Edwards nEXT85 User manual

nEXT Turbomolecular pumps
nEXT85
INSTRUCTION MANUAL
B8G000880_D Original instrucons
edwardsvacuum.com

Copyright noce
©Edwards Limited 2020. All rights reserved.
Associated publicaons
Publicaon tle Publicaon number
Vacuum pump and vacuum system safety P40040100
Trademark credit
Edwards and the Edwards logo are trademarks of Edwards Limited, Innovaon Drive,
Burgess Hill, West Sussex RH15 9TW.
Disclaimer
The content of this manual may change from me to me without noce. We accept no
liability for any errors that may appear in this manual nor do we make any expressed or
implied warranes regarding the content. As far as praccal we have ensured that the
products have been designed and constructed to be safe and without risks when
properly installed and used in accordance with their operang instrucons.
We accept no liability for loss of prot, loss of market or any other indirect or
consequenal loss whatsoever.
Product warranty and limit of liability are dealt with in our standard terms and
condions of sale or negoated contract under which this document is supplied.
You must use this product as described in this manual. Read the manual before you
install, operate, or maintain the product.
Page 2

P20010100DD
CE Declaration of Conformity
The following product
nEXT85
B 8G b - ccc - dd
Is in conformity with the relevant requirements of European CE legislation:
2006/42/EC
Machinery directive
2014/35/EU
Low voltage directive (LVD) as applicable to electrical sub-assemblies
2014/30/EU
Electromagnetic compatibility (EMC) directive
2011/65/EU
Restriction of certain hazardous substances (RoHS) directive
as amended by Delegated Directive (EU) 2015/863
Based on the relevant requirements of harmonised standards:
EN 1012-2:1996 +A1:2009
Compressors and vacuum pumps. Safety requirements. Vacuum pumps
EN 61010-1:2010
Safety requirements for electrical equipment for measurement, control and laboratory
use. General requirements
EN 61326-1:2013
Electrical equipment for measurement, control and laboratory use. EMC requirements.
General requirements
Class B Emissions, Industrial Immunity
Documentation Officer:
Jelena Havelkova, Spielberk Office Centre, Holandska 10, Brno, 63900 Czech Republic,

: [phone],

: [email protected]
This declaration, based on the requirements of the listed Directives and EN ISO/IEC 17050-1, covers all product
serial numbers from this date on: 11th November 2019
Petr Smerek – Engineering Manager
Scientific Vacuum Division
Lutin
Ian Keech – General Manager
Lutin
Edwards Ltd
Innovation Drive
Burgess Hill
West Sussex
RH15 9TW
UK
Pump type
b
2 = Duplex
4 = High compression
Configuration
c c c
1, A, B, C
0 - 9
1 - 9
Variant
d d
Alpha - numeric

This product has been manufactured under a quality management system certified to ISO 9001:2015
Additional Legislation and Compliance Information
EU EMC Directive: Class A/B equipment
Caution: This equipment is not intended for use in residential environments and may not provide adequate protection to
radio reception in such environments.
EU RoHS Directive: Material Exemption Information
This product is compliant with the following Annex III Exemptions:
•6(b) Lead as an alloying element in aluminium containing up to 0.4% by weight
•6(c) Copper alloy containing up to 4% lead by weight
•8(b) Cadmium and its compounds in electrical contacts
EU REACH Regulation Compliance
This product is a complex article which is not designed for intentional substance release. To the best of our knowledge
the materials used comply with the requirements of REACH. The product manual provides information and instruction to
ensure the safe storage, use, maintenance and disposal of the product including any substance based requirements.
Article 33.1 Declaration
This product does not knowingly or intentionally contain Candidate List Substances of Very High Concern above 0.1%ww
by article as clarified under the 2015 European Court of Justice ruling in case C-106/14.
•Cadmium (Cd) added to the Candidate List June 2013
As indicated by the applied RoHS exemption above, this substance is present in electronic componentry
•Lead (Pb) added to the Candidate List June 2018
As indicated by the applied RoHS exemption(s) above this substance is present in certain aluminium/brass components
ADDITIONAL INFORMATION
The products listed are also in scope for and comply with the requirements of the following:
2012/19/EU
Directive on waste electrical and electronic equipment (WEEE)
Product is certified to
CSA-C22.2 No.61010-1-12
Safety requirements for electrical equipment for measurement, control and
laboratory use – Part 1: General requirements
Product conforms to
UL61010-1 3
rd
Edition
Safety requirements for electrical equipment for measurement, control and
laboratory use – Part 1: General requirements
Russia EAC
Intertek certification

