Edwards nEXT85 User manual

nEXT85 SERVICE TOOL KIT
Publicaon Number: B8G2-00-840
Issue: A
Original Instrucons
edwardsvacuum.com

Copyright noce
©Edwards Limited 2017. All rights reserved.
Trademark credits
Edwards and the Edwards logo are trademarks of Edwards Limited.
B8G2-00-840A - Copyright noce
Page 2

Contents
Copyright noce..................................................................................................... 2
Trademark credits...................................................................................................2
List of Figures......................................................................................................... 4
List of Tables...........................................................................................................5
Safety and compliance 6
Denion of Warnings and Cauons..............................................................................6
Safety symbols................................................................................................................ 6
General descripon 7
Overview........................................................................................................................ 7
Pre-service 8
Unpack and inspect........................................................................................................ 8
Addional tools and items required............................................................................... 9
Service kit....................................................................................................................... 9
Preload check................................................................................................................. 9
Bearing preload familiarisaon......................................................................... 10
Service 11
Disassembly.................................................................................................................. 11
Oil cartridge removal......................................................................................... 11
Oil feed nut removal.......................................................................................... 12
Bearing retaining nut removal........................................................................... 13
Bearing module removal................................................................................... 14
Reassembly................................................................................................................... 14
Bearing module inseron.................................................................................. 14
Bearing retaining nut assembly......................................................................... 15
Oil feed nut assembly........................................................................................ 16
Oil cartridge assembly....................................................................................... 16
Bearing preload check.................................................................................................. 17
Service counter reset.................................................................................................... 18
Reset the service interval using a Turbo Instrument Controller (TIC)................ 19
Reset the service interval using a PC serial command.......................................20
Reset the service interval using a nST PC program............................................ 20
Reset the service interval using the turbo drive standby speed control
buons......................................................................................................... 21
Pump checks.................................................................................................................22
Clearance check................................................................................................. 22
Vacuum leak check............................................................................................ 22
Operaonal checks............................................................................................ 22
B8G2-00-840A - Contents
Page 3

List of Figures
Figure 1: Pin spanner adaptor................................................................................................... 8
Figure 2: Bearing module extractor tool................................................................................... 8
Figure 3: Bearing preload measurement and seng tool.........................................................9
Figure 4: Locang the preload tool (NW40 variant shown).................................................... 10
Figure 5: Oil cartridge removal................................................................................................ 12
Figure 6: Oil feed nut removal................................................................................................. 13
Figure 7: Bearing retaining nut removal.................................................................................. 13
Figure 8: Bearing module removal.......................................................................................... 14
Figure 9: Bearing module inseron......................................................................................... 15
Figure 10: Bearing retaining nut assembly.............................................................................. 15
Figure 11: Oil feed nut assembly............................................................................................. 16
Figure 12: Oil cartridge assembly............................................................................................ 17
Figure 13: Preload tool (pass / fail indicaon).........................................................................18
Figure 14: Motor controller status informaon...................................................................... 21
Figure 15: Clearance check...................................................................................................... 22
B8G2-00-840A - List of Figures
Page 4

List of Tables
Table 1: Checklist of components for the bearing exchange tool kit B8G200845..................... 8
Table 2: Front panel symbols and their funcons................................................................... 19
B8G2-00-840A - List of Tables
Page 5

Safety and compliance
Denion of Warnings and Cauons
Important safety informaon is highlighted as WARNING and CAUTION instrucons; these
instrucons must be obeyed.
The use of WARNINGs and CAUTIONs is dened below.
WARNING:
Warnings are given where failure to observe the instrucon could result in injury or
death to people. The actual symbol shown varies according to the hazard.
CAUTION:
Cauons are given where failure to observe the instrucon could result in damage to
the equipment, associated equipment or process.
Safety symbols
The safety symbols on the products denote areas where care and aenon is required.
The following safety symbols may be used on the nEXT85 or throughout the product
documentaon.
Warning/Cauon
An appropriate safety instrucon should be followed or cauon to a
potenal hazard exists.
Warning - Dangerous Voltage
Indicates hazards arising from dangerous voltages.
B8G2-00-840A - Safety and compliance
Page 6

General descripon
Overview
This manual provides step by step instrucons for the removal and inseron of the bearing
module on the nEXT85 pump.
Remove the bearing module as specied in this manual.
B8G2-00-840A - General descripon
Page 7

