DISCO DAD522 User manual

2002-09
disco INSTALLATION MANUAL
Automatic Dicing/Cutting Saws
DAD522
DAC552
DAD562
SOFTWARE VERSION 7.00 SERIES AND NEWER
UHRSNE*070AA
Copyright of this document is owned by Disco Corporation ("Disco").
No part of this document may be copied or reproduced in any form
or by any means, without the express written permission of Disco.
Also, this document may not be disclosed or transferred to third
parties.
This document is printed on recyclable Lint-Free Paper.
- The blue paper is recyclable as used paper just like plain paper.
- The cover paper and adhesive portions are non-recyclable.
(Remove the cover and adhesive portions before recycling.
Recycle the blue paper only.)
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READ CAREFULLY BEFORE USING THIS
MANUAL
Introduction
This machine is a dicing/cutting saw for cutting silicon wafers, glass, ceramics
and VTR heads (workpieces, hereafter).
It has the rotary sections which rotate at high speed, the high-voltage sections
which may cause electric shock hazards and the drive sections which may
catch the operator's body or clothing.
If the machine is not properly operated, safety hazards may cause serious
injury or death.
Read before using the machine
Before using the machine, thoroughly read this manual and follow the
instructions set forth in this manual.
To assure safety in the operation and maintenance of the machine, it is
important that you know the location of potential safety hazards. It is difficult
for DISCO to foresee each and every potential safety hazard. However, this
manual carries various precautionary notes and warnings to indicate the
presence of all foreseeable potential safety hazards. For increased safety
assurance, it is therefore essential that you observe all the precautions and
other relevant instructions set forth in this manual.
If you modify the machine without prior consent of DISCO or repair it in a
manner not stated in this manual, the safety assurance features of the machine
may be seriously affected.
Never attempt to modify or repair the machine in a manner not approved by
DISCO.
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Hazard level
The safety precautions set forth in this document are classified into DANGER,
WARNING and CAUTION categories which represent three degree of hazards
latent in the machine. These categories are defined as detailed below in
accordance with the seriousness and probability level of the hazard. In addition
to the above three safety precaution levels, CAUTION without the safety alert
symbol ( ) and NOTICE are used to give safety usage instructions to the
user.
Before using the machine, be sure to read and understand all the associated
safety precautions set forth in the manual.
Hazard levels are classified as follows:
DANGER
If you cannot avoid the incident in question, a critical
situation in which either critical injury or death is very
likely to result.
This symbol is used for the incident in which the injury
is critical and there is high probability of occurrence.
WARNING
If you cannot avoid the incident in question, a serious
situation in which either critical injury or death may
result.
This symbol is used for the incident in which the injury
is serious but there is not high probability of occurrence.
CAUTION
If you cannot avoid the incident in question, a medium
or slight injury may result.
This symbol is used for the incident in which the injury
is slight and there is not high probability of occurrence.
CAUTION If you cannot avoid the incident in question, an accident
of physical damage may be caused.
NOTICE Indicates the safe way of using the machine as well as
precautions to avoid accidents resulting damage to
property.
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Safety label
Safety labels are affixed to the hazardous sections of the machine. Before
using the machine, verify the label positions and thoroughly understand the
precautions and warning indicated by the safety labels.
Label Hazard Level Meaning of Label
Rotary Blade
Label
WARNING WARNING
It is possible that your hands and
fingers may be cut by the rotating
blade.
Observe the following precautions
for at least 15 seconds until the
spindle comes to a complete stop:
- Do not place your hands or fingers
near the blade or flange.
- Ensure that the waterproof cover is
kept closed.
Driving Section
Label
CAUTION CAUTION
It is possible that yours hands and
fingers may be caught and injured by
the driving section.
While the power is ON, ensure that
the cover is kept closed.
Electrical Shock
Hazard Label WARNING
Use care to avoid possible electrical
shock hazard.
General Label
WARNING
General caution/warning/danger
label.
Laser Beam Label
WARNING WARNING
The DAC552 has sections where
laser beam is used. It is possible that
you will lose your eyesight if you
see a laser beam directly.
Do not disassemble the part where
laser beam is used.