This product has been manufactured under a quality management system certified to ISO 9001:2015
材料成分声明
China Material Content Declaration
部件名称
Part name
铅
Lead
(Pb)
汞
Mercury
(Hg)
镉
Cadmium
(Cd)
六价铬
Hexavalent
Chromium
(Cr VI)
多溴联苯
Polybrominated
biphenyls
(PBB)
多溴二苯醚
Polybrominated
diphenyl ethers
(PBDE)
铸铝及铝合金制品
Aluminium alloys
X O O O O O
铜管管件
Brass pipe fitting
X O O O O O
铜接头
Brass connectors
X O O O O O
印刷电路组件
(PCA)
Printed Circuit Assembly (PCA)
X O X O O O
O: 表示该有害物质在该部件的所有均质材料中的含量低于 GB/T 26572 标准规定的限量要求。
O: Indicates that the hazardous substance contained in all of the homogeneous materials for this part is below the limit
requirement in GB/T 26572.
X: 表示该有害物质在该部件的至少一种均质材料中的含量超出 GB/T26572 标准规定的限量要求。
X: Indicates that the hazardous substance contained in at least one of the homogeneous materials used for this part is
above the limit requirement of GB/T26572.

This page has been intentionally left blank.

Contents
1. Safety and compliance. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
1.1 Denion of Warnings and Cauons. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
1.2 Safety symbols. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
2. Introducon. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10
2.1 Overview. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10
2.2 Motor controller. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11
2.3 Operaonal features. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12
2.3.1 Power limit seng. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12
2.3.2 Standby speed. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12
2.3.3 Timer. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12
2.3.4 Analogue output. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13
2.3.5 Automac vent opons. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13
2.3.6 Normal speed seng. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14
2.3.7 Electronic braking. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14
2.4 Logic interface. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14
2.4.1 USB interface. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15
2.4.2 Parallel control and monitoring. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15
2.4.3 Serial control and monitoring. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15
2.4.4 Serial control with parallel monitoring. . . . . . . . . . . . . . . . . . . . . . . . 16
2.4.5 Parallel control with serial monitoring or serial conguraon. . . . . 16
2.4.6 Motor controller conguraon (serial conguraon). . . . . . . . . . . . 16
3. Technical data. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 18
3.1 General technical data. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 18
3.2 Operang and storage condions. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20
3.3 Vent gas specicaon and vent control data. . . . . . . . . . . . . . . . . . . . . . . . . . 20
3.4 Purge gas specicaon. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21
3.5 Cooling water . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 22
3.6 Electrical data. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 22
3.7 Pumping media. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23
3.8 Materials exposed to gases pumped. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 24
3.9 Logic interface connector. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 25
3.10 Motor controller auxiliary connector socket. . . . . . . . . . . . . . . . . . . . . . . . . 28
3.11 Indicator LEDs. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 29
3.12 Pump performance data. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 30
4. Installaon. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 35
4.1 Unpack and inspect. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 35
4.2 Connect to the vacuum system. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 37
4.2.1 Remove and replace the inlet screen. . . . . . . . . . . . . . . . . . . . . . . . . 37
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4.2.2 Mount the pump. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 38
4.2.3 Backing port connecon. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 40
4.2.4 Interstage connecon. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 41
4.3 Purge gas connecon. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 41
4.3.1 Recommended purge gas ow. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 41
4.3.2 Connect the purge gas. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 41
4.4 Electrical installaon. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 41
4.4.1 Ground the connecons. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 42
4.4.2 Connect the logic interface to the TIC or TAG. . . . . . . . . . . . . . . . . . . 42
4.4.3 Connect the logic interface to the control equipment. . . . . . . . . . . . 42
4.5 Connect the parallel control and monitoring. . . . . . . . . . . . . . . . . . . . . . . . . . 43
4.6 Connecon for serial control and monitoring. . . . . . . . . . . . . . . . . . . . . . . . . 45
4.6.1 Connect the serial interface to the customer control equipment. . 45
4.6.2 Serial enable. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 47
4.6.3 Serial protocol. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 47
4.6.4 Command set. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 48
4.6.5 Mul-drop operaon. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 52
4.7 Connecon for mixed parallel and serial operaon. . . . . . . . . . . . . . . . . . . . 54
4.8 Cooling. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 55
4.8.1 Cooling requirements. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 55
4.8.2 Forced air cooling. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 56
4.8.3 Water cooling. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 56
5. Conguraon. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 58
5.1 Congure the pump using serial commands. . . . . . . . . . . . . . . . . . . . . . . . . . 58
5.1.1 Message structure. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 58
5.1.2 Command and reply table denions. . . . . . . . . . . . . . . . . . . . . . . . . 59
5.1.3 Power limit seng. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 59
5.1.4 Power supply to the fan from the motor controller. . . . . . . . . . . . . . 60
5.1.5 Controlled venng opons. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 60
5.1.6 Standby speed seng. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 61
5.1.7 Normal speed seng. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 62
5.1.8 Timer seng and opons. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 62
5.1.9 Analogue signal opons. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 63
5.1.10 Electronic braking opons. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 64
5.1.11 Factory sengs. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 64
5.1.12 Assigning a mul-drop address. . . . . . . . . . . . . . . . . . . . . . . . . . . . . 64
5.2 Congure the pump using a TIC. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 65
6. Operaon. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 67
6.1 Before starng the pump. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 67
6.1.1 Close the vent valve. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 67
6.1.2 Pre-start sequence. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 67
6.2 Vent opons, vent valve connecon and control. . . . . . . . . . . . . . . . . . . . . . 68
Page 4

