Edwards nEXT200200 User manual

nEXT Turbomolecular Pumps
nEXT200200
INSTRUCTION MANUAL
B85200880_D Original instrucons
edwardsvacuum.com

Copyright noce
©Edwards Limited 2020. All rights reserved.
Trademark credit
Edwards and the Edwards logo are trademarks of Edwards Limited, Innovaon Drive,
Burgess Hill, West Sussex RH15 9TW.
Disclaimer
The content of this manual may change from me to me without noce. We accept no
liability for any errors that may appear in this manual nor do we make any expressed or
implied warranes regarding the content. As far as praccal we have ensured that the
products have been designed and constructed to be safe and without risks when
properly installed and used in accordance with their operang instrucons.
We accept no liability for loss of prot, loss of market or any other indirect or
consequenal loss whatsoever.
Product warranty and limit of liability are dealt with in our standard terms and
condions of sale or negoated contract under which this document is supplied.
You must use this product as described in this manual. Read the manual before you
install, operate, or maintain the product.
Page 2

P20004820E
CE Declaration of Conformity
The following products
nEXT 200/200D B852 XXXXX
nEXT 200/200T B853 XXXXX
Is in conformity with the relevant requirements of European CE legislation:
2006/42/EC
Machinery directive
2014/35/EU
Low voltage directive (LVD) as applicable to electrical sub-assemblies
2014/30/EU
Electromagnetic compatibility (EMC) directive
2011/65/EU
Restriction of certain hazardous substances (RoHS) directive
as amended by Delegated Directive (EU) 2015/863
Based on the relevant requirements of harmonised standards:
EN 1012-2:1996 +A1:2009
Compressors and vacuum pumps. Safety requirements. Vacuum pumps
EN 61010-1:2010
Safety requirements for electrical equipment for measurement, control and laboratory
use. General requirements
EN 61326-1:2013
Electrical equipment for measurement, control and laboratory use. EMC requirements.
General requirements
Class B Emissions, Industrial Immunity
Documentation Officer:
Jelena Havelkova, Spielberk Office Centre, Holandska 10, Brno, 63900 Czech Republic,
: [phone], : [email protected]
This declaration, based on the requirements of the listed Directives and EN ISO/IEC 17050-1, covers all product
serial numbers from this date on: 11th November 2019
Petr Smerek, Engineering Manager
Scientific Vacuum Division
Lutin
Ian Keech – General Manager
Lutin
Edwards Ltd
Innovation Drive
Burgess Hill
West Sussex
RH15 9TW
UK

This product has been manufactured under a quality management system certified to ISO 9001:2015
Additional Legislation and Compliance Information
EU EMC Directive: Class A/B equipment
Caution: This equipment is not intended for use in residential environments and may not provide adequate protection to
radio reception in such environments.
EU RoHS Directive: Material Exemption Information
This product is compliant with the following Annex III Exemptions:
•6(b) Lead as an alloying element in aluminium containing up to 0.4% by weight
•6(c) Copper alloy containing up to 4% lead by weight
•8(b) Cadmium and its compounds in electrical contacts
EU REACH Regulation Compliance
This product is a complex article which is not designed for intentional substance release. To the best of our knowledge
the materials used comply with the requirements of REACH. The product manual provides information and instruction to
ensure the safe storage, use, maintenance and disposal of the product including any substance based requirements.
Article 33.1 Declaration
This product does not knowingly or intentionally contain Candidate List Substances of Very High Concern above 0.1%ww
by article as clarified under the 2015 European Court of Justice ruling in case C-106/14.
•Cadmium (Cd) added to the Candidate List June 2013
As indicated by the applied RoHS exemption above, this substance is present in electronic componentry
•Lead (Pb) added to the Candidate List June 2018
As indicated by the applied RoHS exemption(s) above this substance is present in certain aluminium/brass components.
ADDITIONAL INFORMATION
The products listed are also in scope for and comply with the requirements of the following:
2012/19/EU
Directive on waste electrical and electronic equipment (WEEE)
Product is certified to
CSA-C22.2 No.61010-1-12
Safety requirements for electrical equipment for measurement, control and
laboratory use – Part 1: General requirements
Product conforms to
UL61010-1 3
rd
Edition
Safety requirements for electrical equipment for measurement, control and
laboratory use – Part 1: General requirements
Russia EAC
Intertek certification

