Brooks Instrument 5860E User manual

Installation and Operation Manual
X-TMF-5860E-MFM-eng
Part Number: 541B106AAG
November, 2008 Brooks®Model 5860E
Model 5860E
Mass Flow Meter

Installation and Operation Manual
X-TMF-5860E-MFM-eng
Part Number: 541B106AAG
November, 2008
Brooks®Model 5860E
ESD (Electrostatic Discharge)
Essential Instructions
Read this page before proceeding!
Brooks Instrument designs, manufactures and tests its products to meet many national and international standards. Because
these instruments are sophisticated technical products, you must properly install, use and maintain them to ensure they
continue to operate within their normal specifications. The following instructions must be adhered to and integrated into your
safety program when installing, using and maintaining Brooks Products.
• Read all instructions prior to installing, operating and servicing the product. If this instruction manual is not the correct
manual, please see back cover for local sales office contact information. Save this instruction manual for future reference.
• If you do not understand any of the instructions, contact your Brooks Instrument representative for clarification.
• Follow all warnings, cautions and instructions marked on and supplied with the product.
• Inform and educate your personnel in the proper installation, operation and maintenance of the product.
• Install your equipment as specified in the installation instructions of the appropriate instruction manual and per applicable
local and national codes. Connect all products to the proper electrical and pressure sources.
• To ensure proper performance, use qualified personnel to install, operate, update, program and maintain the product.
• When replacement parts are required, ensure that qualified people use replacement parts specified by Brooks Instrument.
Unauthorized parts and procedures can affect the product's performance and place the safe operation of your process at
risk. Look-alike substitutions may result in fire, electrical hazards or improper operation.
• Ensure that all equipment doors are closed and protective covers are in place, except when maintenance is being
performed by qualified persons, to prevent electrical shock and personal injury.
Pressure Equipment Directive (PED)
All pressure equipment with an internal pressure greater than 0.5 bar (g) and a size larger than 25mm or 1" (inch) falls under the
Pressure Equipment Directive (PED). The Directive is applicable within the European Economic Area (EU plus Norway, Iceland
and Liechtenstein). Pressure equipment can be traded freely within this area once the PED has been complied with.
• Section 1 of this manual contains important safety and operating instructions related to the PED directive.
• Meters described in this manual are in compliance with EN directive 97/23/EC module H Conformity Assessment.
• All Brooks Instrument Flowmeters fall under fluid group 1.
• Meters larger than 25mm or 1" (inch) are in compliance with category I, II, III of PED.
• Meters of 25mm or 1" (inch) or smaller are Sound Engineering Practice (SEP).
Handling Procedure:
1. Power to unit must be removed.
2. Personnel must be grounded, via a wrist strap or other safe, suitable means before any printed circuit card or other internal device is
installed, removed or adjusted.
3. Printed circuit cards must be transported in a conductive container. Boards must not be removed from protective enclosure until
immediately before installation. Removed boards must immediately be placed in protective container for transport, storage or return to
factory.
Comments
This instrument is not unique in its content of ESD (electrostatic discharge) sensitive components. Most modern electronic designs contain
components that utilize metal oxide technology (NMOS, SMOS, etc.). Experience has proven that even small amounts of static electricity
can damage or destroy these devices. Damaged components, even though they appear to function properly, exhibit early failure.

Installation and Operation Manual
X-TMF-5860E-MFM-eng
Part Number: 541B106AAG
November, 2008 Brooks®Model 5860E
Dear Customer,
We appreciate this opportunity to service your flow measurement and control requirements with a Brooks
Instrument device. Every day, flow customers all over the world turn to Brooks Instrument for solutions to their
gas and liquid low-flow applications. Brooks provides an array of flow measurement and control products for
various industries from biopharmaceuticals, oil and gas, fuel cell research and chemicals, to medical devices,
analytical instrumentation, semiconductor manufacturing, and more.
The Brooks product you have just received is of the highest quality available, offering superior performance,
reliability and value to the user. It is designed with the ever changing process conditions, accuracy requirements
and hostile process environments in mind to provide you with a lifetime of dependable service.
We recommend that you read this manual in its entirety. Should you require any additional information concerning
Brooks products and services, please contact your local Brooks Sales and Service Office listed on the back cover
of this manual or visit www.BrooksInstrument.com
Yours sincerely,
Brooks Instrument

