Edwards STP-iS2207 Series User manual

MT-89E-001-C
STP Series Turbomolecular Pumps
STP-iS2207 Series
Instruction Manual
Copyright 2016 Edwards Japan Limited. All rights reserved. Printed in Japan.
Read through the Safety Precautions and
each section of this Manual carefully before
using the STP pump.
Keep this Manual in a place where you can
quickly access it at any time.
Original Instructions

STP-iS2207 Series Turbomolecular Pump
MT-89E-001-C
Page i
PAGE
i
CONTENTS
Section Title Page
1 INTRODUCTION 1
1.1 Scope and definitions 1
1.2 Applied standards 2
1.3 Limited warranty 3
1.3.1 Warranty period 3
1.3.2 Item warranted 3
1.3.3 Disclaimer 4
1.3.4 Spare parts 4
1.4 Precautions for safe operation of the STP pump 5
1.4.1 Usable gases 5
1.5 Maintenance and inspection precautions 6
1.6 Labels 6
1.7 Operation principle of the STP pump 8
1.8 STP pump specification 10
2 TECHNICAL DATA 11
2.1 STP pump specifications 11
2.2 Maximum gas flow-rate 12
2.3 Water cooling use condition 13
2.4 Control unit 14
2.5 External appearance of the STP pump 16
2.6 Label affixing positions 17
3 INSTALLATION OF THE STP PUMP 19
3.1 Precautions before installation 19
3.1.1 Operating environment 19
3.1.2 Installation area 21
3.1.3 Bench 22
3.1.4 Insulation test 22
3.2 Unpacking and installation 23
3.3 Name and function of each part 27
3.3.1 Name and function of the pump 27
3.3.2 Name and function of the control unit 28
3.4 How to install the STP pump 32
3.4.1 Cleaning the seal 33
3.4.2 STP pump installation positions 34
3.4.3 Secure the STP pump 35
3.4.4 Legs for securing the base 39
3.4.5 Power cable 40
3.4.6 How to connect the power cable 42
3.5 Precautions of vacuum piping 44
3.5.1 Vacuum piping method 45
3.6 Introducing N2gas
(for the STP pump equipped with purge port) 45
3.7 Connecting the water cooling pipe 46
3.8 Attaching a baking heater 47

STP-iS2207 Series Turbomolecular Pump
MT-89E-001-C
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PAGE
ii CONTENTS (CONTINUED)
Section Title Page
3.9 Connecting to semiconductor equipment 48
3.9.1 Connecting to power 48
3.9.2 Emergency off circuit (EMO circuit) 48
4 OPERATION 49
4.1 Gas pumping, cooling and baking the STP pump 49
4.1.1 Gas pumping 49
4.1.2 How to introduce a purge gas 50
4.2 Cooling the STP pump 50
4.2.1 Water-cooling method 50
4.3 Baking the STP pump 51
4.4 Before starting the STP pump 52
4.4.1 Confirmation before starting 52
4.4.2 Confirmation of vacuum system 52
4.5 Powering ON 53
4.6 Pump operation 53
4.6.1 Input operation port setting 53
4.6.2 Starting/stopping the STP pump 54
4.7 How to start/stop the STP pump 55
4.7.1 Starting the STP pump after stopping 55
4.7.2 Starting the STP pump after a safety function operates 55
4.7.3 Powering OFF 55
4.8 LED 56
4.9 Parallel port input/output signal 57
4.9.1 Input signal pins 57
4.9.2 Input operation port setting 60
4.9.3 Second speed option 61
4.9.4 Output signal pins 62
5 SERIAL COMMUNICATION PROTOCOL 67
5.1 Introduction 67
5.2 Connection and setting up 68
5.2.1 Signal connection 68
5.2.2 Connecting the RS485 70
5.2.3 Communication parameter setting 71
5.2.4 Input operation port setting 72
5.2.5 Serial communication timeout setting 73
5.2.6 Recommended items about communication cable installation 74
5.3 Protocol specifications 77
5.3.1 General description 77
5.3.2 Standard transmission frame
(in the RS232/RS485 single point connection) 78
5.3.3 Control command
(in the RS232/RS485 single point connection) 79
5.3.4 Query command
(in the RS232/RS485 single point connection) 80
5.3.5 Transmission data format 81
5.3.6 Frame control (checksum) 82

