Edwards STP Series User manual

STP Series Turbomolecular Pump
& Control Unit
STP EtherCAT®Interface
Instruction Manual
Copyright 2023 Edwards Japan Limited. All rights reserved. Printed in Japan.
Read through the Safety Precautions and each
section of this Manual carefully before using the STP
pump.
Keep this Manual in a place where you can quickly
access it at any time.
Read this Manual thoroughly and keep it with the
Turbomolecular Pump and Control unit Instruction
Manual.
Applicable Models
◼SCU-800
◼SCU-801
◼SCU-1600
◼SCU-1601
MT-49E-A01-E
2023.08

This page is intentionally blank.

STP EtherCAT®Interface
MT-49E-A01-E
Page i
PAGE
i
CONTENTS
Section Title Page
1INTRODUCTION 1
1.1 Scope and definitions 1
1.2 General description 2
1.3 User connections and indicator for the EtherCAT interface 3
2TECHNICAL DATA 5
2.1 EtherCAT network connectors 5
2.2 USB connector 5
2.3 Operating and storage data 5
3INSTALLATION 7
3.1 Unpacking 7
3.2 Precautions before installation 7
3.3 EtherCAT Interface panel 7
3.3.1 EtherCAT IN and OUT connector 8
3.3.2 Mini-USB connector 8
4 OPERATION 11
4.1 Setting communication parameters 11
4.2 LED’s 12
4.3 DEVICE ID Rotary Switches 12
4.4 Taking and releasing control 13
4.5 Using Turbo Low Speed (available for SCU-1600/1601 only) 14
4.6 Rotation INHIBIT (available for SCU-1600/1601 only) 15
4.7 Protocol 16
4.8 Alternate PDO Mapping 16
4.9 Firmware Update Over EtherCAT 16
5MAINTENANCE 29
5.1 Inspect the electrical connections 29
6SERVICE, SPARES AND ACCESSORIES 31
6.1 Introduction 31
6.2 Service 31
6.3 Spares 31
6.4 Accessories 31

STP EtherCAT®Interface
MT-49E-A01-E
Page ii
PAGE
ii
ILLUSTRATIONS
Figure Title Page
1 SCU-800/801, SCU-1600/1601 with EtherCAT Interface 2
2 User interface of EtherCAT Interface 7
3 Example of cable installation in metallic duct 9
4 Front panel of SCU-800/801 and SCU-1600/1601 13
TABLES
Table Title Page
1 EtherCAT socket pin-out 8
2 Setting values for STP pump 11
3 LED functions 12
4 Device Profile objects 17
TRADEMARK CREDITS
EtherCAT®is a registered trademark and patented technology, licensed by Beckhoff Automation
GmbH, Germany.

STP EtherCAT®Interface
MT-49E-A01-E
Page 1
1
INTRODUCTION
1 INTRODUCTION
1.1 Scope and definitions
This manual provides installation, operation and maintenance instructions for the STP EtherCAT®
Interface (abbreviated to "EtherCAT Interface" throughout this manual). You must use the EtherCAT
Interface as specified in this manual otherwise the protection provided by the equipment may be
impaired. Edwards takes no responsibility for damage or injury caused by improper use of the
equipment.
Read this manual and the STP control unit manual before you attempt to install, operate or maintain
the EtherCAT Interface.
Important safety information is highlighted as WARNING and CAUTION instructions; you must obey
these instructions. The use of WARNINGS and CAUTIONS is defined below.
WARNING
Warnings are given where failure to observe the instruction could result in serious injury
or death to people.
Throughout this manual, page, figure and table numbers are sequential.
The units used throughout this manual conform to the SI international system of units of
measurement; where appropriate, US equivalent units of measurement are also given.
The following IEC warning labels/symbols appear on this Instruction Manual:
Warning - This symbol denotes general warning
Refer to accompanying documentation and instruction manual.
CAUTION
Cautions are given where failure to observe the instruction could result in minor personal injury or
damage to the equipment, associated equipment and/or process.

