Edwards STP Series User manual

MT-00E-001-B
D
Applicable Models:
STP-603/1003 series
STP-H301/H451 series
STP-H803/H1303 series
STP-A803/A1303 series
STP-A1603 series
STP-A2203 series
STP-A2503/A3003 series
STP-A2803/A3503 series
STP-F2203 series
STP-XH2603P/XH3203P series
STP-XA2703/XA3203 series
STP-XA4503 series
STP-XW3503 series
STP Series Turbomolecular Pumps
Generic Instruction Manual
Instruction Manual (A)
STP pump consists of the three-volumed Instruction Manuals.
Instruction Manual (A):
(This Instruction Manual)
STP pump generic Instruction Manual
Instruction Manual (B): STP pump specific information
Instruction Manual (C): STP control unit Instruction Manual
Copyright 2010 Edwards Japan Limited. All rights reserved. Printed in Japan.

The description of this product consists of the three-volumed Instruction Manuals. Read through each
Instruction Manual before operation.
The separate volume contents of each description are as follows:
Instruction Manual (A)
STP pump generic Instruction Manual:
•Introduction
•Installation of the STP pump
•Installation of the STP control unit
•Operation
•Safety functions
•Maintenance and inspection
•Storage and disposal
•Service, Spares and accessories
Instruction Manual (B)
STP pump specific information:
•Technical data
•How to Secure the STP pump
•Temperature Management System （TMS）
Instruction Manual (C)
STP control unit Instruction Manual:
•Introduction
•Technical data
•Installation
•Operation
•Serial communication protocol
•STP-Link (except for SCU-750)
•Maintenance
•Storage, transportation and disposal
•Service, spares, and accessories
Keep the manuals in an easily accessible location.

STP Series Turbomolecular Pump
March 10 i Issue 1-b
PAGE
i
CONTENTS
Section Title Page
1 INTRODUCTION 1
1.1 Scope and definitions 1
1.2 Applied standards 2
1.3 Limited warranty 2
1.3.1 Warranty period 2
1.3.2 Item warranted 2
1.3.3 Disclaimer 3
1.3.4 Spare parts 3
1.4 Precautions for safe operation of the STP pump 4
1.4.1 Usable gases 4
1.5 Maintenance and inspection precautions 5
1.6 Labels 5
1.7 Operation principle of the STP pump 8
1.8 Temperature management system 9
1.9 Name of the STP pump 10
2 INSTALLATION OF THE STP PUMP 13
2.1 Precautions before installation 13
2.1.1 Operating environment 13
2.1.2 Installation area 14
2.1.3 Bench 15
2.2 Unpacking 16
2.2.1 Unpacking the STP pump 16
2.3 How to install the STP pump 18
2.3.1 Cleaning the seal 20
2.3.2 STP pump installation positions 21
2.3.3 Secure the STP pump 22
2.3.4 Precautions of vacuum piping 22
2.3.5 Vacuum piping method 23
2.3.6 Connecting the purge port 24
2.3.7 Connecting the water cooling pipe 24
2.3.8 Attaching a baking heater 25
2.3.9 Installation of the air cooling unit 25
2.3.10 Installation of the TMS unit 26
3 INSTALLATION OF THE STP CONTROL UNIT 27
3.1 STP control unit 27
3.1.1 SCU-800 27
3.1.2 SCU-750 28
3.1.3 SCU-1400 28
3.1.4 SCU-1500 29
3.1.5 SCU-1600 29
3.2 Cable connection 30
3.2.1 STP connection cable 30
3.2.2 Power cable 31
3.3 How to connect the cables 32

STP Series Turbomolecular Pump
March 10 ii Issue 1-b
PAGE
ii
CONTENTS
Section Title Page
4 OPERATION 35
4.1 Before starting the STP pump 35
4.1.1 Tuning 35
4.1.2 Operation of vacuum system 36
4.2 Pump operation 36
4.2.1 LED indication during operation 36
4.2.2 Starting the STP pump after a safety function operates 37
4.3 Gas pumping, cooling and baking the STP pump 37
4.3.1 Gas pumping 37
4.3.2 How to introduce a purge gas 38
4.4 Cooling the STP pump 38
4.4.1 Water-cooling method 38
4.4.2 Air-cooling method 39
4.5 Baking the STP pump 39
4.6 How to use the TMS unit 40
4.6.1 Parameter set mode 40
4.6.2 Starting/stopping the TMS unit 40
4.6.3 Temperature control 40
5 SAFETY FUNCTIONS 41
5.1 Safety functions 41
5.1.1 Power failure 41
5.1.2 Operation after a power recovery 41
5.1.3 Abnormal state of magnetic bearing 42
5.1.4 Excessive vibration 42
5.1.5 Motor driver overload 42
5.1.6 Overheating inside the STP pump 42
5.1.7 Overheating inside the STP control unit 43
5.1.8 Overspeed 43
5.1.9 Abnormality/Error in the TMS unit (for use with the TMS unit) 43
5.1.10 Failure of the air-cooling fan (for SCU-800 only) 43
6 MAINTENANCE AND INSPECTION 45
6.1 Maintenance and inspection 45
6.2 Cleaning 46
6.3 Inspecting the deposit 46
6.4 Overhaul 47
6.5 Transporting for repair or overhaul 48
7 STORAGE AND DISPOSAL 49
7.1 Storage of the STP pump 49
7.2 Disposal 50

