Edwards Barocel 7025 User manual

W602100880_A Original Instructions
Barocel 7025 Gauge
INSTRUCTION MANUAL
edwardsvacuum.com

W602100880_A - Copyright notice
Page 2
Copyright notice
©Edwards Limited 2019. All rights reserved.
Trademark credits
Edwards and the Edwards logo are trademarks of Edwards Limited, Innovation Drive,
Burgess Hill, West Sussex RH15 9TW.
VCR® Swagelok Marketing Co.
Disclaimer
The content of this manual may change from time to time without notice. Edwards accepts no
liability for any errors that may appear in this manual nor does it make any expressed or
implied warranties regarding the content. So far as is reasonably practicable Edwards has
ensured that its products have been designed and constructed so as to be safe and without
risks when properly installed and used in accordance with Edwards operating instructions.
Edwards accepts no liability for loss of profit, loss of market or any other indirect or
consequential loss whatsoever.
Product warranty and limit of liability are dealt with in Edwards standard terms and conditions
of sale or negotiated contract under which this document is supplied.
You must use the Barocel 7025 as described in this manual. Read this manual before you
install, operate and maintain the Barocel 7025.

P20010230A
CE Declaration of Conformity
The following product
List products here including –
•Barocel 7025m Series Capacitance Manometer W6011*
•Barocel 7025 Series Capacitance Manometer W6021*
•Barocel 7045 Series Capacitance Manometer W6032*
•Barocel 7100 Series Capacitance Manometer W6033*
Is in conformity with the relevant requirements of European CE legislation:
2014/30/EU
Electromagnetic compatibility (EMC) directive
2011/65/EU
Restriction of certain hazardous substances (RoHS) directive
as amended by Delegated Directive (EU) 2015/863
Based on the relevant requirements of harmonised standards:
EN 61010-1:2010
Safety requirements for electrical equipment for measurement, control and laboratory
use. General requirements
EN 60529:1991 +
A2:2013
Specification for degree of protection provided by enclosures (IP code)
– IP code 30
EN 61326-1:2013
Electrical equipment for measurement, control and laboratory use. EMC requirements.
General requirements
Class B Emissions, Industrial Immunity
This declaration, based on the requirements of the listed Directives and EN ISO/IEC 17050-1, covers all product
serial numbers from this date on: 6th June 2019.
Larry Marini – Senior Technical Manager
Eastbourne
Andy Marsh – General Manager
Eastbourne
Edwards Ltd
Innovation Drive
Burgess Hill
West Sussex
RH15 9TW
UK

This product has been manufactured under a quality management system certified to ISO 9001:2015
Additional Legislation and Compliance Information
EU RoHS Directive: Material Exemption Information
This product is compliant with no Annex III or IV Exemptions
EU REACH Regulation Compliance
This product is a complex article which is not designed for intentional substance release. To the best of our knowledge
the materials used comply with the requirements of REACH. The product manual provides information and instruction to
ensure the safe storage, use, maintenance and disposal of the product including any substance-based requirements.
Article 33 Declaration
This product does not knowingly or intentionally contain Candidate List Substances of Very High Concern above 0.1%ww
by article as clarified under the 2015 European Court of Justice ruling in case C-106/14.
ADDITIONAL INFORMATION
材料成分声明
China Material Content Declaration
表示该有害物质在该部件的所有均质材料中的含量低于 GB/T 26572 标准规定的限量要求。
Indicates that the hazardous substance contained in all of the homogeneous materials for this part is
below the limit requirement in GB/T 26572.

Page 3
W602100880_A - Contents
Introduction 7
Product identification .................................................................................................... 7
Intended use .................................................................................................................. 7
Function ......................................................................................................................... 7
Before using this gauge .................................................................................................. 7
Safety symbols ............................................................................................................... 7
Safety precautions .........................................................................................................7
Liability and warranty .................................................................................................... 8
Technical data 9
Dimensions ................................................................................................................... 11
Analogue measurement signal versus pressure .......................................................... 12
Installation 13
Vacuum connection ..................................................................................................... 13
Electrical connection .................................................................................................... 14
Operation 16
Displays ........................................................................................................................16
To zero the gauge ........................................................................................................ 16
<ZERO> Adjustment ........................................................................................... 17
<ZERO> Adjustment with ramp function ........................................................... 18
Switching Functions ..................................................................................................... 19
Adjusting the setpoints ...................................................................................... 20
Activating the factory setting (factory reset) ............................................................... 21
Uninstallation 22
Maintenance and repair 23
Return the equipment for service 24
Disposal 25
Separating the components ......................................................................................... 25
Contents
cg/0132/01/18