This product has been manufactured under a quality management system certified to ISO 9001:2015
材料成分声明
China Material Content Declaration
有害物质
Hazardous Substances
部件名称
Part name
铅
Lead
(Pb)
汞
Mercury
(Hg)
镉
Cadmium
(Cd)
六价铬
Hexavalent
Chromium
(Cr VI)
多溴联苯
Polybrominated
biphenyls
(PBB)
多溴二苯醚
Polybrominated
diphenyl ethers
(PBDE)
铸铝及铝合金制品
Aluminium alloys
XOOOOO
铜管管件
Brass pipe fitting
XOOOOO
铜接头
Brass connectors
XOOOOO
印刷电路组件
(PCA)
Printed Circuit Assembly (PCA)
X O X O O O
O: 表示该有害物质在该部件的所有均质材料中的含量低于 GB/T 26572 标准规定的限量要求。
O: Indicates that the hazardous substance contained in all of the homogeneous materials for this part is below the limit
requirement in GB/T 26572.
X: 表示该有害物质在该部件的至少一种均质材料中的含量超出 GB/T26572 标准规定的限量要求。
X: Indicates that the hazardous substance contained in at least one of the homogeneous materials used for this part is
above the limit requirement of GB/T26572.

This page has been intentionally left blank.

Contents
1. Safety and compliance. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
1.1 Denion of Warnings and Cauons. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
1.2 Safety symbols. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
1.3 Trained personnel. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
2. Introducon. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10
2.1 Overview. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10
2.2 Pump controller. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11
2.3 Operaonal features. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12
2.3.1 Power limit seng. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12
2.3.2 Standby speed. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12
2.3.3 Timer. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12
2.3.4 Analogue output. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13
2.3.5 Automac vent opons. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13
2.3.6 Normal speed seng. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14
2.4 Logic interface. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14
2.4.1 Parallel control and monitoring. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14
2.4.2 Serial control and monitoring. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15
2.4.3 Serial control with parallel monitoring. . . . . . . . . . . . . . . . . . . . . . . . 15
2.4.4 Parallel control with serial monitoring or serial conguraon. . . . . 15
2.4.5 Controller conguraon (serial conguraon). . . . . . . . . . . . . . . . . . 16
3. Technical data. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 17
3.1 General technical data. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 17
3.2 Operaon and storage environment. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 22
3.3 Vent gas specicaon and vent control data. . . . . . . . . . . . . . . . . . . . . . . . . . 22
3.4 Purge gas specicaon. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23
3.5 Cooling water. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 24
3.6 Electrical data. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 24
3.7 Pumping media. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 25
3.8 Materials exposed to gases pumped. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 26
3.9 Logic interface connector. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 27
3.10 Controller connector socket. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 29
3.11 Indicator LED's. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 30
4. Installaon. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 32
4.1 Unpack and inspect. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 32
4.2 Typical installaon. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 33
4.3 Connect to the vacuum system. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 33
4.3.1 Inlet screen. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 34
4.3.2 Mechanical xing. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 35
Page 3

