Edwards STP Series User manual

Copyright 2023 Edwards Japan Limited. All rights reserved. Printed in Japan.
Read through the Safety Precautions and
each section of this Manual carefully before
using the STP pump.
Keep this Manual in a place where you can
quickly access it at any time.
Read this Manual thoroughly and keep it with
the Turbomolecular Pump Instruction Manual.
Applicable Models
◼STP-iXA3307 series
◼STP-iXA3307 -HV series
◼STP-iXA4507 series
◼STP-iXA4507 -HV series
MT-91E-C01-0
Instruction Manual
STP Series Turbomolecular Pumps
I/O Remote Interface
2023.10

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I/O Remote Interface
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CONTENTS
Section Title Page
1INTRODUCTION 1
1.1 Scope and definitions 1
1.2 General description 2
2INSTALLATION 3
2.1 Unpacking 3
2.2 Precautions before installation 3
2.3 User connections and indicator for I/O Remote 3
2.3.1 X4 REMOTE socket 4
2.3.2 X2 COM2 socket 4
2.3.3 X3 VALVE socket 4
2.3.4 "STATUS" LED 5
2.3.5 X5 STP-LINK socket 5
2.3.6 Cable connection to the I/O Remote interface 5
3OPERATION 7
3.1 Input operation port setting 7
3.2 Starting/stopping the STP pump 8
3.3 Starting the STP pump after stopping 8
3.4 Starting the STP pump after a safety function operates 8
3.5 Parallel port input/output signal 9
3.5.1 Input signal pins 9
3.5.2 Output signal pins 11
4MAINTENANCE 15
4.1 Inspect the electrical connections 15
5SERVICE, SPARES AND ACCESSORIES 17
5.1 Introduction 17
5.2 Service 17
5.3 Spares 17
5.4 Accessories 17

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ILLUSTRATIONS
Figure Title Page
1 I/O Remote Interface which integrated to the pump 2
2 User interface of I/O Remote Interface 3
3 X4 REMOTE connector 4
4 Cable connection to the I/O Remote interface 5
3 Example of cable installation in metallic duct 6
6 Pump operation method 8
7 X4 REMOTE input signal pins (contact input) 10
8 X4 REMOTE input signal pins (contact output) 13
9 X4 REMOTE output signal pin that the states change
according to abnormality notification/warning notification 14
10 X4 REMOTE output signal pin that the states changes
according to rotation speed 14
TABLES
Table Title Page
1 Starting/stopping the STP pump (X4 REMOTE) 8
2 Reset operation (X4 REMOTE) 8
3 X4 REMOTE input signal pins (contact input) 9
4 X4 REMOTE Pin function matrix for input signal
(Type-A PROG-IN) 10
5 X4 REMOTE Pin function matrix for input signal
(Type-B PROG-IN) 10
6 X4 REMOTE output signal pins 11
7 X4 REMOTE output signal pins (continued) 12
8 The rated specification of the seven photo relays' contacts 14

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INTRODUCTION
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1 INTRODUCTION
1.1 Scope and definitions
This manual provides installation, operation and maintenance instructions for the I/O Remote
Interface. You must use the I/O Remote Interface as specified in this manual otherwise the protection
provided by the equipment may be impaired. Edwards takes no responsibility for damage or injury
caused by improper use of the equipment.
Read this manual and the STP pump manual before you attempt to install, operate or maintain the
I/O Remote Interface.
Important safety information is highlighted as WARNING and CAUTION instructions; you must obey
these instructions. The use of WARNINGS and CAUTIONS is defined below.
WARNING
Warnings are given where failure to observe the instruction could result in serious injury
or death to people.
Throughout this manual, page, figure and table numbers are sequential.
The units used throughout this manual conform to the SI international system of units of
measurement; where appropriate, US equivalent units of measurement are also given.
The following IEC warning labels/symbols appear on this Instruction Manual:
Warning - This symbol denotes general warning
Refer to accompanying documentation and instruction manual.
CAUTION
Cautions are given where failure to observe the instruction could result in minor personal injury or
damage to the equipment, associated equipment and/or process.