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Intro-1
INTRODUCTION
About this manual
This Installation Manual describes the installation and adjustment procedures
of Automatic Dicing/Cutting Saws 5*2 Series Models DAD522, DAC552 and
DAD562.
To ensure safety
To ensure safety, be sure to thoroughly read and understand the contents of this
manual before installing and adjusting the machine.
Note that this manual is based on the software of version 7.00 and newer.
When installing or adjusting the machine, be sure to follow the procedures set
forth in this manual.
Be sure that the machine is installed and adjusted by a qualified person who
has completed DISCO's education curriculum (hereafter referred to as the
maintenance personnel).
Definition of a manager and an operator
This manual defines a manager and an operator as follows:
Category Applicable
Personnel Job
Manager Management
representative The person who is responsible for overall management of machines and operators.
Maintenance
personnel The qualified person who received DISCO machine maintenance training.
Operator Data maintenance
personnel The qualified person who is responsible for management of software data of the machine.
Operator The person who operates the machine to
process workpieces.
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Intro-2
Documentation for this machine
The following five written manuals are provided for this machine.
This manual is the Installation Manual indicated by the arrow.
Manual Who should read Contents
Installation
Manual Maintenance personnel Operational procedures for machine installation and
adjustment
Operation Manual Operator Operational procedures to be
performed by operators
Data Maintenance
Manual Data maintenance personnel Screen contents for data entry and data entry procedures
Maintenance
Manual Maintenance personnel Servicing, inspection and adjustment procedures to be
performed by customers
Technical
Reference Maintenance personnel Machine specifications, circuit diagrams, illustrations and
part lists
Unit notation
International System of Unit is adopted to express any unit. The values in the
parenthesis are reference data. Also, all the pressure values are expressed in
gauge pressure.
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Intro-3
Section diagram
The diagram and table below show names and functions of each section.
Cutting section
Operating control
section
Name Function
Cutting Section Cuts workpieces.
Operating Control
Section Keys on the operation panel are used for data entries and operations.
Also, the monitor displays operation-related
information in accordance with operation panel
manipulation. On the DAD522 and DAD562, it also
displays microscope images. (Camera is an optional
accessory for the DAC552.)
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Intro-4
External view
The diagram and the table below show the external view, names and functions
of main constituents.
Pilot lamp [Optional accessory]
Waterproof cover
Microscope
Spindle coolant water
flow rate sensor
[Optional accessory]
Wheel coolant water flowmeter
Monitor
EMO switch
Direct light intensity
adjustment dial
Power switch
Maintenance
switch
Floppy disk drive
[Optional accessory]
POWER lamp
Vacuum gauge
Oblique light intensity
adjustment dial
[Optional accessory]
Operation panel
Slide cover
Name Function
Operation panel Consists of operation control keys.
Waterproof cover Prevents water from splashing around during spindle
rotation and functions as a safety device.
Slide cover Prevents water from splashing around during spindle
rotation and functions as a safety device.
Vacuum gauge Indicates the chuck table vacuum pressure to attract the
workpiece to the chuck table.
Flowmeter Indicates the flow rate of the wheel coolant water.
Floppy disk drive Functions as an external storage device.
[Optional accessory]
Pilot lamp Indicates the machine operating status with the blue, green
and yellow lamps. If an error occurs, the red lamp flashes on
and off. [Optional accessory]
Monitor Displays operating information and microscope images.
POWER lamp Lights while the power is ON.
POWER switch Used to turn ON and OFF the machine by inserting and
rotating the key.
Maintenance switch Used by the maintenance personnel.
Direct light intensity
adjustment dial Adjusts the microscope image light intensity for direct lighting.
Oblique light intensity
adjustment dial Adjusts the microscope image light intensity for oblique lighting. [Optional accessory]
EMO switch Functions as the emergency stop switch. When pressed,
shuts off the electrical power supply.
Microscope Used to view workpieces for alignment or other purposes.
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Intro-5
Axis arrangement diagram [DAD522]
The diagram and the table below show axis arrangement, names and functions
of each axis for the DAD522.
X-axis
Spindle shaft
Y-axis
Z-axis
θ-axis
Main body frame
Front
Name Function
X-axis Moves the chuck table to the right and the left.
