Brooks Instrument SLA5800 Series User manual

Beyond Measure
Installation & Operation Manual
SLA5800 Series
Mass Flow Controllers & Meters

3 Installation Manual SLA5800 Series
Brooks Instrument Contents
Section 1 Introduction
Purpose ...........................................................................................................................................5
Specications ..................................................................................................................................5
Certications.................................................................................................................................... 9
Reference Conditions ....................................................................................................................11
Biotech Option Packages ..............................................................................................................11
PC-based Support Tools ...............................................................................................................11
Fast Response Performance......................................................................................................... 12
Calibration Selection......................................................................................................................12
Selectable Soft Start...................................................................................................................... 12
Section 2 Installation
Receipt of Equipment ....................................................................................................................21
Recommended Storage Practice...................................................................................................21
Return Shipment............................................................................................................................21
Transit Precautions........................................................................................................................21
Removal from Storage...................................................................................................................22
Gas Connections ...........................................................................................................................22
In-Line Filter...................................................................................................................................22
Installation .....................................................................................................................................23
Electrical Interface .........................................................................................................................26
Operation Check Procedure (Analog I/O)......................................................................................29
Operation Check Procedure (Digital I/O)....................................................................................... 30
Bus/Network (DeviceNet, Probus, Foundation Fieldbus, EtherCAT)........................................... 30
Section 3 Operation
Features (Standard and Biotech) ..................................................................................................31
Analog I/O Mode of Operation....................................................................................................... 32
RS485 Communications Features (Analog versions only) ............................................................ 34
EtherNET/IP™Communications Features.................................................................................... 34
DeviceNet Communications Features ........................................................................................... 35
Probus Communications Features ..............................................................................................35
EtherCAT Communications Features............................................................................................ 36
Alarms (Analog versions only)....................................................................................................... 36
Alarms (Analog versions only) Conguration Attributes ................................................................37
Diagnostic Alarms (Analog versions only) ..................................................................................... 38
General Alarms (Analog versions only) ......................................................................................... 38
Calibration/Conguration Sets....................................................................................................... 39
Special Features............................................................................................................................39
Setpoint Ramping ..........................................................................................................................40
Low Setpoint Command Cuto󰀨......................................................................................................40
Low Flow Output Cuto󰀨 ................................................................................................................. 40
Adaptive Control ............................................................................................................................40
Flow Totalizer ................................................................................................................................40
PC-based Support Tools ...............................................................................................................40

4 Installation Manual SLA5800 Series
Brooks Instrument Contents
Section 4 Maintenance & Troubleshooting
Troubleshooting Analog or Digital .................................................................................................42
System Checks..............................................................................................................................43
Cleaning Procedures .....................................................................................................................46
Calibration Procedure.................................................................................................................... 46
Figures
1-1 General Wiring ........................................................................................................................12
1-2 Response Performance of Brooks Digital MFC ...................................................................... 13
1-3 Linear Ramp-up and/or Ramp-down from 200% Per Second
Down to 0.5% Per Second Setpoint Change .......................................................................... 13
1-4 SLA5800 Series RS485 15-Pin Analog Connector and Pinouts .............................................14
1-5 SLA5800 Series Probus Connections and Pinouts ...............................................................15
1-6 EtherNet/IP™& PROFINET M8 Power Connection and Pinnout ..........................................16
1-7 SLA5800 Series DeviceNet Connections and Pinouts ........................................................... 17
1-8 SLA5800 Series EtherCAT Connections and Pinouts ............................................................18
1-9 SLA5850/SLA5851/SLA5860/SLA5861 Dimensions .............................................................. 19
1-10 SLA5853/SLA5863 Dimensions ............................................................................................ 20
2-1 RS485 D-Connector Shielded Cable Hookup Diagram, Voltage I/O Version ......................... 26
2-2 Recommended I/O Wiring Conguration for Current Signals (Non-Isolated Power Supply)... 27
2-3 Recommended I/O Wiring Conguration for Current Signals (Isolated Power Supply) .......... 27
2-4 RS485 Multidrop Interconnection TMFs and PC..................................................................... 28
3-1 Externally Accessible Adjustment (Zero Button) for all Meters/Controllers ............................ 33
4-1 Bench Troubleshooting Circuit ................................................................................................ 44
Tables
1-1 SLA5800 Series Standard Specications..................................................................................6
1-2 SLA5800 Series Biotech Specications ....................................................................................7
1-3 SLA5800 Series Electrical Specications.................................................................................. 8
1-4 SLA5800 Series Certications...................................................................................................9
2-1 Recommended Filter Size ....................................................................................................... 22
4-1 Sensor Troubleshooting ..........................................................................................................44
4-4 Troubleshooting.......................................................................................................................45