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Page 4
W602100880_A - Contents

Page 5
W602100880_A - List of Figures
Figure 1: Dimensions .............................................................................................................. 11
Figure 2: Analogue measurement signal versus pressure ...................................................... 12
Figure 3: Connect the gauge to the system ............................................................................ 14
Figure 4: Sensor cable ............................................................................................................ 15
Figure 5: Gauge display .......................................................................................................... 16
Figure 6: Measurement signal (Pressure p) ........................................................................... 20
List of Figures

Page 6
W602100880_A - List of Tables
Table 1: General ....................................................................................................................... 9
Table 2: Output signal .............................................................................................................. 9
Table 3: Gauge identification ................................................................................................... 9
Table 4: Switching functions .................................................................................................... 9
Table 5: Electrical ................................................................................................................... 10
Table 6: Materials exposed to vacuum .................................................................................. 10
Table 7: Environmental .......................................................................................................... 11
List of Tables

Page 7
W602100880_A - Introduction
Introduction
Product identification
Specify the information given on the gauge nameplate in all communications with Edwards.
Intended use
The Barocel 7025 gauge is intended for absolute pressure measurement of gases in their
respective pressure ranges, see Installation on page 13. The unit is clean room compliant and
double protected against contamination.
The gauges belong to the Barocel 7000 series and can be operated in connection with an
Edwards TIC controller or another applicable unit.
Function
The Barocel 7025 gauge has a capacitive sensor element made of aluminium oxide ceramics
and electronics which convert the capacitance into a direct current (d.c.) voltage output
signal.
The output signal is linear to the measured pressure and independent of the gas type.
Before using this gauge
Make sure that the model is the same as you ordered and no damage occurred during
shipment.
Read this instruction manual before you install, operate, inspect, or service this gauge to
familiarize yourself with safety precautions, specifications and operations.
Safety symbols
Important safety information is highlighted as WARNING and CAUTION instructions. Obey the
safety instructions.
The use of warnings and cautions is defined as:
Safety precautions
Obey the applicable regulations and follow the necessary precautions for the process
media used. Reactions with the gauge materials are possible.
WARNING:
Warnings are given where failure to obey the instruction could result in injury or death to
people. The actual symbol shown will change and refer to the applicable hazard.
CAUTION:
Cautions are given where failure to obey the instruction could result in minor injury or
damage to the equipment, associated equipment or process.

Page 8
W602100880_A - Introduction
Obey the applicable regulations and follow the necessary precautions for the work
you do. Obey the safety instructions in this document.
Before you start work, find out if any vacuum components are contaminated. Obey
the applicable regulations and the necessary precautions when you handle
contaminated parts.
Ensure all other users are aware of the safety instructions.
Liability and warranty
Edwards accepts no liability and the warranty becomes non applicable if the end user or third
parties:
Ignore the information in this document
Use the gauge in a non-agreeable manner
Make any kind of interventions (modifications, alterations, etc.) on the gauge
Use the gauge with accessories not listed in this instruction manual.
The customer assumes the responsibility along with the process media used.
Gauge failures because of contamination are not included in the warranty.

Page 9
W602100880_A - Technical data
Technical data
Table 1 General
Measurement range
Accuracy
1.0 Torr/mbar (F.S.) 0.20% of reading
0.1 Torr/mbar (F.S.) 0.50% of reading
Temperature effect on zero
10.0 Torr/mbar (F.S.) 0.0050% F.S./°C
0.1 Torr/mbar (F.S.) 0.020% F.S./°C
Temperature effect on span
1.0 Torr/mbar (F.S.) 0.01% of reading/°C
0.1 Torr/mbar (F.S.) 0.03% of reading/°C
Resolution 0.003% F.S.
Gas type dependence None
Mass  g
Table 2 Output signal
Output signal analogue (measurement
signal)
Voltage range -5 to +10.24 V
Measurement range 0 to +10 V
Relationship voltage-pressure Linear
Output impedance 0  (short-circuit proof)
Loaded impedance > 10 k
Response time
0.25 Torr/mbar (F.S.) 30 ms
0.1 Torr/mbar (F.S.) 130 ms
Table 3 Gauge identification
Gauge identification Resistance 13.2 k referenced to supply
common (Voltage at pin 10, 5 V)
Table 4 Switching functions
Switching functions SP1, SP2
Setting range 0 to 10 V
Hysteresis 1% F.S.
Relay contact 30 V d.c. /0.5 A (d.c.)
floating (n.o.)
Closed At low pressure (LED is illuminated)
Open At high pressure (LED is not illuminated)
Switching time 50 ms

