Edwards T-STATION 85 User manual

T-STATION 85 INSTRUCTION MANUAL
Publicaon Number: D395-94-880
Issue: A
Original Instrucons
edwardsvacuum.com

Copyright noce
©Edwards Limited 2017. All rights reserved.
Trademark credits
Edwards and the Edwards logo are trademarks of Edwards Limited.
Associated publicaons
A746-02-885 Diaphragm Pump - XDD1
A371-32-880 Rotary Vane Pump - E2M0.7 / E2M1.5
B8G0-00-880 Turbomolecular Pumps - nEXT85
D395-94-880A - Copyright noce
Page 2

Contents
Copyright noce.........................................................................................................2
Trademark credits...................................................................................................... 2
Associated publicaons..............................................................................................2
List of Figures............................................................................................................. 7
List of Tables.............................................................................................................. 8
Safety and compliance 9
Denion of Warnings and Cauons.................................................................................. 9
Safety symbols.................................................................................................................... 9
General descripon 10
Overview...........................................................................................................................10
Installaon 11
Installaon safety............................................................................................................. 11
Unpack and inspect.......................................................................................................... 11
Locate the T-Staon 85 .................................................................................................... 12
Bench top xing................................................................................................................ 12
Fill the pump with oil........................................................................................................ 12
Connect to the vacuum system........................................................................................ 13
Connect to the exhaust extracon system....................................................................... 13
Connect the electrical supply........................................................................................... 14
Congure the T-Staon 85 ...............................................................................................14
Turbo pump delay.................................................................................................. 14
Connect a vacuum gauge....................................................................................... 15
Commission the installaon............................................................................................. 15
Operaon 16
Control panel descripon................................................................................................. 16
Start up............................................................................................................................. 17
Menu structure................................................................................................................. 17
Turbo screen.......................................................................................................... 18
Gauge screen......................................................................................................... 19
Vent valve screen................................................................................................... 20
Turbo setpoint screen............................................................................................ 22
Calibrate gauge screen...........................................................................................23
Units screen........................................................................................................... 24
Gas ballast control (E2M1.5)............................................................................................ 25
Electrical supply failure.....................................................................................................25
Maintenance 26
Maintenance safety.......................................................................................................... 26
Maintenance plan.............................................................................................................26
Inspect the hoses, pipelines and connecons.................................................................. 27
Factory default sengs.................................................................................................... 27
D395-94-880A - Contents
Page 5

Fault nding 28
The T-Staon 85 has failed to start...................................................................................28
Ulmate pressure cannot be reached.............................................................................. 28
The backing pump is noisy................................................................................................28
The backing pump is leaking oil........................................................................................ 28
The turbo pump is very noisy or there is excessive vibraon or both.............................. 29
Error numbers...................................................................................................................29
Storage 31
Disposal 32
Service 33
Spares 34
Accessories 35
TAV vent valve and vent port adaptor (for nEXT85 turbo pump)..................................... 35
Outlet mist lter(for E2M1.5 rotary vacuum pump)........................................................ 35
Technical Reference 36
Operang and storage condions.................................................................................... 36
Mechanical data............................................................................................................... 36
Pump performance data...................................................................................................37
Pumped media................................................................................................................. 38
Venng gas specicaon and vent control data...............................................................39
Materials exposed to gases pumped................................................................................ 40
Electrical connecons....................................................................................................... 40
Electrical data................................................................................................................... 42
D395-94-880A - Contents
Page 6

List of Figures
Figure 1: General view of the T-Staon 85.................................................................................. 10
Figure 2: Turbomolecular pump start delay with XDD1 diaphragm pump.................................. 15
Figure 3: Front panel display....................................................................................................... 16
Figure 4: Menu structure.............................................................................................................18
Figure 5: Turbo screen................................................................................................................. 19
Figure 6: Gauge screen................................................................................................................ 20
Figure 7: Vent valve screen.......................................................................................................... 21
Figure 8: Turbo setpoint screen................................................................................................... 22
Figure 9: Turbo setpoint number entry mode............................................................................. 23
Figure 10: Calibrate gauge screen............................................................................................... 24
Figure 11: Units screen................................................................................................................ 24
Figure 12: Dimensions - T-Staon 85...........................................................................................37
Figure 13: Max allowed rate of pressure rise during venng: pressure against me (pump
inially at full speed).............................................................................................................. 40
Figure 14: Pin connecons for 15-way sub-miniature 'D' type socket.........................................41
Figure 15: Pin connecons for an 8-way RJ45............................................................................. 42
Figure 16: HS1 Form.................................................................................................................... 43
Figure 17: HS2 Form.................................................................................................................... 44
D395-94-880A - List of Figures
Page 7