Pre-service
Unpack and inspect
Remove all packaging and check that all items listed in Table 1 on page 8 have been
received. If any of these items are missing, nofy the supplier in wring within three days.
Table 1 Checklist of components for the bearing exchange tool kit B8G200845
Quanty Descripon Reference Check
1 Pin spanner adaptor Figure 1 on
page 8
❏
1 Bearing module extractor tool Figure 2 on
page 8
❏
1 Bearing preload measurement and seng
tool
Figure 3 on
page 9
❏
Figure 1 Pin spanner adaptor
1. ¼” square drive
Figure 2 Bearing module extractor tool
1. Bearing an-rotang tube 2. Bearing extractor sleeve
B8G2-00-840A - Pre-service
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Figure 3 Bearing preload measurement and seng tool
Addional tools and items required
Addional tools are required to perform a bearing module and oil cartridge replacement.
These items are not part of the bearing exchange tool kit B8G200845 and will need to be
acquired separately.
•T15 Torx screwdriver
•Torque driver (torque range required 2 to 6 Nm)
•¼" square drive
•2.5 mm AF hex key or T-bar
•T10 Torx drive bit
•4 mm hex bit
•Lint-free cloth
•Latex gloves (recommended)
Service kit
Before commencing with the bearing module service, conrm that you have purchased the
correct bearing and oil cartridge service kit B8G200811 or oil cartridge service kit
B8G200828.
Preload check
WARNING:
Allow the pump rotor to stop and then disconnect the motor controller before you
remove the pump from your vacuum system for maintenance or fault nding
procedures.
Service on page 11 describes how to perform an oil cartridge and bearing module
replacement.
Part of this process involves checking the bearing preload condion aer the service has
been completed. Preload is the process wherein a permanent thrust load is applied to the
main bearing. Thrust is applied by the misalignment between the inner stac and the outer
rotang passive magnec bearing located at the inlet of the pump.
B8G2-00-840A - Pre-service
Page 9

In order to become familiar with how to recognise bearing preload aer a service, it is
recommended that the instrucons in Bearing preload familiarisaon on page 10 are
followed.
Bearing preload familiarisaon
CAUTION:
Ensure all tools are clean and free of dirt and grease to avoid contaminaon of the
rotor.
This procedure should be performed with the pump placed in the vercal posion.
1. Place the preload tool onto the inlet of the turbomolecular pump. The force probe
must be located into the centre of the pump inlet with the adjuster legs engaged
onto the magnec bearing adjuster nut Figure 4 on page 10. Supporng the
preload tool body in posion while performing the preload check is recommended.
2. Apply pressure by pushing the test plunger unl a change in preload can be
detected. Releasing the test plunger will return the preload back to its original
posion. Pressing and releasing the test plunger slowly while performing this check
is recommended.
Note:
Detecon of the bearing preload can be recognised by a disnct sound. This may be
accompanied by a sensory feel through the tool and pump body. If a change in preload
cannot be detected, it may be possible to carry on with the service but with cauon.
CAUTION:
If the pump has suered any damage (i.e. the rotor does not spin freely or quietly), it is
recommended that the service is not carried out and that the local service centre is
contacted for advice.
Figure 4 Locang the preload tool (NW40 variant shown)
1. Preload tool force probe
2. Preload tool body
3. Preload test plunger
4. Preload tool adjuster legs
5. Magnec bearing adjuster nut
B8G2-00-840A - Pre-service
Page 10

Service
It is highly recommended that the bearing module service should be performed in a clean
environment, free from contaminaon (metallic debris, dust, human skin and hair).
To ensure this:
•Clean the immediate working area and wipe clean the base of the pump with a lint-
free cloth before starng work.
•Ensure all hand tools are scrupulously clean and free from damage or burrs
(demagnesing hand tools is recommended).
•Always wear gloves when handling the bearing unit and surrounding parts.
•A laminar ow bench or clean room is helpful, but not essenal.
CAUTION:
It is recommended that the pump is in a stable horizontal posion when performing this
service. Ensure the vacuum ports are protected to prevent any damage.
Note:
For the purpose of removal and reassembly, all screws and components with screw xings
use right-handed threads.
Disassembly
Oil cartridge removal
Refer to Figure 5 on page 12.
1. Unscrew and remove the 4 x M4 buon head screws holding the oil cartridge.
2. Remove the oil cartridge from the pump body.
Note:
If replacing the oil cartridge only, go straight to Oil cartridge assembly on page 16 aer
following this instrucon.
B8G2-00-840A - Service
Page 11

Figure 5 Oil cartridge removal
1. 4 x M4 buon head screws 2. Oil cartridge base cap
Tools (A or B)
A. 2.5 mm AF hex key
B. T-bar
Oil feed nut removal
Refer to Figure 6 on page 13.
1. Engage the T10 Torx with driver into the end of the oil feed nut.
2. Engage the T15 Torx screwdriver through the end of the sha via the pump inlet.
3. While keeping the T15 Torx screwdriver staonary, undo and remove the oil feed
nut.
4. Place the oil feed nut in a dry clean place.
B8G2-00-840A - Service
Page 12

