Edwards ESDP30A User manual

A710-99-880
Issue A
Edwards High Vacuum International
Manor Royal, Crawley, West Sussex, RH10 2LW, UK
Telephone: [phone] Fax: [phone] Telex: 87123 Edivac G
ESDP30A Scroll Pump
Description Item Number
ESDP30A Scroll Pump, 3-phase, 200/208/230/380-460 V, 50/60 Hz A710-03-908
ESDP30A Scroll Pump, 1-phase, 100/115/200/230 V, 50/60 Hz A710-03-910
Instruction Manual

CONTENTS
Section Title Page
1INTRODUCTION 1
1.1 Scope and definitions 1
1.2 Description 1
2 TECHNICAL DATA 3
2.1 Mechanical data 3
2.2 Performance and operating conditions 3
2.3 Electrical data 3
2.4 Noise and vibration data 3
2.5 Materials exposed to vacuum 3
3 INSTALLATION 7
3.1 Safety 7
3.2 System requirements 7
3.3 Unpack and inspect 8
3.4 Reconfigure the pump (optional) 8
3.5 Locate the pump 9
3.6 Connect the electrical supply 9
3.6.1 Introduction 9
3.6.2 Connect to 3-phase pumps 9
3.6.3 Connect to 1-phase pumps 10
3.7 Check the direction of motor rotation 13
3.8 Connect the pump-inlet to the vacuum system 13
3.9 Connect the pump-outlet 14
3.10 Leak test the pump installation 14
4 OPERATION 15
4.1 Start-up 15
4.2 Shut-down 15
5 MAINTENANCE 16
5.1 Introduction 16
5.2 Inspect the inlet screen 16
5.3 Service 16
6 STORAGE AND DISPOSAL 17
6.1 Storage 17
6.2 Disposal 17
7 SPARES AND ACCESSORIES 17
7.1 Introduction 17
7.2 Accessories 17
RETURN OF EDWARDS EQUIPMENT
DBW 5644-96
ESDP30A Scroll Pump i

Illustrations
Figure Title Page
1 The ESDP30A Scroll Pump (3-phase pump shown) 2
2 Dimensions (mm): 3-phase pump shown 5
3 Pumping speed (m3h-1)6
4 Pumping speed (cfm) 6
5 Motor terminal-box low-voltage configuration: 3-phase pumps 11
6 Motor terminal-box high-voltage configuration: 3-phase pumps 11
7 Motor terminal-box low-voltage configuration: 1-phase pumps 12
8 Motor terminal-box high-voltage configuration: 1-phase pumps 12
Tables
Table Title Page
1 Full load current ratings and motor speed: 3-phase pumps 4
2 Full load current ratings and motor speed: 1-phase pumps 4
ii ESDP30A Scroll Pump

1 INTRODUCTION
1.1 Scope and definitions
This manual provides installation, operation and maintenance instructions for the Edwards
ESDP30A Scroll Pump. You must use the pump as specified in this manual.
Read this manual before you install and operate the pump. Important safety information is
highlighted as WARNING and CAUTION instructions; you must obey these instructions. The
use of WARNINGS and CAUTIONS is defined below.
WARNING
Warnings are given where failure to observe the instruction could result in injury or death
to people.
CAUTION
Cautions are given where failure to observe the instruction could result in damage to the
equipment, associated equipment and process.
The units used throughout this manual conform to the SI international system of units of
measurement. For displacement and pumping speed, the term ’cfm’ is also used to mean
ft3min-1.
1.2 Description
Refer to Figure 1 in the following description.
TheESDP30AScrollPumpisacompact,reliablevacuumpump whichis suitableforuseonclean
processes. The ESDP30A pump is not suitable for use with explosive, flammable, toxic or
corrosive substances, or substances which contain particulates, or powders.
The body of the pump includes stationary scrolls (2) and an orbiting scroll. The orbiting scroll
is driven by the electricmotor through an eccentric cam on the motor drive shaft. The movement
of the orbiting scroll, meshed with the stationary scrolls, forms successive crescent shaped
volumes in the pump. Gas which enters the pump through the inlet (3) is compressed by the
movement of the orbiting scroll and swept towards the centre of the stationary scrolls. The
compressed gas enters the exhaust-port near the centre of the stationary scrolls and is exhausted
from the pump through the outlet (7).
The inlet of the pump (3) has an inlet screen which prevents the entry of debris into the pump.
The pump is air-cooled and has an electric motor and an hours counter (6) which operates when
the electrical supply to the pump is switched on.
ESDP30A Scroll Pump 1