Installation and Operation Manual
X-TMF-5860E-MFM-eng
Part Number: 541B106AAG
November, 2008
Brooks®Model 5860E
THIS PAGE WAS
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i
Installation and Operation Manual
X-TMF-5860E-MFM-eng
Part Number: 541B106AAG
November, 2008 Brooks®Model 5860E
Contents
Section 1
Introduction Paragraph Page
Number Number
1-1 Purpose ............................................................................. 1-1
1-2 Description ........................................................................ 1-1
1-3 Specifications .................................................................... 1-2
Section 2
Installation 2-1 Receipt of Equipment ........................................................ 2-1
2-2 Recommended Storage Practice ....................................... 2-1
2-3 Return Shipment................................................................ 2-2
2-4 Gas Connections ............................................................... 2-2
2-5 Installation ......................................................................... 2-2
2-6 In-Line Filter....................................................................... 2-4
2-7 Electrical Interfacing .......................................................... 2-5
Section 3
Operation 3-1 Theory of Operation........................................................... 3-1
3-2 Operating Procedure ......................................................... 3-2
3-3 ZeroAdjustment ................................................................ 3-2
3-4 CalibrationProcedure ........................................................ 3-3
3-5 Response (Flow Output Signal) ......................................... 3-6
Section 4
Maintenance 4-1 General.............................................................................. 4-1
4-2 Troubleshooting ................................................................. 4-1
4-3 Sensor Tube ...................................................................... 4-4
4-4 Disassembly andAssembly ............................................... 4-4
4-5 Use of the Conversion Tables ............................................ 4-6
4-6 Restrictor Sizing ................................................................ 4-9
Section 5
Parts List 5-1 General.............................................................................. 5-1
SectionA
CE Certification CE Certification of Mass Flow Equipment.......................... A-1

ii
Installation and Operation Manual
X-TMF-5860E-MFM-eng
Part Number: 541B106AAG
November, 2008
Brooks®Model 5860E
Contents
Figures Figure Page
Number Number
1-1 Typical Response to Flow Step Changes........................... 1-2
2-1 Model 5860E Dimensions.................................................. 2-3
2-2 "D" Type Connector PinArrangement................................ 2-3
3-1 Flow Sensor Operational Diagram..................................... 3-2
3-2 Model 5860E Calibration Connections............................... 3-4
3-3 Adjustment Potentiometer Location ................................... 3-4
3-4 Fast Response Adjustment................................................ 3-4
5-1 Model 5860E Parts Drawing .............................................. 5-2
Tables Table Page
Number Number
2-1 Recommended Filter Size ................................................. 2-4
4-1 Bench Troubleshooting ...................................................... 4-2
4-2 Sensor Troubleshooting..................................................... 4-2
4-3 Conversion Factors (Nitrogen Base).................................. 4-7
4-4 Model 5860E Standard Restrictors ....................................4-11
5-1 Model 5860E Replacement Parts List................................ 5-3
5-2 Tool and Spare Part Kits for 5860E .................................... 5-3

1-1
Installation and Operation Manual
X-TMF-5860E-MFM-eng
Part Number: 541B106AAG
November, 2008 Brooks®Model 5860E
Section 1 Introduction
1-1 Purpose
The Brooks®Model 5860E Flow Meter is a mass flow measurement device
designed for accurately measuring flows of gases. This instruction manual
is intended to provide the user with all the information necessary to install,
operate and maintain the Brooks 5860E Mass Flow Meter. This manual is
organized into five sections:
Section 1 - Introduction
Section 2 - Installation
Section 3 - Operation
Section 4 - Maintenance
Section 5 - Parts List
It is recommended that this manual be read in its entirety before attempting
to operate or repair the Model 5860E.
1-2 Description
The Brooks Model 5860E Mass Flow Meter is used widely in the
Semiconductor Industry as well as many others, where manual, electronic
or computer controlled gas handling occurs. The Model 5860E consists of
two basic units: a flow sensor, and an integral electronic signal converter.
This combination produces a stable gas flow indication, which eliminates
the need to continuously monitor and compensate for changing gas
pressures and temperatures. Standard features include:
Fast Response rapidly indicates changes in actual mass flow rate. Refer
to Figure 1-1.
Removable Cleanable Sensor permits the user to clean or replace the
sensor. Refer to Section 4-4.
Output Limiting prevents possible damage to delicate data acquisition
devices by limiting the output to +6.8 Vdc and -.7 Vdc.

