Edwards STP-XA2703 Series User manual

MT-66E-101-B
Model name Voltage
STP-XA2703/XA3203 series 200 - 240 Va.c.
STP Series Turbomolecular Pumps
STP-XA2703/XA3203 Series
Pump Specific Information
Instruction Manual (B)
STP pump consists of the three-volumed Instruction Manuals.
Instruction Manual (A): STP pump generic Instruction Manual
Supplied with STP pump
Instruction Manual (B):
(This Instruction Manual)
STP pump specific information
Supplied with STP pump
Instruction Manual (C): STP control unit Instruction Manual
Supplied with STP control unit
Copyright 2008 Edwards Japan Limited. All rights reserved. Printed in Japan.
FOR SALES AND SERVICE PLEASE CALL:
PTB SALES T:: 626.334.0500
[email protected]
[e-mail]
www.ptbsales.com
DATE SERVICED:
VIEW OUR INVENTORY

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The description of this product consists of the three-volumed Instruction Manuals. Read through each
Instruction Manual before operation.
The separate volume contents of each description are as follows:
Instruction Manual (A)
STP pump generic Instruction Manual:
•Introduction
•Installation of the STP pump
•Installation of the STP control unit
•Operation
•Safety functions
•Maintenance and inspection
•Storage and disposal
•Service, Spares and accessories
Instruction Manual (B)
STP Pump specific information:
•Technical data
•How to Secure the STP pump
•Temperature Management System （TMS）
Instruction Manual (C)
STP control unit Instruction Manual:
•Introduction
•Technical data
•Installation
•Operation
•Serial communication protocol
•STP-Link (except for SCU-750)
•Maintenance
•Storage, transportation and disposal
•Service, spares, and accessories
Keep the manuals in an easily accessible location.

STP-XA2703/XA3203 Series Turbomolecular Pump
Aug. 08 i Issue 1-b
PAGE
i
CONTENTS
Section Title Page
1 TECHNICAL DATA 1
1.1 Applicable pump specifications 1
1.1.1 STP pump specifications 2
1.1.2 Condition for the water-cooling unit 3
1.2 External appearance of the STP pump 4
1.3 Label affixing positions 6
1.4 Accessories 7
2 HOW TO SECURE THE STP PUMP 9
3 TEMPERATURE MANAGEMENT SYSTEM (TMS) 15
3.1 Configuration of the STP pump with the TMS 15
3.2 TMS connection cable 16
3.3 TMS heater 17
3.4 TMS valve 17
3.5 TMS sensor cable 17
3.6 Installation of the TMS unit 18
3.6.1 Connecting the TMS connection cable to the STP control unit 18
3.6.2 Connecting the pump and cables 18
3.6.3 Connecting TMS connection cable to STP pump 18
3.7 Condition for the TMS unit 19
3.8 Accessories 19

STP-XA2703/XA3203 Series Turbomolecular Pump
Aug. 08 ii Issue 1-b
PAGE
ii ILLUSTRATIONS
Figure Title Page
1 STP-XA2703 series: VG250/ISO250F/ICF305 (DN250CF) 4
2 STP-XA3203 series: VG300/ISO320F/ICF356 (DN320CF) 5
3 Label affixing positions for the STP pump 6
4 Methods of securing the STP pump 10
5 Shape of reduced diameter shank bolts 11
6 Configuration of the TMS 15
7 External view of TMS connection cable 16
8 TMS sensor cable 17
TABLES
Table Title Page
1 Tightening torque of bolt 9
2 Maximum torque predicted and recommended securing bolt
for inlet port flange (STP-XA2703 series) 12
3 Maximum torque predicted and recommended securing bolt
for inlet port flange (STP-XA3203 series) 13

STP-XA2703/XA3203 Series Turbomolecular Pump
Aug. 08 1 Issue 1-b
TECHNICAL DATA
1
1 TECHNICAL DATA
1.1 Applicable pump specifications
Model Name Specification Applicable Control unit*1
STP-XA2703/XA3203 series Extreme Advanced throughput type SCU-1500/SCU-1400
*1 Applicable control unit: There are different performance specifications between SCU-1500 and SCU-1400.
Refer to Section 1.1.1, "STP pump specifications" for the differences.
Naming convention:
•"C" following a pump model name indicates a corrosion resistant*2 type (e.g. STP-XA2703C).
•"CV" indicates an enhanced corrosion resistant type with TMS*3 (e.g. STP-XA3203CV).
*2 Corrosion resistant: STP pump with anti-corrosive treatment.
*3 Temperature Management System: TMS maintains the temperature of the turbomolecular pump by monitoring the
temperature with the thermistor in the base of the turbomolecular pump, and
performing the TMS valve and base heater ON/OFF control.