Figure 1 - The ESDP30A Scroll Pump (3-phase pump shown)
9. Cooling-fins
10. Coupling-cover bolts (5 off)
11. Locating dowels (2 off)
12. Direction of rotation arrow
13. Motor end-cover
14. Mounting-holes (4 off)
15. Base-plate
16. Jacking hole
1. Fan cover
2. Stationary scrolls
3. Inlet-port and inlet screen (in the inlet-port)
4 Lifting-eye
5. Motor terminal-box
6. Hours counter
7. Outlet-port
8. Bolts (4 off)
2ESDP30A Scroll Pump

2TECHNICALDATA
2.1 Mechanical data
Overall dimensions See Figure 2
Mass
3-phase pump 40 kg
1-phase pump 46 kg
Inlet connection NW40
Outlet connection NW25
2.2 Performance and operating conditions
Ambient operating temperature range 5 to 40 oC
Ambient storage temperature range -20 to 60 oC
Ultimate pressure 1 x 10-2 mbar, 1 Pa
Maximum inlet pressure 1000 mbar, 1 x 105Pa, 0 psig
Maximum outlet pressure 1150 mbar, 1.15 x 105Pa, 2 psig
Leak tightness better than 1 x 10-4 mbar.ls-1,
1 x 10-2 Pa.ls-1
Displacement (swept volume)
50 Hz 30 m3h-1 (17.6 cfm)
60 Hz 36 m3h-1 (21.2 cfm)
Pumping speed See Figures 3 and 4
Peak pumping speed
50 Hz 25 m3h-1 (14.7 cfm)
60 Hz 30 m3h-1 (17.6 cfm)
2.3 Electrical data
Electrical supply See Tables 1 and 2
Full load current ratings See Tables 1 and 2
2.4 Noise and vibration data
Noise level (at 1 m from the pump)
3-phase pump < 60 dB(A)
1-phase pump < 62 dB(A)
Vibration velocity < 1.5 mm.s-1
2.5 Materials exposed to vacuum
PTFE (polytetrafluoroethylene) impregnated aluminium , stainless steel, steel bearings, PFPE
(perfluoropolyether) grease, fluoroelastomer seals.
ESDP30A Scroll Pump 3

Electrical supply voltage
200 208 230 380 415 460
Full load current rating: A 50Hz2.7 - -1.571.63-
60 Hz 2.6 2.5 2.5 - - 1.47
Motor rotational speed: r.min-1 50 Hz 1460 - - 1470 1470 -
60 Hz 1740 1750 1760 - - 1770
Table 1 - Full load current ratings and motor speed: 3-phase pumps
Electrical supply voltage
100 115 200 230
Full load current rating: A 50 Hz 8.5 - 4.3 3.9
60 Hz 7.7 6.7 3.9 3.4
Motor rotational speed: r.min-1 50 Hz 1430 - 1430 1450
60 Hz 1720 1740 1720 1740
Table 2 - Full load current ratings and motor speed: 1-phase pumps
4ESDP30A Scroll Pump

1. Inlet-port (NW40)
2. Alternative inlet-port position
3. Outlet-port (NW25)
4. Alternative outlet-port position
5. 4 x mounting holes for M8 bolts
Figure 2 - Dimensions (mm): 3-phase pump shown
Pump A B
1-phase 443 194
3-phase 372 123
ESDP30A Scroll Pump 5

Figure 3 - Pumping speed/pressure graph (m3h-1)
Figure 4 - Pumping speed/pressure graph (cfm)
1. 60 Hz
2. 50 Hz
1. 60 Hz
2. 50 Hz
1. 60 Hz
2. 50 Hz
1. 60 Hz
2. 50 Hz
6ESDP30A Scroll Pump