4.3.3 Inlet connecon and orientaon. . . . . . . . . . . . . . . . . . . . . . . . . . . . . 35
4.3.4 Base mounng. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 35
4.3.5 Backing port connecon. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 36
4.3.6 Interstage connecon (variants only). . . . . . . . . . . . . . . . . . . . . . . . . 37
4.4 Purge gas connecon. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 37
4.4.1 Recommended purge gas ow. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 37
4.4.2 Connect the purge gas. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 37
4.5 Electrical installaon. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 37
4.5.1 Ground the connecons. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 38
4.5.2 Connect the logic interface to the TIC. . . . . . . . . . . . . . . . . . . . . . . . . 38
4.5.3 Connect the logic interface to the customer control equipment. . . 38
4.5.4 Connect the electrical supply. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 38
4.6 Connect the parallel control and monitoring. . . . . . . . . . . . . . . . . . . . . . . . . . 40
4.7 Connecon for serial control and monitoring. . . . . . . . . . . . . . . . . . . . . . . . . 41
4.7.1 Connect the serial interface to the customer control equipment. . 41
4.7.2 Serial enable. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 43
4.7.3 Serial protocol. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 44
4.7.4 Message structure. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 46
4.7.5 Command set. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 46
4.7.6 Mul-drop operaon. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 50
4.8 Connecon for mixed parallel and serial operaon. . . . . . . . . . . . . . . . . . . . 50
4.9 Vent opons, vent valve connecon and control. . . . . . . . . . . . . . . . . . . . . . 52
4.9.1 Manual vent valve. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 52
4.9.2 TAV5 or TAV6 solenoid vent valve. . . . . . . . . . . . . . . . . . . . . . . . . . . . 52
4.9.3 Vent valve control. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 53
4.9.4 Alternave valve connected to the vacuum system. . . . . . . . . . . . . 54
4.10 Cooling. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 54
4.10.1 Introducon. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 54
4.10.2 Forced air cooling. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 55
4.10.3 Water cooling. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 55
5. Conguraon. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 57
5.1 Congure the pump using serial commands. . . . . . . . . . . . . . . . . . . . . . . . . . 57
5.1.1 Power limit seng. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 57
5.1.2 Power supply to the fan from the controller. . . . . . . . . . . . . . . . . . . 58
5.1.3 Controlled venng opons. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 58
5.1.4 Standby speed seng. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 59
5.1.5 Normal speed seng. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 59
5.1.6 Timer seng and opons. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 60
5.1.7 Analogue signal opons. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 61
5.1.8 Factory sengs. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 61
5.1.9 Assigning a mul-drop address. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 61
5.2 Conguring the nEXT pump using a TIC. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 62
Page 4

6. Operaon. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 64
6.1 Before starng the pump. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 64
6.1.1 Close the vent valve. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 64
6.1.2 Pre-start Sequence. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 64
6.2 Operaon with parallel control and monitoring. . . . . . . . . . . . . . . . . . . . . . . 65
6.2.1 Start the pump. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 65
6.2.2 Running at standby speed. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 65
6.2.3 Stop the pump. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 65
6.2.4 Parallel monitoring. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 65
6.3 Operaon with serial control and monitoring. . . . . . . . . . . . . . . . . . . . . . . . . 65
6.3.1 Delayed start. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 65
6.3.2 Start the pump. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 66
6.3.3 Standby speed. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 66
6.3.4 Stop the pump. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 66
6.3.5 Temperature readings. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 67
6.3.6 Link parameter readings. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 67
6.3.7 Measured motor speed. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 67
6.4 Mixed parallel and serial operaon. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 68
6.5 Operaon with a TIC. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 69
6.6 Decelerang and venng. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 69
6.7 Operaon at extreme condions. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 70
6.7.1 Operaon with high inlet pressure. . . . . . . . . . . . . . . . . . . . . . . . . . . 70
6.7.2 Operaon at high temperatures. . . . . . . . . . . . . . . . . . . . . . . . . . . . . 70
6.7.3 Protecon against over-speed. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 70
6.7.4 Electrical supply failure. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 71
6.8 Bakeout. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 73
7. Maintenance. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 74
7.1 Introducon. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 74
7.2 Bearing and oil cartridge maintenance. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 74
7.3 Rotor life. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 74
7.4 Clean the external surfaces of the pump. . . . . . . . . . . . . . . . . . . . . . . . . . . . . 75
8. Fault nding. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 76
8.1 The controller LEDs do not ash for 0.5 seconds when the system is set to on.
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 76
8.2 The pump does not rotate aer a parallel start command is sent. . . . . . . . . 76
8.3 The pump does not rotate aer a serial start command is sent. . . . . . . . . . 77
8.4 The pump does not respond in mul- drop mode. . . . . . . . . . . . . . . . . . . . . . 77
8.5 The green Normal LED does not light or the pump does not rotate at full
speed or the pump fails while in operaon. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 77
8.6 Ulmate pressure cannot be reached. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 77
8.7 The pump is very noisy or there is excessive vibraon or both. . . . . . . . . . . 78
8.8 No serial comms. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 78
Page 5