STP-iS2207 Series Turbomolecular Pump
MT-89E-001-C
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iii
CONTENTS (CONTINUED)
Section Title Page
5.3.7 Error control 82
5.3.8 Transmission frame in the RS485 multi-point connection 82
5.3.9 Control command in the RS485 multi-point connection 84
5.3.10 Query command in the RS485 multi-point connection 85
5.3.11 Broadcasting command in the RS485 multi-point connection 86
5.3.12 Application note 87
5.4 Command specifications 91
5.4.1 Command list 91
5.4.2 ReadMeas 92
5.4.3 Command 92
5.4.4 ReadFailMess 93
5.4.5 ReadModFonct 97
5.4.6 ReadVersion 99
5.4.7 ReadCounters 100
5.4.8 ReadSetPoint 101
5.4.9 ReadMotorTemp 101
5.4.10 ReadStatus 102
5.4.11 ReadEvents 103
5.4.12 SetSpeedSetPoint 104
5.4.13 ReadSpeedSetPoint 105
5.4.14 ReadModFonctWithWarning 106
5.4.15 ReadMeasValue 109
5.4.16 ReadOptionFunc 111
5.4.17 SetOptionFunc 114
5.4.18 ReadCondition 116
5.4.19 ReadEventsWithTime 118
5.4.20 SetOptions 122
5.4.20.1 Second speed option setting 122
5.4.20.2 Second speed selection 123
5.4.21 ReadOptions 124
5.4.21.1 Second speed function setting 124
5.4.21.2 Second speed select 125

STP-iS2207 Series Turbomolecular Pump
MT-89E-001-C
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iv
CONTENTS (CONTINUED)
Section Title Page
6 STP-LINK AND DISPLAY UNIT 127
6.1 STP-Link 127
6.2 Display unit 128
7 SAFETY FUNCTIONS 129
7.1 Safety functions 129
7.1.1 Power Failure 129
7.1.2 Operation after a power recovery 130
7.1.3 Abnormal state of magnetic bearing (Disturbance) 131
7.1.4 Excessive vibration (Disturbance) 131
7.1.5 Motor driver overload (DRV Overload) 131
7.1.6 Overheating inside the STP pump (MOTOR Overheat) 131
7.1.7 Overheating inside the control unit (CNT Overheat) 131
7.1.8 Overspeed 132
7.2 "WARNING" function 132
7.2.1 "WARNING" function 132
7.3 Contents of WARNING function 134
7.3.1 First Damage limit 134
7.3.2 Second Damage Limit 134
7.3.3 Pump run time over 134
7.3.4 Pump Overload 135
7.3.5 Imbalance 135
7.3.6 Other Warning 135
7.4 WARNING function setting 136
7.5 Troubleshooting immediately after failure occurs 137
7.5.1 After power failure 137
7.5.2 After other abnormality/error 137
7.6 Troubleshooting 138
7.6.1 Indication of "FAILURE" LED (red) 138
7.6.2 Indication of "FAILURE" LED (red) 144
7.6.3 No Indication of the "FAILURE" LED 144
8 MAINTENANCE AND INSPECTION 145
8.1 Maintenance and inspection 145
8.2 Cleaning 146
8.3 Inspecting the deposit 146
8.4 Maintenance 147
8.4.1 Recommended overhaul intervals 147
8.4.2 Standard replacement parts 147
8.4.3 Recommended maintenance intervals for main parts 148
8.5 Transporting for repair or overhaul 149

STP-iS2207 Series Turbomolecular Pump
MT-89E-001-C
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v
CONTENTS (CONTINUED)
Section Title Page
9 STORAGE AND DISPOSAL 151
9.1 Storage of the STP pump 151
9.2 Disposal 152
10 SERVICE, SPARES AND ACCESSORIES 153
10.1 Introduction 153
10.2 Service 153
10.3 Spares 153
10.4 Accessories 154