List of Tables
Table 1: Checklist of items........................................................................................................... 11
Table 2: Front panel symbols and their funconsl.......................................................................16
Table 3: Menu items.................................................................................................................... 17
Table 4: Turbo screen key acons................................................................................................ 19
Table 5: Gauge screen key acons............................................................................................... 20
Table 6: Vent valve screen........................................................................................................... 21
Table 7: Vent valve screen key acons.........................................................................................21
Table 8: Turbo setpoint screen key acons..................................................................................23
Table 9: Calibrate gauge screen key acons................................................................................ 24
Table 10: Units screen key acons...............................................................................................24
Table 11: Error numbers.............................................................................................................. 29
Table 12: TAV vent valve kits and adaptor................................................................................... 35
Table 13: Outlet mist lter...........................................................................................................35
Table 14: Operang and storage condions................................................................................36
Table 15: Mechanical data........................................................................................................... 36
Table 16: Pump performance data - nEXT85H.............................................................................37
Table 17: Pump performance data - nEXT85D.............................................................................38
Table 18: Vent gas specicaon and vent control....................................................................... 39
Table 19: Electrical connecons.................................................................................................. 40
Table 20: Turbo pump connector pin-out....................................................................................41
Table 21: Acve gauge connector pin-out................................................................................... 42
Table 22: Electrical data...............................................................................................................42
D395-94-880A - List of Tables
Page 8

Safety and compliance
Denion of Warnings and Cauons
Important safety informaon is highlighted as WARNING and CAUTION instrucons; these
instrucons must be obeyed.
The use of WARNINGs and CAUTIONs is dened below.
WARNING:
Warnings are given where failure to observe the instrucon could result in injury or death
to people. The actual symbol shown varies according to the hazard.
CAUTION:
Cauons are given where failure to observe the instrucon could result in damage to the
equipment, associated equipment or process.
Safety symbols
The safety symbols on the products denote areas where care and aenon is required.
The following safety symbols may be used on the T-Staon 85 or throughout the product
documentaon.
Warning/Cauon
An appropriate safety instrucon should be followed or cauon to a potenal
hazard exists.
Warning - Dangerous Voltage
Indicates hazards arising from dangerous voltages.
Warning - Hot Surfaces
Indicates that the marked item may be hot and should not be touched
without taking precauons.
D395-94-880A - Safety and compliance
Page 9

General descripon
For the general descripon of the major components used on the T-Staon 85, select the
appropriate instrucon manual reference against each product type.
Diaphragm pump XDD1 A746-02-885
Rotary vane pumps E2M0.7 / E2M1.5 A371-32-880
Turbomolecular pumps nEXT85 B8G0-00-880
Overview
The T-Staon 85 is a small compact fully automac pumping system which is suitable for a
wide range of vacuum applicaons.
The T-Staon 85 can be supplied with either an XDD1 oil free diaphragm pump or an E2M1.5
rotary vane pump. Both system variants use a nEXT85 turbomolecular pump.
The T-Staon 85 is controlled by an easy to use touch pad control module. A single gauge input
included can be connected to a range of Edwards acve gauges allowing for pressure
measurement and/or control management of the turbomolecular pump.
The compact size of the T-Staon 85 is ideal for use on bench tops or suitable mobile
plaorms. The open system conguraon allows easy maintenance of the main pump
components.
Figure 1 General view of the T-Staon 85
A. Front view (T-Staon with E2M1.5 backing pump opon)
B. Rear view (T-Staon with XDD1 backing pump opon)
1. T-Staon control unit
2. E2M1.5 gas ballast control
3. Backing pump
4. Turbomolecular pump inlet
5. Turbomolecular pump connector
6. Vacuum gauge input
7. T-Staon xing points for bench top
mounng
8. T-Staon liing handles
9. Backing pump mains connector
10. Mains input
D395-94-880A - General descripon
Page 10