1-2
Installation and Operation Manual
X-TMF-5860E-MFM-eng
Part Number: 541B106AAG
November, 2008
Brooks®Model 5860E
Section 1 Introduction
1-3 Specifications
Flow Ranges
Any full scale flowrate from 3 sccm to 30 slpm, N2
*Standard temperature and pressure in accordance with SEMI
(Semiconductor Equipment and Materials Institute) standard: 0° C and
101.3 kPa (760 Torr).
Ratings
Maximum Operating pressure: 4500 psi (31.03 MPa)
Ambient/Operating Temperature: 40°F to 150°F (5°C to 65°C)
Non-Operating:-13°F to +212°F (-25°C to 100°C)
Performance
Accuracy: ±1% full scale including linearity at calibration conditions.
±1.5% full scale including linearity for flow ranges greater than 20 slpm.
Repeatability
0.25% of rate
Figure 1-1 Typical Response to Flow Step Changes

1-3
Installation and Operation Manual
X-TMF-5860E-MFM-eng
Part Number: 541B106AAG
November, 2008 Brooks®Model 5860E
Section 1 Introduction
Response Time
Less than 3 seconds response to within 2% of full scale final value for a
0 to 100% command step.
Control / Usable Range
50 to 1
Sensitivity to Mounting Attitude
±0.5% F.S. maximum deviation from specified accuracy after re-zeroing
under 200 psig.
Temperature Sensitivity
Zero: Less than ±0.075% F.S. per degree C
Span: Less than ±1.0% F.S. shift from original calibration over
10-50° C range
Pressure Sensitivity
0.03% per PSI up to 200 PSIG
Power Supply Sensitivity
±0.09% full scale per % power supply voltage variation
Output Signal
0-5 Vdc into 2000 ohms (or greater) load.
Maximum ripple 3 mV.
Leak Integrity
1 x 10-9 Atmosphere scc/sec. Helium
Power Requirements
+15 Vdc (±5%) at 35 mA dc
-15 Vdc (±5%) at 35 mA dc
1.05 watts power consumption
Materials of Construction
Fittings and Transducer Assembly - Wetted parts 316 stainless steel
O-rings and gaskets - Standard: Viton® fluoroelastomers and Buna-N;
Optional:Kalrez®
Electrical Connection
D-connector, 15 pin type (DA-15P)

1-4
Installation and Operation Manual
X-TMF-5860E-MFM-eng
Part Number: 541B106AAG
November, 2008
Brooks®Model 5860E
Section 1 Introduction
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2-1
Installation and Operation Manual
X-TMF-5860E-MFM-eng
Part Number: 541B106AAG
November, 2008 Brooks®Model 5860E
Section 2 Installation
2-1 Receipt of Equipment
When the equipment is received, the outside packing case should be
checked for damage incurred during shipment. If the packing case is
damaged, the local carrier should be notified at once regarding his liability.
Areport should be submitted to the Product Service Department, Brooks
Instrument, Hatfield, Pennsylvania 19440-0903.
Remove the envelope containing the packing list. Carefully remove the
equipment from the packing case. Make sure spare parts are not
discarded with the packing materials. Inspect for damaged or missing
parts.
Brooks Instrument
407 W. Vine Street
P.O. Box 903
Hatfield, PA 19440 USA
Toll Free (888) 554-FLOW (3569)
Tel [phone]
Fax [phone]
E-mail: [e-mail]
www.BrooksInstrument.com
Brooks Instrument Brooks Instrument
Neonstraat 3 1-4-4 Kitasuna Koto-Ku
6718 WX Ede, Netherlands Tokyo, 136-0073 Japan
P.O. Box 428 Tel [phone]
6710 BK Ede, Netherlands Fax [phone]
Tel [phone] Email: [email protected]
Fax [phone]
E-mail: [email protected]
2-2 Recommended Storage Practice
If intermediate or long-term storage is required for equipment as supplied
by Brooks Instrument, it is recommended that said equipment be stored in
accordance with the following:
a. Within the original shipping container.
b. Store in a sheltered area with the following conditions:
1. Ambient temperature 21°C (70°F) nominal.
2. Relative humidity 45% nominal, 60% maximum/25% minimum.
Upon removal from storage, a visual inspection should be conducted
to verify its condition is “as received.” If the equipment has been in
storage for an excess of ten (10) months or in conditions in excess
of those recommended, all pressure boundary seals should be
replaced and the device subjected to a pneumatic pressure test in
accordance with applicable vessel codes.