STP EtherCAT®Interface
MT-49E-A01-E
Page 2
INTRODUCTION
1
1.2 General description
The EtherCAT Interface acts as a gateway between the EtherCAT protocol and RS232/RS485 based
ASCII serial protocol used by the STP control unit. It realizes the remote control through EtherCAT
network. The EtherCAT Interface is integrated into the rear side of the STP control unit. The setting
switches, indicators and connectors for the EtherCAT are on the rear panel. Refer to Figure 1.
The EtherCAT Interface starts up after turning on the main power switch of the STP control unit.
(a) Rear panel of SCU-800/801 with EtherCAT Interface
(b) Rear panel of SCU-1600/1601 with EtherCAT Interface
Figure 1 - SCU-800/801, SCU-1600/1601 with EtherCAT Interface
EtherCAT Interface
EtherCAT Interface

STP EtherCAT®Interface
MT-49E-A01-E
Page 3
1
INTRODUCTION
1.3 User connections and indicator for the EtherCAT interface
•RJ45 socket 1 and 2 –EtherCAT IN and OUT network connectors.
•USB Mini socket –connection for software upgrades by Edwards service personnel.
•L/A (Link/Activity) LED (green) (one over each RJ45 socket) –indicates network activity.
•Power LED (green) (one over each RJ45 socket) –indicates power status of unit.
•RUN LED (green) –indicates EtherCAT SubordinateDevice operating status.
•ERROR LED (red) –indicates EtherCAT SubordinateDevice fault status.
•DEVICE ID Rotary Switches –sets the Explicit Device Identification value.

STP EtherCAT®Interface
MT-49E-A01-E
Page 4
INTRODUCTION
1
This page is intentionally blank.

STP EtherCAT®Interface
MT-49E-A01-E
Page 5
2
TECHNICAL DATA
2 TECHNICAL DATA
2.1 EtherCAT network connectors
Connector type: RJ45 socket
Mating part: Standard RJ45 plug
Signal levels: Ethernet 100 base TX compliant
2.2 USB connector
Connector type: USB Min-B socket
Mating part: USB Min-B plug
Protocol: USB 2.0 full speed compatible
2.3 Operating and storage data
Operating temperature range: 0 to +40°C
Storage temperature range: -25 to +55°C
Operating humidity range: 30 to 95 %Rh (no condensing)
Note : Refer to each instruction manual for technical data related to the STP pump and the STP
control unit.

STP EtherCAT®Interface
MT-49E-A01-E
Page 6
TECHNICAL DATA
2
This page is intentionally blank.

STP EtherCAT®Interface
MT-49E-A01-E
Page 7
3
INSTALLATION
3 INSTALLATION
3.1 Unpacking
Check outer package for damage and that the delivery note corresponds to the purchase order.
Note : The EtherCAT Interface is implemented into the STP control unit by Edwards
Note : It is recommended to keep the packaging materials, such as the corrugated fibreboard
container and cushioning material for possible re-use. If the product is damaged, return it in
its original package and contact Edwards or their distributor.
3.2 Precautions before installation
3.3 EtherCAT Interface panel
Figure 2 shows the connectors and indicators present on the EtherCAT Interface.
Figure 2 - User interface of EtherCAT Interface
CAUTION
Read this manual and the STP control unit manual before you attempt to install, operate or
maintain.
1. RUN indicator (green)
2. Mini USB sccket
3. ERROR indicator (red)
4. PWR(Power) indicator (green)
5. In link activity indicator (green)
6. Out link activity indicator (green)
7. x10 DEVICE ID Rotary Switch (most
significant switch)
8. x1 DEVICE ID Rotary Switch (least
significat switch)
9. IN port
10. OUT port
1
2
3
4
5
6

7
8

9

10

4

STP EtherCAT®Interface
MT-49E-A01-E
Page 8
INSTALLATION
3
3.3.1 EtherCAT IN and OUT connector
There are two connectors named “IN”and “OUT”to connect the EtherCAT Interface to your
EtherCAT network.
Ensure that the IN connector connects to the previous SubordinateDevice in the chain (closer to the
MainDevice) and that the OUT connector connects to the next SubordinateDevice in the chain
(further from the MainDevice). If the EtherCAT Interface is at the end of the daisy chained network,
the OUT connector can be left empty.
For the best EMC performance, screened and twisted patch cables which complied with 100 BASE-
TX are recommended.
Pin
Function
1
Transmit data +
2
Transmit data -
3
Receive data +
4
Not connected
5
Not connected
6
Receive data -
7
Not connected
8
Not connected
Table 1 - EtherCAT socket pin-out
3.3.2 Mini-USB connector
The Mini-USB socket will normally be used by Edwards service personnel for code upgrades. It can
also be used to power the EtherCAT Interface without the need to connect it to a pump. To utilise this
socket, connect a standard Mini-USB lead (type A to Mini-USB type B) between a PC and the
EtherCAT Interface.