Y-axis Moves the spindle shaft and the microscope
forward and backward.
Z-axis Moves the spindle up and down.
θ-axis Rotates the chuck table.
Spindle Shaft Section Rotates a blade at a high speed.
Main Body Frame Supports the machine main body.
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Intro-6
Axis arrangement diagram [DAC552]
The diagram and the table below show axis arrangement, names and functions
of each axis for the DAC552.
X-axis
Spindle shaft
Y-axis
Z-axis
Main body frame
Front
Name Function
X-axis Moves the chuck table to the right and the left.
Y-axis Moves the spindle shaft and the microscope
forward and backward.
Z-axis Moves the spindle up and down.
Spindle Shaft Section Rotates a blade at a high speed.
Main Body Frame Supports the machine main body.
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Intro-7
Axis arrangement diagram [DAD562]
The diagram and the table below show axis arrangement, names and functions
of each axis for the DAD562.
X-axis
Spindle shaft
Y-axis
Z-axis
θ-axis
Main body frame
Front
Name Function
X-axis Moves the chuck table to the right and the left.
Y-axis Moves the spindle shaft and the microscope
forward and backward.
Z-axis Moves the spindle up and down.
θ-axis Rotates the chuck table.
Spindle Shaft Section Rotates a blade at a high speed.
Main Body Frame Supports the machine main body.
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Contents-1
CONTENTS
READ CAREFULLY BEFORE USING THIS MANUAL
INTRODUCTION................................................Intro-1
CONTENTS.................................................Contents-1
A. IMPORTANT SAFETY INFORMATION..............A-1
1. General Safety Precautions.................................................................... A-2
2. Safety Items for Hoisting and Moving the Machine................................. A-4
3. Safety Precautions to Be Observed During Operation............................ A-5
4. Inherently Hazardous Areas and Ways to Avoid Hazards .................... A-11
4-1. Inherently Hazardous Areas for Operation and Ways to Avoid Hazards........A-12
4-2. Inherently Hazardous Areas for Maintenance and Ways to Avoid Hazards ...A-17
5. EMO Switch ......................................................................................... A-24
6. Power Circuit Breaker .......................................................................... A-28
7. Interlock Mechanism ............................................................................ A-33
7-1. Interlock Mechanism of Covers......................................................................A-35
8. Safety Labels ....................................................................................... A-42
B. WHOM TO CONTACT IN AN EMERGENCY..B-1
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Contents-2
CONTENTS
C. INSTALLATION ..................................................C-1
1. Installation Specifications and Environment ........................................... C-2
1-1. Specifications...................................................................................................C-3
1-2. Standard Packing Style on Delivery.................................................................C-9
1-3. Installation Environment.................................................................................C-10
1-3-1. Installation site......................................................................................C-11
1-3-2. Environment requirements....................................................................C-12
1-4. Piping and Wiring Connection........................................................................C-13
1-4-1. Rear side connecting positions.............................................................C-14
1-4-2. Piping and wiring connection ................................................................C-15
2. Installation Operation ........................................................................... C-16
2-1. Hoisting and Lowering the Machine ...............................................................C-18
2-1-1. Hoisting and lowering the machine by a crane .....................................C-19
2-1-2. Hoisting and lowering the machine by a handlift...................................C-23
2-2. Transferring the Machine................................................................................C-26
2-3. Installing the Machine with Adjusters .............................................................C-28
2-4. Removing Electrical Box Metal Fixtures.........................................................C-30
2-5. Removing Main Base Bolt Fixtures ................................................................C-32
2-6. Removing Drive Axis Metal Fixtures...............................................................C-33
2-7. Piping and Wiring Connection........................................................................C-37
2-7-1. Connecting piping.................................................................................C-38
2-7-2. Connecting power supply wiring ...........................................................C-39
2-8. Mounting Machine Outer Covers....................................................................C-46
2-9. Leveling the Machine with Adjusters..............................................................C-48
2-9-1. Mounting the spirit level........................................................................C-49
2-9-2. Removing the machine outer cover ......................................................C-50
2-9-3. Leveling the machine............................................................................C-52
2-10. Mounting Machine Anchors [Optional Feature] ............................................C-54