2-2
Installation and Operation Manual
X-TMF-5860E-MFM-eng
Part Number: 541B106AAG
November, 2008
Brooks®Model 5860E
Section 2 Installation
2-3 Return Shipment
Prior to returning any Brooks equipment to the factory, contact the factory -
for a Return MaterialsAuthorization Number (RMA#). This can be obtained
at Brooks Instrument, Product Service Department, 407 West Vine Street,
Hatfield, PA19440-0903, or call toll free 1-888-554-FLOW (3569).
Brooks Instrument
407 W. Vine Street
P.O. Box 903
Hatfield, PA 19440USA
Toll Free (888) 554-FLOW (3569)
Tel [phone]
Fax [phone]
E-mail: [e-mail]
www.BrooksInstrument.com
Brooks Instrument Brooks Instrument
Neonstraat 3 1-4-4 Kitasuna Koto-Ku
6718 WX Ede, Netherlands Tokyo, 136-0073 Japan
P.O. Box 428 Tel [phone]
6710 BK Ede, Netherlands Fax [phone]
Tel [phone] Email: [email protected]
Fax [phone]
E-mail: [email protected]
Also, completion of Form RPR003-1, Brooks Instrument Decontamination
Statement, as well as, a Material Safety Data Sheet (MSDS) for the fluid(s)
used in the meter, is required before any Brooks Personnel can begin
processing the equipment. Copies of the form can be obtained at one of
the locations above.
2-4 Gas Connections
Standard inlet and outlet connections supplied on the Model 5860E are 1/
4" compression fittings for flow rates up to 10 slpm, and 3/8" compression
fittings for higher flow rates.
Optional VCOTM and VCRTM connections are available upon request. Prior
to installation, make certain all piping is clean and free of obstructions.
Install the piping in such a manner that permits easy removal if the
instrument is to be removed for cleaning or test bench troubleshooting.
2-5 Installation (Refer to Figures 2-1 through 2-2)

2-3
Installation and Operation Manual
X-TMF-5860E-MFM-eng
Part Number: 541B106AAG
November, 2008 Brooks®Model 5860E
Section 2 Installation
Figure 2-1 Model 5860E Dimensions
Connection "X"Dim.
1/4"Compression 4.32
Fitting 109.7
1/4" Tube VCO 3.86
98.0
1/4" Tube VCR 4.18
106.2
3/8"Compression 4.44
Fitting 112.8
Figure 2-2 "D" Type Connector Pin Arrangement
PIN NO. FUNCTION COLOR CODE
1 Cmd. Common (Command Pot "CCW") •Black
2 0-5 Volt Signal Output White
3 Supply Common Red
4 Valve Off • Green
5 +15 Vdc Supply Orange
6 -15 Vdc Supply Blue
7 Valve Test Point/Purge •Wht/Blk
8 Cmd. Input or Cmd. Pot "S" • Red/Blk
9 Supply Voltage Common Grn/Blk
10 0-5 Volt Signal Common Org/Blk
11 +5 Volt Reference Output (Command Pot "CW") • Blu/Blk
12 Valve Override • Blk/Wht
13 Not Used Red/Wht
14 Chassis Ground Grn/Wht
15 Remote Transducer Input* • Blu/Wht
*Factory Activated Option.
•These connections are used for the 5850E and 5851E Mass Flow Controllers.
Make no connections to these pins.
NOTE:
1. Cable shield tied to chassis ground in
meter connector. Make no connection
on customer end.
2. All power leads must be connected to
power supply.
INCHES/MILLIMETERS