STP-XA2703/XA3203 Series Turbomolecular Pump
Aug. 08 2 Issue 1-b
TECHNICAL DATA
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2
1
1.1.1 STP pump specifications
The values shown below are typical. They are not guaranteed.
Item XA2703 series XA3203 series
Inlet port flange VG250/ISO250F/
ICF305 (DN250CF)
VG300/ISO320F/
ICF356 (DN320CF)
Flange size
Outlet port flange KF40 KF40
Pumping speed N2L/s 2650 3200
H2L/s 2050 2300
Compression ratio N2>108
H2>6×103
Ultimate pressure Pa 10-7 order [after baking]
Allowable backing pressure Pa (Torr) 266 (2): Water cooling/TMS unit used
Flow rate of purge gas <N2> Pa·m3/s (SCCM) 8.4×10-2 (50)
Rated speed rpm 27,500
Backup rotational speed*1 rpm Approximately 6,000
Starting time*2 min 8: with SCU-1500
9: with SCU-1400
Stopping time*2 min 8: with SCU-1500
11: with SCU-1400
Noise dB <50 (at 27,500 rpm)
Temperature Management System (TMS) Available
Baking temperature °C <120
Lubricating oil Not necessary
Installation position Free
Cooling method Water cooling
Recommended backing-pump L/min >1,300
Mass*3 kg 75 80
Ambient temperature range °C 0 to 40
Storage temperature range °C -25 to 55
Applicable Control unit SCU-1500/SCU-1400
*1 A backup rotational speed is the lowest rotational speed to which the magnetic bearing can be backed up at a power failure.
*2 Time varies depending on the control unit used.
*3 Mass is a value of state that the only standard accessory was installed (except the optional accessory).

STP-XA2703/XA3203 Series Turbomolecular Pump
Aug. 08 3 Issue 1-b
TECHNICAL DATA
1
Maximum gas flow-rate *3
Condition
Maximum gas flow-rate *3
Gas TMS
set point
Cooling
pipe Cooling water Purge gas N2
gas flow rate [Pa･m3/s] [SCCM]
No Built-in 3.21 1900
No Option*4
Temperature:
5 to 25 °C
Flow rate:
3 L/min Max. 3.88 Max. 2300
Ar
70°C Built-in 2.03 1200
No Built-in 3.89 2300
N2
70°C Built-in
Temperature:
5 to 25 °C
Flow rate:
3 L/min
8.4×10-2 Pa･m3/s
(50 SCCM)
2.70 1600
*3 The maximum gas flow-rate is applicable under conditions that N2or Ar gas is vacuumed continuously and the backing
backing-pump (pumping speed: 1,300 L/min) is used. It is changed depending on condition. For example, when the gas is
exhausted intermittently, the gas more than the maximum gas flow-rate can be exhausted. In this case, contact Edwards.
*4 Contact Edwards for details of additional cooling pipe.
1.1.2 Condition for the water-cooling unit
Specification
Item
Without TMS With TMS
Port type Rc 1/4 (Female) *1
Flow rate L/min 3 2
Water temperature °C 5 to 25
Water pressure MPa (kgf/cm2) 0.3 (3)
*1 Standard type

STP-XA2703/XA3203 Series Turbomolecular Pump
Aug. 08 4 Issue 1-b
TECHNICAL DATA
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1
1.2 External appearance of the STP pump
φ326
187
20ﾟ
20ﾟ
55ﾟ
45ﾟ
(8)
(13)
(9)
≧370
(11)
(5)
φ235
(12)
22.5ﾟ
22.5ﾟ
22.5ﾟ
22.5ﾟ
187
(10)
J (3)
I (2)
(4)
φA
B
H
F
E
D45
C
φ335
φ358
G (1)
(6) *1
(7) *1
Figure 1 - STP-XA2703 series: VG250/ISO250F/ICF305 (DN250CF)
No. Item Description
1 Center of gravity
2 Height of the purge port
3 Height of water cooling port
4 TMS sensor
5 Screw hole of legs 4-M16 depth 33
6 TMS heater*1 Built-in
7 TMS heater cover*1
8 Outlet port flange KF40
9 Purge port KF10
10 Cooling water port 2-Rc*21/4
11 Bending dimension of the
STP connection cable
12 Screw hole for legs 8-M16 depth 24
13 Viewed from arrow A
Inlet
port
flange
VG250 ISO250F
ICF305
(DN250
CF)
φA 350 335 305
B 15 15 28
C 454 454 459
D 409 409 414
E 377.5 377.5 383
F 319 319 325
G 250 250 250
H 262 262 267
I 379.5 379.5 385
J 387 387 393
*1 TMS used only
*2 ISO