6.2.1 Manual vent valve. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 68
6.2.2 TAV5 solenoid vent valve. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 68
6.2.3 Vent valve control. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 69
6.2.4 Alternave valve connected to the vacuum system. . . . . . . . . . . . . 71
6.3 Operaon with parallel control and monitoring. . . . . . . . . . . . . . . . . . . . . . . 72
6.3.1 Start the pump. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 72
6.3.2 Run the pump at standby speed. . . . . . . . . . . . . . . . . . . . . . . . . . . . . 72
6.3.3 Stop the pump. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 72
6.3.4 Parallel monitoring. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 73
6.4 Operaon with serial control and monitoring. . . . . . . . . . . . . . . . . . . . . . . . . 73
6.4.1 Delayed start. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 73
6.4.2 Start the pump. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 73
6.4.3 Run the pump at standby speed. . . . . . . . . . . . . . . . . . . . . . . . . . . . . 74
6.4.4 Stop the pump. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 74
6.4.5 Monitor temperature readings. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 75
6.4.6 Monitor link parameter readings. . . . . . . . . . . . . . . . . . . . . . . . . . . . . 75
6.4.7 Monitor measured motor speed. . . . . . . . . . . . . . . . . . . . . . . . . . . . . 75
6.5 Mixed parallel and serial operaon. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 76
6.6 Operaon with a TIC or TAG. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 77
6.7 Decelerang and venng. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 77
6.8 Operaon at extreme condions. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 78
6.8.1 Operaon with high inlet pressure. . . . . . . . . . . . . . . . . . . . . . . . . . . 78
6.8.2 Operaon at high temperatures. . . . . . . . . . . . . . . . . . . . . . . . . . . . . 78
6.8.3 Protecon against over-speed. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 79
6.8.4 Electrical supply failure. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 79
6.9 Bakeout. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 80
6.10 Shut down the pump manually. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 81
7. Maintenance. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 82
7.1 Bearing and oil cartridge maintenance. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 82
7.2 Rotor life. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 82
7.3 Cleaning the pump. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 82
7.4 Decoding service status words. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 83
7.5 Controller run me. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 84
7.6 Pump run me. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 84
7.7 Pump cycles. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 84
7.8 Bearing run me. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 85
7.9 Oil cartridge run me. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 85
8. Fault nding. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 86
8.1 The controller LEDs do not ash for 0.5 seconds when the system is set to on.
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 86
8.2 The pump does not rotate aer a parallel start command is sent. . . . . . . . . 86
8.3 The pump does not rotate aer a serial start command is sent. . . . . . . . . . 86
8.4 The pump does not respond in mul- drop mode. . . . . . . . . . . . . . . . . . . . . . 86
Page 5