5 Installation Manual SLA5800 Series
Brooks Instrument Section 1 Introduction
Purpose
Thank you for purchasing a Brooks Instrument mass ow device. This manual is an installation
and operation manual for your instrument. If you have purchased a Brooks® Digital Mass
Flow Product with RS485, DeviceNet®, Probus®,EtherCAT® , EtherNet IP™or PROFINET
communicatons, a separate supplemental manual is also available as part of the operating
documentation.
Brooks Instrument mass ow measurement instruments are designed for accurately measuring
(MFMs) and rapidly controlling (MFCs) ows of gases. This instruction manual is intended to
provide the user with all the information necessary to install, operate and maintain these devices.
This manual is organized into the following sections.
Section 1 Introduction
Section 2 Installation
Section 3 Operation
Section 4 Maintenance
Section A Essential Instructions
Back Cover Warranty, Local Sales/Service Contact Information
It is recommended that this manual be read in its entirety before attempting to operate or repair
these devices.
Specications
(Reference Tables 1-1 and 1-2)

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Brooks Instrument Section 1 Introduction
Table 1-1 SLA5800 Series Standard Specications

7 Installation Manual SLA5800 Series
Brooks Instrument Section 1 Introduction
Table 1-2 SLA5800 Series Biotech Specications

8 Installation Manual SLA5800 Series
Brooks Instrument Section 1 Introduction
Table 1-3 SLA5800 Series Electrical Specications

9 Installation Manual SLA5800 Series
Brooks Instrument Section 1 Introduction
Table 1-4 SLA5800 Series Certications
Certications
Note:
1) Not all certications are available for all SLA5800 specications and congurations. Please
contact Brooks Customer
ATEX/IECEx Specic conditions of use
1. The equipment shall only be used in an area of not more than pollution degree 2, as dened in EN/IEC 60664-1.
2. The modules shall be installed in a suitable enclosure providing a degree of protection of at least IP54 according to
IEC/EN 60079-7, taking into account the environmental conditions under which the equipment will be used.
3. Provisions shall be made to prevent the rated voltage from being exceeded by transient disturbances of more
than 140%.
UL Conditions of Acceptability
1. These devices are to be used within their ratings.
2. These devices are to be mounted in a suitable enclosure in the end product rated not less than IP40.
3. The wiring terminals are suitable for eld wiring.
4. The suitability of the wiring method is to be determined in the end-use application.
5. These devices are intended to be powered by a class 2 power source.
6. These devices were evaluated for use in a maximum ambient temperature of 65ºC.
Note: PROFINET Communications is available only with CE Certifcation.

10 Installation Manual SLA5800 Series
Brooks Instrument Section 1 Introduction

11 Installation Manual SLA5800 Series
Brooks Instrument Section 1 Introduction
Reference Conditions
Due to e󰀨ects of pressure and temperature on the compressibility of gases, specic reference
conditions must be used when reporting volumetric ow rates in mass ow terms. For example,
the unit of measure SCCM (standard cubic centimeters per minute) refers to a volumetric
gas ow at a standard reference condition, NOT the actual volumetric gas ow at the actual
operating pressure and temperature. The key point is that the MASS FLOW of the gas is xed,
but the reference volumetric ow can be reported di󰀨erently based upon the standard reference
condition used in the calculation.
Throughout the world, there are di󰀨erences in terminology when describing reference conditions
for gases. The words “normal conditions” and “standard conditions” are sometimes used
interchangeably to describe the reference STP (Standard Temperature and Pressure) for gases.
Further note that temperature and pressure values for standard or normal reference conditions
vary in countries and industries worldwide. For example, the Semiconductor Equipment
Manufacturing Industry (SEMI) denes standard temperature and pressure conditions as 273.15
K (0 °C) and 101,325 Pa (760 torr). The main concern is that no matter what words are used
for descriptive purposes, a gas mass ow rate must have a dened standard pressure and
temperature reference condition when performing a volumetric conversion.
Biotech Options Packages
The SLA58XX mass ow controllers and meters are available with two biotech options packages
- Performance and Premium - that include a number of enhanced features designed for the
biotech industry and for bioreactors/fermenters specically. The specications are shown in Table
1-2. Instructions for changing between the four available gasses are included in Section 3 on
page 33 of this manual.
PC-based Support Tools
Brooks Instrument o󰀨ers a variety of PC-based process control and service tools to meet
the needs of our customers. Smart Interface may be used with any unit supporting RS485
S-Protocol in a multidrop conguration, thus allowing users to control and monitor their Brooks
devices. The Brooks Expert Support Tool (BEST) may be used to monitor, diagnose, tune and
calibrate Brooks devices equipped with DeviceNet communications. The Brooks Expert Support
Tool interfaces with Brooks products via a special service port.