8.9 Fail signal or standby signal not working. . . . . . . . . . . . . . . . . . . . . . . . . . . . . 79
8.10 Yellow service LED is ashing a repeated sequence. . . . . . . . . . . . . . . . . . . 79
8.11 The red alarm LED is on. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 79
8.12 The red alarm LED is ashing. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 79
8.13 Other problems. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 79
8.14 Flashing service codes. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 79
8.15 Decoding service status words. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 80
8.16 Controller run me. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 81
8.17 Pump run me. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 81
8.18 Pump cycles. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 81
8.19 Bearing run me. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 82
8.20 Oil cartridge run me. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 82
8.21 Flashing error codes. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 82
8.22 Decoding system status words. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 83
8.23 Useful service informaon. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 85
9. Storage. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 87
10. Disposal. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 88
11. Service. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 89
11.1 Return the equipment or components for service . . . . . . . . . . . . . . . . . . . . 89
11.2 Bearing and oil cartridge on-site maintenance. . . . . . . . . . . . . . . . . . . . . . . 90
12. Spares. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 91
12.1 ISX inlet screen. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 91
12.2 Inlet strainer. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 91
12.3 Inlet-ange seals and integrated inlet screens. . . . . . . . . . . . . . . . . . . . . . . . 91
12.4 NW16 and NW25 Ports. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 91
13. Accessories. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 92
13.1 Installaon. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 92
13.2 ACX air cooler. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 92
13.3 WCX water cooler. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 93
13.4 BX bakeout band. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 93
13.5 TAV vent valve and vent port adaptor. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 93
13.6 VRX vent restrictor. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 93
13.7 Vent port adaptor. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 94
13.8 PRX purge restrictor. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 94
13.9 C-clamp adaptor kit. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 94
13.10 Interface cable. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 94
13.11 TIC PC program. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 95
Page 6

List of Figures
Figure 1: nEXT200200 main inlet performance curve. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 19
Figure 2: nEXT200200 side inlet performance curve. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 19
Figure 3: nEXT 200200 NW25 interstage port pumping speed. . . . . . . . . . . . . . . . . . . . . . . 20
Figure 4: nEXT200200 dimensions (mm). . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21
Figure 5: nEXT200200D/T B85xxx510 dimensions (mm). . . . . . . . . . . . . . . . . . . . . . . . . . . . 22
Figure 6: Max allowed rate of pressure rise during venng: pressure against me (pump
inially at full speed). . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23
Figure 7: Interface circuits for nEXT turbo pump controllers. . . . . . . . . . . . . . . . . . . . . . . . . 29
Figure 8: Controller connector showing pin numbers. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 30
Figure 9: Typical pumping system with a nEXT pump. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 34
Figure 10: Logic interface connecons - parallel control. . . . . . . . . . . . . . . . . . . . . . . . . . . . 40
Figure 11: Controller status informaon. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 42
Figure 12: Logic interface connecons - RS232 serial control. . . . . . . . . . . . . . . . . . . . . . . . 43
Figure 13: Logic interface connecons - RS485 serial control. . . . . . . . . . . . . . . . . . . . . . . . 43
Figure 14: Conceptual diagram for mul-drop connecon using RS232 interface. . . . . . . 45
Figure 15: RS485 mul-drop connecon. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 46
Figure 16: Logic interface connecon - mixed parallel and serial operaon. . . . . . . . . . . . 51
Figure 17: Maximum relave humidity to avoid condensaon with water cooling. . . . . . 56
Figure 18: Serial and parallel control owchart. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 69
Figure 19: nEXT exploded accessories view. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 92
Page 7