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INTRODUCTION
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1.2 General description
The remote input/output signal connector, "X4 REMOTE", is used for input/output remote signals for
I/O Remote Interface. The connectors for the I/O Remote Interface are on the front panel of the STP
pump. Refer to Figure 1.
(a) Front panel of STP Pump with I/O Remote Interface
(b) Enlarged view of the front panel
Figure 1 - I/O Remote Interface which integrated to the pump
I/O Remote Interface connector
Front panel

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INSTALLATION
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2 INSTALLATION
2.1 Unpacking
Check outer package for damage and that the delivery note corresponds to the purchase order.
Note : The I/O Remote Interface is implemented into the STP Pump by Edwards
Note : It is recommended to keep the packaging materials, such as the corrugated fibreboard
container and cushioning material for possible re-use. If the product is damaged, return it in
its original package and contact Edwards or their distributor.
2.2 Precautions before installation
2.3 User connections and indicator for I/O Remote
Figure 2 - User interface of I/O Remote Interface
CAUTION
Read this manual and the STP pump manual before you attempt to install, operate or maintain.
1. X4 REMOTE socket
2. X2 COM2 socket
3. X3 VALVE socket
4. “STATUS” indicator
5. X5 STP-LINK socket
1
4
3
2
5

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INSTALLATION
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2.3.1 X4 REMOTE socket
X4 REMOTE connector is of D-Sub type (37 pins, socket type). The screws for the connector are
M2.6.
Note : The connector (pin type) is not included with the STP pump. Prepare it at your company.
Note : It is recommended to use a shielded cable and connect both sides of the shells to the ground.
Figure 3 - X4 REMOTE connector
2.3.2 X2 COM2 socket
The serial port COM2 is available for the serial communication via RS232 or RS485. When using a
user application, connect it to this port.
Refer to the STP pump instruction manual for detailed specifications.
2.3.3 X3 VALVE socket
Connect the cable of the TMS valve. This TMS valve controls the cooling water in order to maintain a
constant temperature inside the STP pump.
Refer to the STP pump instruction manual for detailed specifications.

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INSTALLATION
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2.3.4 "STATUS" LED
The STP pump operation status is indicated by the colors and flashing patterns of the "STATUS"
LED. Refer to the STP pump instruction manual for detailed specifications.
2.3.5 X5 STP-LINK socket
Connects the communication cable for the STP-Link (optional accessory) or the Display unit iDT-002
(optional accessory). This optional accessory can operate the STP pump, confirm the operation state,
or change various settings.
See the Instruction Manual of "STP-Link" or “Display unit iDT-002”for the detailed specification and
operating method.
2.3.6 Cable connection to the I/O Remote interface
Connect the cable to the I/O Remote interface as shown in Figure 4.
Figure 4 - Cable connection to the I/O Remote interface
*1 The equipment and part within the parentheses must be prepared by the customer.
to TMS valve
TMS valve cable
to iDT-002
iDT-002 cable
(to Vacuum device control circuit)*1
(Serial cable)*1
(to Vacuum device control circuit)*1
(Remote cable)*1

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INSTALLATION
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CAUTION
Locate and secure the cables.
It may be difficult to measure the reproducibility of the communication failure without securing the
cables.
CAUTION
Avoid installing a power line and a communication line in the same metallic duct.
When unavoidable, separate a line with a metal separator certainly, and connect the duct containing
a metal separator certainly to GND, or installing a communication line put into conductive pipes,
such as metal.
Figure 5 - Example of cable installation in metallic duct
CAUTION
Connect each cable securely with caution, avoiding any obstacles. DO NOT place heavy objects on
the cables or bend them excessively. Support each cable so as not to apply direct force to the
connectors or terminals. If any problem occurs in cables, connectors or terminals, the STP pump
may not function normally. DO NOT apply voltage to each connector pin and DO NOT cause any
short-circuiting between pins. Install cables so that personnel are not exposed to risk of tripping or
falling.
CAUTION
DO NOT bundle a communication line with a protective earth conductor or a power line.
Moreover, keep away a communication line from the apparatus used as a noise source as much as
possible.