STP-iS2207 Series Turbomolecular Pump
MT-89E-001-C
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vi
ILLUSTRATIONS
Figure Title Page
1 STP pump installation warning label 6
2 Hot surface warning label 6
3 Heavy product caution label 7
4 High voltage device caution label 7
5 Rotation instruction label 7
6 Cross sectional view of the STP pump 8
7 External appearance of STP-iS2207 16
8 External appearance of STP-iS2207C 17
9 Label affixing positions 18
10 Space around the STP pump 21
11 Example of lifting the STP pump 23
12 Example of lifting the STP pump (horizontal positioning) 24
13 Jack-up the STP pump 25
14 Control unit bottom face 25
15 STP pump with eyebolts 26
Configuration of the STP pump 27
17 Control unit (Front panel) 29
18 Installation of the STP pump to the vacuum equipment 32
19 STP pump installation positions 34
20 Positions of the outlet port on the horizontally
or slanted installed STP pump 34
21 Bolt position for securing the flange 38
22 Methods of securing the STP pump 38
23 Screw holes for securing the base 39
24 Power cable 40
25 Connecting method of the power cable 41
26 Height of purge port 45
27 Positions of the cooling water port 46
28 Baking heater installation position 47
29 Pump operation method 54
30 "ROTATION" LED Indication 56
31 X2 REMOTE connector 57
32 X2 REMOTE input signal pins (contact input) 59
33 X2 REMOTE output signal pins 64
34 Serial port 67
35 X3 connector (D-Sub9) 68
36 RS485 connections 70
37 Grounding example (Both ends grounding) 74
38 Grounding example (single point grounding) 74
39 Example of ring ferrite core installation 75
40 Example of cable installation in metallic duct 75
41 Example of differential signal waveform 76
42 PC to SIM communication 77
43 Block diagram of communication process example 87
44 Example of answer resending process 88
45 Example of response when the command is sent continuously 88
46 Example of command sending during answer data reply 88
47 Example of communication cycle process 89
48 Example of command sending process 90
49 Example of answer receiving process 90

STP-iS2207 Series Turbomolecular Pump
MT-89E-001-C
Page vii
PAGE
vii
ILLUSTRATIONS (CONTINUED)
Figure Title Page
50 Display unit iDT-001 128
51 WARNING output 133
52 Failure output 138

STP-iS2207 Series Turbomolecular Pump
MT-89E-001-C
Page viii
PAGE
viii
TABLES
Table Title Page
1 Environmental requirements for installation 20
2 Eye nut size 23
3 Pump functions 27
4 Control unit front panel functions 30
5 Control unit front panel functions (continued) 31
6 Tightening torque of bolt 35
7 Maximum torque predicted and recommended securing bolt
for inlet port flange 36
8 Power cable 40
9 Starting/stopping the STP pump (X2 REMOTE) 54
10 Reset Operation (X2 REMOTE) 55
11 LED Indications for each state 56
12 X2 REMOTE input signal pins 61
13 X2 REMOTE input signal pins (continued) 63
14 Input operation port setting 65
15 Rotation INHIBIT signal input 62
16 X3 pin position 68
17 Communication parameters 71
18 Input operation port 72
19 Serial communication time out setting 73
20 Transmission control characters 78
21 Pump operation commands 86
22 Command list 91
23 Pump operation commands 93
24 Error message values 95
25 Error message values (continued) 96
26 Pump operation mode 98
27 Remote mode 103
28 Warning value bit assign 107
29 Parameter setting value 112
30 Option function number and parameter list 122
31 Option function number and parameter list 124
32 Warning value bit assign 127
33 States of LEDs and X2 REMOTE output signals at power failure130
34 WARNING function 132
35 Default setting of WARNING function 136
36 Factory Setting and Variable Range 136
37 Priority of failure signal 138
38 Error List 139
39 Error List (continued) 140
40 Error List (continued) 141
41 Error List (continued) 142
42 Error List (continued) 143
43 Troubleshooting with no indication of the "FAILURE" LED 144