1. Safety and compliance
1.1 Denion of Warnings and Cauons
NOTICE:
This manual meets our obligaon to provide you with informaon. For safe operaon
from the start, read these instrucons carefully before you install or commission the
equipment.
Read all the safety instrucons in this secon and the rest of this manual carefully
and make sure that you obey these instrucons. The equipment must only be
operated and maintained by trained personnel in the proper condion and as
described in this instrucon manual.
Obey local and state requirements and regulaons. If you have any quesons about
safety, operaon or maintenance of the device, please contact our nearest subsidiary.
Important safety informaon is highlighted as warning and cauon instrucons. Obey
these instrucons.
WARNING:
If you do not obey a warning, there is a risk of injury or death. Dierent symbols are
used according to the type of hazard.
CAUTION:
If you do not obey a cauon, there is a risk of minor injury, damage to equipment,
related equipment or process.
NOTICE:
Informaon about properes or instrucons for an acon which, if ignored, will
cause damage to the pump or the system.
We reserve the right to change the design and the stated data. The illustraons are not
binding.
Keep the instrucons for future use.
1.2 Safety symbols
The safety symbols on the products shows the areas where care and aenon is
necessary.
The safety symbols that follow are used on the product or in the product
documentaon.
Page 8
B85200880_D - Safety and compliance

Warning/Cauon
A safety instrucon which must be followed.
Warning - Dangerous voltage
Idenes possible hazards from dangerous voltages.
Warning - Hot surfaces
Idenes a potenal hazard from a hot surface.
Warning - Protecve earth (ground)
The equipment must be grounded.
1.3 Trained personnel
“Trained personnel” for the operaon of this pump are
▪ skilled workers with knowledge in the elds of mechanics, electrical engineering
and vacuum technology and
▪ personnel specially trained for the operaon of vacuum pumps.
Page 9
B85200880_D - Safety and compliance

2. Introducon
The units used in the manual conform to the SI internaonal system of units of
measurement where applicable US equivalent units of measurement are given. When
ow rates are specied, the abbreviaon 'sccm' is used to mean standard cubic
cenmetres per minute. This is a ow of 1 cm3 min-1 at an ambient temperature of 0 °C
and a pressure of 1013 mbar (1.013 x 105 Pa).
2.1 Overview
WARNING: SAFE EQUIPMENT USE
Risk of injury or damage to equipment. Improper use of the equipment could cause
damage to it or injury to people. The user is responsible for the safe operaon,
installaon and monitoring of the system.
WARNING: ELECTROLYTIC
Risk of asphyxiaon. The drive contains electrolyc capacitors and, under certain
fault condions, may emit dangerous fumes. Ensure that the drive is operated in a
well-venlated area.
CAUTION: ELECTRICAL CONNECTIONS
Risk of damage to equipment. Do not aempt to separate the controller from the
pump since this will cause damage to the electrical connecons.
A nEXT pump has a turbomolecular pump with a permanently aached controller which
has drive electronics.
The controller controls the electrical supply to the pump with the excepon of standby
speed control. The controller has no manual controls and can be operated through the
logic interface only. To operate the nEXT pump, connect it to the customer control
equipment and to the power supply or use the manufacturer's TIC Turbo Instrument
Controller or TIC Turbo Controller.
The controller drives the brush-less d.c. motor in the pump. Three variants of the nEXT
pump are:
▪ The 'S' or 'Simplex' variant which has turbomolecular blades.
▪ The 'D' or 'Duplex' variant which has turbomolecular blades and a drag mechanism
that allows operaon at higher backing pressures than the pure turbomolecular
pumps.
▪ The 'T' or 'Triplex' variant which has turbomolecular blades, a drag mechanism and
a regenerave mechanism. The regenerave stage gives the opon to ulise
'boost' mode.
An 'iD' or 'iT' interstage variant gives an interstage port between the turbomolecular
blades and drag mechanism.
Page 10
B85200880_D - Introducon

