
© Edwards Limited 2008. All rights reserved. Page i
Edwards and the Edwards logo are trademarks of Edwards Limited.
Contents
B311-01-880 Issue K
Contents
Section Page
1 Introduction .......................................................................................1
1.1 Scope and definitions ................................................................................................... 1
1.2 Description ................................................................................................................ 2
1.2.1 HT10 and HT16 Diffusion Pumps ....................................................................................... 2
1.2.2 Pump-inlet and outlet sizes ............................................................................................ 2
1.2.3 Drain/fill assembly ...................................................................................................... 2
1.2.4 Over-temperature and auxiliary protection ......................................................................... 3
1.3 Performance .............................................................................................................. 3
1.4 Operation with high ambient humidity ............................................................................... 3
2 Technical data ....................................................................................9
2.1 Performance and operating conditions ............................................................................... 9
2.2 Pump warm-up and cool-down curves ................................................................................ 9
2.3 Mechanical data .........................................................................................................10
2.4 Electrical data ...........................................................................................................10
2.5 Pump fluid data .........................................................................................................11
2.6 Construction details ....................................................................................................11
3 Installation ....................................................................................... 17
3.1 Unpack and Inspect .....................................................................................................17
3.2 Locate the pump ........................................................................................................17
3.3 Electrical connections ..................................................................................................18
3.3.1 Pump electrical supply .................................................................................................18
3.3.2 Over-temperature protection .........................................................................................20
3.3.3 Auxiliary plug connections ............................................................................................20
3.3.4 Indicator trip ............................................................................................................20
3.4 Cooling-water connections ............................................................................................22
3.5 Vacuum connections ...................................................................................................22
3.6 Leak-test the system ...................................................................................................23
3.7 Fill the pump with fluid ................................................................................................23
3.7.1 Safety of vapour pump fluids .........................................................................................23
3.7.2 Recommended pump fluids ...........................................................................................23
3.7.3 Filling procedure ........................................................................................................23
4 Operation ........................................................................................ 25
4.1 Introduction .............................................................................................................25
4.2 Check the insulation resistance of the heaters ....................................................................26
4.3 Pump start-up ...........................................................................................................26
4.3.1 Fully-valved pumping system .........................................................................................26
4.3.2 Partially-valved pumping system .....................................................................................27
4.3.3 Valveless pumping system .............................................................................................27
4.4 Process cycling ..........................................................................................................27
4.4.1 Re-admission of air to your vacuum system ........................................................................27
4.4.2 Re-evacuate your vacuum system ....................................................................................27
4.5 Pump shut-down ........................................................................................................28
4.5.1 Introduction .............................................................................................................28
4.5.2 Fully-valved pumping systems ........................................................................................28
4.5.3 Partially-valved pumping systems ....................................................................................30
4.5.4 Valveless pumping systems ............................................................................................30
5 Maintenance ..................................................................................... 31
Ipsitech 9001(24)-2008