STP-iS2207 Series Turbomolecular Pump
MT-89E-001-C
Page 1
INTRODUCTION
1
1 INTRODUCTION
1.1 Scope and definitions
This manual provides installation, operation and maintenance instructions for the Edwards
Turbomolecular Pump (abbreviated to "STP pump" throughout this manual). You must use the STP
pump as specified in this manual otherwise the protection provided by the equipment may be
impaired.
Important safety information is highlighted as WARNING and CAUTION instructions; these
instructions are mandatory. The use of WARNINGS and CAUTIONS is defined below:
WARNING
Warnings are given where failure to observe the instruction could result in serious injury
or death to people.
CAUTION
Cautions are given where failure to observe the instruction could result minor personal injury in
damage to the equipment, associated equipment and/or process.
Note: Items you must follow during operation and maintenance.
Throughout this manual, page, figure and table numbers are sequential.
The units used throughout this manual conform to the SI international system of units of
measurement; US equivalent units of measurement are also given.
The following IEC warning labels/symbols appear on the STP-iS2207 series Turbomolecular Pump
and the STP Pump Instruction Manual:
Warning - This symbol denotes general warning
Refer to accompanying documentation and instruction manual.
Warning - Hazardous Voltage
This symbol denotes the risk of electrical shock.
Warning - Heavy object
This symbol denotes the risk of low back pain and fall.
Warning - Hot surface
This symbol denotes the risk of burns.

STP-iS2207 Series Turbomolecular Pump
MT-89E-001-C
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INTRODUCTION
1
Note: An alarm function is incorporated into this STP series. Alarm and cautionary messages are
displayed on the LCD of the display unit iDT-001 (optional accessory). Note that the words
"WARNING" and "CAUTION" displayed on the LCD indicate the need for overhaul of the
pump or precautions during the operation. They do not have the same meaning as the much
more serious symbols for "WARNING" and "CAUTION" used in the instruction manual.
1.2 Applied standards
The STP pump conforms to the following directives and standards:
1. Applied Directives
EC Machinery Directive
EC Electromagnetic Compatibility Directive
EC Low Voltage Directive
RoHS Directive *
* i.e. The product(s) contain less than - 0.1wt% for hexavalent chromium, lead, mercury, PBB and PBDE; 0.01wt% for
cadmium - in homogeneous materials (subject to the exemptions allowed by the Directive). This information relates only
to products sold on or after the date of this certificate. Edwards has taken all reasonable steps to confirm this statement,
which is based mainly on information from our suppliers. Whilst the RoHS Directive does not legally apply to this vacuum
equipment, we recognize that component compliance is relevant to many of our customers.
2. Applied Standards
EN12100
EN1012-2
EN61010-1
EN61326-1 (Class A)
EN61000-6-2
EN55011
EN50581
UL61010-1, 3rd Edition (Electrical Equipment for Measurement, Control, Laboratory Use)
SEMI S2-0715

STP-iS2207 Series Turbomolecular Pump
MT-89E-001-C
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INTRODUCTION
1
3. Electromagnetic compatibility
This product is a class A product according to EN61326, and a group 1, class A product
according to EN 55011.
This means that this product does not generate and/or use intentionally radio-frequency energy,
in the form of electromagnetic radiation, inductive and/or capacitive coupling, for the treatment
of material or inspection / analysis purpose and that it is suitable for use in all establishments
other than domestic and those directly connected to a low voltage power supply network which
supplies buildings used for domestic purposes.
This product may have potential difficulties in ensuring electromagnetic compatibility in other
than industrial environments, due to conducted as well as radiated disturbances.
This product must not be used in residential areas because it may cause interference if used in
residential areas.
4. REACH Regulation
Some components in this product contain Lead (Pb) which is in the REACH SVHC Candidate
List.
1.3 Limited warranty
This WARRANTY applies to the customer to whom Edwards has delivered this product.
1.3.1 Warranty period
Edwards warrants this product against defects for a period of two (2) years from the date of delivery
or during the period specified in the agreement made by and between the customer and Edwards.
1.3.2 Item warranted
1. This warranty applies only to the product delivered from Edwards to the customer.
2. If any defect is found during this period, Edwards will, at its option, repair or recondition the
product free of charge. The costs for repair or replacement of the product after the warranty
period has passed will be at your own charge.