Figure 6 Oil feed nut removal
1. Oil feed nut
Tools
A. T10 Torx drive bit
B. Torque driver
C. T15 Torx screwdriver
Bearing retaining nut removal
Refer to Figure 7 on page 13.
1. Using the combinaon of tools, engage the pins of the pin spanner adaptor into the
pump bearing retaining nut.
2. While holding the pump body, undo and remove the bearing retaining nut.
3. Place the retaining nut in a dry clean place.
Figure 7 Bearing retaining nut removal
1. Pin spanner adaptor
B8G2-00-840A - Service
Page 13

Tools
A. Torque driver
B. ¼” square drive
Bearing module removal
Refer to Figure 8 on page 14.
1. Screw the bearing extractor sleeve onto the bearing module.
Note:
The bearing an-rotang tube may be used to prevent the bearing from rotang while the
extractor sleeve is ed. Slide the tube inside the sleeve and apply a small force onto the
bearing while rotang the extractor sleeve.
2. Firmly hold the pump body and remove the bearing module by pulling the extractor
sleeve squarely away from the pump body.
3. Once extracted, remove the bearing module from the bearing extractor sleeve.
4. As a precauon, clean any contaminaon that might be present from the extractor
thread using a dry lint-free cloth.
Figure 8 Bearing module removal
1. Bearing an-rotang tube
2. Bearing extractor sleeve
3. Bearing module
Reassembly
Bearing module inseron
Refer to Figure 9 on page 15.
1. Remove the new bearing module from its packaging.
2. Screw the bearing extractor sleeve onto the new bearing module.
3. Carefully insert the bearing module into the bearing cavity of the pump in reverse
order of removal. Ensure that the bearing is pushed fully home.
B8G2-00-840A - Service
Page 14

Note:
The bearing an-rotang tube may be used to prevent the bearing from rotang while the
extractor sleeve is removed.
Figure 9 Bearing module inseron
Bearing retaining nut assembly
Refer to Figure 10 on page 15.
1. Using the combinaon of tools, engage the bearing retaining nut onto the pins of
the pin spanner adaptor.
2. In reverse order of removal, t the bearing retaining nut into posion, taking care
not to cross thread the nut. Torque the bearing retaining nut to 6 Nm.
Figure 10 Bearing retaining nut assembly
1. Pin spanner adaptor 2. Bearing retaining nut
B8G2-00-840A - Service
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Tools
A. Torque driver
B. ¼” square drive
Oil feed nut assembly
Refer to Figure 11 on page 16.
1. Screw the oil feed nut onto the end of the sha. This can be performed by hand.
2. Engage the T10 Torx bit with torque driver combinaon into the end of the oil feed
nut.
3. Engage the T15 Torx screwdriver through the end of the sha via the pump inlet.
4. While keeping the T15 Torx screwdriver staonary, torque the oil feed nut to 2 Nm.
Figure 11 Oil feed nut assembly
1. Oil feed nut
Tools
A. T10 Torx bit
B. Torque driver
C. T15 Torx screwdriver
Oil cartridge assembly
Refer to Figure 12 on page 17.
1. Carefully remove the new oil cartridge from its packaging.
2. Fit the oil cartridge into posion while ensuring the xing screw holes and threads
are aligned.
3. Fasten the oil cartridge using the 4 x M4 buon head screws previously removed.
Evenly ghten each screw to 2 Nm.
B8G2-00-840A - Service
Page 16

Note:
If replacing the oil cartridge only, go straight to Service counter reset on page 18 aer
following this instrucon.
Figure 12 Oil cartridge assembly
1. 4 x M4 buon head screws
Tools
A. Torque driver
B. 4 mm hex bit
Bearing preload check
The bearing preload tool checks that the bearing preload force is correctly set. If necessary,
the tool can be used to correct the bearing preload force if adjustment is required.
CAUTION:
Bearing preload checking is required to check and if necessary set the bearing preload
using the bearing preload tool. Failure to do so may shorten the service life of the
pump.
1. Fit and use the preload tool in accordance with pre-service Preload check on page 9.
While performing this check, the posion of the test indicator must be noted when
a change in preload transion occurs. Refer to Figure 13 on page 18.
2. If the test indicator falls within the pass limit, then no further acon is required.
Proceed to Service counter reset on page 18.
3. Adjustment of the bearing preload force will be required if the test indicator falls
above or below the pass limit when a change in preload transion occurs. Using the
preload tool body, rotate the magnec bearing adjuster nut (viewed from top)
clockwise if the test indicator is above the pass limit and an-clockwise if the test
indicator is below the pass limit.
It is advisable to monitor the preload force using the preload tool test plunger
between 1 mm rotaonal increments. Connue this process unl the test indicator
B8G2-00-840A - Service
Page 17

