Edwards EPX HiVac Series User manual

EPX HiVac Series Dry Vacuum Pumps
Description EPX EPXTWIN
Item Number Item Number
EPX180L
A419-41-xxx A419-6 1-xxx
EPX180N A419·42-xxx A419-62-xxx
EPX180N
A419-48-xxx A419-68-xxx
EPX180LE A419-43-xxx A419-63-xxx
EPX180NE
A419-44-xxx A419-64-xxx
EPXSOOL
A419-51-xxx A419-71-xxx
EPXSOON
A419-52-xxx A419-72-xxx
EPXSOOLE
A419-53-xxx A419-73-xxx
EPXSOONE
A419-54-xxx A419-74-xxx
Original In structions
{(EDWAI=IDS
WWW. fECJWAI=It:JSVACUUM.COM

~DWARDS
Declaration of Conformity
We, Edwards,
Innovation Drive,
Burgess
Hill ,
West
Sussex,
RH15 9TW, UK
declare under our sole responsibility, as manufacturer and person within the EU authorised
to assemble the technical file, that the product(s)
EPX High Vacuum Dry Pump E PX
E PXTwin
EPX180L
A419-41 - xxx A419-61 - xxx
EPX 1 80N
A419·42-xxx A419·62- xxx
EPX180N
A419-48-xxx A419-68-xxx
E
PX180LE
A419·43- xxx A419-63-xxx
EPX180N E A419-44-
xxx A419-64-xxx
EPX500L
A419-51-xxx A419-71-xxx
EPX500N
A419-52- xxx A419-72-xxx
EPX500LE
A419-53-xxx A419-73-xxx
EPX500NE
A419-54-xxx A419-74-xxx
in combination with the following TIM units: C3, E73, SPI, TEL, LAM, HIT, MCM and also pumps
with no TIM unit fitted
to which this declaration relates is in conformity with the following standard(s) or other
normative documen t(s)
EN1012-2:1996+A1 :2009
E N61 010-1:2010
EN61326-1:2013
(Class A Emissions,
Industrial Immunity)
UL61010-
1,3rd Edition
SEMI 52-0302
SE
MI 58-0701
SEMI F47-0200
Compressors and Vacuum Pumps. Safety Req uirements.
Vacuum Pumps
Safety Requirements
for Electrical Equipment for Measurement,
Control and Laboratory Use. General Requirements
E
lectrical equipment for measurement, control and laboratory
Use.
EMC requirements. General requirements.
Safety requirements for electrical equipment for measurement,
Control and laboratory
use -Part 1: General requirements
Product safetyassessment
Ergonomic assessment
Voltage
sag immunity
and fulfils all the relevant provisions of
Machinery Directive
L
ow Voltage Directive
Electromagnetic
Compatibility (EMC) Directive
2006/42/EC
2014/35/EU
2014/30/EU
2011/65/EU R
estriction of Certain Hazardous Substances (RoHS) Directive
Note: This declaration covers all product serial numbers from the date this Declaration was
sis;•; o:7rds ~
~~ 04.10.2017, Burgess Hill
Mr /llark Hope, Global Engineering Quality Director Date and Place
This product has been manufacturedunder a quality management system certified to ISO 9001:2008