Page 10
W602100880_A - Technical data
WARNING: HIGH VOLTAGE
Risk of electrical shock. The gauge can only be connected to power supplies, instruments
or control devices that comply with the requirements of a grounded Protective Extra-Low
Voltage (PELV) and Limited Power Source (LPS), Class 2. The connection to the gauge has
to be fused.
Table 5 Electrical
Supply voltage
at the gauge +14 to +30 V d.c.
Class 2/LPS
ripple 1 Vpp
Current consumption < 500 mA (maximum starting current)
Power consumption (supply voltage
dependent)
1 W
Fuse required*
*The gauge is protected against reverse polarity of the supply voltage.
1 AT (slow), automatic reset (Polyfuse)
Electrical connection 15-pin D-Sub, male
Sensor cable
without switching functions 5-pin plus shielding
with switching functions 9-pin plus shielding
Cable length§
§For longer cables, larger conductor cross-sections are required (Rcable
 1.0 
 100 m (0.14 mm² conductor)
Grounding concept
Vacuum flange - signal common See Electrical connection on page 15
Supply common - signal common Conducted separately for differential
measurement (10 )
Table 6 Materials exposed to vacuum
Materials exposed to vacuum
Flange, tube Stainless steel AISI 316L
Sensor and diaphragm Ceramics (Al2O3 99.5%)
Internal volume 3.6 cm3
Admissible pressure (absolute)
200 Torr/mbar (F.S.) 4.0 bar (400 kPa)
1 to 100 Torr/mbar (F.S.) 2.6 bar (260 kPa)
0.1 Torr/mbar (F.S.) 1.3 bar (130 kPa)
Bursting pressure (absolute) 5.0 bar (500 kPa)

Page 11
W602100880_A - Technical data
Dimensions
Figure 1 Dimensions (mm)
Table 7 Environmental
Admissible temperatures
Storage -40 °C to +65 °C
Operation +5 °C to +50 °C
Bakeout (not in operation) 110 °C at the flange
Relative humidity 80% at temperatures
+31 °C decreasing to 50% at +40 °C
Use Indoors only, altitude up to 2000 metres NN
Degree of protection IP 30

Page 12
W602100880_A - Technical data
Analogue measurement signal versus pressure
Figure 2 Analogue measurement signal versus pressure
p = (Uout / 10 V) × p (F.S.)
Conversion Torr to Pascal
Torr mbar Pa
1.00 1013.25 / 760 = 1.3332… 101325 / 760 = 133.3224…
Example: Gauge with 10 Torr F.S.
Measurement signal Uout = 6 V
p = (6 V / 10 V) × 10 Torr
= 0.6 × 10 Torr = 6 Torr

Page 13
W602100880_A - Installation
Installation
Vacuum connection
WARNING: NOT FAIL-SAFE DESIGNED
Risk of death. Do not use the Barocel 7025 for safety critical applications. The gauge is not
intended to be fail-safe.
CAUTION: IMPACT DAMAGE
Risk of damage to equipment. The ceramic sensor can be damaged by impacts. Do not
drop the gauge.
WARNING: PRESSURIZED CONTAINER
Risk of injury or death. A release of parts and process gases because of system
overpressure greater than 1 bar causes a hazard. Do not open any clamps while the
vacuum system is pressurized. Use clamps designed for overpressure conditions.
WARNING: PRESSURIZED CONTAINER
Risk of injury or death. A release of process gases because of system overpressure greater
than 2.5 bar causes a hazard. KF flange connections with elastomer seals cannot resist
such pressures. Use O-rings with an outer centring ring.
WARNING: HIGH VOLTAGE
Risk of electric shock. Make sure that the pump and electrical cables are correctly
protected against earth (ground) faults. A protective earth (ground) conductor
(equivalent or larger than the incoming supply power cable conductor) must be attached
to the protective earth (ground) stud.
CAUTION: DIRT CONTAMINATION
Risk of damage to equipment. Dirt and damage will cause the gauge to operate
incorrectly. When you handle the gauge, prevent dirt and damage to the vacuum
components.
CAUTION: DIRT SENSITIVE AREA
Dirt sensitive area. Do not touch the components with bare hands as it increases the
desorption rate. Wear clean, lint-free gloves and use clean tools when you work in this
area.

Page 14
W602100880_A - Installation
1. Position the gauge to prevent vibrations.
Note:
The gauge can be installed in any orientation. We recommend you install the gauge in a
horizontal to upright position and use a seal with a centring ring and filter to prevent the influx
of condensates and particles in the measurement chamber.
2. Install the gauge so that the buttons can be accessed with a pin for future
adjustments.
3. Remove the protective lid and connect the gauge to the vacuum system.
4. Keep the protective lid.