12 Installation Manual SLA5800 Series
Brooks Instrument Section 1 Introduction
Figure 1-1 General Wiring
Fast Response Performance
The curves in Figure 1-2 depict the MFC output signal and actual transitional ow to steady-state
when gas ow enters into process chamber, under a step response command condition.
Brooks devices also feature adaptive (optimized) PID control, including fast response. and linear
ramp-up and/or ramp-down control characteristics.
Calibration Selection
Select one of 6 calibrations via Brooks Expert Support Tool (BEST) or digital signal (See
communications protocol for your digital coms). Analog devices can be switched via voltage
signals to Pin 11 & 8 on Firmware Version 1.18 & newer.
Selectable Soft Start
Processes requiring injection of gases can be adversely a󰀨ected by excessive initial gas ow.
This abrupt injection of gas can result in process damage from explosion or initial pressure
impact. These problems are virtually eliminated with the soft start feature.
Linear ramp-up or ramp-up/down (Figure 1-3) set by user via software tools or digital commands.
Linear ramp-up/ramp-down is adjustable at 200% per second down to 0.5% per second setpoint change.

13 Installation Manual SLA5800 Series
Brooks Instrument Section 1 Introduction
Figure 1-2 Response Performance of Brooks Digital MFC
Figure 1-3 Linear Ramp-up or Ramp-up/down from 200% Per Second Down to 0.5 % Per Second
Setpoint Change

14 Installation Manual SLA5800 Series
Brooks Instrument Section 1 Introduction
Figure 1-4 SLA5800 Series RS485 15-Pin Analog Connector and Pinouts
Note: Aux Input is used for Remote
Transducer Pressure Controllers only.
RS485 Communications
The Brooks Digital Series is equipped with RS485 communication capability. Refer to Figure 1-4
(Analog I/O pin connections), that enables the device to communicate via a personal computer
for process control.
Baud rate selections for the Brooks Digital Series related to RS485 are: 1200, 2400, 4800, 9600,
19200 and 38400 baud and can be selected via the Brooks Expert Support Tool (BEST).
The RS485 is essentially a multidrop connection. It allows a maximum of 32 devices to be
connected to a computer system. Personal computers are not equipped with RS485 ports as
standard. An RS232/USB to RS485 converter or RS485 interface board is therefore required
to connect an RS485 network to a standard personal computer. The RS485 bus, a daisy chain
network, meaning that the wires are connected at the units as in Figure 1-1.
Function PIN
Setpoint: Common Input (-) 1
Flow Signal: 0(1) -5 Vdc, 0-10 Vdc (Option), Output (+) 2
TTL Alarm: Open collector, Output (+) 3
Flow Signal: 0(4)-20 mA, Output (+) 4
Power Supply: +13.5 Vdc to +27 Vdc(+) 5
Not Connected 6
Setpoint: 0(4)-20 mA, Input (+) 7
Setpoint: 0(1)-5 Vdc, 0-10 Vdc, Input (+) 8
Power Supply: Common (-) 9
Flow Signal: Common, Output, (-) 10
Not Connected 11
Valve Override: Input 12
Auxilliary: RT Input, 0-5 Vdc, 0-10 Vdc, Input (+) 13
RS-485: Common B (-) 14
RS-485: Common A (+) 15

15 Installation Manual SLA5800 Series
Brooks Instrument Section 1 Introduction
Note: Aux Input is used for Remote Transducer Pressure
Controllers only.
Probus Communications
The Brooks SLA5800 is now equipped to support the Probus communication protocol. Probus
is a eldbus-based automation standard of Probus and Pronet International (PI). Via a single
bus cable, Probus links controller or control systems with decentralized eld devices (sensors
and actuators) on the eld level and also enables consistent data exchange with higher ranking
communication systems. A 9-pin sub-D connector is included on every device and is galvanic
isolated from the main electronics as dened by the EN 50170 Probus standard to allow easy
network connection separate from the main connector. The main 15-pin sub-D connector or
termination board is still needed for the power supply, but also allows for the standard analog I/O
signals, analog valve override, and (open-collector) alarm signaling to be used separate from the
network connection.
The communication electronics allows for automatic baud rate detection ranging from 9600 baud
to 12 Mbaud, thus making the need for any hardware baud rate selection methods not required.
For selecting the device address, which must be unique on the network, two rotary switches are
provided. This allows a user to easily select any address number ranging from 0 to 126. This
can provide fast device replacement without complex network congurations. The Probus-
DP piggyback board is equipped with a zero command pushbutton, allowing the user to give a
manual command to the device to (re)balance the ow sensor electronics. This command can
also be issued through the protocol.
The Probus-DP communication option supports the following message types:
• Cyclic data exchange (Write/Read data).
• Read inputs (e.g. status, ow, temperature, totalizer, etc.).
• Read outputs (e.g. commands, setpoint).
• Global control commands (e.g. fail safe, sync).
• Get conguration (i.e. read number of I/O bytes and composition).
• Read diagnostics information (i.e. get error and alarm status).
• Set parameters (i.e. select gas number, engineering units, I/O conguration
• Set parameters (i.e. select gas number, engineering units, I/O conguration etc.).
• Check conguration (i.e. check I/O composition).
Figure 1-5 SLA5800 Series Probus Connections and Pinouts