M ate rial Declaration
P601- 00-700
I ssue E
In accordan ce with the requirements of the Chinese regulatory requirement on the Management Methods for the
Restriction of the Use of Hazardous Substances in Electrical and Electronic Products Order No. 32 (also known as
'China
RoHS2' ) and SJ /T 11364 Marking for the Restricted Use of Hazardous Substances in Electronic and Electrical
Products:
Product Product Labels Meaning
All iH models
~
This product contains hazardous substances in at
All iGX models
least one of the homogeneous materials used which
All GX models
are above the limit requirement in GB /T 26572 as
All EPX models detailed in
the declaration table below.
Tool I
nterface ( Micro TIM) ( if fitted ) These parts can safely
be used for the
en vironmental protection use period as indicated.
t~IH!t-~:M:
m
~
Part name Lead Mercury
(Pb) (
Hg )
t!L7E
X 0
Enclosure
fl!t!l<*~t!l~:tt
II*)
Motors (pump and X 0
mechanical
booster)
*~:ttlli*
X 0
Pump and booster
1'1! =f 7G14'~~1tf:
Electronics and X 0
Controls
;.Hp~~
X 0
Cooling system
~B~~
X 0
Purge system
t!Lilf&r:J
X 0
Tool I nterface
~~fiHtF"~
Materials Co n ten t D eclaratio n
li*~l!li
Hazardous Substances
m
:f.\ 1ft ill
$~~*
Cadmium Hexaval
ent
Polybrominated
Chromium biphenyls
(
Cd ) (CrVI)
(PBB )
0 0 0
0 0 0
0 0 0
X 0 0
0 0 0
0 0 0
0 0 0
0: ~ff-~li~4ml!li.f£1Hl'!#Bt!Mli~l!li:ft~-l-!f!Btl~mf~-=f GB /T 26572 fif,i!Em\5EBtl~~m~31(.
$~ - *M
Polybrominated
diphenyl
ethers
( PBD E)
0
0
0
0
0
0
0
0 : Indicates that the hazardous substance contained in all of the homogeneous materials for this part is
below
the limit requirement in GB /T 26572.
X:
~ff-~li~4ml!li.f£~H!l14'Bt1~:1> - :ft l •~l!li~~ !f! Btl~mi!il:±l GB /T26572 f;f,ftHli!5EBtlll&m~31(.
X: Indicates that the hazardous substance contained in at least one of the homogeneous materials used for
th
is part is above the limit requirement of GB /T26572.
NOTE: The se produc ts are EU RoH S com plian t, the following Exe mptionsapply:
6(b) Lead
as an alloying element in aluminium cont aining upto 0.4% by weig ht
6(c) Copper a
lloy c ont aining up to 4% lead by weight
7(a) Lead inin high m
el tin g te mp er at ur e ty pe solder (i.e. lead based alloys co nt aining 85% by or more)
7(b) Lead in sold
er s for se rv er s, sto ra ge and st or ag e arr ay sy st ems, n etwork i nfr a structur e e quipm e nt for switching, signalli ng,
transmission, and netw or k managem ent for t el e co mm unications
(
c) I Elec tr ical and el ectro nic co mp on en ts containing lead in a gl ass or cer am ic ot her than diel ect ric ceramic in capacitors, e.g.
piezoelectronic device
s, or in a gla ss or ceramic ma tr ix comp ou nd
7(c) II
Lead in diel ectr ic cer am ic in capaci tors for a r ated vo lt age of 125 V AC or 250 V DC or higher
8(b) Cadmium and
it sc om poundsin el ect rical co nt acts
15 Lead in solders t o complete a viable electrical connection between s
em icondu ct or die and carrierwithin in teg rated cir cuit
flipchip packages
34 Lead in
cermet -b as ed t rimme r po ten tiom ete r elements

This page has been intentionally left blank.