STP-XA2703/XA3203 Series Turbomolecular Pump
Aug. 08 5 Issue 1-b
TECHNICAL DATA
1
φ326
187
20ﾟ
20ﾟ
55ﾟ
45ﾟ
(8)
(12)
(9)
≧370
(11)
(5)
φ235
(11)
22.5ﾟ
22.5ﾟ
22.5ﾟ
22.5ﾟ
187
(10)
J (3)
I (2)
(4)
(7)*1
(6)*1
φA
B
H
F
E
D45
C
φ335
φ358
G (1)
Figure 2 - STP-XA3203 series: VG300/ISO320F/ICF356 (DN320CF)
No. Item Description
1 Center of gravity
2 Height of the purge port
3 Height of water cooling port
4 TMS sensor
5 Screw hole of legs 4-M16 depth 33
6 TMS heater*1 Built-in
7 TMS heater cover*1
8 Outlet port flange KF40
9 Purge port KF10
10 Cooling water port 2-Rc*21/4
11 Bending dimension of the
STP connection cable
12 Screw hole for legs 8-M16 depth 24
13 Viewed from arrow A
Inlet
port
flange
VG300 ISO320F
ICF356
(DN320
CF)
φA 400 425 356
B 18 20 28.5
C 415.5 415.5 454.5
D 370.5 370.5 409.5
E 339 339 378.5
F 280.5 280.5 320.5
G 220 225 215
H 223.5 223.5 262.5
I 341 341 380.5
J 348.5 348.5 388
*1 TMS used only
*2 ISO

STP-XA2703/XA3203 Series Turbomolecular Pump
Aug. 08 6 Issue 1-b
TECHNICAL DATA
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6
1
1.3 Label affixing positions
Refer to the Instruction Manual (A) for the details of the labels 1 to 7.
Figure 3 - Label affixing positions for the STP pump
1 STP pump installation warning label
2 Hot surface warning label
3 Heavy product caution label
4 Connector caution label
5 STP pump/control unit caution label
6 TMS heater caution label
7 Rotational direction instruction label
8 Name plate
9 Company logo
10 Parts number
4
9
8
5
7
10
2
6
1
3

STP-XA2703/XA3203 Series Turbomolecular Pump
Aug. 08 7 Issue 1-b
TECHNICAL DATA
1
1.4 Accessories
Item Q’ty Remarks
Inlet port cover 1
Outlet port cover 1
STP connector cover 1
Blank flange for purge port 1 KF10
Clamping ring for purge port 1 KF10
O-ring washer for purge port 1 KF10
Leg 4
Instruction Manual (B) 1 This manual

STP-XA2703/XA3203 Series Turbomolecular Pump
Aug. 08 8 Issue 1-b
TECHNICAL DATA
PAG
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1
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STP-XA2703/XA3203 Series Turbomolecular Pump
Aug. 08 9 Issue 1-b
HOW TO SECURE THE STP PUMP
2
2 HOW TO SECURE THE STP PUMP
WARNING
The STP pump is provided with a high-speed rotor. Any internal abnormality/error
may result in a jump in rotational torque leading to personal injury or peripheral
equipment damage.
The STP pump is provided with a high-speed rotor. The worst-case failure may result in a jump in
rotational torque leading to personal injury or peripheral equipment damage.
Secure the STP pump to the vacuum equipment according to the method specified in this manual.
The generated torque during a pump failure is called "Destructive torque". Design and secure the
mounting for the STP pump so that it can withstand the maximum rotational torque. Refer to Table 2
and Table 3 for torque in pump abnormality.
Bolt size Tightening torque (Nm)
M8 12
M10 24
M12 42
Table 1 - Tightening torque of bolt
When making the legs to secure the base, make them shorter than the ones attached to the STP
pump. Use a material that has a tensile strength of 600N/mm2or more.
When securing the base, use stainless steel securing bolts with a tensile strength class of 70 or more.
Note: When using any securing method other than that specified in this manual, contact Edwards.

STP-XA2703/XA3203 Series Turbomolecular Pump
Aug. 08 10 Issue 1-b
HOW TO SECURE THE STP PUMP
2
The generated destructive torque depends on the presence of a torque reduction mechanism that
can be built into the flange, according to the pump model and flange type. This mechanism, shown in
Figure 5, is designed to absorb energy and also buffer the destructive torque.
There are two installation methods for the pump, as shown in Figure 4. Make sure to secure the inlet
port flange of the pump with the recommended bolts, as described in Table 2 and Table 3, according
to the installation method used.
Note that special washers will be required if the pump includes the inlet torque reduction mechanism.
The washer shape is shown in Figure 5.
(A) When the base is not secured (B) When the base is secured
1. Recommended fitting bolt for flange
2. Secure the base
Figure 4 - Methods of securing the STP pump
1
2

