Edwards STP Series User manual

MT-91E-001-0
STP Series Turbomolecular Pumps
STP-iXA4507 Series
Instruction Manual
Copyright 2023 Edwards Japan Limited. All rights reserved. Printed in Japan.
Read through the Safety Precautions and
each section of this Manual carefully before
using the STP pump.
Keep this Manual in a place where you can
quickly access it at any time.
2023.10

This product has been manufactured under a quality management system certified to ISO9001:2015.
This declaration is based on the requirements of ENISO17050-1 and the relevant directives.
China Material Content Declaration
Hazardous Substances
Part name
Lead
(Pb)
Mercury
(Hg)
Cadmium
(Cd)
Hexavalent
Chromium
(Cr VI)
Polybrominated
biphenyls
(PBB)
Polybrominated
diphenyl ethers
(PBDE)
Aluminium alloys
×〇〇〇〇〇
Brass pipe fitting ×〇〇〇〇〇
Cable/wire/connector ×〇〇〇〇〇
(PCA)
Printed Circuit Assembly (PCA) ×〇〇〇〇〇
Electronics and
Controls
×〇〇〇〇〇
O: GB/T 26572 。
O: Indicates that the hazardous substance contained in all of the homogeneous materials for this part is below the limit
requirement in GB/T 26572.
X: GB/T26572 。
X: Indicates that the hazardous substance contained in at least one of the homogeneous materials used for this part is
above the limit requirement of GB/T26572.

STP-iXA4507 series Turbomolecular Pump
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CONTENTS
Section Title Page
1INTRODUCTION 1
1.1 Scope and definitions 1
1.2 Electromagnetic compatibility 2
1.3 Limited warranty 2
1.3.1 Item warranted 2
1.3.2 Disclaimer 3
1.3.3 Spare parts 3
1.4 Precautions for safe operation of the STP pump 4
1.4.1 Usable gases 4
1.5 Maintenance and inspection precautions 5
1.6 Labels 5
1.7 Operation principle of the STP pump 8
1.8 STP pump specification 10
2TECHNICAL DATA 13
2.1 STP pump specifications 13
2.2 Maximum gas flow-rate 15
2.2.1 STP-iXA4507C/CV/CV3 15
2.2.2 STP-iXA4507B/BV/BV3 16
2.2.3 Water cooling use condition 17
2.3 Control unit 18
2.4 External appearance of the STP pump 19
2.5 Label affixing positions 20
3INSTALLATION OF THE STP PUMP 21
3.1 Precautions before installation 21
3.1.1 Operating environment 21
3.1.2 Installation area 23
3.1.3 Bench 24
3.1.4 Insulation test 24
3.2 Unpacking 25
3.2.1 Unpacking the STP pump 25
3.3 Name and function of each part 28
3.3.1 Name and function of the pump 28
3.3.2 Name and function of the control unit 29
3.4 How to install the STP pump 31
3.4.1 Cleaning the seal 32
3.4.2 STP pump installation positions 33
3.4.3 Secure the STP pump 34
3.4.4 Screw holes for securing the base of the control unit 37
3.4.5 Power cables 38
3.4.6 How to connect the power cable 40
3.5 Precautions for vacuum piping 41
3.5.1 Vacuum piping method 41
3.6 Connecting the purge port 42
3.7 Connecting the water cooling pipes 43
3.8 Attaching a baking heater 44