~t:JWARDS
A419 -00-880 Issue K
Contents
Section
Page
1 Introduction ..
.. ........ .. ........ .. ........ .. ........ .. ........ .. ........... ... .... .. ........ ... .. 1
1.1 Scope and definitions ...
........ .... ... ...... . ... .... ... . .... ........ ... .... .... ... .. ............ . ........ ..... ...... ... 1
1.2 Description ..... . ............ ... .................................. . ....... . ........................................... . ... . 2
1.2.1 The
EPX l .......... .. ....... ... ... . ............. .. ...... . ... . ..... .. .. ........... .. ... . ........ . ........ ... .. ... . ..... .... 3
1.
2.2
The EP X LE ........ .. ........ ..... ...... . ........................... ... .......... . ............ . ........ . ................ . .. 3
1.2.3 The
EPX N ......... .. ............ ... ......... .. ............ . ......................... . ......................... . ........... 3
1.2.4 The EPX NE ......... . ........ .. ... .. ............. .. ...... . ... . ...... ... .......... . .. ... ... ...... . .......... . .. ... . ...... . .. 3
1.3 Pump protection sensors
....... ... .. ...... . ... ... .... .. ... .. .......... . ... . .... .. ... .. ....... .. .. ........ . .. ........ ... 4
1.4
LED status indicators ........ ... ............ ... ........ . ... . ...... ...... . ........ . .............. . .......... . ..... .. ...... 4
1.5 Connections
................... . ................ .... ..... . .......... . .............. . ..... . ................... . .......... .. 12
1.6 Control and monitoring .............. .... .......... ... ..... ...... ...... .... ..... ..... ...... .... ..... ........ . .......... 12
1.7 EPX pump labels .. ......... ...... . ... . ........ ..... ...... . .............. . .... ..................... . ... . ................. 12
1.8
End user controller ..... . ..... . ...... . ..... . ...... . ........ . ....... . ......................... . ....................... ...13
1.9 Green mode operation ... .. .......... .... ...... .... . .... . .. ............ ... ...... ......... .. .... .... ... ...... . ...... .. .. 13
2 Technical
data .. .... .. .... ..... ... .. ...... .... ............... ... .. ..... ... .. ..... ... ....... ..... 15
2.1 General ..... ...... ... ........ . .............. ... ........ ..... ...... ... .... ...... ....... .. .. .... . .......... . ... . ...... ... ...15
2.2
Performance . ..... .. .......... . .... .......... . ............ . ............ . ...................................... . .......... 15
2.3 Electrical
data ....... .. ........................ .. ....... . ..... . ........ . .......... . ..... . ................... . .......... ..16
2.4
Coo ling w ater supply ............ ... .. ...... ......... .. .. ... .. ......... .. ... . .... .. ... .. .... ...... . ... . .... .. ... .. ...... 17
2.5
Nitrogen purge system ( EPX Nseries pumps) .......... .. ...................... . .... ........ . .......... .. ........... 17
2.6
Materials in contact wi th process gases .... .. ........ . .............. .. ...................... .... .... ............ .. .. 17
3 Installation
.... .. ........ ... ....... .. ....... .... ...... ... ....... ... ....... ... ....... .. ......... . .. 27
3.1
Safety . ... . .......... . ........ ....... ......... ...... ...... . .......... ....... ........ . .. ... . ....... .. ... ....... . .......... .. 27
3.2 Unpack and inspect
... . .. .. ...... . ... .... ..... ... .. .. ...... ... ........ . ..... . ........ ... ........ ..... ...... ........ ..... 27
3.3 Securing
the EPX pump .... . ......... .. ................................ . .... .............................. . ............ 28
3.4
Con n ect the inlet to the process system .. .. .... . ...................................... ... .. ........................ 29
3.5 Connect
the outlet to the exhaust extraction system ...... ...... . .... .. ...... .... ........ .......... .... ... ...... 30
3.6 Nitrogen purge ( EPX Nseries pumps) .. .. ...... .. ... . ... ... .... ... ... ... ...... . ... ... ...... ... ........ ...... ... .... .. 31
3.7 Leak
test the system ......................... .. . .. ............. .. ........................ .. ........................ .. .. 31
3.8 Connect
the cooling w ater supply ........ ..... ............ . ........ .. ............... . ........ .. ............... . ...... 32
3.9
Con n ect to the emergency stop circuit ..... .. ........... . ............ . .... .. ...... ... ...... ..... ............ ... .... 33
3.10 Connect
the EP Xpump to the electrical supply .... . .......... .. ............................ .. ........ .. .......... 34
3.11 Con n ect to the control equipment .... ...... .. ............ ........ .... ........ .. .... .. ......... .. .................... 35
3.11.1 Inputs . ... ... .... . .. ... ....... ... .... .... .. .. ..... .. ...... ... .... ..... . ... .. ........ ..... ...... ..... ...... . ... .. ... .... .. .. 36
3.11.2 Outputs
... .......... . .......... . ........................ .. .......... . ..... . ...... ...... . ...... . ............. .. ........... .36
4 End User Controller (EUC) and Pump Display Terminal (PDT) menus .. .. .... ...... ... .. 39
4.1 Introduction .. ..... ... .. .... ... ... . .... .. .... .. .................... .. .. ... ............. .. ...... . .......... ... .......... .. 39
4.2 General operation
.. .. ..... .... ... ... ... ...... ... .. .... ....... ........ . ..... .. ... .... ... .... .. ... ... ... .... .... .. ... .... 40
4.3 The
CANCEL button .... .. ......... .. ........ ... .. ........ . ............ .... ................. ... ... ... .................... 40
4.4 Display
text and variable te xt ..................... ... .... .. .... . ... . ...... ..... .......... .. ....... ... ... . .... . ..... ..40
4.5 Wrap-around ..... ... ........ ... .. ........ .. .. . .... .. .... . .... .. ....... .. .. ........... .. ....... .... ...... .. ... .... .... .... 41
4.6 Timeout
.. ........ ..... .......... . .......... ... . ... ...... . .......... . .... .......... . ............. .. ..................... .. 41
4.7 Menu
structure .......... .. ........ .. .............. ... ... ..... . ........ ... ........ . ..... . ....... .. .. ...... ..... .... .... .. 41
4.8 Example
..... . ..... .. .. ........ ..... ... . ...... ... ........ ... ... .. ....... . .......... . ... ... ........ ... ........ ... ... .. ..... 42
....
5
;:;
~
s
5.1
~
Operation ....... ....... ... ....... ... ....... ... ....... ... ....... ... ....... .. ........ . ............. 53
Introduction ... ... ...... ...... .. ...... . .... . .. . ... .. .... . ... . ...... ..... . ... ...... . ... .... ..... . ... ........ ..... . ...... .. 53
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