8.5 The green Normal LED does not light or the pump does not rotate at full
speed or the pump fails while in operaon. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 87
8.6 Ulmate pressure cannot be reached. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 87
8.7 The pump is very noisy or there is excessive vibraon or both. . . . . . . . . . . 88
8.8 No serial comms. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 88
8.9 Fail signal or standby signal not working. . . . . . . . . . . . . . . . . . . . . . . . . . . . . 88
8.10 Yellow service LED is ashing a repeated sequence. . . . . . . . . . . . . . . . . . . 89
8.11 The red alarm LED is on. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 89
8.12 The red alarm LED is ashing. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 89
8.13 Other problems. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 89
8.14 Command set error codes. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 89
8.15 Flashing service codes. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 90
8.16 Flashing error codes. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 90
8.17 Decoding system status words. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 91
8.18 Service informaon. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 93
9. Storage. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 95
10. Disposal. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 96
11. Service. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 97
11.1 Return the equipment or components for service . . . . . . . . . . . . . . . . . . . . 97
11.2 Bearing and oil cartridge on-site maintenance. . . . . . . . . . . . . . . . . . . . . . . 98
12. Spares. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 99
12.1 Inlet screen. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 99
12.2 Inlet strainer. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 99
12.3 Inlet ange seals and integrated inlet screens. . . . . . . . . . . . . . . . . . . . . . . . 99
12.4 NW16 and NW25 ports. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 100
13. Accessories. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 101
13.1 Air cooler. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 101
13.2 Water cooler. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 101
13.3 Flange heater. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 102
13.4 TAV5 vent valve. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 102
13.5 VRX vent restrictor. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 102
13.6 Vent port adaptor. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 103
13.7 PRX purge restrictor. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 103
13.8 Interface cable. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 103
13.9 nST PC program. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 103
13.10 Auxiliary connector. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 104
13.11 Auxiliary extension cable. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 104
13.12 Auxiliary 'Y' cable adaptor. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 105
13.13 Base mounng adaptor. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 105
Page 6

List of Figures
Figure 1: Dimensions - nEXT85 ISO63. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 18
Figure 2: Dimensions - nEXT85 CF63. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 19
Figure 3: Dimensions - nEXT85 ISO100. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 19
Figure 4: Dimensions - nEXT85 DN40. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 19
Figure 5: Typical base view. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20
Figure 6: Maximum allowed rate of pressure rise during venng: pressure against me
(with pump inially at full rotaonal speed). . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21
Figure 7: Maximum relave humidity to avoid condensaon with water cooling. . . . . . . 22
Figure 8: Interface circuits for nEXT turbo pump controllers. . . . . . . . . . . . . . . . . . . . . . . . . 27
Figure 9: Valve connector. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 29
Figure 10: nEXT85 pumping speed versus inlet pressure performance graph. . . . . . . . . . . 31
Figure 11: nEXT85 compression rao versus backing pressure graph. . . . . . . . . . . . . . . . . 31
Figure 12: Typical pumping system with a nEXT pump. . . . . . . . . . . . . . . . . . . . . . . . . . . . . 36
Figure 13: Allowable pump orientaon. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 40
Figure 14: Logic interface connecons - parallel control. . . . . . . . . . . . . . . . . . . . . . . . . . . . 45
Figure 15: Motor controller status informaon. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 46
Figure 16: Logic interface connecons - RS232 serial control. . . . . . . . . . . . . . . . . . . . . . . . 46
Figure 17: Logic interface connecons - RS485 serial control. . . . . . . . . . . . . . . . . . . . . . . . 47
Figure 18: Conceptual diagram for mul-drop connecon using RS232 interface. . . . . . . 53
Figure 19: RS485 mul-drop connecon. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 54
Figure 20: Logic interface connecon - mixed parallel and serial operaon. . . . . . . . . . . . 55
Figure 21: Auxiliary interface connecon. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 71
Figure 22: Serial and parallel control owchart. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 77
Figure 23: Accessories. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 101
Page 7

