Edwards STP Series User manual

MT-66E-0A1-E
Model name Voltage
STP-XA2703BV155/XA3203BV155 200 - 240 Va.c.
STP Series Turbomolecular Pumps
STP-XA2703BV155/XA3203BV155
Pump Specific Information
Instruction Manual (B)
STP pump consists of the three-volumed Instruction Manuals.
Instruction Manual (A):
STP pump generic Instruction Manual
Instruction Manual (B):
(This Instruction Manual)
STP pump specific information
Instruction Manual (C):
STP control unit Instruction Manual
Instruction Manual (D):
STC-U eTMS unit for Turbomolecular Pump
Copyright 2023 Edwards Japan Limited. All rights reserved. Printed in Japan.
2023.08

Declaration of Conformity
This product has been
manufactured under a quality management system certified to ISO9001: 015
.
This declaration is based on the requirements of ENISO17050-1 and the relevant directives.
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This declaration of conformity is issued under the sole responsibility of the manufacturer:
Edwards Japan Limited
1078-1,Yoshihashi,
Yachiyo-shi
Chiba, 76-85 3
Japan
Documentation Officer
Jana Sigmunda 300
Lutín , 78349
Czech Republic
T: [phone]
[email protected]
Product Name:
T
urbomolecular pump
Model Number:
STP
-
XA 703/XA3 03
series
Is in conformity with the relevant requirements of European CE legislation:
006/4 /EC
Machinery directive
Note: The safety objectives of the Low Voltage Directive 2014/35/ U were
complied with in accordance with Annex 1 No. 1.5.1 of this directive.
014/30/EU
Electromagnetic compatibility (EMC) directive
Class A Emissions, Industrial Immunity
011/65/EU
Restriction of certain hazardous s
ubstances (RoHS)
d
irective
as amended by Delegated Directive (EU) 015/863
Based on the relevant requirements of harmonised standards:
EN ISO 1 100: 010
Safety of machinery. General principles for design. Risk assessment and risk
reduction
EN 101
-
:1996 +A1: 009
Compressors and vacuum pumps. Safety requirements. Vacuum pumps
EN 613 6
-
1: 013
Electrical
equipment for measurement, control and laboratory use. EMC
requirements
This declaration, based on the requirements of the listed Directives and EN ISO/IEC 17050-1, covers all product
serial numbers from this date on: 11th-Oct- 0
You must retain the signed legal declaration for future reference
This declaration becomes invalid if modifications are made to the product without prior agreement.
Martin Tollner
President, Semiconductor Chamber Solutions
Chelmsford
Petr Tochacek
General Manager, PC Yachiyo
Yachiyo

Declaration of Conformity
This product has been
manufactured under a quality management system certified to ISO9001: 015
.
This declaration is based on the requirements of ENISO17050-1 and the relevant directives.
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Edwards Japan Limited
1078-1,Yoshihashi,
Yachiyo-shi
Chiba, 76-85 3
Japan
Documentation Officer
Innovation Drive
Burgess Hill
West Sussex
RH15 9TW
UK
[email protected]
This declaration of conformity is issued under the sole responsibility of the manufacturer.
Product Name:
T
urbomolecular pump
Model Number:
STP
-
XA 703/XA3 03
series
The object of the declaration described above is in conformity with relevant statutory requirements:
Supply of Machinery (Safety) Regulations 008
The objectives of the lectrical quipment (Safety) Regulations 2016 are governed by Annex 1 1.5.1 of this regulation.
Electromagnetic Compatibility Regulations 016
Class A Emissions, Industrial Immunity
Restriction of the Use of Certain Hazardous Substances in Electrical and Electronic Equipment Regulations 01
Relevant designated standards or technical specifications are as follows:
EN ISO 1 100: 010
Safety of machinery. General principles for design. Risk assessment and risk
reduction
EN 101
-
:1996 +A1: 009
Compressors and vacuum pumps. Safety requirements. V
acuum pumps
EN 613 6
-
1: 013
Electrical equipment for measurement, control and laboratory use. EMC
requirements. General requirements. Class A Emissions, Industrial Immunity
This declaration, based on the requirements of the listed Directives and EN ISO/IEC 17050-1, covers all product
serial numbers from this date on: 11th-Oct- 0
You must retain the signed legal declaration for future reference
This declaration becomes invalid if modifications are made to the product without prior agreement.
Signed for and on behalf of Edwards Ltd
Martin Tollner
President, Semiconductor Chamber Solutions
Chelmsford
Petr Tochacek
General Manager, PC Yachiyo
Yachiyo