Page 15
W602100880_A - Installation
Figure 3 Connect the gauge to the system
Electrical connection
Make sure the vacuum connection is correct.
Ground loops, differences of potential, or EMC problems can affect the measurement signal.
For optimum signal quality:
Connect the cable shield to ground on one side through the chassis ground. Do not
connect the other side of the shield.
Connect the supply common with protective ground directly at the power supply.
Use differential measurement input (signal common and supply common wired
separately).
Potential difference between supply common and housing 18 V (over-voltage
protection).
1. Clamp
2. Seal with centring ring
3. Seal with centring ring and filter
4. Protective lid
WARNING: HIGH VOLTAGE
Risk of electric shock. The gauge can only be connected to power supplies, instruments or
control devices that agree to the requirements of a grounded Protective Extra-Low
Voltage (PELV) and Limited Power Source (LPS), Class 2. The connection to the gauge has
to be fused.*
*Edwards controllers meet this requirement.

Page 16
W602100880_A - Installation
1. If a sensor cable is not available, one can be made. Refer to Figure 4 on page 16.
Figure 4 Sensor cable
2. Use lock screws to attach the sensor cable to the gauge.
3. Attach the sensor cable to the controller.
1, 4 Relay SP1, closing contact
2 Signal output (measurement
signal) or thresholds SP1/2
5 Supply common, ground
7, 11 Supply
8, 9 Relay SP2, closing contact
10 Gauge identification
12 Signal common
13 Reserved
14 Reserved
15 Housing (chassis ground)
case Connector case

Page 17
W602100880_A - Operation
Operation
Put the gauge into operation. If you use an Edwards controller, specify the measurement
range and the unit of measurement.
Warm-up time:
For general purpose reading (within specifications) > 0.25 hours
For zero adjustment and precision measurement > 2.00 hours
Displays
Figure 5 Gauge display
To zero the gauge
The gauge is factory calibrated while "standing upright".
Note:
Do a zero adjustment when the gauge is operated for the first time.
Continuous operation or contamination can lead to zero drift and the gauge will need zero
adjustment.
To adjust the zero, operate the gauge under the same constant ambient conditions and in the
same mounting orientation as normal.
LED State Meaning
<RUN> illuminated Measurement mode
flashing Other mode (See To zero the gauge on page 17),
warning, over/under range, error
<1> illuminated p  setpoint level 1
flashing Adjusting setpoint <1>
<2> illuminated p  setpoint level 2
flashing Adjusting setpoint <2>

Page 18
W602100880_A - Operation
The output signal is dependent on the mounting orientation. The signal difference between
the vertical and horizontal mounting orientation is:
Note:
If the gauge is operated through a controller, the zero of the whole measurement system has
to be adjusted on the controller. Adjust the zero on the gauge first and then on the controller.
<ZERO> Adjustment
The zero can be adjusted by:
The <ZERO> button on the gauge
The RS232C interface, see Operation on page 17
An Edwards vacuum gauge controller.
To adjust the zero:
1. Evacuate the gauge to a pressure according to the table below:
Note:
If the final pressure in the gauge is too high for zero adjustment (> 25% of the F.S.), the zero
cannot be reached and the <RUN> LED flashes. If this happens, start the factory setting and
adjust the zero again.
2. Operate the gauge for a minimum of 2 hours (until the signal is stable).
3. Briefly press the <ZERO> button with a pin (maximum ø1.1 mm). The zero
adjustment runs automatically. The <STATUS> LED flashes until the adjustment
(duration 8 seconds) is completed.
F.S. U/90°
1000 Torr/mbar Approximately 2.0 mV
100 Torr/mbar Approximately 10.0 mV
10 Torr/mbar Approximately 50.0 mV
1 Torr/mbar Approximately 300.0 mV
0.1 Torr/mbar Approximately 1.8 V
F.S. Recommended final pressure for zero adjustment
1100 mbar - < 7 × 100 Pa < 7 × 10-2 mbar
1000 Torr < 5 × 10-2 Torr < 7 × 100 Pa -
100 Torr/mbar < 5 × 10-3 Torr < 7 × 10-1 Pa < 7 × 10-3 mbar
10 Torr/mbar < 5 × 10-4 Torr < 7 × 10-2 Pa < 7 × 10-4 mbar
1 Torr/mbar < 5 × 10-5 Torr < 7 × 10-3 Pa < 7 × 10-5 mbar
0.1 Torr/mbar < 5 × 10-6 Torr < 7 × 10-4 Pa < 7 × 10-6 mbar