falls within the pass limit. When condent that the preload force has been correctly
set, proceed to Service counter reset on page 18.
4. If no preload is detected, slowly turn the preload tool body clockwise unl preload is
established in accordance with Preload check on page 9. When the preload has been
veried, measure the preload force by following the corresponding instrucons
above.
Figure 13 Preload tool (pass / fail indicaon)
1. Pass/ Fail test indicator
2. Fail
3. Pass
Note:
To check if the bearing is set to the correct preload force, the test indicator must be within
the pass limits when the preload transison occurs.
Service counter reset
Aer compleng an oil cartridge change or an oil cartridge and bearing module change, it is
important to reset the service interval in order to schedule the next service and reset the
status LED.
Depending on the set up and equipment availability, a choice of 4 opons are available to
perform a service counter reset.
Choose one of the following opons:
1. Turbo instrument controller
2. PC serial command
3. nST PC program
4. nEXT turbo controller
B8G2-00-840A - Service
Page 18

WARNING:
Following a service counter reset the pump may enter a short setup / test roune.
During this period some movement of the rotor may occur. To ensure safety of the user,
in line with the product instrucon manual, install the pump in the vacuum system
before connecng the motor controller to the power supply. This will ensure that the
pump cannot operate and injure people.
Table 2 Front panel symbols and their funcons
Symbol Name Funcon
UP Move up through a menu.
Cycle selected numerical values up.
Cycle a selected list item upwards.
DOWN Move down through a menu.
Cycle selected numerical values down.
Cycle a selected list item downwards.
SELECT Enter the highlighted sub menu.
Edit the highlighted list or numerical item.
Move to the next digit of a numerical value.
Jump to the setup screen for the highlighted
gauge or pump.
MENU Switch between the default view screen and
the main menu.
Exit the current sub menu or setup screen.
Abort edit of a selected list item.
Move to the previous digit of a numerical
value.
CYCLE Turn a highlighted gauge or pump on or o.
Reset the service interval using a Turbo Instrument Controller (TIC)
1. Starng from the top level view screen, press the MENU buon to enter the MAIN
menu.
2. Using the DOWN buon, scroll down to the "Turbo Status" opon then press the
SELECT buon to enter the TURBO STATUS menu.
3. Using the DOWN buon, scroll down to the "Service menu - enter" opon then
press the SELECT buon to enter the nEXT SERVICE menu.
4. Using the DOWN buon, scroll down to the "Reset Service Due . . . " opon then
press the SELECT buon to enter the nEXT SERVICE RESET menu.
B8G2-00-840A - Service
Page 19

5. Using the DOWN buon, scroll down to the "Reset oil due" opon then press the
SELECT buon to reset the oil service schedule. *
6. To conrm that the service reset has been successful, press the MENU buon to
return to the nEXT SERVICE menu. Check that “run” and “unl” hours have been
reset. Check that the status LED has been reset and is no longer ashing.
7. Once the service counter reset has been completed, a power cycle must be
performed to complete the process.
Reset the service interval using a PC serial command
1. To reset the oil cartridge service interval following an oil cartridge change, send the
following command over the serial communicaons link:
Command ! C 886sp 1cr
The reply received will be as follows:
Command * C 886sp 1cr
To reset the bearing service interval following a bearing change, send the following
command over the serial communicaons link:
Command ! C 885sp 1cr
The reply received will be as follows:
Command * C 885sp 1cr
2. To conrm that the service reset has been successful, check that status LED has
been reset and is no longer ashing.
3. Once the service counter reset has been completed, a power cycle must be
performed to complete the process.
Reset the service interval using a nST PC program
The nST PC program is PC-based soware that can be used with the nEXT85 pump either via
the serial interface or via the USB service port.
It can be used to control, monitor, congure and data log the nEXT85 pump and also to view
service status, reset service intervals and upgrade the soware embedded in the motor
controller.
This soware is available for download from the Edwards upgrades website:
www.upgrades.edwardsvacuum.com
Currently, nST soware requires a free license in order to be used. To obtain a free license
follow the on screen instrucons, ll out the user data form and then send the automacally
generated email to Edwards.
For rst me users, referring to the nST Support Toolkit instrucon manual D396-49-880 is
recommended. The manual will give guidance on how to:
•Install the nST soware applicaon
•Register and acvate the product
*If the bearing module has also been replaced, then repeat the operaon above by selecng the “Reset
bearing due” opon.
B8G2-00-840A - Service
Page 20