Installaon
Installaon safety
WARNING:
Risk of injury or damage to equipment. Follow the safety instrucons and take note of all
appropriate precauons.
•When referring to a manual supplied as a Supplementary Publicaon, all of the
WARNING and CAUTION instrucons in the manual must be obeyed.
•A suitably trained and supervised technician must install the T-Staon 85.
•Check that all the required parts are available and of the correct type before
commencing work.
•Ensure that the installaon technician is familiar with the safety procedures which
relate to the products pumped.
•Wear the appropriate safety clothing when coming into contact with contaminated
components.
•Isolate the other components in the system from the electrical supply so that they
cannot be operated accidentally.
•Do not reuse O-rings and co-seals if they are damaged.
•Dispose of components, grease and oil safely (refer to Disposal on page 32).
•Take care to protect sealing faces from damage.
•Leak tesng the system aer installaon is complete to ensure opmum vacuum
performance is recommended.
Unpack and inspect
1. Remove the outer cover and all packing materials, remove the protecve covers from
the inlet and outlet ports, inspect the system for any damage.
2. If the T-Staon 85 is damaged, nofy the supplier and the carrier in wring within
three days; state the item number of the T-Staon 85 together with the order number
and the supplier's invoice number. Retain all packing materials for inspecon. Do not
use the pump if it is damaged.
3. Check that the package contains the items listed in Table 1 on page 11. If any of
these items are missing, nofy the supplier in wring within three days.
4. If the pump is not to be used immediately, replace the protecve covers and store in
suitable condions as described in Storage on page 31.
Table 1 Checklist of items
Quanty Descripon Check
1T-Staon 85 ❏
1 CD instrucon manual P450-00-000 ❏
1 Ultragrade 15 oil 1 litre (supplied with E2M1.5 only) ❏
1 Inlet seal (either trapped O-ring, co-seal or copper
compression gasket suitable for the inlet ange type)
❏
D395-94-880A - Installaon
Page 11

Locate the T-Staon 85
WARNING:
Heavy objects can cause muscle strain or back injury. The mass of the T-Staon 85 will
dier depending on the model supplied.
WARNING:
The turbo pump used on the T-Staon 85 stores a large amount of kinec energy when it
is running at full speed. In the unlikely event of a malfuncon (rotor seizure), the stored
energy could cause a slight movement of the T-Staon 85 plaorm. If the T-Staon 85 is
operang on a bench top, taking the following steps is advised: (a) Posion the T-Staon
85 at least 10-15 cm away from the edge of the bench top and adjacent devices and/or (b)
Tether or x the T-Staon 85 to the bench top, see Bench top xing on page 12.
CAUTION:
When locang the T-Staon 85, care should be taken not to restrict the venlaon grid
located under the base of the system. Failing to observe this may result in overheang of
the turbomolecular pump.
Bench top xing
There are two M8 xing points located at the rear of the T-Staon 85 base (Figure 1 on page
10, item 7). Using suitable brackets or straps (not supplied), securing the T-Staon 85 to the
bench top is recommended to prevent excessive movement in the unlikely event of a pump
failure.
Note:
Straps or brackets cannot be provided as the best type xing for the customer bench top
locaon cannot be determined. Sourcing or fabricang these xings locally is recommended.
Fill the pump with oil
Procedure for lling the pump with the recommended oil.
If the T-Staon 85 uses an E2M1.5 rotary vane pump, it must be lled with the correct quanty
of oil (supplied) before operang the equipment. For further informaon refer to the EM
Rotary Vane Pump manual A371-32-880.
Fill the pump with oil as follows:
1. Remove the oil ller plug.
2. Pour oil into the pump unl the oil level just reaches the MAX mark on the bezel at the
top of the sight glass. If the oil level goes above the MAX mark, remove the drain plug
and drain the excess oil from the pump.
3. Aer a few minutes, recheck the oil level. If the oil level is now below the MAX mark,
pour more oil into the pump.
4. Ret the oil ller plug. Tighten the plug rmly by hand. Do not over ghten.
D395-94-880A - Installaon
Page 12

Connect to the vacuum system
WARNING:
Connect the turbo pump inlet to the vacuum system before applying power to the T-
Staon 85. This will ensure that the pump cannot operate accidentally causing injury.
WARNING:
If installing the vacuum system directly onto the T-Staon 85, the weight of the system
must be no more than 10 kg and the centre of gravity must be posioned laterally within
the bounds of the base plate. If this is not the case, the vacuum system must be supported
to ensure that the T-Staon 85 does not topple.
1. The turbo pump can be securely xed to the vacuum system via the inlet ange. Make
sure that the pump inlet and all components ed to the pump inlet are clean and
dust-free. If the pump inlet is not kept clean, the pump down me may be increased.
2. If the pump has a CF ange, use the copper compression gasket supplied with the
pump and use a full complement of bolts to connect the inlet ange of the pump to
the vacuum system.
3. If the pump has an ISO ange, use a minimum of four claw clamps (each torqued to
10 Nm) to connect the inlet ange of the pump to the vacuum system. Alternavely,
use a rotatable collar and the combined inlet screen and trapped O-ring supplied with
the pump to connect the inlet ange of the pump to the vacuum system; use a full
complement of bolts with the rotatable collar.
4. If the pump has an NW ange, use the centring ring supplied with the pump and a
metal NW clamp to connect the inlet ange of the pump to the vacuum system.
5. All inlet ange bolts must be re-ghtened once the system is under vacuum. Ensure
that no torques or other forces are transmied to the pump from the vacuum system
or the associated pipelines.
Connect to the exhaust extracon system
WARNING:
Vent dangerous gases and gas mixtures safely. Do not expose people to these gases. If
pumping hazardous gases or vapours, observe the safety recommendaons of the supplier
of the gas/vapour.
Note:
This secon applies to E2M1.5 versions only.
The exhaust system must be congured so that the maximum pressure at the pump outlet
does not exceed 0.5 bar gauge (1.5 bar absolute, 1.5 x 105 Pa) at full pump throughput.
1. Make sure that the exhaust pipeline cannot become blocked.
2. If using an exhaust isolaon valve, make sure the pump cannot be operated with the
valve closed.
D395-94-880A - Installaon
Page 13