STP EtherCAT®Interface
MT-49E-A01-E
Page 9
3
INSTALLATION
CAUTION
Locate and secure the cables.
It may be difficult to measure the reproducibility of the communication failure without securing the
cables.
CAUTION
Avoid installing a power line and a communication line in the same metallic duct.
When unavoidable, separate a line with a metal separator certainly, and connect the duct containing
a metal separator certainly to GND, or installing a communication line put into conductive pipes,
such as metal.
Figure 3 - Example of cable installation in metallic duct
CAUTION
Connect each cable securely with caution, avoiding any obstacles. DO NOT place heavy objects on
the cables or bend them excessively. Support each cable so as not to apply direct force to the
connectors or terminals. If any problem occurs in cables, connectors or terminals, the STP pump
may not function normally. DO NOT apply voltage to each connector pin and DO NOT cause any
short-circuiting between pins. Install cables so that personnel are not exposed to risk of tripping or
falling.
CAUTION
DO NOT bundle a communication line with a protective earth conductor or a power line.
Moreover, keep away a communication line from the apparatus used as a noise source as much as
possible.

STP EtherCAT®Interface
MT-49E-A01-E
Page 10
INSTALLATION
3
This page is intentionally blank.

STP EtherCAT®Interface
MT-49E-A01-E
Page 11
4
OPERATION
4 OPERATION
WARNING
The EtherCAT Interface provides remote control of an Edward’s pump. You should
refer to the safety information in the pump and the control unit instruction manual.
This interface should not be relied upon for safety related functions.
4.1 Setting communication parameters
As defined in Section 1.2, the EtherCAT Interface acts as a gateway between the EtherCAT protocol
and RS232/RS485 based ASCII serial protocol used by the STP pump.
Before connecting to your EtherCAT network, it is necessary to set communication parameters as
shown in Table 2.
Communication parameter
Setting values
Remote mode
COM1
Baud rate
9,600 bps
Bit length
8 bits
Stop bit
1 bit
Parity
None
Drive type
RS485 single
Table 2 - Setting values for STP pump
Note : It is possible to check or change parameter values by operating switches on front panel of
the STP control unit or using STP-Link (optional accessory). Refer to each instruction manual
for details.
Note : If the pump connecting to the control unit is replaced to another one, setting values may be
altered. Setting values should be checked after tuning with replaced pump. Because setting
values are stored in the memory of the pump connected.

STP EtherCAT®Interface
MT-49E-A01-E
Page 12
OPERATION
4
4.2 LED’s
The indicators on the EtherCAT Interface are in accordance with the EtherCAT standard. Table 3
details the states and meanings of the LED’s on the EtherCAT Interface.
LED/color
Mode
Meaning
PWR(power)
/ green
Off
No powered
On
Powered to the unit
Link Activity
(IN and OUT
ports)
/ green
Off
No link to the next device detected.
On
Link to next device detected but no activity present.
Flickering
Link to next device detected and activity present.
Single flash
EtherCAT Interface PHY auto-negotiation failure.
Double flash
Neighbouring device PHY auto-negotiation failure.
Triple flash
Unknown PHY auto-negotiation failure.
Inverted
double flash
Port closed and needs manual intervention.
RUN
/ green
Off
EtherCAT Interface is in state INIT.
Blinking
EtherCAT Interface is in state PRE-OPERATIONAL.
Single flash
EtherCAT Interface is in state SAFE-OPERATIONAL.
On
EtherCAT Interface is in state OPERATIONAL.
Flickering
EtherCAT Interface is in state BOOTSTRAP.
ERROR
/ red
Off
No error, EtherCAT Interface is operating correctly.
On
EtherCAT Interface application failure.
Blinking
Invalid configuration detected.
Flickering
Booting error detected.
Single flash
EtherCAT Interface has changed state due to a local error.
Double flash
EtherCAT Interface watchdog error detected.
Table 3 - LED functions
Note : See “ETG.1300 EtherCAT Indicator and Labeling Specification”published by the EtherCAT
Technology Group for details.
4.3 DEVICE ID Rotary Switches
The DEVICE ID Rotary Switches can be used to set the Explicit Device Identification value, uniquely
identifying the EtherCAT Interface on the EtherCAT network.
The required value should be set using the two rotary switches, which have each 16 positions from
0hex to Fhex. 00hex(0) to FFhex(255) is settable value by combinations of two switches.
A small screwdriver or potentiometer trim tool should be used to set the required address.