16 Installation Manual SLA5800 Series
Brooks Instrument Section 1 Introduction
Figure 1-6 EtherNet/IP™& PROFINET M8 Power Connection and Pinnouts
EtherNet/IP™ & PROFINET Communications
The SLA5800 Series is now available with the state-of-the-art EtherNet/IPTM communications
interface. Please refer to the supplemental EtherNet/IPTM manual for more description of the
benets of Brooks’ implementation of the communications platform.
The available physical interfaces on the EtherNet/IPTM& PROFINET devices are listed below:
• 5 pin M8 threaded male connector for power and Analog l/O, indicated by pwr”.
• ln and Out ports with RJ-45 connectors with industry standard pin outs, labelled “1” and “2”.
• 2.5mm female jack for RS485 diagnostic port indicated by “DlAG”
Embedded Browser Interface:
• Network address is 192.168.1.100 (EtherNET & PROFINET)
• EtherNET/IP: Network conguration is DHCP.
• PROFINET: The default name is “sla-mfc”

17 Installation Manual SLA5800 Series
Brooks Instrument Section 1 Introduction
Figure 1-7 SLA5800 Series DeviceNet Connection and Pinouts
DEVICENET BUS 5 PIN MALE M12 CONNECTOR M12 X 1.0 OUTSIDE THREAD
DeviceNet Communications
The SLA5800 Series is also available with DeviceNetTM communication capability. DeviceNet is
an open digital protocol capable of high speeds and easy system connectivity. Brooks Instrument
has several of its devices available on this popular networking standard, and is a member of
ODVATM (Open DeviceNet Vendors Association), the governing standard body for DeviceNet.
DeviceNet is similar to the RS485 standard in that it is a multi-drop connection that allows
a maximum of 64 devices to be connected on the same network. Baud rate selections for
DeviceNet products are 125K, 250K and 500K and can be selected via a rate switch mounted on
the device.
The DeviceNet communication link also provides access to many of the Brooks SLAMf Digital
Series functions for “control and monitor” operations, including:
• Accurate setpoint adjustment and ow output measurement (including units of measure
selection)
• PID Settings (controller only)
• Valve Override (controller only)
• Calibration Gas Select
• Soft Start Control (controller only)

18 Installation Manual SLA5800 Series
Brooks Instrument Section 1 Introduction
EtherCAT Communications
The SLA5800 Series is also available with EtherCAT communication capability. Many
applications of Flow Controllers/Meters are moving to increase the use of automation.
Automation comes in many forms including Ethernet based eld buses. Digital communications
from these varied systems and the devices they measure and control, are a very e󰀨ective means
of not only accomplishing more e󰀨ective and rapid system integration, but also providing greatly
improved system diagnostics and maintainability.
The available physical interfaces on the EtherCAT device are listed below:
• 5 pin M8 threaded male connector for power and Analog l/O, indicated by “pwr”.
• ln and Out ports with RJ-45 connectors.
• 2.5mm female jack for RS485 diagnostic port indicated by “DlAG” (refer to the SLA 5800
Series installation and operation manual for more details) The EtherCAT communication
option supports the following message types:
• Cyclic data exchange (Read/Write data)
• Read lnputs (e.g. status, ow, temperature, actuator drive value, etc.)
• Read Outputs (e.g. commands, setpoint, actuator override, etc.)
• Read Diagnostics information (warning & alarm status)
• Check Device conguration
• Calibration due status
• Hardware/Software versions etc.
Figure 1-8 SLA5800 Series EtherCAT Connection and Pinout

19 Installation Manual SLA5800 Series
Brooks Instrument Section 1 Introduction
Figure 1-9 SLA5850/SLA5851/SLA5860/SLA5861 Dimensions

20 Installation Manual SLA5800 Series
Brooks Instrument Section 1 Introduction
Figure 1-10 SLA5853/SLA5863 Dimensions