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CONTENTS (CONTINUED)
Section Title Page
3.9 TMS unit 45
3.9.1 TMS unit specification 45
3.9.2 TMS heater 46
3.9.3 Connecting the TMS heater cable 46
3.9.4 TMS valve 46
3.9.5 Configuration of the STP pump with the TMS 47
3.9.6 Connecting the pump and TMS valve 48
3.10 Connecting to semiconductor equipment 49
3.10.1 Connecting to power 49
3.10.2 Emergency off circuit (EMO circuit) 49
4OPERATION 51
4.1 Gas pumping, cooling and baking of the STP pump 51
4.1.1 Gas pumping 51
4.1.2 How to introduce a purge gas 52
4.2 Cooling the STP pump 52
4.2.1 Water-cooling method 52
4.3 Baking the STP pump 53
4.4 Before starting the STP pump 54
4.4.1 Confirmation before starting 55
4.4.2 Confirmation of vacuum system 55
4.5 Powering ON/OFF 56
4.5.1 Powering ON 56
4.5.2 Powering OFF 56
4.6 Pump operation 56
4.6.1 Input operation port setting 56
4.6.2 X5 STP-LINK socket 56
4.7 "STATUS" LED 57
4.8 Second speed option 58
4.9 Operating the TMS unit (for use with the TMS unit) 59
4.9.1 Before starting 59
4.9.2 Starting/Stopping 59
4.9.3 Setting the TMS unit function 59
5SERIAL COMMUNICATION PROTOCOL 61
5.1 Introduction 61
5.2 Connection and setting up 62
5.2.1 Signal connection 62
5.2.2 Connecting the RS485 63
5.2.3 Communication parameter setting 64
5.2.4 Input operation port setting 64
5.2.5 Serial communication timeout setting 65
5.2.6 Recommended items about communication cable installation 66
5.3 Protocol specifications 69
5.3.1 General description 69
5.3.2 Standard transmission frame 70
5.3.3 Control command
(in the RS232/RS485 single point connection) 70

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CONTENTS (CONTINUED)
Section Title Page
5.3.4 Query command
(in the RS232/RS485 single point connection) 72
5.3.5 Transmission data format 73
5.3.6 Frame control (checksum) 73
5.3.7 Error control 73
5.3.8 Transmission frame in RS485 multi-point connection 73
5.3.9 Control command in RS485 multi-point connection 75
5.3.10 Query command in RS485 multi-point connection 76
5.3.11 Broadcasting command in RS485 multi-point connection 77
5.3.12 Application note 78
5.4 Command specifications 82
5.4.1 Command list 82
5.4.2 ReadMeas 83
5.4.3 Command 83
5.4.4 ReadFailMess 84
5.4.5 ReadModFonct 88
5.4.6 ReadVersion 90
5.4.7 ReadCounters 91
5.4.8 ReadSetPoint 92
5.4.9 ReadMotorTemp 92
5.4.10 ReadStatus 93
5.4.11 ReadEvents 94
5.4.12 SetSpeedSetPoint 95
5.4.13 ReadSpeedSetPoint 96
5.4.14 ReadModFonctWithWarning 97
5.4.15 ReadMeasValue 100
5.4.16 ReadOptionFunc 102
5.4.17 SetOptionFunc 105
5.4.18 ReadCondition 107
5.4.19 ReadEventsWithTime 109
5.4.20 SetOptions 114
5.4.20.1 Second speed function setting 114
5.4.20.2 Second speed selection 115
5.4.21 ReadOptions 116
5.4.21.1 Second speed function setting 116
5.4.21.2 Second speed selection 117
5.4.21.3 TMS temperature 118
6STP-LINK AND DISPLAY UNIT 121
6.1 STP-Link 121
6.2 Display unit 121
7SAFETY FUNCTIONS 123
7.1 Safety functions 123
7.1.1 Power Failure 123
7.1.2 Operation after a power recovery 124
7.1.3 Abnormal state of magnetic bearing (Disturbance) 124
7.1.4 Excessive vibration (Disturbance) 124
7.1.5 Motor driver overload (DRV Overload) 125

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CONTENTS (CONTINUED)
Section Title Page
7.1.6 Overheating inside the STP pump (MOTOR Overheat) 125
7.1.7 Overheating inside the control unit (CNT Overheat) 125
7.1.8 Overspeed 125
7.1.9 Abnormality/Error in the TMS unit (for use with the TMS unit) 125
7.1.10 Safety feature of the rotor blade temperature
warning sensor (Option) 126
7.2 "WARNING" function 127
7.2.1 "WARNING" function 127
7.3 Contents of WARNING function 128
7.3.1 First Damage limit 128
7.3.2 Second Damage Limit 128
7.3.3 Pump Run Time Over 128
7.3.4 Pump Overload 129
7.3.5 Imbalance 129
7.3.6 Other Warning 130
7.4 WARNING function setting 131
7.5 Troubleshooting immediately after failure occurs 132
7.5.1 After power failure 132
7.5.2 After other abnormality/error 132
7.6 Troubleshooting 133
7.6.1 Indication of "STATUS" LED (red flash) 133
7.6.2 Indication of "STATUS" LED (green and red alternately) 141
7.6.3 No Indication of the "STATUS" LED (red) 141
8MAINTENANCE AND INSPECTION 143
8.1 Maintenance and inspection 143
8.2 Cleaning 144
8.3 Inspecting the deposit 144
8.4 Maintenance 146
8.4.1 Recommended overhaul intervals 146
8.4.2 Standard replacement parts 146
8.4.3 Recommended maintenance intervals for main parts 147
8.5 Transporting for repair or overhaul 148
9STORAGE AND DISPOSAL 149
9.1 Storage of the STP pump 149
9.2 Disposal 149
10 SERVICE, SPARES AND ACCESSORIES 151
10.1 Introduction 151
10.2 Service 151
10.3 Spares 151
10.4 Accessories 152