Connect the electrical supply
WARNING:
Ensure that the electrical installaon of the pump conforms with all local and naonal
safety requirements. It must be connected to a suitably fused and protected electrical
supply with a suitable earth point.
CAUTION:
Always make the electrical connecons to the T-Staon 85 aer the equipment has been
installed on the vacuum system. Always disconnect the electrical supply from the T-Staon
85 before removing the equipment from the vacuum system.
Check that the electrical supply is suitable for this equipment. Refer to Table 22 on page 42
for the electrical requirements for this equipment.
Make the electrical connecon to the T-Staon 85 using a cable ed with an IEC60320
connector.
A range of suitable cables is available from the supplier.
Congure the T-Staon 85
As supplied from the factory, the T-Staon 85 will control the system as follows:
System start is selected:
•The TAV vent valve will close.
•The backing pump will turn on.
•The turbomolecular pump will start accelerang up to full rotaonal speed.
System o is selected:
•The backing pump will turn o.
•The turbomolecular pump drive will turn o and the pump will start to decelerate.
•The TAV vent valve will open fully from 50% of full rotaonal speed.
Turbo pump delay
The T-Staon 85 can be congured to delay the turbo pump aer the backing pump has
started.
Refer to Turbo setpoint screen on page 22. The delay is helpful to prevent the turbomolecular
pump from accelerang under high pressure for a prolonged period if the volume being
pumped is greater than 2 litres. This opon is especially useful if the T-Staon 85 uses an XDD1
diaphragm pump.
Figure 2 on page 15 shows the recommended delay period for a turbo / XDD1 pump
combinaon.
*This operaon refers to systems which have been ed with an Edwards TAV vent valve (oponal
accessory). For more vent opons refer to Vent valve screen on page 20.
D395-94-880A - Installaon
Page 14

Figure 2 Turbomolecular pump start delay with XDD1 diaphragm pump
Connect a vacuum gauge
A single compable acve gauge can be ed to the T-Staon 85.
Fit the gauge using an Edwards acve gauge cable into the gauge connector located on the side
of the controller housing (refer to Figure 1 on page 10, item 6). For acve gauge control and set
up refer to Gauge screen on page 19.
The following Edwards acve gauges are suitable for use with the T-Staon 85:
•APG100 Acve Pirani vacuum gauge
•APGX-H Acve Linear Convecon gauge
•AIM-X Acve Inverted Magnetron gauge
•ASG Acve Strain gauge
Commission the installaon
Aer installing the T-Staon 85, the system must be tested.
Use the following procedure to test the system:
1. Make sure that all the electrical connecons are secure.
2. Switch on the electrical supply and the exhaust extracon system (if available).
3. To operate the system press the START/STOP key. Check that the equipment operates
as described in .
4. Check that the turbo pump reaches normal speed. If the pump inlet is valved or
capped o, it should take approximately 100 - 150 seconds for the turbo to reach
normal speed. If a vacuum chamber is aached to the pump inlet, this me may take
longer.
5. To turn OFF the system, press the START/STOP key followed by the ENTER key to
conrm. Check that the equipment closes down as described in .
For full operaonal details and how to navigate using the front panel control key pad refer to
Menu structure on page 17.
D395-94-880A - Installaon
Page 15