This product has been manufactured under a quality management system certified to
ISO9001: 015
.
This declaration is based on the requirements of ENISO17050-1 and the relevant directives.
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ADDITIONAL LEGISLATION AND COMPLIANCE INFORMATION
RoHS (EU, UK): Material Exe ption Infor ation
This product is compliant with the following Exemptions
Annex III:
• 6(b) Lead as an alloying element in aluminium containing up to 0.4% by weight
• 6(c) Copper alloy containing up to 4% lead by weight
• 7(a) Lead in in high melting temperature type solder (i.e. lead based alloys containing 85% by weight or more lead)
• 7(c) I Electrical and electronic components containing lead in a glass or ceramic other than dielectric ceramic in
capacitors, e.g. piezoelectronic devices, or in a glass or ceramic matrix compound
REACH (EU, UK)
This product is a complex article which is not designed for intentional substance release. To the best of our knowledge
the materials used comply with the requirements of REACH. The product manual provides information and instruction
to ensure the safe storage, use, maintenance and disposal of the product including any substance based requirements.
Article 33.1 Declaration:
This product contains Candidate List Substances of Very High Concern above 0.1%ww by article as clarified under the
015 European Court of Justice ruling in case C-106/14.
• Lead (Pb)
This substance is present in certain steel / aluminium / brass / electrical or electronic components.
W ASTE F RAMEWORK D IRECTIVE
(EU)

This product has been manufactured under a quality management system certified to
ISO9001: 015
.
This declaration is based on the requirements of ENISO17050-1 and the relevant directives.
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材料成分声明
China Material Content Declaration
有害物质
Hazardous Substances
部件名称
Part name
铅
Lead
(Pb)
汞
Mercury
(Hg)
镉
Cadmium
(Cd)
六价铬
Hexavalent
Chromium
(Cr VI)
多溴联苯
Polybrominated
biphenyls
(PBB)
多溴二苯醚
Polybrominated
diphenyl ethers
(PBDE)
铸铝及铝合金制品
Aluminium alloys
× 〇 〇 〇 〇 〇
铜管管件
Brass pipe fitting
× 〇 〇 〇 〇 〇
电缆/电线/连接器
Cable/wire/connector
× 〇 〇 〇 〇 〇
电子元件和控件
Electronics and
Controls
× 〇 〇 〇 〇 〇
O: 表示该有害物质在该部件的所有均质材料中的含量低于 GB/T 657 标准规定的限量要求 。
O: Indicates that the hazardous substance contained in all of the homogeneous materials for this part is below the limit
requirement in GB/T 657 .
X: 表示该有害物质在该部件的至少一种均质材料中的含量超出 GB/T 657 标准规定的限量要求 。
X: Indicates that the hazardous substance contained in at least one of the homogeneous materials used for this part is
above the limit requirement of GB/T 657 .