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ILLUSTRATIONS
Figure Title Page
1 Warning label of STP pump installation and Caution label
for Heavy product 5
2 Caution label of Heater removing prohibition and
Warning label for hot surface 6
3 Caution label for the high voltage devices 6
4 Label for the rotational direction 6
5 Notice label urging to use water-cooling 7
6 Label related to connecting the water-cooling lines 7
7 Warning label of urging overhaul the pump 7
8 Cross sectional view of the STP pump 8
9 External appearance of STP-iXA4507 series 19
10 Label affixing positions 20
11 Space around the STP pump* 23
12 Example of lifting the STP pump 25
13 Jacking up the STP pump 26
14 Control unit bottom face 27
15 Configuration of the STP pump 28
16 Control unit (Front panel) 29
17 Installation of the STP pump to the vacuum equipment 31
18 STP pump installation positions 33
19 Positions of the outlet port on the horizontally
or slanted installed STP pump (view from bottom) 33
20 Methods of securing the STP pump 36
21 Screw holes for securing the control unit base 37
22 Power cable (straight type connector) 38
23 Connecting method of the power cable 39
24 Connecting the purge port 42
25 Positions of the cooling water port 43
26 Baking heater installation position 44
27 Configuration of the STP pump with the TMS 47
28 TMS valve connection 48
29 Example of cable installation in metallic duct 54
30 The flash patterns of STATUS 57
31 Serial port 61
32 X2 connector (D-Sub 9pin) 62
33 RS485 connections 63
34 Grounding example (Both ends grounding) 66
35 Grounding example (single-point grounding) 66
36 Example of ring ferrite core installation 67
37 Example of cable installation in metallic duct 67
38 Example of a differential signal waveform 68
39 PC to SIM communication 69
40 Block diagram of communication process example 78
41 Example of answer resending process 79
42 Example of response when the command is sent continuously 79
43 Example of command sending during answer data reply 79
44 Example of the communication cycle process 80
45 Example of the command sending process 81
46 Example of the answer receiving process 81

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TABLES
Table Title Page
1 Maximum gas flow-rate (STP-iXA4507C) 15
2 Maximum gas flow-rate (STP-iXA4507CV) 15
3 Maximum gas flow-rate (STP-iXA4507CV3) 15
4 Maximum gas flow-rate (STP-iXA4507B) 16
5 Maximum gas flow-rate (STP-iXA4507BV) 16
6 Maximum gas flow-rate (STP-iXA4507BV3) 16
7 Environmental requirements for installation 22
8 Eye nut / Eye bolt size 25
9 Pump functions 28
10 Control unit front panel functions 30
11 Tightening torque of the bolt 34
12 Destructive torque and recommended securing bolt
for inlet port flange 35
13 Power cable 38
14 TMS unit specification 45
15 Second speed function 58
16 X2 pin assign 62
17 Communication parameters 64
18 Input operation port 64
19 Serial communication time out setting 65
20 Transmission control characters 69
21 Pump operation commands 77
22 Command list 82
23 Pump operation commands 84
24 Error message values 86
25 Error message values (continued) 87
26 Pump operation mode 89
27 Remote mode 94
28 Warning value bit assign 98
29 Parameter setting value 104
30 Option function number and parameter list 114
31 Option function number and parameter list 116
32 Functions of STP-Link 121
33 STATUS LED and X4 REMOTE output signals
at power failure 123
34 WARNING function 127
35 Default setting of WARNING function 131
36 Factory Setting and Variable Range 131
37 Error List 134
38 Error List (continued) 135
39 Error List (continued) 136
40 Error List (continued) 137
41 Error List (continued) 138
42 Error List (continued) 139
43 Error List (continued) 140
44 Troubleshooting with no indication of the "STATUS" LED 141

