Edwards Barocel 7025M User manual

W601100880_A Original Instructions
Barocel 7025M Gauge
INSTRUCTION MANUAL
edwardsvacuum.com

W601100880_A - Copyright notice
Page 2
Copyright notice
©Edwards Limited 2019. All rights reserved.
Trademark credits
Edwards and the Edwards logo are trademarks of Edwards Limited, Innovation Drive,
Burgess Hill, West Sussex, RH15 9TW, UK.
VCR®Swagelok Marketing Co.
Disclaimer
The content of this manual may change from time to time without notice. Edwards accepts no
liability for any errors that may appear in this manual nor does it make any expressed or
implied warranties regarding the content. So far as is reasonably practicable Edwards has
ensured that its products have been designed and constructed so as to be safe and without
risks when properly installed and used in accordance with Edwards operating instructions.
Edwards accepts no liability for loss of profit, loss of market or any other indirect or
consequential loss whatsoever.
Product warranty and limit of liability are dealt with in Edwards standard terms and conditions
of sale or negotiated contract under which this document is supplied.
You must use the Barocel 7025M as described in this manual. Read this manual before you
install, operate and maintain the Barocel 7025M.

P20010230A
CE Declaration of Conformity
The following product
List products here including –
•Barocel 7025m Series Capacitance Manometer W6011*
•Barocel 7025 Series Capacitance Manometer W6021*
•Barocel 7045 Series Capacitance Manometer W6032*
•Barocel 7100 Series Capacitance Manometer W6033*
Is in conformity with the relevant requirements of European CE legislation:
2014/30/EU
Electromagnetic compatibility (EMC) directive
2011/65/EU
Restriction of certain hazardous substances (RoHS) directive
as amended by Delegated Directive (EU) 2015/863
Based on the relevant requirements of harmonised standards:
EN 61010-1:2010
Safety requirements for electrical equipment for measurement, control and laboratory
use. General requirements
EN 60529:1991 +
A2:2013
Specification for degree of protection provided by enclosures (IP code)
– IP code 30
EN 61326-1:2013
Electrical equipment for measurement, control and laboratory use. EMC requirements.
General requirements
Class B Emissions, Industrial Immunity
This declaration, based on the requirements of the listed Directives and EN ISO/IEC 17050-1, covers all product
serial numbers from this date on: 6th June 2019.
Larry Marini – Senior Technical Manager
Eastbourne
Andy Marsh – General Manager
Eastbourne
Edwards Ltd
Innovation Drive
Burgess Hill
West Sussex
RH15 9TW
UK

This product has been manufactured under a quality management system certified to ISO 9001:2015
Additional Legislation and Compliance Information
EU RoHS Directive: Material Exemption Information
This product is compliant with no Annex III or IV Exemptions
EU REACH Regulation Compliance
This product is a complex article which is not designed for intentional substance release. To the best of our knowledge
the materials used comply with the requirements of REACH. The product manual provides information and instruction to
ensure the safe storage, use, maintenance and disposal of the product including any substance-based requirements.
Article 33 Declaration
This product does not knowingly or intentionally contain Candidate List Substances of Very High Concern above 0.1%ww
by article as clarified under the 2015 European Court of Justice ruling in case C-106/14.
ADDITIONAL INFORMATION
材料成分声明
China Material Content Declaration
表示该有害物质在该部件的所有均质材料中的含量低于 GB/T 26572 标准规定的限量要求。
Indicates that the hazardous substance contained in all of the homogeneous materials for this part is
below the limit requirement in GB/T 26572.

Page 3
W601100880_A - Contents
Introduction 7
Product identification .................................................................................................... 7
Intended use .................................................................................................................. 7
Function ......................................................................................................................... 7
Before using this gauge .................................................................................................. 7
Safety symbols ............................................................................................................... 8
Safety precautions .........................................................................................................8
Liability and warranty .................................................................................................... 8
Technical data 9
Dimensions ................................................................................................................... 11
Analogue measurement signal versus pressure .......................................................... 12
Installation 13
Vacuum connection ..................................................................................................... 13
Electrical connection .................................................................................................... 15
FCC68, 8-pin connector ...................................................................................... 16
D-Sub, 9-pin connector ...................................................................................... 17
Operation 18
To zero the gauge ........................................................................................................ 18
<ZERO> Adjustment ........................................................................................... 18
Uninstallation 20
Maintenance and repair 21
Return the equipment for service 21
Disposal 22
Separating the components ......................................................................................... 22
Contents