The description of this product consists of the four-volumed Instruction Manuals. Read through each
Instruction Manual before operation.
The separate volume contents of each description are as follows:
Instruction Manual (A)
•STP pump generic Instruction Manual:
•Introduction
•Installation of the STP pump
•Installation of the STP control unit
•Operation
•Safety functions
•Maintenance and inspection
•Storage and disposal
•Service, Spares and accessories
Instruction Manual (B)
•STP pump specific information:
•Technical data
•How to Secure the STP pump
•Temperature Management System (TMS)
Instruction Manual (C)
•STP control unit Instruction Manual:
•Introduction
•Technical data
•Installation
•Operation
•Serial communication protocol
•STP-Link
•EdCentra (for SCU-1601 series only）
•Maintenance
•Storage, transportation and disposal
•Service, spares, and accessories
Instruction Manual (D)
•STC-U eTMS unit for Turbomolecular Pump:
•Introduction
•Technical data
•Installation
•Operation
•Maintenance and inspection
•Storage, transportation and disposal
•Service, spares, and accessories
Keep the manuals in an easily accessible location.

STP-XA2703BV155/XA3203BV155 Turbomolecular Pump
MT-66E-0A1-E
Page i
PAGE
i
CONTENTS
Section Title Page
1TECHNICAL DATA 1
1.1 Applicable pump specifications 1
1.1.1 STP pump specifications 2
1.1.2 Condition for the water-cooling unit 3
1.2 External appearance of the STP pump 4
1.3 Label affixing positions 6
1.4 Accessories 7
2HOW TO SECURE THE STP PUMP 9
2.1 How to install the STP pump 9
2.2 Connecting the water cooling pipe 14
3TEMPERATURE MANAGEMENT SYSTEM (TMS) 15
3.1 Configuration of the STP pump with the TMS 15
3.2 TMS heater 16
3.3 TMS valve 16
3.4 Installation of the TMS unit 16
3.4.1 Connecting cables to the TMS unit 16
3.4.2 Connecting the pump and TMS valve 16
3.5 Specification of TMS unit 17
3.6 Condition for the TMS unit 17
3.7 Accessories 18

STP-XA2703BV155/XA3203BV155 Turbomolecular Pump
MT-66E-0A1-E
Page ii
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PAGE
ii
ILLUSTRATIONS
Figure Title Page
1 STP-XA2703BV155: VG250/ISO250F/ICF305 (DN250CF) 4
2 STP-XA3203BV155: VG300/ISO320F/ICF356 (DN320CF) 5
3 Label affixing positions for the STP pump 6
4 Prohibited matter 9
5 Methods of securing the STP pump 10
6 Shape of reduced diameter shank bolts 11
7 Positions of the cooling water port 14
8 Configuration of the TMS 15
TABLES
Table Title Page
1 Tightening torque of bolt 9
2 Maximum torque predicted and recommended securing bolt
for inlet port flange (STP-XA2703BV155) 12
3 Maximum torque predicted and recommended securing bolt
for inlet port flange (STP-XA3203BV155) 13

STP-XA2703BV155/XA3203BV155 Turbomolecular Pump
MT-66E-0A1-E
Page 1
TECHNICAL DATA
1
1 TECHNICAL DATA
1.1 Applicable pump specifications
Model Name
Specification
Applicable Control unit
STP-XA2703BV155
STP-XA3203BV155
Extreme Advanced throughput type
Corrosion resistant*1 type
High-emissivity*2 coating type
TMS*3 unit
SCU-1600/1601 *4
*1 Corrosion resistant: STP pump with anti-corrosive treatment.
*2 High-emissivity coating: STP pump with rotor covered with high-emissivity coating.
*3 Temperature Management System: TMS maintains the temperature of the turbomolecular pump by monitoring the
temperature with the thermistor in the turbomolecular pump, and performing the TMS heater ON/OFF control in order to
maintain a constant temperature of the STP pump.
*4 The dedicated control unit for STP-XA2703BV155/XA3203BV155.