STP-iS2207 Series Turbomolecular Pump
MT-89E-001-C
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INTRODUCTION
1
1.3.3 Disclaimer
Edwards makes no warranty with respect to any damage occurred due to any of the following during
the warranty period:
1. Handling, operation or maintenance other than that specified herein.
2. Failure to follow any of the warnings or cautions enumerated in this manual.
3. Installation, operation or maintenance using parts which are not specified by Edwards.
4. Maintenance personnel other than those authorized by Edwards or Service office have
disassembled, reconditioned, or tampered the product.
5. Defect resulting from the not-specified use of the product.
6. When the product is used under special conditions without obtaining the written consent of
Edwards (particular gases, strong magnetic field and the radiation are added to the product).
7. Defect resulting from deposit.
8. Water cooling system defect resulting from water quality used.
9. Defect resulting from the installation of the product (exclude the installation by authorized
personnel).
10. Deterioration in the external because of use (discoloration, scratches and so forth).
11. Product damage occurred during transport or other factors not attributable to Edwards.
12. Product breakage or damage due to natural disasters, fire or other external factors.
13. Deterioration in the basic performance due to the use of the product beyond limits of the use.
14. Any direct, incidental or consequential damage resulting from the use of the product.
15. When continuously operated without overhaul after the WARNING indication on the "Failure"
LED of the control unit or the LCD ("WARNING" message) of the display unit iDT-001.
16. Overhaul and replacement of maintenance parts.
1.3.4 Spare parts
Touch down bearing.
Touch down bearing should be replaced at Edwards, contact Edwards.

STP-iS2207 Series Turbomolecular Pump
MT-89E-001-C
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INTRODUCTION
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1.4 Precautions for safe operation of the STP pump
1.4.1 Usable gases
1. Chlorine or fluorine system gases can be used in corrosion resistant pumps. When you use the
following gases, contact Edwards.
Gases including alkaline metals except Li gas.
Gases including Ga, Hg, In, or Sn.
HBr gas.
2. Non-corrosion resistant pump cannot use the above gases including chlorine and fluorine
system gases.
WARNING
To prevent an accident, confirm the characteristics of gases to be used, referring to the
Material Safety Data Sheet (MSDS) you obtain from the gas supplier, and, keep MSDS
and a safety advice of gas supplier.
WARNING
Warn of the danger of the gas with the warning label when the use gas is hazardous
chemical material.
WARNING
Secure safety by wearing personal protective equipment when using the gas which
might influence damage health. In addition, take appropriate measure for depending
upon the properties of the gas to be used.
CAUTION
NEVER use any gas that is not specified as usable in this Manual. The use of such gas may
corrode the STP pump and damage it.
CAUTION
Introduce a dry N2gas (purge gas) to protect the inside of the STP pump when using reactive or
corrosive gas, gas including hydrogen. The use of these gases may result in product damage.

STP-iS2207 Series Turbomolecular Pump
MT-89E-001-C
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INTRODUCTION
1
1.5 Maintenance and inspection precautions
Perform any maintenance or inspection of the STP pump under the condition that no power is
applied to the STP pump (refer to SEMI S2 Section 13.2 - type 1), following Section 8,
"MAINTENANCE AND INSPECTION".
1.6 Labels
The following labels are affixed to the STP pump. Read the contents of the labels before operation.
1. STP pump installation warning label
This label describes installation of the STP pump. Install the STP pump according to the
precautions. Install the STP pump according to the precautions of Section 3, "INSTALLATION
OF THE STP PUMP".
Figure 1 - STP pump installation warning label
2. Hot surface warning label
This label instructs operators so as not to touch the hot surface of the baking heater.
The baking heater may lead to a considerable rise in temperatures outside of the STP pump.
(only with baking heater)
Figure 2 - Hot surface warning label