2-11. Completion of Installation Operation ............................................................C-55
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Contents-3
CONTENTS
3. Transferring Operation......................................................................... C-56
3-1. Water Drainage..............................................................................................C-58
3-2. Removing Machine Outer Covers ..................................................................C-60
3-2-1. Turning OFF the power.........................................................................C-61
3-2-2. Removing covers other than the top cover and circuit breaker section
cover...................................................................................................C-62
3-2-3. Removing the circuit breaker section cover ..........................................C-65
3-2-4. Removing the top cover........................................................................C-67
3-3. Securing Drive Axes.......................................................................................C-68
3-4. Fixing Main Base............................................................................................C-73
3-5. Disconnecting Piping and Wiring....................................................................C-74
3-6. Securing the Electrical Box.............................................................................C-75
3-7. Removing Machine Anchors [Optional Feature].............................................C-76
3-8. Raising Adjusters ...........................................................................................C-77
INDEX............................................................... Index-1
ADDRESS LIST
IN AN EVENT OF AN ACCIDENT
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A-1
A. IMPORTANT SAFETY INFORMATION
Contents of this chapter
This chapter describes various precautions to assure safety in the operation and
safety protective functions employed in this machine.
Section No. Title Contents
1 General Safety
Precautions - Safety precautions to be understood before operation
- Safety precautions to be
observed during operation
2 Safety Items for Hoisting
and Moving the Machine - Safety precautions to be observed during hoisting and
moving the machine
3 Safety Precautions to Be
Observed During
Operation
- Safety precautions that operators
should understand before
operation
- Safety precautions that operators
should observe during
performing any work
4 Inherently Hazardous
Areas and Ways to Avoid
Hazards
- Potentially hazardous sections
and the ways to avoid hazards
5 EMO Switch - Construction of the EMO
(Emergency OFF) switch
- Function of the EMO switch
6 Power Circuit Breaker - Construction of the power circuit
breaker
- Function of the power circuit
breaker
7 Interlock Mechanism - Construction of the interlock
mechanism
- Function of the interlock
mechanism
8 Safety Labels - Type of safety labels
- Affixing positions of safety
labels
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A-2
1. General Safety Precautions
General safety precautions
This section describes the general safety precautions that should be understood
before operation and observed during operation.
CAUTION
Machine installation environment
Comply with the recommended machine installation conditions (such
as room temperature, humidity or temperature of spindle coolant
water and wheel coolant water). If the machine is installed in an
environment that does not conform to the installation conditions
recommended by DISCO, rust formation may occur due to moisture
condensation or other factor, thereby adversely affecting the cutting
accuracy.
For the recommended environmental conditions, see section C-1 of
Installation Manual, [Installation Specifications and Environment].
NOTICE
- Responsibility for instructing workers
Instruct the workers who perform installation to read the safety
precautions set forth in the Installation Manual before proceeding to
work. Also, if the workers perform various tasks, direct them to read
the points of note concerning the safety given in the respective
manuals.
The written instructions for this machine are Installation Manual,
Operation Manual, Data Maintenance Manual, Maintenance Manual
and Technical Reference Manual.
- Responsibility for instructing workers who seem not to understand
the points of note
For the workers who seem not understand what is given in the
manuals, explain the safety items described in this chapter so that
they understand what the points mean.
- Regular inspection
The machine must be inspected on a regular basis.
If any accidents occur while an appropriate regular inspection
program is not adhered to, DISCO is not responsible for the results.
- Maintenance personnel
Maintenance must be conducted by qualified personnel who has
received the maintenance training.
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A-3
General safety precautions Continued
NOTICE
- Proper installation of safety device
If the covers or other parts with safety interlocks are broken,
immediately stop the machine and repair broken parts.
- Air exhaust, water drainage and contamination control
Since harmful substance may be generated depending on the
cutting work type and machining characteristics, air exhaust, water
drainage and contamination control/disposal must be properly
completed in compliance with applicable environmental protection
codes.
- Exhaust sampling port
The machine requires an exhaust operation. When measuring the
exhaust for the machine to fulfill legal requirements, use the
sampling port, which is provided at the location indicated below.