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1. Safety and compliance
1.1 Denion of Warnings and Cauons
NOTICE:
This manual meets our obligaon to provide you with informaon. For safe operaon
from the start, read these instrucons carefully before you install or commission the
equipment.
Read all the safety instrucons in this secon and the rest of this manual carefully
and make sure that you obey these instrucons. The equipment must only be
operated and maintained by trained personnel in the proper condion and as
described in this instrucon manual.
Obey local and state requirements and regulaons. If you have any quesons about
safety, operaon or maintenance of the device, please contact our nearest subsidiary.
Important safety informaon is highlighted as warning and cauon instrucons. Obey
these instrucons.
WARNING:
If you do not obey a warning, there is a risk of injury or death. Dierent symbols are
used according to the type of hazard.
CAUTION:
If you do not obey a cauon, there is a risk of minor injury, damage to equipment,
related equipment or process.
NOTICE:
Informaon about properes or instrucons for an acon which, if ignored, will
cause damage to the pump or the system.
We reserve the right to change the design and the stated data. The illustraons are not
binding.
Keep the instrucons for future use.
1.2 Safety symbols
The safety symbols on the products shows the areas where care and aenon is
necessary.
The safety symbols that follow are used on the product or in the product
documentaon.
Page 8
B8G000880_D - Safety and compliance

Warning/Cauon
A safety instrucon which must be followed.
Warning - Dangerous voltage
Idenes possible hazards from dangerous voltages.
Warning - Hot surfaces
Idenes a potenal hazard from a hot surface.
Warning - Protecve earth (ground)
The equipment must be grounded.
Warning - Use protecve equipment
Use appropriate protecve equipment.
Warning - Risk of explosion
An indicaon that there is a risk of explosion when you do the task.
Page 9
B8G000880_D - Safety and compliance

2. Introducon
2.1 Overview
WARNING: SAFE EQUIPMENT USE
Risk of injury or damage to equipment. Improper use of the equipment could cause
damage to it or injury to people. The user is responsible for the safe operaon,
installaon and monitoring of the system.
WARNING: DANGEROUS FUMES
Risk of asphyxiaon. The drive contains electrolyc capacitors and, under certain
fault condions, may emit dangerous fumes. Ensure that the drive is operated in a
well-venlated area.
CAUTION: ELECTRICAL CONNECTIONS
Risk of damage to equipment. Do not aempt to separate the controller from the
pump since this will cause damage to the electrical connecons.
A nEXT pump has a turbomolecular pump with a permanently aached controller which
contains the drive electronics.
The controller controls the electrical supply to the pump. With the controller, you can
manually adjust the standby speed. Other controls can be operated through the logic
interface only. To operate the nEXT pump, connect it to the customer control equipment
and to the power supply or use manufacturer's TIC Turbo Instrument Controller, TIC
Turbo Controller or TAG Controller. Refer to Electrical data on page 22.
The controller drives the brush-less motor in the pump. Two variants of the pump are:
▪ The 'D' or 'Duplex' variant which has turbomolecular blades and a drag mechanism
that allows operaon at higher backing pressures than the pure turbomolecular
pumps.
▪ The ‘H’ or ‘High Compression’ variant which has the same technology as the 'D'
variant, but it is tuned to deliver higher compression.
Also available is an ‘iD’ or ‘iH’ interstage variant, which provides an interstage port
between the turbomolecular blades and drag mechanism.
The nEXT pump is supplied with an inlet screen. The inlet screen is installed in the
centering O‑ring for ISO and NW40 version pumps and in the envelope for CF version
pumps. The inlet screen prevents damage to the pump caused by debris entering the
pump.
The nEXT pump has a vent port for venng the pump and vacuum system to the
atmospheric pressure. The pump has a manual vent valve which can be replaced with a
TAV5 solenoid‑operated vent valve (available as an accessory, refer to Accessories on
page 101). The on‑board motor controller can control the TAV valve.
The nEXT pump has a purge port through which an inert purge gas can be introduced to
protect the bearing and motor from corrosion. You can install an oponal vent port
Page 10
B8G000880_D - Introducon