STP-XA2703BV155/XA3203BV155 Turbomolecular Pump
MT-66E-0A1-E
Page 2
TECHNICAL DATA
PAG
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2
1
1.1.1 STP pump specifications
The values shown below are typical. They are not guaranteed.
Item
XA2703BV155
XA3203BV155
Flange size
Inlet port flange
VG250/ISO250F
ICF305 (DN250CF)
VG300/ISO320F
ICF356 (DN320CF)
Outlet port flange
KF40
KF40
Pumping speed
N2
L/s
2,650
3,200
H2
L/s
2,050
2,300
Compression ratio
N2
>108
H2
>6×103
Ultimate pressure
Pa
10-7 order [after baking]
Maximum backing pressure *1
Pa (Torr)
266 (2)
Allowable flow backing pressure *2
Pa (Torr)
141 (1.06)
Flow rate of purge gas <N2>
Pa·m3/s (SCCM)
5.1×10-1±1.7×10-2 (300±10)
Rated speed
rpm
27,500
Backup rotational speed*3
rpm
Approximately 6,000
Starting time
min
8
Stopping time
min
8
Noise
dB
<50 (at 27,500 rpm)
Temperature Management System (TMS)
Available
Baking temperature
°C
<120
Lubricating oil
Not necessary
Installation position
Free
Cooling method
Water cooling
Recommended backing-pump
L/min
>1,300
Mass*4
kg
90
95
Ambient temperature range
°C
0 to 40
Storage temperature range
°C
-25 to 55
Applicable Control unit
SCU-1600/1601 *5
*1 Maximum backing pressure indicates the outlet pressure at which the inlet pressure suddenly increases without gas flow.
*2 Allowable flow backing pressure indicates the outlet pressure when the maximum gas flow rate of Argon gas is continuously
exhausted using the back pump (maximum exhaust speed 1,300 L / min).
*3 A backup rotational speed is the lowest rotational speed to which the magnetic bearing can be backed up at a power failure.
*4 Mass is a value of state that the only standard accessory was installed (except the optional accessory).
*5 The dedicated control unit for STP-XA2703BV155/XA3203BV155.

STP-XA2703BV155/XA3203BV155 Turbomolecular Pump
MT-66E-0A1-E
Page 3
TECHNICAL DATA
1
Maximum gas flow-rate
Gas
Condition
Maximum gas flow-rate
*6
Backing-pump
TMS
Heater
set point
TMS
Valve
set point
Purge gas N2
gas flow rate
[Pa･m3/s]
[SCCM]
Ar
>1,300 L/min
155 C
95 C
5.1×10-1±1.7×10-2
(300±10)
2.2
1,300
*6 The maximum gas flow-rate is applicable under conditions that N2or Ar gas is vacuumed continuously and the
backing-pump (pumping speed: 1,300 L/min) is used. It is changed depending on condition. For example, when the gas is
exhausted intermittently, the gas more than the maximum gas flow-rate can be exhausted. In this case, contact Edwards.
1.1.2 Condition for the water-cooling unit
Item
Specification
Port type
Rc 1/4 (Female) *1
Flow rate
L/min
2
Water temperature
°C
5 to 25
Water pressure
MPa (kgf/cm2)
0.3 (3)
*1 Standard type

STP-XA2703BV155/XA3203BV155 Turbomolecular Pump
MT-66E-0A1-E
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TECHNICAL DATA
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1
1.2 External appearance of the STP pump
Figure 1 - STP-XA2703BV155: VG250/ISO250F/ICF305 (DN250CF)
No.
Item
Description
1
Center of gravity
2
Purge port
KF10
3
Upper water cooling port
Rc*11/4
4
Lower water cooling port
Rc*11/4
5
TMS sensor connector
6
TMS heater connector
7
Screw hole of legs
4-M16 depth 33
8
TMS heater
Built-in
9
TMS heater cover
10
Outlet port flange
KF40
11
Cooling pipe
12
Cable bending dimensions
13
Screw hole for legs
8-M16 depth 24
14
Outlet port heater
Option
Inlet
port
flange
VG250
ISO250F
ICF305
(DN250CF)
φA
350
335
305
B
15
15
28
C
454
454
459
D
409
409
414
E
378
378
383
F
320
320
325
G
312
312
317
H
281
281
286
I
249
249
254
J
380
380
385
K
387
387
393
L
315
315
315
*1 ISO
(14)