(connection port: Rc1/4)
Duct
Sampling port
[Rc1/4]
- Facility side interlock connection terminal (Special user
specification)
To permit the facility side to provide air exhaust and water drainage
interlock, the machine is equipped with air exhaust and water
drainage reservoir tank interlock connection terminals.
When connecting these terminals to the facility side interlock
system, contact your nearest DISCO office.
- Machine relocation/disposal
In the case of relocation or disposal of the machine, the
presentation of detailed precautionary notes and the management
of new installation site data will be done by DISCO.
If you want to relocate or dispose the machine, contact your nearest
DISCO office or DISCO service office.
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A-4
2. Safety Items for Hoisting and Moving the
Machine
Safety items for hoisting and moving the machine
Follow the safety precautions below when hoisting and moving the machine.
DANGER
- Hoisting the machine
If the machine should fall while it is hoisted, any person under the
machine could be crushed to death or seriously injured. Further,
when the machine is hoisted, it may swing like a pendulum and
press the personnel against the wall or bump against the body of the
personnel, which results in death or serious injury.
When the machine is hoisted, stay away from the area beneath the
machine and from its surrounding area.
- Lifting crane, handlift and hoisting jigs
If the machine should fall while it is hoisted, any person under the
machine could be crushed to death or seriously injured. When
hoisting the machine properly secure the machine with the specified
hoisting jigs.
The mass of the machine is 670 kg for DAD522, DAC552 and
DAD562.
Ensure that the maximum load rating for the employed lifting crane
or handlift is adequate for the machine weight, boom length and
hoisting angle.
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A-5
3. Safety Precautions to Be Observed During
Operation
Safety precautions to be observed during operation
This section describes the safety precautions that should be understood before
starting operation and observed during operation by operators.
WARNING
- Blade section
The blade has a sharp edge. Therefore, if your fingers or hands
come into contact with it, they may be scarred or cut off.
Do not place your fingers or hands beneath the blade.
- Moving parts
If you place your fingers or hands in a motor driven part, they may
be caught or cut off.
Do not touch any moving parts during operation.
Do not put your fingers or hands into the operating space of any
moving parts.
- When the machine interior or floor get wet with water
If you operate the machine while its interior or floor get wet with
water, you may receive electric shock that could result in serious
injury or death.
If the machine is wet with water, do not turn ON the facility power
supply until it dries.
If the floor is wet with water, turn OFF the facility power supply and
wipe the floor dry.
- Maintenance key storage
The maintenance key is an interlock related key for use with the
machine. It is used to disable the power shutoff feature for axis
drivers except for the spindle while the waterproof cover is open.
This key must be stored with due care by qualified maintenance
personnel.
When the key is needed during machine operations, the associated
operations must be carried out with due care by the maintenance
personnel.
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A-6
Safety precautions to be observed during operation Continued
WARNING
- Waterproof cover lock
When the machine power is ON and during spindle rotation, the
waterproof cover is locked. If the machine power turns OFF during
spindle rotation (by EMO switch activation, power failure, etc.), the
waterproof cover is locked and does not open even when the
machine is OFF.
If it is necessary to open the waterproof cover while power cannot
be restored, the cover lock cylinder has to be released. Performing
maintenance with the cover lock released may cause injury to the
personnel or damage to the machine. Maintenance tasks must be
carefully performed by the qualified personnel. While a maintenance
task is being performed, no one must touch the machine except the
maintenance personnel (for detailed interlock operation
descriptions, see section 7 of this chapter, [Interlock Mechanism]).
- Circuit breaker lever lockout
Before performing maintenance tasks with the machine turned OFF,
lock up the circuit breaker lever with a padlock or the like. Observe
this precaution to prevent irrelevant persons from inadvertently
touching the machine to invoke unexpected operations. For circuit
breaker lever lockout, perform the following steps:
1) Turn OFF the key switch, which is located at the right of the
monitor, and then take out the key.
2) Turn OFF the circuit breaker lever at the rear side of the
machine. As shown below, lock up the circuit breaker lever with a
padlock or the like.
[Standard (CE) version] [SEMI version]
Push the knob to the left.
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