3INSTALLATION
3.1 Safety
WARNING
Obey the safety instructions given below and take note of appropriate precautions. If you
do not, you can cause injury to people and damage to equipment.
•A suitably trained and supervised technician must install your ESDP30A pump.
•Ensure that the installation of the pump conforms with all the requirements of your local
and national safety standards. Ensure that your control system is configured so that the
pumping system is safe if the electrical supply fails.
•Ensure that the installation technician is familiar with the safety precautions for the gases
processed by the pumping system. Wear the appropriate safety-clothing when you come
into contact with contaminated components. Vent and purge the pumping system before
you start installation work.
•Disconnect the other components in the pumping system from the electrical supply so that
they cannot be operated accidentally.
•Do not reuse ’O’ rings and Co-Seals if they are damaged.
3.2 System requirements
Consider the following points when you design your pumping system:
•Support the vacuum pipelines to stop the transmission of stress to the pipeline joints.
•You must be able to isolate the pump inlet and outlet from the atmosphere and from your
vacuum system if you have pumped dangerous gases.
ESDP30A Scroll Pump 7

3.3 Unpack and inspect
1. Place the carton in a convenient position with a fork-lift truck or a pallet truck.
2. Remove all packing materials.
3. Attach suitable lifting-gear to the lifting eye (Figure 1, item 4) and remove the pump from
its carton. Do not try to lift the pump by hand.
4. Remove all protective covers and inspect the pump. If the pump is damaged, notify your
supplier and the carrier in writing within three days; state the Item Number of the pump
together with your order number and your supplier’s invoice number. Retain all packing
materials for inspection. Do not use the pump if it is damaged.
5. If the pump is not to be used immediately, replace the protective covers. Store the pump in
suitable conditions as described in Section 6.1.
3.4 Reconfigure the pump (optional)
The pump is supplied with the inlet flange at the top of the pump (as shown in Figure 1). You
can move the inlet flange to the side of the pump; refer to Figure 1 and use the following
procedure:
1. Lift the pump into a vertical position so that it rests on the motor end-cover (13).
2. Undo and remove the four bolts which secure the fan cover (1) to the body of the pump.
Remove the fan cover.
3. Undo and remove the five bolts (10) which secure the body of the pump to the motor.
4. Lift the body of the pump clear of the motor. If you cannot lift the body of the pump off of
the motor, place two of the bolts removed in Step 3 in the jacking holes (16), then tighten the
bolts to push the body of the pump away from the motor.
5. Turn the body of the pump through 90o, so that the inlet flange is at the side of the pump
(that is, opposite the base-plate).
6. Ensure that the flexible coupling and the two locating dowels (11) are correctly aligned,then
lower the body of the pump back onto the motor shaft.
7. Turn the cooling-fan and check that the pump mechanism rotates smoothly. If you cannot
turn the fan easily, the body of the pump is not correctly aligned on the motor.
8. Use the five bolts removed in Step 3 to secure the body of the pump to the motor.
9. Use the four bolts removed in Step 2 to secure the fan cover to the body of the pump.
10. Turn the pump over so that it rests on the base-plate (15).
8ESDP30A Scroll Pump

11. Remove the four bolts (8) and remove the outlet flange (7) and ’O’ ring seal from the pump
body.
12. Turn the outlet flange through 90o(so that it is orientated as shown in Figure 2, item 4),
ensure that the ’O’ ring seal is correctly located, then refit the outlet flange to the pump and
secure with the four bolts (8).
3.5 Locate the pump
CAUTION
Locate the pump so that it is on a firm, level surface. If you do not, seals in the pump may
wear quickly and the performance of the pump will deteriorate.
Ensure that the pump is not installed in an enclosed area. The pump requires a cooling-air flow
rate of 5 m3min-1. The cooling-fans will provide this flow rate if the pump is not installed in a
restricted space.
Refer to Figure 1. Attach suitable lifting-gear to the lifting-eye (4) on the pump and move the
pump to its final operating position. The pump can be free-standing or you can use fixing-bolts
through the mounting-holes (14) in the base-plate of the pump to secure the pump to the floor.
If you want, you can fit vibration isolators below the base-plate. Suitable vibration isolators are
available as optional accessories (see Section 7).
3.6 Connect the electrical supply
CAUTION
The motor is not thermally protected. You must provide external overload protection.
Branch circuit fuses must have a maximum rating of 115% of the full load current rating
given in Section 2.
3.6.1 Introduction
Connect the electrical supply to the motor as described in Section 3.6.2 or 3.6.3. Connect the
supply through a contactor which incorporates a circuit breakersuitable for the full load current
ratings given in Section 2.
ESDP30A Scroll Pump 9