STP-XA2703/XA3203 Series Turbomolecular Pump
Aug. 08 11 Issue 1-b
HOW TO SECURE THE STP PUMP
2
CAUTION
Install the flange securing bolts in the proper position with the special square washer shown in
Figure 5. Failure to do so may cause abnormal operation of the torque reduction mechanism and
damage the pump.
CAUTION
When any internal abnormality/error results in high rotational torque, causing the torque reduction
mechanism to operate, the pump may rotate a maximum of 5 degrees around the rotor rotation at
axis.
A
2 A
2.5
(A) VG250/VG300/VG350/ISO320F (B) ISO250F
*1 VG250: A=15,
VG300/VG350: A=18,
ISO320F: A=20
*1 ISO250F: A=15
1. Vacuum equipment
2. Inlet port flange
3. Washer
4. Torque reduction mechanism
5. Bolt insert position
Figure 5 - Shape of reduced diameter shank bolts
1
2
5
3 4
43

STP-XA2703/XA3203 Series Turbomolecular Pump
Aug. 08 12 Issue 1-b
HOW TO SECURE THE STP PUMP
2
Pump model STP-XA2703 series
Flange type ISO250F VG250
Toque reduction
mechanism Equipped (standard) Not Equipped Equipped (optional) Not Equipped
(standard)
Destructive Torque
[kNm] 48.1 48.1 71.2
Base (8 positions)
securing No Yes No Yes No Yes
Shape Standard Standard Standard Standard Standard Standard
Material*1
Carbon
steel
Alloyed
steel
Carbon
steel
Alloyed
steel
Carbon
steel
Alloyed
steel
Carbon
steel
Alloyed
steel
Carbon
steel
Alloyed
steel
Stainless
steel
Strength*1 12.9 or
more
12.9 or
more
12.9 or
more
12.9 or
more
12.9 or
more 70 or more
Recommended bolt
Special
washer
Figure 5
(B)
Figure 5
(B)
This model is not
available
Figure 5
(A)
Figure 5
(A)
Not
necessary
Not
necessary
Pump model STP-XA2703 series
Flange type ICF305 (DN250CF)
Toque reduction
mechanism Equipped Not Equipped
(standard)
Destructive Torque
[kNm] 71.2
Base (8 positions)
securing No Yes
Shape Standard Standard
Material*1
Carbon
steel
Alloyed
steel
Stainless
steel
Strength*1 12.9 or
more 70 or more
Recommended bolt
Special
washer
This model is not
available
Not
necessary
Not
necessary
*1 Refer to ISO898-1 (JISB 1051), ISO3506 (JISB 1054).
Table 2 - Maximum torque predicted and recommended securing bolt for inlet port flange
(STP-XA2703 series)

STP-XA2703/XA3203 Series Turbomolecular Pump
Aug. 08 13 Issue 1-b
HOW TO SECURE THE STP PUMP
2
Pump model STP-XA3203 series
Flange type ISO320F VG300/VG350
Toque reduction
mechanism Equipped (optional) Not Equipped
(standard) Equipped (optional) Not Equipped (standard)
Destructive Torque
[kNm] 48.1 71.2 48.1 71.2
Base (8 positions)
securing No Yes No Yes No Yes No Yes
Shape Standard Standard Standard Standard Standard Standard Standard Standard
Material*1
Carbon
steel
Alloyed
steel
Carbon
steel
Alloyed
steel
Carbon
steel
Alloyed
steel
Stainless
steel
Carbon
steel
Alloyed
steel
Carbon
steel
Alloyed
steel
Carbon
steel
Alloyed
steel
Stainless
steel
Strength*1 12.9 or
more
12.9 or
more
12.9 or
more 70 or more 12.9 or more
12.9 or
more
12.9 or
more 70 or more
Recommended bolt
Special
washer
Figure 5
(A)
Figure 5
(A)
Not
necessary
Not
necessary
Figure 5
(A)
Figure 5
(A)
Not
necessary
Not
necessary
Pump model STP-XA3203 series
Flange type ICF356 (DN320CF)
Toque reduction
mechanism Equipped Not Equipped
(standard)
Destructive Torque
[kNm] 71.2
Base (8 positions)
securing No Yes
Shape Standard Standard
Material*1
Carbon
steel
Alloyed
steel
Stainless
steel
Strength*1 12.9 or
more 70 or more
Recommended bolt
Special
washer
This model is not
available
Not
necessary
Not
necessary
*1 Refer to ISO898-1 (JISB 1051), ISO3506 (JISB 1054).
Table 3 - Maximum torque predicted and recommended securing bolt for inlet port flange
(STP-XA3203 series)

STP-XA2703/XA3203 Series Turbomolecular Pump
Aug. 08 14 Issue 1-b
HOW TO SECURE THE STP PUMP
2
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