STP EtherCAT®Interface
MT-49E-A01-E
Page 13
4
OPERATION
4.4 Taking and releasing control
When the EtherCAT Interface is used as the remote operation tool of the STP pump, the remote
switch in the front panel of the STP control unit has to be correctly set.
If its switch is set to ‘REMOTE ON' position, the "Remote LED" lights on with green, then the
EtherCAT interface takes a remote control of the STP pump.
Figure 4 - Front panel of SCU-800/801 and SCU-1600/1601
The EtherCAT Interface will release control when following cases occur.
•The remote switch is set REMOTE OFF.
•“Remote mode”of communication parameters is not correctly specified. (see Table 2)
The control status is indicated by the “Remote / Local (0x1A05)”. (see Table 4)
Remote LED
Remote switch

STP EtherCAT®Interface
MT-49E-A01-E
Page 14
OPERATION
4
4.5 Using Turbo Low Speed (available for SCU-1600/1601 only)
The STP pump is normally driven in speed set “Turbo Normal Speed Setpoint (0x8003)”.
Turbo Low Speed is a function alternated between “Normal Speed”and “Low Speed”by “Turbo Low
Speed (0x7003)”. “Low Speed”is pre-set in “Turbo Low Speed Setpoint (0x8002)”as another speed.
(see Table 4.)
This function is operated with “Second Speed Function”of the STP control unit. It is available for
SCU-1600/1601 only. SCU-800/801 is not supported.
“Second Speed Function”is set to “DISABLE”as factory setting. It is necessary to change a setting
to “ENABLE”when using Turbo Low Speed.
Note : It is possible to check or change Second speed function by operating switches on front panel
of the STP control unit or using STP-Link (optional accessory). Refer to each instruction
manual for details.
Note : If the pump connecting to the control unit is replaced to another one, setting values of
"Second Speed" function may be altered. The setting values of "Second Speed" function
should be checked after tuning with replaced pump. Because the setting values are stored in
the memory of the pump connected.

STP EtherCAT®Interface
MT-49E-A01-E
Page 15
4
OPERATION
4.6 Rotation INHIBIT (available for SCU-1600/1601 only)
SCU-1600/1601 has the Rotation “INHIBIT function”. When Rotation “INHIBIT function”is set to
“ENABLE”and the pins between “INHIBIT IN”and “COM”in “REMOTE X7”connector are opened,
the STP pump does not rotate despite the presence of a start signal.
Rotation “INHIBIT Function”is set to “DISABLE”as factory setting. It is necessary to change a setting
to “ENABLE”when using rotation “INHIBIT function”.
Note : See “Remote operation”in SCU-1600/1601 Instruction manual for usage of “REMOTE X7”
connector.
Note : SCU-800/801 control unit with EtherCAT Interface does not have “REMOTE X7”connector in
the rear panel. “INHIBIT Function”of rotation have to be always set to “DISABLE”.
Note : It is possible to check or change parameter values by operating switches on front panel of
the STP control unit or using STP-Link (optional accessory). Refer to each instruction manual
for details.
Note : If the pump connecting to the STP control unit is replaced to another one, setting values may
be altered. Setting values should be checked after tuning with replaced pump. Because
setting values are stored in the memory of the pump connected.

STP EtherCAT®Interface
MT-49E-A01-E
Page 16
OPERATION
4
4.7 Protocol
The EtherCAT Interface implements the following Device Profiles published by the EtherCAT
Technology Group:
ETG.5003.1: Semiconductor Device profile - Part 1: Common Device Profile
The Functional Generation is defined in object 0xF9F1
ETG.5003.2070: Semiconductor Device profile - Part 2070: Turbo Pump Device Profile
The Functional Generation is defined in object 0xF9F2
Table 4 shows the object definitions for the objects of the Turbo Pump Device Profile. If required an
EtherCAT SubordinateDevice Information file for this device may be found at
http://upgrades.edwardsvacuum.com . If there is difficulty accessing this file, contact Edwards for
assistance.
4.8 Alternate PDO Mapping
There are Alternate TxPDO and RxPDO Mappings that can be used instead of the defaults (refer to
Table 4). Only the Alternate Mappings are editable allowing re-order, insert and delete of any data
item that has the RX or TX markers set. The Alternate Mappings are only editable in PREOP.
4.9 Firmware Update Over EtherCAT
Refer to the EtherCAT MainDevice documentation for specific details. For firmware update to an
EtherCAT Turbo Pump a suitable .efw from Edwards will be required such as: *.efw (* = software
name).
The Edwards version of these files contains a header that the SubordinateDevice will check for
suitability. If the SubordinateDevice finds the file unsuitable it will return an error code to the
MainDevice. The header has entries to allow checking of software version, hardware version and
bootloader version. The header has its own CRC which is also checked.