The nEXT pump is supplied with an inlet screen. The inlet screen is installed in the
centering O‑ring. The nEXT pumps with NW25 interstage port is supplied with an inlet
strainer. The inlet strainer is installed in the interstage port. The inlet screen and inlet
strainer prevent the damage to the pump caused by debris entering the pump.
The nEXT pump has a vent port for venng the pump and vacuum system to the
atmospheric pressure. The pump has a manual vent valve which can be replaced with a
TAV5 or TAV6 solenoid‑operated vent valve (available as an accessory, refer to
Accessories on page 92). The on‑board motor controller can control the TAV valve.
The nEXT pump has a purge port through which an inert purge gas can be introduced to
protect the bearing and motor from corrosion. You can install an oponal vent port
adapter and purge restrictor to the purge port to control the ow rate of the purge gas
and to lter the gas supply. Refer to Accessories on page 92.
Air coolers and a water cooling block are available as an oponal accessories to cool the
nEXT pumps. Refer to Accessories on page 92.
2.2 Pump controller
The pump controller has the drive electronics that control the pump operaon and the
TAV vent valve. The connector socket is given at the side of the controller where the
TAV vent valve can be plugged in. Refer to Controller connector socket on page 29.
The controller has three indicator LED's which signal the general status, operaon and
the service status of the pump. The LEDs can be used for fault nding if a problem
occurs. Refer to Indicator LED's on page 30.
The drive electronics system has a number of built‑in safety features to prevent
the pump from damage during sustained high pressure or temperature.
▪ The electronics constantly monitors the temperature in the controller and the
temperature of the motor in the pump. If the controller or the motor gets too hot,
the controller decreases the power supplied to the pump motor and the pump
speed decreases. If the rotaonal speed of the pump decreases below 50% of the
full speed, the electronics can trip into a fail condion, depending on the system
conguraon. Refer to Timer on page 12.
▪ If the inlet pressure of the pump increases, the power supplied to the pump motor
increases to counteract the gas friconal load. When the built‑in maximum power
limit is reached, the speed of the pump starts to decrease. If the rotaonal speed
of the pump decreases below 50% of the full speed, the electronics can trip into
fail condion, depending on how the system has been congured. Refer to Timer
on page 12.
▪ If the electrical supply fails, the controller uses the motor in the pump as a
generator. This means the pump has its own regenerave supply and a separate
baery for an emergency power backup is not necessary. The regenerated energy
maintains the electrical supply to the controller, the vent valve or the fan aached
to the controller connector unl the pump speed decreases below 50% of the full
rotaonal speed to make sure that the vent valve stay shut unl below 50% of the
full rotaonal speed and prevent the pump from venng at a full speed. It makes
sure that the serial link and signals on the parallel interface stays acve unl the
pump speed decreases below 50%.
Page 11
B85200880_D - Introducon

2.3 Operaonal features
The pump has basic start and stop commands and some other features that allows the
pump operaon to be modied for an applicable applicaon. Refer to Table: Logic
interface technical data on page 27 for factory default sengs of the parameters given
in the secons that follows.
2.3.1 Power limit seng
Select the maximum power that will be drawn by the pump. The more power supplied,
the quicker the pump will accelerate to reach full speed.
If the applicaon requires fast cycling or higher gas loads, set the power limit to the
maximum value. If ramp me is not important in the applicaon, use a lower power
limit, down to a minimum value (refer to Table: Power limit seng on page 57). Also
ensure there is sucient cooling for the applicaon.
Ensure that the power supply is capable of delivering sucient power to the nEXT pump.
By choosing a lower power limit seng, a smaller power supply may be used. For more
informaon, refer to Electrical data on page 24.
Table 1 Power limits
Pump Standard default seng Maximum value seng Minimum value
seng
nEXT200200 160 W 200 W 50 W
2.3.2 Standby speed
In standby mode, the pump rotaonal speed is lower than the full rotaonal speed. The
default seng for standby speed is 70% of the full speed.
To operate the pump at standby speed, it must be in the start condion.
If operang the pump at maximum speed at all mes is not necessary for the
applicaon, use the standby speed feature rather than seng the pump to o. You can
use the standby speed feature for tuning the vacuum system or as a power saving opon
for the system.
The standby speed is a user‑selectable value. Refer to Standby speed seng on page 59.
2.3.3 Timer
When the pump is started, an internal mer is starts automacally in the drive
electronics. The default mer seng is 8 minutes.
If the pump fails to reach 50% of full rotaonal speed in the meout period, the motor
controller will signal a fail and decelerate the pump to rest. This feature prevents the
motor controller from driving the pump at maximum power for a long me. The pump
can fail to reach 50% speed if the gas load is too high (for example if there is a leak in the
system), if the backing pump fails or if the pump is too hot.
The meout period is user‑selectable (refer to Timer seng and opons on page 60). If
slow ramp‑up of the pump is necessary for the applicaon, extend the meout period.
The mer is permanently enabled for ramp‑up.
Page 12
B85200880_D - Introducon