2-4
Installation and Operation Manual
X-TMF-5860E-MFM-eng
Part Number: 541B106AAG
November, 2008
Brooks®Model 5860E
Section 2 Installation
Recommended installation procedures:
a. The Model 5860E should be located in a clean dry atmosphere
relatively free from shock and vibration.
b. Leave sufficient room for access to the electrical components.
c. Install in such a manner that permits easy removal if the instrument
requires cleaning.
When used with a reactive (sometimes toxic) gas, contamination or
corrosion may occur as a result of plumbing leaks or improper
purging. Plumbing should be checked carefully for leaks and the
meter purged with dry Nitrogen before use.
d. The Model 5860E Mass Flow Meter can be installed in any position.
However mounting orientations other than the original factory
calibration (see data sheet) will result in a ±0.5% maximum full scale
shift after re-zeroing.
e. When installing flow meters be aware that sharp abrupt angles in the
system piping directly upstream of the meter may cause a small shift
in accuracy. If possible have at least 10 pipe diameters of straight
tubing upstream of the Model 5860E Mass Flow Meter.
2-6 In-Line Filter
It is recommended that an in-line filter be installed upstream from the
flowmeter to prevent the possibility of any foreign material entering the flow
sensor. The filtering element should be replaced periodically or
ultrasonicallycleaned.
Table 2-1 Recommended Filter Size
Maximum Flow Rate Recommended Filter Size
100 sccm 1 micron
500 sccm 2 micron
1 to 5 slpm 7 micron
10 to 30 slpm 15 micron
Note: The above Table lists the maximum recommended porosity for each
flow range. It is recommended that the minimum micron porosity that does
not limit the full scale flowrate be used.

2-5
Installation and Operation Manual
X-TMF-5860E-MFM-eng
Part Number: 541B106AAG
November, 2008 Brooks®Model 5860E
Section 2 Installation
2-7 Electrical Interfacing
To insure proper operation, the Model 5860E must be connected per
Figure 2-2.
Note: There are several functions on the printed circuit board which are
not used by the Model 5860E.Avoid making connections marked in Figure
2-2 which are marked •.Also, the plug-in jumpers on the printed circuit
board are not used by the Model 5860E and have no effect on
performance.
The following minimum electrical connections must be made for new
installations:
Chassis Ground
0-5 Volt Signal Common
0-5 Volt Signal Output
+15 Vdc Supply
-15 Vdc Supply

2-6
Installation and Operation Manual
X-TMF-5860E-MFM-eng
Part Number: 541B106AAG
November, 2008
Brooks®Model 5860E
Section 2 Installation
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3-1
Installation and Operation Manual
X-TMF-5860E-MFM-eng
Part Number: 541B106AAG
November, 2008 Brooks®Model 5860E
Section 3 Operation
3-1 Theory of Operation
The thermal mass flow sensing technique used in the 5860E works as
follows:
Aprecision power supply provides a constant power heat input (P) at the
heater which is located at the midpoint of the sensor tube. (Refer to Figure
3-1)At zero or no flow conditions, the heat reaching each temperature
sensor (one upstream and one downstream of the heater) is equal.
Therefore, the temperatures T1 and T2 are equal. When gas flows through
the tube, the upstream sensor is cooled and the downstream sensor is
heated, producing a temperature difference. The temperature difference
T2-T1 is directly proportional to the gas mass flow.
The equation is: ΔT = A * P * Cp* m
Where,
ΔT = temperature difference T2 - T1 (°K)
Cp= specific heat of the gas at constant pressure
(kJ/kg-°K)
P = heater power (kJ/s)
m = mass flow (kg/s)
A = constant of proportionality (S2-°K2/kJ2)
Abridge circuit interprets the temperature difference and a differential
amplifier generates a linear 0-5 Vdc signal directly proportional to the gas
mass flow rate.
The flow restrictor shown in Figure 3-1 performs a ranging function similar
to a shunt resistor in an electrical ammeter. The restrictor provides a
pressure drop that is linear with flow rate. The sensor tube has the same
linear pressure drop/flow relationship. The ratio of the restrictor flow to the
sensor tube flow remains constant over the range of the meter. Different
restrictors have different pressure drops and produce meters with different
full scale flow rates. The span adjustment in the electronics affects the fine
adjustment of the controller's full scale flow.
The Model 5860E has the following features incorporated in the integral
control circuit:
Fast Response adjusted by the anticipate potentiometer. This circuit, when
properly adjusted, allows the high frequency information contained in
the sensor signal to be amplified to provide a faster responding flow
signal for remote indication.
Removable cleanable sensor permits the user to clean or replace the
sensor. Refer to Section 4-4.
Output Limiting prevents possible damage to delicate data acquisition
devices by limiting the output to +6.8 Vdc and -.7 Vdc.