STP-iXA4507 series Turbomolecular Pump
MT-91E-001-0
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INTRODUCTION
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1 INTRODUCTION
1.1 Scope and definitions
This manual provides installation, operation and maintenance instructions for the Edwards
Turbomolecular Pump (abbreviated to "STP pump" throughout this manual). You must use the STP
pump as specified in this manual otherwise the protection provided by the equipment may be
impaired.
Important safety information is highlighted as WARNING and CAUTION instructions; these
instructions are mandatory. The use of WARNINGS and CAUTIONS is defined below:
WARNING
Warnings are given where failure to observe the instruction could result in serious injury
or death to people.
CAUTION
Cautions are given where failure to observe the instruction could result minor personal injury in
damage to the equipment, associated equipment and/or process.
Note: Items you must follow during operation and maintenance.
Throughout this manual, page, figure and table numbers are sequential.
The units used throughout this manual conform to the SI international system of units of
measurement; US equivalent units of measurement are also given.
The following IEC warning labels/symbols appear on the STP-iXA4507 series Turbomolecular Pump
and this Instruction Manual:
Warning - This symbol denotes general warning
Refer to accompanying documentation and instruction manual.
Warning - Hazardous Voltage
This symbol denotes the risk of electrical shock.
Warning - Heavy object
This symbol denotes the risk of low back pain and fall.
Warning - Hot surface
This symbol denotes the risk of burns.

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1.2 Electromagnetic compatibility
•This product is a Class A product according to EN61326-1 (Group 1, Class A product according
to EN55011) and intended to be used in an industrial electromagnetic environment defined by
EN61326-1.
This means that this product does not generate and/or use intentionally radio-frequency
energy, in the form of electromagnetic radiation, inductive and/or capacitive coupling, for the
treatment of material or inspection / analysis purpose and that it is suitable for use in all
establishments other than domestic and those directly connected to a low voltage power supply
network which supplies buildings used for domestic purposes.
•This product may have potential difficulties in ensuring electromagnetic compatibility in other
than industrial environments, due to conducted as well as radiated disturbances.
•This product must not be used in residential areas because it may cause interference if used in
residential areas.
1.3 Limited warranty
This WARRANTY applies to the customer to whom Edwards has delivered this product.
The warranty period is stated in the Edwards Terms and Condition of Supply of Goods and Services,
or during the period specified in the agreement made by and between the customer and Edwards.
1.3.1 Item warranted
1. This warranty applies only to the product delivered from Edwards to the customer.
2. If any defect is found during this period, Edwards will, at its option, repair or recondition the
product free of charge. The costs for repair or replacement of the product after the warranty
period has passed will be at your own charge.

STP-iXA4507 series Turbomolecular Pump
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1.3.2 Disclaimer
Edwards makes no warranty with respect to any damage occurred due to any of the following during
the warranty period:
1. Handling, operation or maintenance other than that specified herein.
2. Failure to follow any of the warnings or cautions enumerated in this manual.
3. Installation, operation or maintenance using parts which are not specified by Edwards.
4. Maintenance personnel other than those authorized by Edwards or Service office have
disassembled, reconditioned, or tampered the product.
5. Defect resulting from the not-specified use of the product.
6. When the product is used under special conditions without obtaining the written consent of
Edwards (particular gases, strong magnetic field and the radiation are added to the product).
7. Defect resulting from deposit.
8. Water cooling system defect resulting from water quality used.
9. Defect resulting from the installation of the product (exclude the installation by authorized
personnel).
10. Deterioration in the external because of use (discoloration, scratches and so forth).
11. Product damage occurred during transport or other factors not attributable to Edwards.
12. Product breakage or damage due to natural disasters, fire or other external factors.
13. Deterioration in the basic performance due to the use of the product beyond limits of the use.
14. Any direct, incidental or consequential damage resulting from the use of the product.
15. When continuously operated without overhaul after the "STATUS" LED on the control unit being
in the warning detection state (see Section 4.7) or "WARNING" message being displayed on the
LCD of the display unit iDT-002.
16. Overhaul and replacement of maintenance parts.
1.3.3 Spare parts
•Touch down bearing.
•Air-cooling fan
Touch down bearing and air-cooling fan should be replaced at Edwards, contact Edwards.