If the rotaonal speed of the pump decreases below 50% of the full speed, the pump
me can be set to recover rather than trigger a fail condion. The mer starts
immediately when the rotaonal speed of the pump decreases below 50% of the full
speed. If the rotaonal speed of the pump increases above 50% during the meout
period, the mer will reset. If the rotaonal speed of the pump does not recover by the
end of the meout period, the motor controller will trigger a fail condion and
decelerate the pump to rest.
The mer funcon is enabled when the pump is shipped. You can disable the mer
funcon. If the mer funcon is disabled, the pump will fail and decelerate to rest
immediately when the rotaonal speed of the pump decreases below 50%.
2.3.4 Analogue output
The pump controller produces an analogue output for monitoring four dierent system
parameters:
▪ Measured pump rotaonal speed (default condion)
▪ Measured motor power
▪ Measured motor temperature
▪ Measured controller temperature.
The range of the analogue output signal is from 0 to 10 V and is directly proporonal to
the system parameter. Refer to Logic interface connector on page 27.
Connect the analogue output to an applicable meter or indicator to display the
applicable system parameter or connect it to the customer control equipment (for
example, to operate other components in the pumping system at set values).
The analogue output can monitor only one system parameter at a me. You can
congure the controller to monitor dierent system parameter. Refer to Analogue signal
opons on page 61.
2.3.5 Automac vent opons
The manufacturer's TAV vent valve can be connected to the nEXT pump's controller. The
controller can give number of dierent venng opons.
The drive electronics can control the rate of venng. Using this feature, the pump can be
vented from the full rotaonal speed in a controlled manner that will not damage the
pump bearings. When the rotaonal speed of the pump decreases below 50% of the
maximum speed, it is safe to do a hard vent (open the vent valve fully).
Many venng opons are available, that includes:
▪ Hard vent when the rotaonal speed decreases below 50%
▪ Controlled vent when the rotaonal speed is above 50% speed and hard vent is
below 50% speed
▪ Hard vent immediately through an applicable restrictor.
Controlled venng gives a quicker ramp down me by controlling the vent rate through
a single large orice across the speed range of the pump. List of the venng opons is
given in Vent opons, vent valve connecon and control on page 52.
Page 13
B85200880_D - Introducon

A feature is given that allows a delayed start of the nEXT pump. With this feature, the
vent valve can be closed before starng the nEXT pump. This allows the backing pump to
decrease the pressure in the vacuum system before starng the nEXT pump.
If the controller is not used to control a TAV vent valve, it can be used to operate a fan.
You can congure the controller to permanently enable the fan.
2.3.6 Normal speed seng
The normal speed is a user‑selectable parameter which can be set from 50% to 100% of
full rotaonal speed.
When the pump gets to normal speed, a signal is available on the normal pin of the logic
interface connector. The signal can be used to control the applicaon as it shows that
the vacuum performance (pump speed) is at a set level. The default seng is 80% of the
full rotaonal speed. Refer to Normal speed seng on page 59 for instrucons to
change the normal speed seng.
2.4 Logic interface
The pump controller can be operated only through the logic interface. The signals on the
logic interface are of three types:
▪ Control inputs: Switch‑type signals that are used to control the pump
▪ Status outputs: To idenfy the status of the system
▪ Analogue output: Gives a 0 ‑ 10 V output for a number of pump parameters.
The logic interface supports the serial control and the parallel control to monitor and
control through one connector. For serial control, RS232 (default) or RS485 can be
selected using the RS485 / RS232 slide switch which is given on the motor controller.
Refer to Connecon for serial control and monitoring on page 41.
You can plug the logic interface into the manufacturer's TIC Turbo Controller or
TIC Turbo Instrument Controller and then use the given funconality. The logic interface
can be connected to the customer control system as an alternave.
Refer to Logic interface connector on page 27 for more informaon about the logic
interface.
2.4.1 Parallel control and monitoring
The simple parallel interface is a quick and easy way to control the pump. Same interface
is used on the 24 V manufacturer's Turbo Pumps. The start and standby controls are
available to use. You can monitor the system status using the normal, fail and analogue
output signals.
Note:
The serial enable switch must be open (no connecon) and the slide switch must be in
the RS232 posion. Refer to Connect the parallel control and monitoring on page 40.
Refer to Connect the parallel control and monitoring on page 40 for more instrucons
about how to use the parallel interface.
A system that is in operaon with a parallel connecon only is not capable to adjust the
conguraon sengs stored in the controller (for example, power limit seng or
Page 14
B85200880_D - Introducon