adapter and purge restrictor to the purge port to control the ow rate of the purge gas
and to lter the gas supply. This can be used to opmise the performance of the pump,
for example with low molecular mass gases. Refer to Accessories on page 101.
A forced air-cooling kit and a water‑cooling block are available as oponal accessories to
cool the nEXT pump. Refer to Accessories on page 101.
Note:
The units used throughout this manual conform to the SI internaonal system of units of
measurement. Also throughout this manual, wherever ow rates are specied, the
abbreviaon 'sccm' is used to mean standard cm3min-1: this is a ow of 1 cm3min-1 at an
ambient temperature of 0 °C and a pressure of 1013 mbar (1.013 x 105 Pa).
2.2 Motor controller
The motor controller has the drive electronics that control the pump operaon, the TAV
vent valve and the air cooler.
An auxiliary connector socket is given at the side of the motor controller where you can
plug in the TAV vent valve and the air cooler. Refer to Motor controller auxiliary
connector socket on page 28.
A USB port (Figure: Motor controller status informaon on page 46, item 9) is given
which is a service port to use with our nST PC soware using a standard micro‑USB
cable. This enables the pump to be congured, monitored and upgraded without
disconnecng from the 24 ‑ 48 V d.c. supply. This soware is available for download
from our Upgrade website: www.upgrades.edwardsvacuum.com
Currently, for the nST soware, a free license is necessary to use the soware. To get a
free license, obey the on‑screen instrucons, complete the user data form and send the
automacally generated email to us.
The controller has ve indicator LED's which signal the general status, operaon and
service status of the pump. The LEDs can be used for fault nding if a problem occurs.
Refer to Indicator LEDs on page 29.
The motor controller has built‑in safety features to prevent the pump from damage
during sustained high pressure or temperature.
▪ The electronics constantly monitors the temperature in the controller and the
temperature of the motor in the pump. If the controller or the motor gets too hot,
the controller decreases the power supplied to the pump motor and the pump
speed decreases. If the rotaonal speed of the pump decreases below 50% of the
full speed, the electronics can trip into a fail condion, depending on the system
conguraon. Refer to Timer on page 12.
▪If the pump inlet pressure increases, the power supplied to the pump motor
increases to counteract the gas friconal load. When the built‑in maximum power
limit is reached, the speed of the pump starts to decrease. If the rotaonal speed
of the pump decreases below 50% of the full speed, the electronics can trip into
fail condion, depending on how the system has been congured. Refer to Timer
on page 12.
If the electrical supply fails, the controller uses the motor in the pump as a generator.
This means the pump has its own regenerave supply and a separate baery for
emergency power backup is not necessary. The regenerated energy maintains the
Page 11
B8G000880_D - Introducon