Operaon
WARNING:
Do not aempt to move the T-Staon 85 while the turbo pump is rotang. Doing so may
cause severe damage to the pump and could cause injury.
CAUTION:
To familiarise yourself with the vacuum pumps installed on the T-Staon 85, it is advisable
to read the relevant instrucon manuals (refer to General descripon on page 10).
Control panel descripon
Figure 3 Front panel display
1. Start/ Stop
2. Enter
3. Next
Table 2 Front panel symbols and their funconsl
Key pad symbol Name Funcon
1START/STOP Turns the pumps on and o.
Returns to turbo menu screen.
2ENTER Selects or conrms current menu opon.
Controls acve gauges.
3NEXT Moves to next menu.
Scrolls through menu opons.
The LEDs along the top of the T-Staon 85 display indicate which menu screen is currently
being shown on the numeric display. To move to the next menu item press the NEXT key and to
return to the turbo menu screen press the START/STOP key. The available items are listed in
order in Table 3 on page 17.
D395-94-880A - Operaon
Page 16

Table 3 Menu items
Turbo screen
Gauge screen
Vent valve screen
Turbo setpoint (TSP) screen
Calibrate gauge screen
Units screen
Start up
When applying power to the T-Staon 85 all LEDs in the display will light for 2 seconds to
conrm operaon. The soware version will then be displayed for a further 2 seconds. If you
need to contact Edwards for support regarding the T-Staon 85, please have this soware
version number available.
Menu structure
Figure 4 on page 18 shows the view screen shortcuts and menu structure for the T-Staon 85
control display. They also give an indicaon as to where buons will take you within the menu
layout.
D395-94-880A - Operaon
Page 17

Figure 4 Menu structure
Turbo screen
When the turbo screen is selected, the turbo LED is lit and the speed of the turbomolecular
pump is displayed in percentage of full speed.
If no turbo pump is connected the display shows "---".
D395-94-880A - Operaon
Page 18

Figure 5 Turbo screen
Start the pump with the turbo screen
When the START/STOP key is pressed, both the turbo and backing pumps start. The display
shows the turbo pump is accelerang by ashing the top le poron of the percentage sign.
When the turbo pump reaches normal speed (>80% default) the percentage sign stops ashing
and remains steady.
If a turbo setpoint (TSP) has been set, only the backing pump starts when the START/STOP key
is pressed. The TSP LED ashes unl the setpoint has been reached. Once the setpoint has
been reached the turbo pump starts and the TSP LED turns OFF. If no turbo setpoint has been
set, the TSP LED remains OFF.
Stop the pump with the turbo screen
1. To stop the pumps press the START/STOP key; the display will show "Stop" for three
seconds.
2. Press the ENTER key within that me to stop the pumps. If the ENTER key has not been
pressed, or the START/STOP or NEXT keys are pressed, the display shows the turbo
pump speed and the pumps remain running.
When the turbo pump is decelerang the boom right poron of the percentage sign
ashes unl the pump has completely stopped.
Turbo screen key acons
Table 4 Turbo screen key acons
Keys Short press Long press
START START the turbo, or inialise turbo
STOP sequence, or cancel turbo
STOP, or force turbo STOP when in
error
-
ENTER Acknowledge turbo STOP Fault code display when in error
NEXT Go to gauge screen, or cancel turbo
STOP
Scroll through menu screens
Gauge screen
When the gauge screen is selected, the gauge LED is lit and the gauge pressure reading is
displayed in the selected units.
If no gauge is connected the display shows "---".
D395-94-880A - Operaon
Page 19

Connect a gauge
When a gauge is rst connected the display shows "ID" followed by a number to idenfy the
new gauge.
If the gauge is an Acve Strain Gauge (ASG), the display then goes to ASG range select,
otherwise the display reverts to showing the pressure reading. If the gauge type is not
supported the display shows "???". When no gauge is connected the display shows "---".
Figure 6 Gauge screen
ASG range select
When an ASG is connected the display changes to select the ASG range. 1000 mbar is assumed
by default, and the display ashes "1.03".
Press the NEXT key to select between 1000 and 2000 mbar, then press the ENTER key to
conrmed the selecon.
Gauge ON/OFF control
Gauges which support ON/OFF control (e.g. AIM gauges) can be turned ON and OFF using the
ENTER key.
When rst connected the gauge is in the OFF state and the display shows "OFF". When the
gauge is turned on the display will show "Str" whilst the gauge is starng up, and will then
display pressure.
Gauge screen key acons
Table 5 Gauge screen key acons
Keys Short press Long press
START Go to turbo screen -
ENTER ON/OFF control of supported gauge
or acknowledge error
-
NEXT Go to vent control screen Scroll through menu screens
Vent valve screen
If a TAV solenoid vent valve is connected to the turbo pump podule the operaon of the valve
is controlled by the vent valve screen.
When the vent valve screen is selected, the vent LED is lit and the current vent valve control
seng is displayed. The default is "50%". The vent valve screen is not available if the turbo
pump is running.
1. Select the appropriate seng for either normally open or normally closed vent valve.
D395-94-880A - Operaon
Page 20