This page has been intentionally left blank.
Page 4
W601100880_A - Contents

Page 5
W601100880_A - List of Figures
Figure 1: Dimensions (mm) .................................................................................................... 11
Figure 2: Analogue measurement signal versus pressure ...................................................... 12
Figure 3: Connect the gauge to the system ............................................................................ 15
Figure 4: FCC69 8-pin sensor cable ........................................................................................ 16
Figure 5: D-Sub 9-pin sensor cable ......................................................................................... 17
List of Figures

Page 6
W601100880_A - List of Tables
Table 1: General ....................................................................................................................... 9
Table 2: Output signal .............................................................................................................. 9
Table 3: Gauge identification ................................................................................................... 9
Table 4: Electrical ..................................................................................................................... 9
Table 5: Materials exposed to vacuum .................................................................................. 10
Table 6: Environmental .......................................................................................................... 10
List of Tables

Page 7
W601100880_A - Introduction
Introduction
Product identification
Specify the information given on the gauge nameplate in all communications with Edwards.
Intended use
The Barocel 7025M gauge is intended for absolute pressure measurement of gases in their
respective pressure ranges, see Installation on page 13. The unit is clean room compliant and
double protected against contamination.
The gauge can be operated in connection with an Edwards TIC controllers or another
applicable unit.
Function
The Barocel 7025M gauge has a capacitive sensor element made of aluminium oxide ceramics
and electronics which convert the capacitance into a direct current (d.c.) voltage output
signal.
The output signal is linear to the measured pressure and independent of the gas type.
Before using this gauge
Make sure that the model is the same as you ordered and no damage occurred during
shipment.
Read this instruction manual before you install, operate, inspect, or service this gauge to
familiarize yourself with safety precautions, specifications and operations.

Page 8
W601100880_A - Introduction
Safety symbols
Important safety information is highlighted as WARNING and CAUTION instructions. Obey the
safety instructions.
The use of warnings and cautions is defined as:
Safety precautions
Obey the applicable regulations and follow the necessary precautions for the process
media used. Reactions with the gauge materials are possible.
Obey the applicable regulations and follow the necessary precautions for the work
you do. Obey the safety instructions in this document.
Before you start work, find out if any vacuum components are contaminated. Obey
the applicable regulations and the necessary precautions when you handle
contaminated parts.
Ensure all other users are aware of the safety instructions.
Liability and warranty
Edwards accepts no liability and the warranty becomes non applicable if the end user or third
parties:
Ignore the information in this document
Use the gauge in a non-agreeable manner
Make any kind of interventions (modifications, alterations, etc.) on the gauge
Use the gauge with accessories not listed in this instruction manual.
The customer assumes the responsibility along with the process media used.
Gauge failures because of contamination are not included in the warranty.
WARNING:
Warnings are given where failure to obey the instruction could result in injury or death to
people. The symbol shown will change and refer to the applicable hazard.
CAUTION:
Cautions are given where failure to obey the instruction could result in minor injury or
damage to the equipment, associated equipment or process.

Page 9
W601100880_A - Technical data
Technical data
Table 1 General
Measurement range
Accuracy*
*Non linearity, hysteresis, repeatability in the calibrated range at 25 °C ambient
operating temperature without temperature effects after 2 hours of operation.
W601xxxxx 1.0% of reading
Temperature effect on zero 0.02% F.S./°C
Temperature effect on span 0.02% of reading/°C
Resolution 0.05% F.S.
Gas type dependence None
Mass  g
Table 2 Output signal
Output signal analogue (measurement signal)
Voltage range -0.2 to +10.24 V
Measurement range 0 to +10 V
Relationship voltage-pressure Linear
Output impedance 10  (short circuit proof)
Loaded impedance > 10 k
Response time 100 ms
Table 3 Gauge identification
Gauge identification Resistance 18 k referenced to supply
common
WARNING: HIGH VOLTAGE
Risk of electrical shock. The gauge can only be connected to power supplies, instruments
or control devices that comply with the requirements of a grounded Protective Extra-Low
Voltage (PELV) and Limited Power Source (LPS), Class 2. The connection to the gauge has
to be fused.*
*Edwards controllers meet this requirement.
Table 4 Electrical
Supply voltage
at the gauge +13 to +32 V d.c.
Class 2 / LPS
ripple  Vpp
Current consumption < 20 mA
Power consumption 0.3 W
Fuse required*1 AT (slow), automatic reset (Polyfuse)