electrical supply to the controller, the vent valve or the fan aached to the controller
connector unl the pump speed decreases below 50% of the full rotaonal speed to
make sure that the vent valve stay shut unl below 50% of the full rotaonal speed and
prevent the pump from venng at full speed. It makes sure that the serial link and
signals on the parallel interface stays acve unl the pump speed decreases below 50%.
2.3 Operaonal features
The pumps have basic start and stop commands and some other features that allow the
pump operaon to be modied for an applicable applicaon.
2.3.1 Power limit seng
Select the maximum power that will be drawn by the pump. The more power supplied,
the quicker the pump will accelerate to reach full speed.
If the applicaon requires fast cycling or higher gas loads, set the power limit to the
maximum value. If ramp me is not important in the applicaon, use a lower power
limit, down to a minimum value (refer to Table: Power limit seng on page 60). Also
ensure there is sucient cooling for the applicaon.
Ensure that the power supply is capable of delivering sucient power to the nEXT pump.
By choosing a lower power limit seng, a smaller power supply may be used. For more
informaon, refer to Electrical data on page 22.
2.3.2 Standby speed
In standby mode, the pump rotaonal speed is lower than the full rotaonal speed. The
default seng for standby speed is 70% of the full speed.
To operate the pump at standby speed, it must be in the start condion.
If operang the pump at maximum speed at all mes is not necessary for the
applicaon, use the standby speed feature rather than seng the pump to o. You can
use the standby speed feature for tuning the vacuum system or as a power saving opon
for the system.
The standby speed is a user‑selectable value. Refer to Standby speed seng on page 61.
2.3.3 Timer
When the pump is started, an internal mer starts automacally in the motor controller.
The default mer seng is 8 minutes.
If the pump fails to reach 50% of full rotaonal speed in the meout period, the motor
controller will signal a fail and decelerate the pump to rest. This feature prevents the
motor controller from driving the pump at maximum power for a long me. The pump
can fail to reach 50% speed if the gas load is too high (for example if there is a leak in the
system), if the backing pump fails or if the pump is too hot.
The meout period is user‑selectable (refer to Timer seng and opons on page 62). If
slow ramp‑up of the pump is necessary for the applicaon, extend the meout period.
The mer is permanently enabled for ramp‑up.
If the rotaonal speed of the pump decreases below 50% of the full speed, the pump
me can be set to recover rather than trigger a fail condion. The mer starts
Page 12
B8G000880_D - Introducon

immediately when the rotaonal speed of the pump decreases below 50% of the full
speed. If the rotaonal speed of the pump increases above 50% during the meout
period, the mer will reset. If the rotaonal speed of the pump does not recover by the
end of the meout period, the motor controller will trigger a fail condion and
decelerate the pump to rest.
The mer funcon is enabled when the pump is shipped. You can disable the mer
funcon. If the mer funcon is disabled, the pump will fail and decelerate to rest
immediately when the rotaonal speed of the pump decreases below 50%.
2.3.4 Analogue output
The pump controller gives an analogue output for monitoring ve parameters of the
system:
▪Measured pump rotaonal speed (default condion)
▪Measured link power
▪Measured motor temperature
▪Measured controller temperature
▪Measured rotor power
The range of the analogue output signal is from 0 to 10 V and is directly proporonal to
the system parameter. Refer to Logic interface on page 14.
Connect the analogue output to an applicable meter or indicator to display the
applicable system parameter or connect it to the customer control equipment (for
example, to operate other components in the pumping system at set values).
The analogue output can monitor only one system parameter at a me. You can
congure the controller to monitor a dierent system parameter. Refer to Analogue
signal opons on page 63.
2.3.5 Automac vent opons
The manufacturer's TAV vent valve can be connected to the motor controller. The motor
controller can give a number of dierent venng opons and can be congured for a
normally closed and a normally open vent valve.
The motor controller can control the rate of venng. Using this feature, the pump can be
vented from the full rotaonal speed in a controlled manner that will not damage the
pump bearings. When the pump rotaonal speed decreases below 50% of the maximum
speed, it is safe to do a hard vent (open the vent valve fully).
Many venng opons are available, that include:
▪Hard vent when the rotaonal speed decreases below 50% speed.
▪Controlled vent when the rotaonal speed is above 50% speed and hard vent is
below 50% speed.
▪Hard vent immediately through an applicable restrictor.
Controlled venng gives quicker ramp down me by controlling the vent rate through a
single large orice across the speed range of the pump. A list of the venng opons is
given in Vent opons, vent valve connecon and control on page 68.
Page 13
B8G000880_D - Introducon