3-2
Installation and Operation Manual
X-TMF-5860E-MFM-eng
Part Number: 541B106AAG
November, 2008
Brooks®Model 5860E
Section 3 Operation
3-2 Operating Procedure
a.Apply power to the flowmeter and allow approximately 45 minutes for
the instrument to warm-up and stabilize its temperature.
b. Turn on the gas supply.
c. Shut-off flow to the meter and observe the flowmeter's output signal.
If the output is not 0mVdc (±10mVdc), check for leaks and if none
are found, refer to the re-zeroing procedure in Section 3-3.
d.Adjust for the desired flow and assume normal operation.
3-3 Zero Adjustment
Each Model 5860E is factory adjusted to provide a 0 ±10mVdc signal at
zero flow. The adjustment is made in our calibration laboratory which is
temperature controlled to 21.1°C (70°F ±2°F).After initial installation and
warm-up in the gas system the zero flow indication may be other than the
factory setting. This is primarily caused by changes in temperature
between our calibration laboratory and the final installation. The zero flow
reading can also be affected to a small degree by changes in line pressure
and mounting attitude.
To check zero always mount the meter in its final configuration and allow a
minimum of 45 minutes for the temperature of the meter and its
environment to stabilize. Using a suitable voltmeter check the controller
output signal. If it differs from the factory setting adjust it by removing the
lower pot hole plug, which is located closest to the controller body.Adjust
the zero potentiometer (refer to Figure 3-3) until the desired output signal is
obtained.
Figure 3-1 Flow Sensor Operational Diagram

3-3
Installation and Operation Manual
X-TMF-5860E-MFM-eng
Part Number: 541B106AAG
November, 2008 Brooks®Model 5860E
Section 3 Operation
3-4 Calibration Procedure
NOTE 1: Calibration of the Model 5860E mass flowmeter requires the use
of a digital voltmeter (DVM) a flow control valve or mass flow controller to
set the flow rate and a precision flow standard calibrator such as the
Brooks Vol-U-Meter®. It is recommended that the calibration be performed
only by trained and qualified service personnel.
NOTE 2: If the mass flowmeter is to be used on a gas other than the
calibration gas, apply the appropriate sensor conversion factor.
a. Adjust the anticipate potentiometer fully clockwise (20 turns). Then
adjust the anticipate potentiometer 10 turns counterclockwise to
center the potentiometer. This will provide a rough adjustment of this
circuit and make the flow signal stable for calibration.
b. Connect the DVM positive lead to the 0-5V signal output (terminal 3
card edge, pin 2 D-type) and the negative lead to signal common
(TP4).Adjust the zero potentiometer for an output of 0mV ±2mV.
c. Increase the flow rate until the flow signal output equals 5.000V.
Connect the DVM positive lead to the 0.5V signal output (pin 2 of the
"D" connector) and the negative lead to TP4. Connect the DVM
positive lead to TP2 (linearity voltage) and the negative lead to TP4
(signal common).Adjust the linearity potentiometer for an output of
0.0V (zero volts).
d. Connect the DVM positive lead to the 0-5V signal output (pin 2 of D-
Connector) and the negative lead to TP4 (circuit common). Measure
the flow rate using suitable volumetric calibration equipment.Adjust
the flow rate to the proper full scale flow.
Adjust the span potentiometer until the voltage at pin 2 is 5.000V.
e. Measure the voltage at TP1. The voltage at TPl is -100 times the
output voltage of the sensor. This voltage can range from -1.2 to -12
volts, however it is recommended that this voltage stays between
-2.0 and -9.0 volts for proper operation. If the recommended voltage
range exceeds this then the desired accuracy and/or signal stability
may not be achieved. If one of the limits is reached check the
restrictor sizing procedures. Refer to Section 4-6.
f. Shut off the flow. Connect the DVM positive lead to flow signal output
(pin 2 D-type) and the negative lead to TP4. Readjust the zero
potentiometer for an output of 0mV± 2mV as necessary.
g. Flow rate for a flow signal output of 50% (2.500V) and measure the
flow rate. Calculate the error as a percentage of full scale.

3-4
Installation and Operation Manual
X-TMF-5860E-MFM-eng
Part Number: 541B106AAG
November, 2008
Brooks®Model 5860E
Section 3 Operation
Figure 3-2 Model 5860E Calibration Connections
Figure 3-3 Adjustment Potentiometer Location
Figure 3-4 Fast Response Adjustment