Page 10
W601100880_A - Technical data
Electrical connection FCC68/RJ45, 8 pin socket or D-Sub, 9-pin,
male
Sensor cable 8-pin or 9-pin plus shielding
Cable length§ 100 m (0.14 mm² conductor)
For longer cables, larger conductor cross-sections are required.
Grounding concept
Vacuum flange - signal common See Electrical connection on page 15
Supply common - signal common Conducted separately; for differential
measurement (10 )
*The gauge is protected against reverse polarity of the supply voltage.
§For longer cables, larger conductor cross sections are required.
Table 5 Materials exposed to vacuum
Materials exposed to vacuum
Flange, tube Stainless steel AISI 316L
Sensor, feedthrough Ceramics (Al2O3 99.5%)
Internal volume
DN 16 ISO-KF 3.7 cm3
8 VCR female 5.1 cm3
Admissible pressure (absolute)
00 Torr/mbar (F.S.) 4 bar
100 Torr/mbar (F.S.) 3 bar
10 Torr/mbar (F.S.) 2 bar
Bursting pressure (absolute) 6 bar
Table 6 Environmental
Temperature compensated range +10 °C to +50 °C
Admissible temperatures
Storage -20 °C to +85 °C
Operation 0 °C to +70 °C
Bakeout (not in operation) 110 °C at the flange
Relative humidity 80% at temperatures
+31 °C decreasing to 50% at +40 °C
Use Indoors only, altitude up to 4000 metres NN
Degree of protection IP 40
Table 4 Electrical (continued)

Page 11
W601100880_A - Technical data
Dimensions
Figure 1 Dimensions (mm)

Page 12
W601100880_A - Technical data
Analogue measurement signal versus pressure
Figure 2 Analogue measurement signal versus pressure
p = (Uout / 10 V) × p (F.S.)
Conversion Torr to Pascal
Torr mbar*
*Source: NPL (National Physical Laboratory)
Guide to the Measurement of Pressure and Vacuum, ISBN 0904457x /1998
Pa
1.00 1013.25/760 = 1.3332… 101325 / 760 = 133.3224…
Example: Gauge with 10 Torr F.S.
Measurement signal Uout = 6 V
p = (6 V / 10 V) × 10 Torr
= 0.6 × 10 Torr = 6 Torr

Page 13
W601100880_A - Installation
Installation
Vacuum connection
WARNING: NOT FAIL-SAFE DESIGNED
Risk of death. Do not use the Barocel 7025M for safety critical applications. The gauge is
not intended to be fail-safe.
CAUTION: IMPACT DAMAGE
Risk of damage to equipment. The ceramic sensor can be damaged by impacts. Do not
drop the gauge.
WARNING: PRESSURIZED CONTAINER
Risk of injury or death. A release of parts and process gases because of system
overpressure greater than 1 bar causes a hazard. Do not open any clamps while the
vacuum system is pressurized. Use clamps designed for overpressure conditions.
WARNING: PRESSURIZED CONTAINER
Risk of injury or death. A release of process gases because of system overpressure greater
than 2.5 bar causes a hazard. KF flange connections with elastomer seals cannot resist
such pressures. Use O-rings with an outer centring ring.
WARNING: HIGH VOLTAGE
Risk of electric shock. Make sure that the pump and electrical cables are correctly
protected against earth (ground) faults. A protective earth (ground) conductor
(equivalent or larger than the incoming supply power cable conductor) must be attached
to the protective earth (ground) stud.
CAUTION: DIRT CONTAMINATION
Risk of damage to equipment. Dirt and damage will cause the gauge to operate
incorrectly. When you handle the gauge, prevent dirt and damage to vacuum
components.
CAUTION: DIRT SENSITIVE AREA
Dirt sensitive area. Do not touch the components with bare hands as it increases the
desorption rate. Wear clean, lint-free gloves and use clean tools when you work in this
area.