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OPERATION
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3 OPERATION
WARNING
The I/O Remote Interface provides remote control of an Edward’s pump. You should
refer to the safety information in the pump instruction manual.
This unit should not be relied upon for safety related functions.
3.1 Input operation port setting
The STP pump needs to set the hardware which operates the STP pump before the operation.
The STP pump is equipped with the parallel port (X4 REMOTE connector) and the serial port COM2
(X2 COM2 connector) as standard operating hardware. The STP-Link (optional accessory) or the
display unit iDT-002 (optional accessory) can also operate the STP pump via the serial port (X5 STP-
LINK connector).
The default setting of the Remote Operation Mode is "I/O Remote" (parallel port). It can be set via
serial communication or the STP-Link (optional accessory).
When setting the input port to the parallel port, refer to Section 3.5, "Parallel port input/output signal".
When setting it to the serial port, refer to Section 5, "SERIAL COMMUNICATION PROTOCOL" in the
STP pump Instruction Manual.
The method of operation with the parallel port (X4 REMOTE connector) is shown below. Read
Section 3.5, "Parallel port input/output signal", and follow it.
When operating the STP pump via serial communication, refer to Section 5, "SERIAL
COMMUNICATION PROTOCOL" in the STP pump Instruction Manual.
When operating the STP pump via the STP-Link (optional accessory) or the display unit iDT-002
(optional accessory), refer to each Instruction Manual.

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OPERATION
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3.2 Starting/stopping the STP pump
This section shows methods to operate starting/stopping the STP pump with the parallel part.
Starting the pump
Stopping the pump
Short the circuit between (1)-(3).
Open the circuit between (1)-(3).
Table 1 - Starting/stopping the STP pump (X4 REMOTE)
Stop
Rotation
Stop
(1)–(3)
X4 REMOTE
connector
OPEN
CLOSE
Pump operation
Figure 6 - Pump operation method
3.3 Starting the STP pump after stopping
The start operation shows in Section 3.2, "Starting/stopping the STP pump".
The STP pump can reaccelerate even while it is stopping.
3.4 Starting the STP pump after a safety function operates
The safety function operates when an abnormality/error occurs in the STP pump or peripheral
equipment. To restart the STP pump, remove the cause of the abnormality/error after the STP pump
stops ("STATUS" LED has one flash in red), and do the reset operation shown in Table 2. The
"STATUS" LED will change from red to green, and the safety function is released (RESET operation).
Then, restart the STP pump.
For the safety functions and troubleshooting, see Section 7, "SAFETY FUNCTIONS" in the STP
pump Instruction Manual.
Reset operation
Short-circuit the pins between (1)-(22) for 0.3 seconds or more.
Table 2 - Reset operation (X4 REMOTE)

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OPERATION
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3.5 Parallel port input/output signal
3.5.1 Input signal pins
When using contact input, refer to Table 3 and Figure 7.
The input signal pins function only when the input operation port is set to the parallel port.
Two abbreviations are used in Table 3 and Figure 7:
•COM: Common Pin
•IN: Input Pin
Pin
Description
The pins for inputting the START signal
Short-circuit the pins between (1)-(3).
When the pins (1)-(3) are opened, the STP pump will stop.
The pins for inputting multiple function signal
One of the following functions is available by changing the
setting via the serial port. (refer to Section 5, "SERIAL
COMMUNICATION PROTOCOL" in the STP pump Instruction
Manual, or the Instruction Manual for the STP-Link [optional
accessory])
1. Type A
When a safety function operates, remove the cause of the
abnormality/error after confirming the STP pump has
stopped. When the cause of the abnormality/error is
removed, short the circuits between (1)-(22) for 0.3
seconds or more to reset the failure signal ("STATUS"
LED will change from red flash to green flash).
2. Type B
This is a factory setting.
When the start signal input pins (1)-(3) are opened, it
functions as the reset signal input pin. When the pins are
closed, it functions as the second speed signal input pin.
When using the second speed function, set the function
"ENABLE" by serial communication or STP-Link.
When pins (1)-(22) are set to close, rotational speed will
be second speed during the pump state is NORMAL.
When pins (1)-(22) are set to open, rotational speed will
be normal speed during the pump state is NORMAL.
When using the second speed function to switch the
rotational speed through the serial communication port or
STP-Link, open the circuits between (1)-(22).
Table 3 - X4 REMOTE input signal pins (contact input)
(1) (3)
COM START IN
(1) (22)
COM PROG IN