STP-XA2703BV155/XA3203BV155 Turbomolecular Pump
MT-66E-0A1-E
Page 5
TECHNICAL DATA
1
Figure 2 - STP-XA3203BV155: VG300/ISO320F/ICF356 (DN320CF)
No.
Item
Description
1
Center of gravity
2
Purge port
KF10
3
Upper water cooling port
Rc*11/4
4
Lower water cooling port
Rc*11/4
5
TMS sensor connector
6
TMS heater connector
7
Screw hole of legs
4-M16 depth 33
8
TMS heater
Built-in
9
TMS heater cover
10
Outlet port flange
KF40
11
Cooling pipe
12
Cable bending dimensions
13
Screw hole for legs
8-M16 depth 24
14
Outlet port heater
Option
Inlet
port
flange
VG300
ISO320F
ICF356
(DN320CF)
A
B
φA
400
425
425
356
B
18
20
20
28.5
C
415
415
429
454.5
D
370
370
384
409.5
E
339
339
353
378.5
F
281
281
295
320.5
G
273
273
279
312
H
242
242
248
281
I
210
210
216
249
J
341
341
355
380.5
K
349
349
363
388
L
285
285
290
280
*1 ISO
(14)

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MT-66E-0A1-E
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TECHNICAL DATA
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6
1
1.3 Label affixing positions
Refer to the Instruction Manual (A) for the details of the labels 1 to 4 and 8 to 12.
Figure 3 - Label affixing positions for the STP pump
1
TMS heater caution label
2
Hot surface warning label
3
STP pump installation warning label
4
Heavy product caution label
5
Name plate
6
Parts number
7
Company logo
8
Connector caution label
9
STP pump/control unit caution label
10
Rotational direction instruction label
11
Protective earth (ground) label
12
Pipe damage caution label
8
5
7
9
10
6
11
2
2
1
3
4
12

STP-XA2703BV155/XA3203BV155 Turbomolecular Pump
MT-66E-0A1-E
Page 7
TECHNICAL DATA
1
1.4 Accessories
Item
Q’ty
Remarks
Inlet port cover
1
Outlet port cover
1
STP connector cover
1
Blank flange for purge port
1
KF10
Clamping ring for purge port
1
KF10
O-ring washer for purge port
1
KF10
Leg
4
Instruction Manual (B)
1
This manual

STP-XA2703BV155/XA3203BV155 Turbomolecular Pump
MT-66E-0A1-E
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TECHNICAL DATA
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1
This page is intentionally blank.

STP-XA2703BV155/XA3203BV155 Turbomolecular Pump
MT-66E-0A1-E
Page 9
HOW TO SECURE THE STP PUMP
2
2 HOW TO SECURE THE STP PUMP
2.1 How to install the STP pump
WARNING
The STP pump is provided with a high-speed rotor. Any internal abnormality/error
may result in a jump in rotational torque leading to personal injury or peripheral
equipment damage.
The STP pump is provided with a high-speed rotor. The worst-case failure may result in a jump in
rotational torque leading to personal injury or peripheral equipment damage.
Secure the STP pump to the vacuum equipment according to the method specified in this manual.
DO NOT the grip the cooling water pipe (Figure 4) as handle when installing the STP pump. The water
pipe may be deformed, and causes water leakage.
Figure 4 - Prohibited matter
The generated torque during a pump failure is called "Destructive torque". Design and secure the
mounting for the STP pump so that it can withstand the maximum rotational torque. Refer to Table 2
and Table 3 for destructive torque in pump abnormality.
Bolt size
Tightening torque (Nm)
M8
12
M10
24
M12
42
Table 1 - Tightening torque of bolt
When making the legs to secure the base, make them shorter than the ones attached to the STP
pump. Use a material that has a tensile strength of 600 N/mm2or more.
When securing the base, use stainless steel securing bolts with a tensile strength class of 70 or more.
Note: When using any securing method other than that specified in this manual, contact Edwards.