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1.4 Precautions for safe operation of the STP pump
1.4.1 Usable gases
1. Chlorine or fluorine system gases can be used in corrosion resistant pumps. When you use the
following gases, contact Edwards.
•Gases including alkaline metals except Li gas.
•Gases including Ga, Hg, In, or Sn.
•HBr gas.
2. Non-corrosion resistant pump cannot use the above gases including chlorine and fluorine system
gases.
WARNING
Confirm the characteristics of gases to be used to prevent an accident. Refer to the
Safety Data Sheet (SDS) obtained from the gas supplier. Keep SDS and follow safety
advice from the gas suppliers.
WARNING
Warn of the danger of the gas with the warning label when the use gas is hazardous
chemical material.
WARNING
Secure safety by wearing personal protective equipment when using the gas which
might influence damage health. In addition, take appropriate measure for depending
upon the properties of the gas to be used.
CAUTION
NEVER use any gas that is not specified as usable in this Manual. The use of such gas may
corrode the STP pump and damage it.
CAUTION
Introduce a dry N2gas (purge gas) to protect the inside of the STP pump when using reactive or
corrosive gas, gas including hydrogen. The use of these gases may result in product damage.
CAUTION
Cool the STP pump to prevent the STP pump from overheating when pumping gases.

STP-iXA4507 series Turbomolecular Pump
MT-91E-001-0
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INTRODUCTION
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1.5 Maintenance and inspection precautions
Perform any maintenance or inspection of the STP pump under the condition that no power is
applied to the STP pump (refer to SEMI S2 Section 13.2 - type 1), following Section 8,
"MAINTENANCE AND INSPECTION".
1.6 Labels
The following labels are affixed to the STP pump. Read the contents of the labels before operation.
1. Warning label of STP pump installation and Caution label for heavy product
“Warning label of STP pump” installation describes a warning during installation of the STP
pump. Install the STP pump according to Section 3, “INSTALLATION OF THE STP PUMP”.
“Caution label for heavy product” is affixed to products with a weight of 18 kg or more. Comply
with Section 3.2, “Unpacking" not to cause an accident during handling.
Figure 1 - Warning label of STP pump installation and Caution label for Heavy product

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2. Caution label of Heater removing prohibition and Warning label for hot surface
The pump has TMS heater, which is mentioned in section 3.9.2, “TMS heater”. That is not
removable. Therefore, do not remove that as “Caution label of Heater removing prohibition”
mentioning.
“Warning label for hot surface” instructs operators not to touch the hot surface of the STP
pump. The pump and control unit will become high temperature while the STP pump is in
operation. This label is for warning operators not to get burned their hands.
Figure 2 - Caution label of Heater removing prohibition and Warning label for hot surface
3. Caution label for the high voltage devices
The pump and the control unit are equipped with the high voltage devices. This label is for
warning operators to pay attention to the high voltage devices during an inspection.
Figure 3 - Caution label for the high voltage devices
4. Label for the rotational direction
This label describes the rotational direction of the STP pump. The STP pump rotates in this
direction.
Figure 4 - Label for the rotational direction

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5. Notice label urging to use the water-cooling
As this label mentions, while driving the pump, always run the water-cooling unit. If the pump is
used without that, it may stop running to avoid overheat. For more information such as the way
to connect the water-cooling unit, see section 3.9, “TMS unit”.
Figure 5 - Notice label urging to use water-cooling
6. Label related to connecting the water-cooling lines
As this label mentions, refer to this manual section 3.9, “TMS unit”, when connecting the water-
cooling lines.
Figure 6 - Label related to connecting the water-cooling lines
7. Warning label of urging overhaul the pump
The pump needs regular overhauls. Otherwise, it causes some breakdowns. For details such
as overhaul intervals, see section 8.4, “Maintenance”.
Figure 7 - Warning label of urging overhaul the pump