3.6.1 Connect to 3-phase pumps
1. Remove the motor terminal-box cover.
2. Check your electrical supply voltage and frequency. The universal motor of the pump can
be configured for ‘low-voltage’ operation (200-230 V) as shown in Figure 5, or for
’high-voltage’ operation (380-460 V), as shown in Figure 6. If necessary, reconfigure the
motor to operate with your supply voltage.
3. Fit a suitable 20 mm cable-gland to the cable leadthrough hole. If your cable is too large to
pass through a 20 mm cable-gland, fit a 20 mm to 25 mm female thread adaptor to the cable
entry-hole, and fit a 20 mm cable-gland to the adaptor.
4. Pass the electrical supply cable through the cable-gland.
5. Connect the phase wires in the cable (L1, L2, L3) to the U, V and W terminals as shown in
Figures 5 or 6, depending on your electrical supply voltage, then connect the earth wire in
the cable to the earth stud in the terminal-box.
6. Tighten the cable-gland and replace the terminal-box cover.
7. Connect the wires at the other end of the cable to your electrical supply.
3.6.2 Connect to 1-phase pumps
1. Remove the motor terminal-box cover.
2. Check your electrical supply voltage and frequency. The universal motor of the pump can
be configured for ‘low-voltage’ operation (100-115 V) as shown in Figure 7, or for
’high-voltage’ operation (200-230 V), as shown in Figure 8. If necessary, reconfigure the
motor to operate with your supply voltage.
3. Fit a suitable 20 mm cable-gland to the cable leadthrough hole. If your cable is too large to
pass through a 20 mm cable-gland, fit a 20 mm to 25 mm female thread adaptor to the cable
entry-hole, and fit a 20 mm cable-gland to the adaptor.
4. Pass the electrical supply cable through the cable-gland.
5. Connect the neutral and live wires in the cable (N, L) to the X and Z terminals as shown in
Figures 7 or 8, depending on your electrical supply voltage, then connect the earth wire in
the cable to the earth stud in the terminal-box.
6. Tighten the cable-gland.
7. Connect the wires at the other end of the cable to your electrical supply.
10 ESDP30A Scroll Pump

Figure 5 - Motor terminal-box low-voltage configuration: 3-phase pumps
Figure 6 - Motor terminal-box high-voltage configuration: 3-phase pumps
ESDP30A Scroll Pump 11

Figure 7 - Motor terminal-box low-voltage configuration: 1-phase pumps
Figure 8 - Motor terminal-box high-voltage configuration: 1-phase pumps
12 ESDP30A Scroll Pump

3.7 Check the direction of motor rotation
CAUTION
Ensure that debris and objects do not fall into the pump inlet and outlet when you check
the direction of motor rotation. If this happens, you may damage the pump.
Note: When you switch off the pump, the cooling-fan may stop and then rotate in the reverse direction
for a few revolutions.
1. Watch the cooling-fan from the motor end of the pump, switch on the pump for two or three
seconds, then switch the pump off.
2. The correct direction of rotation ofthe cooling-fan is clockwise whenviewedfrom the motor
end ofthe pump and is indicated by the arrow onthe coupling-cover (seeFigure 1, item 12).
If the direction of rotation is incorrect:
•On a 3-phase pump, isolate the pump from the electrical supply, swap any two of the
phase-wires in the motor terminal-box, then reconnect the pumpto the electrical supply
and repeat Step 1 to ensure that the direction of rotation is now correct.
•Ona1-phasepump,donotuse thepump. Contactyoursupplier orEdwardsforadvice.
3.8 Connect the pump-inlet to the vacuum system
Ensure that debris does not get into the pump when you install it. If the pump is to replace a
pump in an existing system, purge the existing pump with nitrogen for 15 minutes before you
disconnect it. If the existing pump is an oil-sealed pump, we recommend that you dismantle
the pipeline which connects the vacuum system to the pump and clean the pipeline to ensure
that there is no residual oil contamination in the pipeline.
Use standard NW40 fittings to connect the pump-inlet to your vacuum system. When you
connect to the vacuum system:
•To get the best pumping speed, ensure that the pipeline connected to the pump-inlet has an
internal diameter not less than the inlet-port diameter.
•Incorporate flexible bellows in your system pipelines to reduce the transmission of vibration
and to prevent loading of coupling-joints. The bellows must have a maximum pressure
rating which is greater than the highest pressure that can be generated in your system. We
recommend that you use Edwards flexible bellows.
•Incorporate an inlet isolation-valve in the pipeline from the vacuum system to the pump, so
that you can isolate the vacuum system from the pump when it is switched off and prevent
the suck-back of process gases and debris into the vacuum system.
ESDP30A Scroll Pump 13