There is also a feature that allows a delayed start of the pump. With this feature, the
vent valve can be closed before starng the pump. This allows the backing pump to
decrease the pressure in the vacuum system before starng the pump.
With a ‘Y’ cable adaptor, a TAV and a cooling fan can be controlled at the same me. No
conguraon is necessary.
2.3.6 Normal speed seng
The normal speed is a user‑selectable parameter which can be set from 50% to 100% of
full rotaonal speed.
When the pump gets to normal speed, a signal is available on the normal pin of the logic
interface connector. The signal can be used to control the applicaon as it shows that
the vacuum performance (pump speed) is at a set level. The default seng is 80% of the
full rotaonal speed. Refer to Normal speed seng on page 62 for instrucons to
change the normal speed seng.
2.3.7 Electronic braking
The pump has a user‑selectable electronic braking opon which is disabled by default.
With the electronic braking opon disabled, the pump will take power from the
electrical supply during acceleraon and operaon.
When the pump decelerates it will coast down and power will not be returned to the
electrical supply.
The electronic braking opon can be enabled to decrease the pump deceleraon me
and to recover some energy from the pump. This can be done by returning the power
from the pump to the electrical supply. The rate at which the electrical energy is
returned to the supply is regulated to the voltages shown:
Voltage range Returned electronic braking voltage
Below 21.6 V d.c. (24 V d.c. -10%) Outside working range for pump
21.6 V d.c. to 26.4 V d.c. 24 V d.c. +10%
26.4 V d.c. to 38.4 V d.c. Electronic braking not funconal
38.4 V d.c. to 50.4 V d.c. 48 V d.c. +10%
Above 50.4 V d.c. (48 V d.c. +5%) Outside working range for pump
To get the fastest electronic braking mes, the returned power must go to somewhere,
such as:
▪A supply capable to receive the returned power.
▪Other devices that share the same electrical supply bus with the pump.
▪An applicable 2 A load during the deceleraon of the pump.
2.4 Logic interface
The pump controller can be operated only through the logic interface. The signals on the
logic interface are of three types:
▪Control inputs: Switch‑type signals that are used to control the pump
▪Status outputs: To idenfy the status of the system
Page 14
B8G000880_D - Introducon

▪ Analogue output: Gives a 0 ‑ 10 V output for a number of pump parameters.
The logic interface supports the serial control and the parallel control to monitor and
control through one connector. For serial control, RS232 (default) or RS485 can be
selected using the RS485 / RS232 slide switch which is given on the motor controller.
Refer to Connecon for serial control and monitoring on page 45.
You can plug the logic interface into the manufacturer's TIC Turbo Controller or
TIC Turbo Instrument Controller and then use the given funconality. The logic interface
can be connected to the customer control system as an alternave.
Refer to Logic interface connector on page 25 for more informaon about the logic
interface.
2.4.1 USB interface
The USB service port is designed to work with manufacturer's nST PC soware. The
primary funcon of the interface is to allow an easy conguraon of the pump.
The START / STOP opon is given to check the pump operaon through the USB service
port. It is not intended as an industrial control interface for unaended machine to
machine (M2M) control.
The USB service port supports the same me communicaons with the serial interface
in the logic interface connector. This enables the review of the pump status and logs,
and you can congure the pump while the pump is installed and in operaon.
Use the USB service port only when the 24 - 48 V d.c. power is applied. Do not use the
USB service port without 24 - 48 V d.c. power as there is a risk of corrupon of the pump
controller memory.
2.4.2 Parallel control and monitoring
The simple parallel interface is a quick and easy way to control the pump. Same interface
is used on the 24 V manufacturer's Turbo Pumps. The start and standby controls are
available to use. You can monitor the system status using the normal, fail and analogue
output signals.
Refer to Connect the parallel control and monitoring on page 43 for more instrucons
about how to use the parallel interface.
A system that is in operaon with a parallel connecon only is not capable to adjust the
conguraon sengs stored in the controller (for example, power limit seng or
controlled venng opons). All these features will be at factory default sengs. You can
manually adjust the standby speed if the standby mode is selected, but the motor
controller has to be congured separately before the installaon of the pump to the
system. Refer to Parallel control with serial monitoring or serial conguraon on page 16
and Motor controller conguraon (serial conguraon) on page 16 for more
informaon.
2.4.3 Serial control and monitoring
The serial communicaons link gives complete control and monitoring by using three
signal lines.
The serial data lines have the same connector pins as the parallel signals standby and
fail. The serial data lines can be congured to give an RS485 compliant or RS232
Page 15
B8G000880_D - Introducon