STP-iS2207 Series Turbomolecular Pump
MT-89E-001-C
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INTRODUCTION
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3. Heavy product caution label
This label is affixed to the product with a weight of 18 kg or more. Follow the precautions of
Section 3.2, "Unpacking and installation" so as not to cause any accident during handling.
Figure 3 - Heavy product caution label
4. High voltage device caution label
The pump and control unit are equipped with a high voltage device. This label warns operators
to pay attention to the high voltage device at the maintenance and inspection.
Figure 4 - High voltage device caution label
5. Rotational direction instruction label
This label describes the rotational direction of the STP pump. The STP pump rotates in this
direction.
Figure 5 - Rotation instruction label

STP-iS2207 Series Turbomolecular Pump
MT-89E-001-C
Page 8
INTRODUCTION
1
1.7 Operation principle of the STP pump
Turbomolecular pump (abbreviated to "STP pump" throughout this manual) is used for high vacuum
pumping. It is principally used for manufacture and inspection equipment of semiconductor, flat panel,
solar battery.
The STP pump (Figure 6) is configured so that rotor blade (1) and stator blade (2) are aligned
alternately in the axial direction. Gas molecules are pumped from the inlet port to the outlet port by
the high speed rotation of the rotor.
The STP-iS2207 series pump is a magnetically-levitated turbomolecular pumps, each with the
following features:
1. Oil free
2. Low vibration
3. High reliability
4. Compact size (Integrated control unit)
1. Rotor blade 4. Radial electromagnet
7. Touch down bearing
2. Stator blade 5. Axial sensor 8.
Control unit
3. Radial sensor 6. Axial electromagnet
Figure 6 - Cross sectional view of the STP pump
1
2
4
6
7
3
3
5
8

STP-iS2207 Series Turbomolecular Pump
MT-89E-001-C
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INTRODUCTION
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1. Oil free
Rotor blade (1) is supported by the magnetic bearing without mechanical contact. Therefore, the STP
pump requires no lubrication oil unlike conventional turbomolecular pumps using ball bearings.
2. Low vibration
The magnetic bearing consists of 5 pairs of active magnetic bearings. The rotor is supported in the
radial direction by 4 pairs of radial direction active magnetic bearings that consist of radial sensor (3)
and radial electromagnet (4). A pair of axial direction active magnetic bearings consists of axial
sensor (5) and axial electromagnet (6) to support the rotor in the axial direction. Because the rotor is
supported without mechanical contact, it can rotate at low vibration.
3. High reliability
There is no periodic replacement of magnetic bearings unlike conventional turbomolecular pumps
using ball bearings because there is no friction. Taking into consideration a breakage of magnetic
bearings, touch down bearings (7) have been installed. They do not contact with the rotor during the
rated operation. The status of the rotor and magnetic bearing is continuously monitored via circuits
detecting rotor displacement, rotational speed and pump temperature. If an abnormality/error occurs,
the rotor will stop.
4. Compact size (Integrated control unit)
To save space for installation, the STP pump mounts the control unit (8) that includes the power
supply which converts the alternating input to direct current output. In addition, the following circuits
are integrated; the magnetic bearing control circuit, the motor drive circuit which drives rotor blade,
the supervisor circuit which monitors pump operation status and operates the pump in remote
operation mode.

STP-iS2207 Series Turbomolecular Pump
MT-89E-001-C
Page 10
INTRODUCTION
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1.8 STP pump specification
External appearance, installation and unpacking method differ depending to the STP pump
specification. Refer to the followings:
Standard type
(Without anticorrosion
treatment type)
Corrosion resistant type
STP-iS2207 STP-iS2207C
Naming convention:
"C" following a pump model name indicates a corrosion resistant*1 type.
(e.g. STP-iS2207C)
*1 Corrosion resistant: STP pump with anti-corrosive treatment.
The display unit iDT-001 is available as an optional accessory with the STP-iS2207 series.
The display unit operates the STP pump, confirms the pump status and sets various settings. (refer
to Section 6.2 and the Instruction Manual of the "Display Unit iDT-001".)
Display unit iDT-001