3.9 Connect the pump-outlet
We recommend that you usean exhaust extraction-system suitable for use with all ofthe process
gases you will pump. Ensure that the exhaust-extraction system cannot become blocked or
obstructed when the pump is operating.
Use standard NW25 fittings to connect the pump-outlet to the exhaust-extraction system.
3.10 Leak test the pump installation
Leak test the pump installation and seal any leaks found to prevent the leakage of dangerous
substances from the system and the leakage of air into the system. When supplied, the leak
tightness of the pump is less than 1 x 10-4 mbar.ls-1 (1 x 10-2 Pa.ls-1).
14 ESDP30A Scroll Pump

4OPERATION
Note: The following procedures assume that your system has an inlet isolation-valve which you can
use to isolate the pump from your vacuum system.
4.1 Start-up
Use the procedure below to start up the pump.
1. Ensure that the vacuum system isolation-valve is closed.
2. Switch on the electrical supply to the pump.
3. Open the vacuum system isolation-valve.
4.2 Shut-down
Note: When you switch off the pump, the cooling-fan may stop and then rotate in the reverse direction
for a few revolutions.
Use the procedure below to shut down the pump.
1. Close the vacuum system isolation-valve (to prevent suck-back into the vacuum system).
2. Switch off the electrical supply to the pump.
ESDP30A Scroll Pump 15

5 MAINTENANCE
5.1 Introduction
The ESDP30A pump is designed to require little user maintenance. Do the following checks
when you maintain your vacuum system:
•Check that the vacuum connections are secure.
•Check that the electrical connections are secure and that the electrical cable is not damaged.
•Check that the cooling-fins on the pump are not obstructed or blocked.
5.2 Inspect the inlet screen
Whenever you disconnect the pump from your vacuum system, we recommend that you:
•Remove any debris trapped by the inlet screen (in the inlet-port).
•Inspect the inlet screen and if necessary, clean it with a cleaning solution suitable for the
substances pumped. To remove the inlet screen, remove the circlip which secures the inlet
screen in the inlet-port. Refit the inlet screen in the inlet-port and secure with the circlip
before you reconnect the pump to your vacuum system.
5.3 Service
We recommend that the ESDP30A pump is serviced by Edwards service engineers at least once
a year (if the pump is in continuous use) or every 8500 hours of pump operation; contact your
supplier or Edwards to arrange these services.
16 ESDP30A Scroll Pump

6 STORAGE AND DISPOSAL
6.1 Storage
Use the procedure below to store the pump.
1. Shut-down the pump as described in Section 4.
2. Isolate the pump from the electrical supply and disconnect it from the vacuum system.
3. Place protective covers over the inlet and outlet-flanges.
4. Store the pump in cool, dry conditions until required for use. When required, prepare and
install the pump as described in Section 3.
6.2 Disposal
Dispose of the pump and anycomponents safely in accordance with all local and national safety
and environmental requirements. Take particular care with components which have been
contaminated with dangerous process substances.
7 SPARES AND ACCESSORIES
7.1 Introduction
Edwards products, spares and accessories are available from Edwards companies in Belgium,
Brazil, Canada, France, Germany, Hong Kong, Italy, Japan, Korea, Switzerland, United
Kingdom, U.S.A and a worldwide network of distributors. The majority of these centres employ
Service Engineers who have undergone comprehensive Edwards training courses.
Order spare parts and accessories from your nearest Edwards company or distributor. When
you order, state for each part required:
•Model and Item Number of your equipment
•Serial number
•Item Number and description of part.
7.2 Accessories
Accessory Item Number
Vibration isolators (pack of 4) A248-01-404
ESDP30A Scroll Pump 17