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1.7 Operation principle of the STP pump
Turbomolecular pump (abbreviated to "STP pump" throughout this manual) is used for high vacuum
pumping. It is principally used for manufacturing and inspection equipment of semiconductors, flat
panels, and solar batteries.
The STP pump (Figure 8) is configured, so that rotor blade (1) and stator blade (2) are aligned
alternately in the axial direction. Gas molecules are pumped from the inlet port to the outlet port by
the high-speed rotation of the rotor.
The STP-iXA4507 series pump are magnetically-levitated turbomolecular pumps, each with the
following features:
1. Oil-free
2. Low vibration
3. High reliability
4. Compact size (Integrated control unit)
5. Temperature management system
1.
Rotor blade
5.
Axial sensor
9.
Motor
2.
Stator blade
6.
Axial electromagnet
10.
Rotor cup cover (option)
3.
Radial sensor
7.
Touch down bearing
11.
Rotor blade temperature warning
sensor *1 (option)
4.
Radial electromagnet
8.
Control unit
*1 The rotor blade temperature warning sensor function can be added when ordering the product. Please contact us for
details.
Figure 8 - Cross sectional view of the STP pump
10
11
6
5
6
7
7
9
3, 4
3, 4
1
2
8

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INTRODUCTION
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1. Oil-free
Rotor blade (1) is supported by the magnetic bearing without any mechanical contact. Therefore, the
STP pump requires no lubrication oil, unlike conventional turbomolecular pumps using ball bearings.
2. Low vibration
The magnetic bearing consists of 5 pairs of active magnetic bearings. The rotor is supported in the
radial direction by 4 pairs of active magnetic bearings that consist of a radial sensor (3) and a radial
electromagnet (4). A pair of active magnetic bearings in the axial direction consists of an axial sensor
(5) and an axial electromagnet (6) to support the rotor in the axial direction. Because the rotor is
supported without any mechanical contact, it can rotate with low vibration.
3. High reliability
Unlike conventional turbomolecular pumps using ball bearings, the magnetic bearings do not require
replacement because there is no friction. To be safe when the magnetic bearings are broken, touch
down bearings (7) have been installed. They do not contact the rotor during the regular operation.
The rotor and magnetic bearing status are continuously monitored via the circuits detecting rotor
displacement, rotational speed, and pump temperature. If an abnormality/error occurs, the rotor will
stop.
4. Compact size (Integrated control unit)
For saving space, the STP pump has the mounted control unit (8), which includes the power supply
that converts the alternating current input to direct current output. In addition, the following circuits
are integrated into the control unit; the magnetic bearing control circuit, the motor drive circuit driving
the rotor blade, the supervisor circuit monitoring pump operation status and operating the pump in
remote operation mode.
5. Temperature management system
The Temperature Management System (TMS) maintains the temperature of the turbomolecular
pump by monitoring the temperature with a thermistor in the base part of the STP pump and
operating the TMS valve and TMS heater ON/OFF to maintain a constant temperature of the STP
pump.

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1.8 STP pump specification
The external appearances, installation and unpacking ways are different depending on the STP
pump model. Refer to the following:
External appearance of the STP pump
STP-iXA4507C / STP-iXA4507CV / STP-iXA4507CV3
STP-iXA4507B / STP-iXA4507BV / STP-iXA4507BV3
Naming convention:
•"C" following a pump model name indicates a corrosion resistant*1 type.
(e.g. STP-iXA4507C)
•"B" following a pump model name indicates corrosion resistant*1 and high-emissivity coating*2
type.
(e.g. STP-iXA4507B)
•"V" indicates a TMS*3 unit.
(e.g. STP-iXA4507CV)
•“(n)” of the trailing number indicates TMS temperature *4
(e.g. STP-iXA4507CV3)
*1 Corrosion-resistant: STP pump with anti-corrosive treatment.
*2 High-emissivity coating: STP pump with rotor covered with high-emissivity coating.
*3 Temperature Management System: TMS maintains the temperature of the turbomolecular pump with the thermistor in the
base of the turbomolecular pump and operates the TMS heater ON/OFF control to maintain a constant temperature of the
STP pump.
*4 Refer to Section 2.2 for TMS temperature.