Page 14
W601100880_A - Installation
1. Position the gauge to prevent vibrations.
Note:
The gauge can be installed in any orientation. We recommend you install the gauge in a
horizontal to upright position and use a seal with a centring ring and filter to prevent the influx
of condensates and particles in the measurement chamber.
2. Install the gauge so that the buttons can be accessed with a pin for future
adjustments.
3. Remove the protective lid and connect the gauge to the vacuum system.
4. Keep the protective lid.

Page 15
W601100880_A - Installation
Figure 3 Connect the gauge to the system
Electrical connection
Make sure the vacuum connection is correct.
Ground loops, differences of potential, or EMC problems can affect the measurement signal.
For optimum signal quality:
Use an overall metal braided shielded cable. The connector must have a metal case.
Connect the cable shield to ground on one side through the connector case. Make
sure the connector case has a direct contact to the cable's shield on its whole
circumference. Do not connect the other side of the shield.
Connect the supply common with protective ground directly at the power supply.
1. Clamp
2. Seal with centring ring
3. Seal with centring ring and filter
4. Protective lid
WARNING: HIGH VOLTAGE
Risk of electric shock. The gauge can only be connected to power supplies, instruments or
control devices that agree to the requirements of a grounded Protective Extra-Low
Voltage (PELV) and Limited Power Source (LPS), Class 2. The connection to the gauge has
to be fused.*
*Edwards controllers meet this requirement.

Page 16
W601100880_A - Installation
Use differential measurement input (signal common and supply common wired
separately).
Potential difference between the supply common and the housing 16 V (over-
voltage protection).
FCC68, 8-pin connector
1. If a sensor cable is not available, one can be made. Refer to Figure 4 on page 16.
Connect the sensor cable.
Figure 4 FCC69 8-pin sensor cable
1 Supply
2 Supply common ground
3 Signal output (measurement signal)
4 Gauge identification or remote zero adjust
5 Signal common
6 N.C.
7 N.C.
8 N.C.
case Connector case

Page 17
W601100880_A - Installation
D-Sub, 9-pin connector
1. If a sensor cable is not available, one can be made. Refer to Figure 5 on page 17.
Connect the sensor cable.
Figure 5 D-Sub 9-pin sensor cable
1 Signal output (measurement signal)
2 N.C.
3 N.C.
4 Supply
5 N.C.
6 N.C.
7 Gauge identification or remote zero adjust
8 Signal common
9 Supply common ground
case Connector case

Page 18
W601100880_A - Operation
Operation
Put the gauge into operation. If you use an Edwards controller, specify the measurement
range.
Warm-up time: approximately 1 minute
To zero the gauge
The gauge is factory calibrated in an upright orientation. It requires no maintenance.
Continuous operation or contamination can lead to zero drift and the gauge will need zero
adjustment.
To adjust the zero, operate the gauge under the same constant ambient conditions and in the
same mounting orientation as normal.
Note:
If the gauge is operated through a controller, the zero of the whole measurement system has
to be adjusted on the controller. Adjust the zero of the gauge first and then on the controller.
<ZERO> Adjustment
The zero can be adjusted by:
The <ZERO> button on the gauge
The digital input "Remote Zero Adjust" (briefly apply the supply voltage to pin 7 of
the D-Sub connector, or to pin 4 of the FCC68 and Binder M12 connector
An Edwards vacuum gauge controller.
To adjust the zero:
1. Evacuate the gauge to a pressure according to the table below:
Note:
If the final pressure in the gauge is too high for zero adjustment (> 25% of F.S.), the zero cannot
be reached.
F.S. Recommended final pressure for zero adjustment
1100 mbar - < 6.65 × 100 Pa < 5.0 × 10-2 mbar
1000 Torr < 5.0 × 10-2 Torr < 6.65 × 100 Pa < 5.0 × 10-2 mbar
100 Torr/mbar < 5.0 × 10-3 Torr < 6.65 × 10-1 Pa < 5.0 × 10-3 mbar
10 Torr/mbar < 5.0 × 10-4 Torr < 6.65 × 10-2 Pa < 5.0 × 10-4 mbar