VI on page 12)
²600 lpm of H2 possible with decreased accuracy. Greater than 40 psig inlet required for ows greater than 100 lpm N₂ equivalent
³1000 psi/70 bar for UL Certicate
4500 psi/310 bar available as a special on SLAMf61 only
Pressure per body size as noted or maximum pressure of the selected ange; see Instruction and Operations Manual
²³
Table 1-1 SLAMf Series Standard Specications
Flow Ranges and Pressure Ratings:
Brooks Instrument
Brooks Instrument
Communication Protocol RS485 DeviceNetTM TM & PROFINET
Terminal Block Connections via 1/2" NPT (F) Conduit Optional:
PG11 Cable Gland or M20 x 1.5 Conduit
1x 4-pin M12 Male Connector /
2x 4-pin M12 Female D Coded
Connector
0-5 V, 1-5 V, 0-10 V, 0-20 mA, 4-20 mA N/A N/A
From +13.5 Vdc to +27 Vdc From +11 Vdc to +25 Vdc From +13.5 Vdc to +27 Vdc
Power Requirements Watts, Max. V a l v e O r i c e > 0 . 0 3 2 ” : 8 W
V a l v e O r i c e ≤ 0 . 0 3 2 ” : 5 W
W i t h o u t Va l v e : 2 W
Valve Orice > 0.032”: 10 W
Valve Orice ≤ 0.032”: 7 W
Without Valve: 4 W
Valve Orifice > 0.032”: 11 W
Valve Orice ≤ 0.032”: 7 W
Without Valve:3W
N/A N/A The Default Network Address is
192.168.1.100.
EtherNet/IP: Default Network
Conguration is DHCP
PROFINET: The Default Name is
"brooks-sla"
FLOW INPUT (VOLTAGE) SPECIFICATIONS
Nominal Range 0-5 Vdc, 1-5 Vdc or 0-10 Vdc
Full Range (-0.5) -11 Vdc
Absolute Max. 18 V (without damage)
>990 kOhms
0.002 mA
FLOW INPUT (CURRENT) SPECIFICATIONS
Nominal Range 4-20 mA or 0-20 mA
Full Range 0-22 mA
Absolute Max 24 mA (without damage)
100 Ohms
FLOW OUTPUT (VOLTAGE) SPECIFICATIONS
Nominal Range 0-5 Vdc, 1-5 Vdc or 0-10 Vdc
Full Range (-1)-11 Vdc
2 kOhms
FLOW OUTPUT (CURRENT) SPECIFICATIONS
Nominal Range 0-20 mA or 4-20 mA
Full Range
0-22 mA (@ 0-20 mA); 3.8-22 mA (@ 4-20 mA)
380 Ohms (for supply voltage: < 16 Vdc)
ANALOG I/O ALARM OUTPUT*
Type Open Collector
25 mA
1µA
30 Vdc
ANALOG I/O VALVE OVERRIDE SIGNAL SPECIFICATIONS**
Instrument controls valve to command set point
Valve Closed
Valve Normal
Valve Open
800 kOhms
Absolute Max. Input (-25 Vdc) < VOR < 25 Vdc (without damage)
* The Alarm Output is an open collector or "contact type" that is CLOSED (on) whenever an alarm is active.
The Alarm Output may be set to indicate any one of various alarm conditions.
** The Valve Override Signal (VOR) is implemented as an analog input which measures the voltage at the input and controls the
valve based upon the measured reading as shown in this section.
Table 1-2 Electrical Specications
Brooks Instrument
Performance Package must be ordered for basic Biotech model features;
Premium Package includes Performance Package features.
Not available on SLAMf53 or SLAMf63
Performance SLAMf5850/60 SLAMf5851/61 SLAMf5853/63
Full Scale Flow Ran
(N₂, Eq. 0 Deg C Ref)
5 sccm -50 slpm 15 -150slpm 100 - 1100 slpm >1100 - 2500 slpm
Air, CO Nitrogen & Oxygen
Flow Accuracy (includes linearity and
uncertainty per SEMI E69)
±0.9% of SP (20-100% FS), ±0.18% of FS (<20% FS) ±1.0% of FS
0.20% SP
250:1 250:1 150:1
Response Time < 1 Second < 1 Second < 3 Second
< 0.005 sccm < 15.6 sccm
Maximum ow depends on pressure conditions; consult Applications Engineering for details
²Calibration on CO2 available as an option on SLA5850/60 & SLA5851/61
³Accuracy at Calibration Conditions ; accuracy spec valid across the full control range
Ratings SLAMf5850/60 SLAMf5851/61 SLAMf5853/63
Inlet Pressure Range 5 psig to 75 psig 10 psig to 75 psig 8 psig to 75 psig
5 psi/0.35 ba 10 psi/0.69 bar Min.: 7.5 psi/0.52 bar at 500 lpm
Min.: 14.5 psi/1.00 bar at 1000 lpm
Min.: 35.0 psi/2.41 bar at 2500 lpm
30 psi/ 2 bar 30 psi/ 2 bar 30 psi/ 2 bar
Maximum Pressure Same as standard
Standard SLA with Special Factory Tuning/Normally Closed
-14˚C - 50˚C
Sensor Design Enhanced construction to meet industry standards for cleanliness
Performance at minimum inlet pressure will be gas and ow range dependent. Consult Applications Engineering for details
For optimum performance operate at the specied inlet and outlet pressure values
Code Description Code Option Option Description
S Performance Package6
TPremium Package7
UPerformance Package with CO2 Calibration8
V Premium Package with CO2 Calibration8
Table 1-3 SLAMf Series Biotech Specications
Brooks Instrument
Biotech Options Packages
and Premium - that include a number of enhanced features designed for the biotech industry and for
Table 1-4 SLAMf Series Agency Certications
ATEX Special Conditions:
IECEx Special Conditions:
Mark Agency Certification Applicable Standard Details
UL
(Recogonized)
Class I, Div 2, Group A, B, C, D
Class I, Zone 2, IIC T4
Class II, Zone 22 IP66 UL & CSA Standards E73889 Vol 3, Sec 4
UL (Listed)
Class I, Div 2, Group A, B, C, D
Class I, Zone 2, IIC T4
Class II, Zone 22 IP66 UL & CSA Standards E73889 Vol 1, Sec 25
ATEX II 3 G Ex ec IIC T4 Gc
II 3 D Ex tc IIIC T 85 oC Dc
IP66
EN IEC 60079-0: 2018
EN 60079-7: 2015+ A1:2018
EN 60079-31: 2014
KEMA 04ATEX1290 X
IECEx Ex ec IIC T4 Gc
Ex tc IIIC T 85 oC Dc
IP66
IEC 60079-0: 2017 (Ed. 7)
IEC 60079-7:2015 (Ed. 5.1)
IEC 60079-31: 2013 (Ed. 2)
IECEx KEM 08.0043X
KOSHA
Ex nA IIC T4
Ex tD A22 IP66 T85oC
15-AV4BO-0638
15-AV4BO-0639
16-AV4BO-0328X
16-AV4BO-0327X
CE EMC Directive 2014/30/EU
Directive 2011/65/EU
EN:61326-1:2013 EMC
RoHS
ATEX/IECEx Special Conditions: Please see Certication section of the SLAMf Series Installation & Operations Manual
Note: Not all certications are available for all SLAMF specications and congurations.
Brooks Instrument
Then run the braided steel cable around the capture
piece with bolts as shown below.
Next, place the straight washer over the cable and both bolts
The cable lock is now captured.
SLAMf UL Listed Installation Instructions:
WARNING
unless power has been removed or the area is known to be
WARNING
Brooks Instrument
UL Recognized versions of SLAMf - Conditions of Acceptability:
1. These devices are to be used within their ratings.
KOSHA Special Conditions:
shall be in compliance with the actual measured temperature values.
Reference Conditions
-
lation.
conditions for gases. The words “normal conditions” and “standard conditions” are
Temperature and Pressure) for gases. Further note that temperature and pressure
values for standard or normal reference conditions vary in countries and industries
-
ture reference condition when performing a volumetric conversion.
PC-based Support Tools
-
products via a special service port.
Brooks Instrument
Fast Response Performance
command condition.
Calibration Selection
Selectable Soft Start
or initial pressure impact. These problems are virtually eliminated with the soft start
feature.
digital commands.
second setpoint change.
Figure 1-1 General Wiring
Brooks Instrument
Figure 1-2 Response Performance of Brooks Digital MFC
Figure 1-3 Linear Ramp-up or Ramp-up/down from 200% Per Second Down to 0.5 % Per Second
Setpoint Change
10
Brooks Instrument
Communication Interfaces
requirements.
RS485 Communications
measure selection)
•
•
• Alarm status and settings
•
for process control. The communication speed (baud rate) is software selectable.
selected via software.
Figure 1-4 SLAMf Series RS485/Analog Terminal Connections
11
Brooks Instrument
Probus Communications
-
The communication electronics allows for automatic baud rate detection ranging from
selection methods not required. For selecting the device address, which must be
unique on the network, two rotary switches are provided. This allows a user to easily
command can also be issued through the protocol.
• Read outputs (e.g. commands, setpoint).
• Global control commands (e.g. fail safe, sync).
• Read diagnostics information (i.e. get error and alarm status).
etc.).
Figure 1-5 SLAMf Series Probus Terminal Connections
Brooks Instrument
DeviceNet Communications
capability. DeviceNet is an open digital protocol capable of high speeds and easy
system connectivity. Brooks Instrument has several of its devices available on this
Association), the governing standard body for DeviceNet.
rate switches mounted on the device.
The DeviceNet communication link also provides access to many of the Brooks
(including units of measure selection)
Figure 1-6 SLAMf Series DeviceNet Terminal Connections
Brooks Instrument
EtherNet/IP & PROFINET Communication
Communication and Power Connections – Hazardous Area Certication
Figure 1-9 M12, 4 Pole Female D connector for
In-Out ports
Figure 1-8 Layout under the Top Cover
Figure 1-7 Device side view with M12 Power connector
See gure 1-9 for M12 Communications Connectors
Brooks Instrument
Figure 1-11 Layout under the Top Cover
Figure 1-10: 5 Pin M8 Male Nano-for Legacy devices
15
Brooks Instrument
EtherNet/IP™ & PROFINET Communications
-
tion of the communications platform.
listed below:
Legacy Devices Only
cover (Figure 1-11)
Embedded Browser Interface:
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