controlled venng opons). In this case, all these features will be at factory default
sengs. You can manually adjust the standby speed if standby mode is selected, but the
controller must be congured separately before the installaon of the nEXT pump to the
system. Refer to Controller conguraon (serial conguraon) on page 16 for more
informaon.
2.4.2 Serial control and monitoring
The serial communicaons link gives complete control and monitoring by using three
signal lines.
The serial data lines have the same connector pins as the parallel signals standby and
fail. The serial data lines can be congured to give an RS485 compliant or RS232
compable interface by seng the posion of the RS485 / RS232 slide switch. Refer to
Connecon for serial control and monitoring on page 41.
The serial enable signal must be linked to 0 V for the system to accept commands from
the serial link. This is a safety feature which operates as an interlock. For pure serial
control, the parallel start signal will be le unconnected.
The motor controller will connue to give normal and analogue signals on the logic
interface connector even when operang under serial control. You can get the status of
the normal signal and the value of the system parameter on the analogue output by
interrogang the system status through the serial link.
Refer to Connecon for serial control and monitoring on page 41 for more informaon
about the serial interface.
2.4.3 Serial control with parallel monitoring
Normal and analogue signals stay available when using serial control. You can control the
pump through the serial link while monitoring the normal and analogue signals in the
parallel interface.
The serial link uses the same connector pins as the parallel signals standby and fail so
these parallel control and monitoring signals are not available. The serial enable signal
must be linked to 0 V and the parallel start signal will be le unconnected.
2.4.4 Parallel control with serial monitoring or serial conguraon
Use this conguraon to operate the pump in parallel control mode, with the opon to:
▪ adjust the conguraon sengs stored in the motor controller or
▪ monitor operaonal status of the pump through the serial link
The serial enable signal must be linked to 0 V for serial communicaons to take place.
While operang under parallel control with the serial link acve, the parallel start
control signal is available (as given in Parallel control and monitoring on page 14) but the
standby control line will not be available as it is used as a serial data line.
If the serial enable line is deacvated while the RS485 / RS232 slide switch is in the
RS232 posion, the serial link must be disconnected. We recommend you to make a
special cable for the serial communicaons that includes a link between serial enable
and 0 V. This way, the serial enable is automacally acvated when the cable is
connected and deacvate when the cable is removed.
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B85200880_D - Introducon

2.4.5 Controller conguraon (serial conguraon)
All conguraon sengs stored in the motor controller are kept when the power to the
pump is removed so that it is possible to use another system to congure the motor
controller before the installaon of the pump at the applicaon. You can congure the
operaon of the pump as per the applicaon and the pump can be operated using a
simple parallel interface system.
To congure the pump, use a customer simple serial system or use the
manufacturer's TIC Turbo Controller or Turbo Instrument Controller. The TICs allows the
storage of a pump's conguraon. You can download the conguraon to another
pump. This is useful when you congure a number of pumps with the same sengs
before they are installed at a system.
Note:
The RS485 / RS232 slide switch must be in the RS232 (default) posion if the TIC is to be
used to congure the pump. Refer to Connect the serial interface to the customer control
equipment on page 41.
The TIC is supplied with a WindowsTM based PC program which allows the pump to be
congured from a single PC. The program has a simple user interface and it is not
necessary to use the ASCII message protocol given in Connecon for serial control and
monitoring on page 41. The TIC PC program can save number of pump conguraons
which can be downloaded to the other pumps.
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B85200880_D - Introducon