STP-XA2703BV155/XA3203BV155 Turbomolecular Pump
MT-66E-0A1-E
Page 10
HOW TO SECURE THE STP PUMP
PAG
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10
2
The generated destructive torque depends on the presence of a torque reduction mechanism that can
be built into the flange, according to the pump model and flange type. This mechanism, shown in,
Figure 6 is designed to absorb energy and also buffer the destructive torque.
There are two installation methods for the pump, as shown in Figure 5. Make sure to secure the inlet
port flange of the pump with the recommended bolts, as described in Table 2 and Table 3, according
to the installation method used.
Note that special washers will be required if the pump includes the inlet torque reduction mechanism.
The washer shape is shown in Figure 6.
(A) When the base is not secured
(B) When the base is secured
1.
Recommended fitting bolt for flange
2.
Secure the base
Figure 5 - Methods of securing the STP pump
1
2

STP-XA2703BV155/XA3203BV155 Turbomolecular Pump
MT-66E-0A1-E
Page 11
HOW TO SECURE THE STP PUMP
2
CAUTION
Install the flange securing bolts in the proper position with the special square washer shown in
Figure 6. Failure to do so may cause abnormal operation of the torque reduction mechanism and
damage the pump.
CAUTION
When any internal abnormality/error results in high rotational torque, causing the torque reduction
mechanism to operate, the pump may rotate a maximum of 5 degrees around the rotor rotation at
axis.
A
2 A
2.5
(A)
VG250/VG300/VG350/ISO320F
(B)
ISO250F
*1
VG250: A=15,
VG300/VG350: A=18,
ISO320F: A=20
*1
ISO250F: A=15
1.
Vacuum equipment
2.
Inlet port flange
3.
Washer
4.
Torque reduction mechanism
5.
Bolt insert position
Figure 6 - Shape of reduced diameter shank bolts
1
2
5
3
4
4
3

STP-XA2703BV155/XA3203BV155 Turbomolecular Pump
MT-66E-0A1-E
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HOW TO SECURE THE STP PUMP
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2
Pump model
STP-XA2703BV155
Flange type
ISO250F
VG250
Torque reduction
mechanism
Equipped (standard)
Not Equipped
Equipped (optional)
Not Equipped
(standard)
Destructive Torque
[kNm]
48.1
This model is not
available
48.1
71.2
Base (8 positions)
securing
No
Yes
No
Yes
No
Yes
Recommended bolt
Shape
Standard
Standard
Standard
Standard
Standard
Standard
Size
M10
M10
M12
M12
M12
M12
Q’ty
12
12
12
12
12
12
Material*1
Carbon
steel
Alloyed
steel
Carbon
steel
Alloyed
steel
Carbon
steel
Alloyed
steel
Carbon
steel
Alloyed
steel
Carbon
steel
Alloyed
steel
Stainless
steel
Strength*1
12.9 or
more
12.9 or
more
12.9 or
more
12.9 or
more
12.9 or
more
70 or more
Special
washer
Figure 5 (B)
Figure 5 (B)
Figure 5 (A)
Figure 5 (A)
Not
necessary
Not
necessary
Pump model
STP-XA2703BV155
Flange type
ICF305 (DN250CF)
Torque reduction
mechanism
Equipped
Not Equipped
(standard)
Destructive Torque
[kNm]
This model is not
available
71.2
Base (8 positions)
securing
No
Yes
Recommended bolt
Shape
Standard
Standard
Size
M8
M8
Q’ty
32
32
Material*1
Carbon
steel
Alloyed
steel
Stainless
steel
Strength*1
12.9 or
more
70 or more
Special
washer
Not
necessary
Not
necessary
*1 Refer to ISO 898-1 (JIS B 1051), ISO3506 (JIS B 1054).
Table 2 - Maximum torque predicted and recommended securing bolt for inlet port flange
(STP-XA2703BV155)