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OPERATION
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Figure 7 - X4 REMOTE input signal pins (contact input)
Note : 1 pin (0 V) is isolated from the frame ground.
Note : The input current of the remote input signal is approximately 3.5 mA. When the remote
operation with a relay, make sure the minimum load of a relay contact is lower than that.
「START IN」（X4.pin3）
Open (OFF)
Close (ON)
Type-A:
「PROG IN」(X4.pin22)
Open (OFF)
STOP request
START request
Close (ON)
（STOP request）
RESET request
Undefined
(Don’t use)
Table 4 - X4 REMOTE Pin function matrix for input signal (Type-A PROG-IN)
「START IN」（X4.pin3）
Open (OFF)
Close (ON)
Type-B:
「PROG IN」(X4.pin22)
Open (OFF)
STOP request
START request
Close (ON)
（STOP request）
RESET request
START request
for 2nd SPEED
Table 5 - X4 REMOTE Pin function matrix for input signal (Type-B PROG-IN)

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OPERATION
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3.5.2 Output signal pins
Use the output signal pins according to Table 6, Table 7, and Figure 8. The pins can function when
the input operation port is either in the parallel port setting or the serial port setting.
Three abbreviations are used in Table 6 and Table 7, and Figure 8.
•N.O OUT: Normal Open Output Pin
•N.C OUT: Normal Close Output Pin
•COM: Common Pin
Pin
Description
The pins for outputting the ACCELERATION state signal
These pins are closed when the STP pump accelerates.
The pins for outputting the NORMAL OPERATION state signal
These pins are closed when the STP pump is in rated
operation.
The pins for outputting the BRAKE state signal
These pins are closed when the STP pump brakes.
The pins for outputting the parallel port select state signal
These pins are closed when the input operation port is set to
the parallel port (I/O REMOTE).
The pins for outputting the FAILURE signal
These pins between (14)-(33) are closed, and the pins
between (15)-(33) are opened when an abnormality/error is
detected.
Table 6 - X4 REMOTE output signal pins
ACCELERATION
N.O OUT
(10) (29)
(11) (30)
NORMAL
N.O. OUT
NORMAL OUT COM
(13) (32)
BRAKE
N.O. OUT
BRAKE OUT COM
I/O ENABLE OUT COM
(34) (31)
I/O ENABLE
N.O. OUT
(14) N.O OUT
FAILURE
COM
(33)
(15) N.C OUT
ACCELERATION OUT COM

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OPERATION
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Pin
Description
The pins for outputting multiple functions signal
One of the following functions is available by changing the
setting via the serial port. (refer to Section 5, "SERIAL
COMMUNICATION PROTOCOL" in the STP pump Instruction
Manual, or the Instruction Manual for the STP-Link [optional
accessory])
1. Type A
Pump operation signal output
These pins are closed when the STP pump is in operation
(acceleration, deceleration, normal operation).
2. Type B
ACCELERATION state signal output
These pins are closed when the STP pump accelerates.
3. Type C
BRAKE state signal output
These pins are closed when the STP pump brakes.
4. Type D
FAILURE signal output N.O (FAIL N.O.)
These pins are closed when an abnormality/error is
detected.
5. Type E (Default)
This is a factory setting.
WARNING signal output
These pins are closed when the STP pump is WARNING
state.
6. Type F
LEVITATION state signal output
These pins are closed when the STP pump isn’t in
operation (acceleration, deceleration, normal operation).
7. Type G
ACCELERATION or BRAKE state signal output
(ACCEL/BRAKE)
These pins are closed when the STP pump is in
acceleration or brake.
Table 7 - X4 REMOTE output signal pins (continued)
PROG OUT OUT COM
(24) (6)
PROG OUT
N.O. OUT

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OPERATION
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Figure 8 - X4 REMOTE input signal pins (contact output)
ACCELERATION state
signal output pins
NORMAL OPERATION state
signal output pins
BRAKE OPERATION state
signal output pins
FAILURE state
signal output pins
MULTIFUNCTION
signal output pins
IO ENABLE stat
signal output pins

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OPERATION
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Table 8 shows the rated specification of the seven photo relays' contacts.
Resistance Load (COS Ø=1)
Maximum voltage
30 V DC
Maximum rated current
0.1 A
Table 8 - The rated specification of the seven photo relays' contacts
Figure 9 - X4 REMOTE output signal pin that the states change according to abnormality
notification/warning notification
Figure 10 - X4 REMOTE output signal pin that the states change according to rotation speed

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MAINTENANCE
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4 MAINTENANCE
4.1 Inspect the electrical connections
Carry out the following checks regularly when maintaining the pumping system.
1. Inspect the electrical cables and check that they are not damaged. Repair or replace any
damaged cables.
2. Inspect the electrical connections and check that they are secure. Tighten any loose connections
found.

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MAINTENANCE
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