STP Series Turbomolecular Pump
March 10 iii Issue 1-b
PAGE
iii
CONTENTS
Section Title Page
8 SERVICE, SPARES AND ACCESSORIES 51
8.1 Introduction 51
8.2 Service 51
8.3 Spares 51
8.4 Accessories 52

STP Series Turbomolecular Pump
March 10 iv Issue 1-b
PAGE
iv ILLUSTRATIONS
Figure Title Page
1 STP pump installation warning label 5
2 Hot surface warning label 5
3 Heavy product caution label 6
4 Connector caution label 6
5 Caution label 6
6 TMS heater surface caution label 7
7 Rotation instruction label 7
8 Cross sectional view of the STP pump 8
9 Configuration of the STP pump (Typical pump model) 10
10 Example of lifting the STP pump 16
11 Example of lifting the STP pump (horizontal positioning) 17
12 Installation of the STP pump to the vacuum equipment 19
13 STP pump installation positions 21
14 Positions of the outlet port on the horizontally
or slanted installed STP pump 21
15 Positions of the cooling water port and baking heater 24
16 SCU-800 27
17 SCU-750 28
18 SCU-1400 28
19 SCU-1500 29
20 SCU-1600 29
21 SCU-750/SCU-800 STP connection cable 30
22 SCU-1400/SCU-1500/SCU-1600 STP connection cable 30
23 SCU-750 power cable 31
24 SCU-800 power cable 31
25 SCU-1400/SCU-1500/SCU-1600 power cable 31

STP Series Turbomolecular Pump
March 10 1 Issue 1-b
INTRODUCTION
1
1 INTRODUCTION
1.1 Scope and definitions
This manual provides installation, operation and maintenance instructions for the Edwards
Turbomolecular Pump (abbreviated to "STP pump" throughout this manual). In this manual, the
control unit for the turbomolecular pump is referred to as the "STP control unit". You must use the
STP pump as specified in this manual.
The procedures in this manual must be followed before you install, operate and maintain the STP
pump. Important safety information is highlighted as WARNING and CAUTION instructions; these
instructions are mandatory. The use of WARNINGS and CAUTIONS is defined below:
WARNING
Warnings are given where failure to observe the instruction could result in serious injury
or death to people.
CAUTION
Cautions are given where failure to observe the instruction could result minor personal injury in
damage to the equipment, associated equipment and/or process.
Note: Items you must follow during operation and maintenance.
Throughout this manual, page, figure and table numbers are sequential.
The units used throughout this manual conform to the SI international system of units of
measurement; US equivalent units of measurement are also given.
The following IEC warning labels/symbols appear on the STP Pump Instruction Manual:
Warning - refer to
accompanying documentation.
Warning - risk of electric shock.
Warning - heavy object.
Note: An alarm function is incorporated into this STP series. Alarm and cautionary messages are
displayed on the LCD of the STP control unit. Note that the words "WARNING" and
"CAUTION" displayed on the LCD indicate the need for overhaul of the pump or precautions
during the operation. They do not have the same meaning as the much more serious
symbols for "WARNING" and "CAUTION" used in the instruction manual.

STP Series Turbomolecular Pump
March 10 2 Issue 1-b
INTRODUCTION
1
1.2 Applied standards
The STP pump conforms to the following directives and standards:
1. Applied Directives
•EC Machinery Directive
•EC Electromagnetic Compatibility Directive
•EC Low Voltage Directive
2. Applied Standards
•EN1012-2
•EN61010-1
•EN61326 (class A)
•EN61000-6-2
3. Applied Standards (Only some model. Contact Edwards about recognized model.)
•UL61010-1, 2nd Edition (Electrical Equipment for Laboratory Use; Part 1: General
Requirements)
1.3 Limited warranty
This WARRANTY applies to the customer to whom Edwards has delivered this product.
1.3.1 Warranty period
Edwards warrants this product against defects for a period of two (2) years from the date of delivery
or during the period specified in the agreement made by and between the customer and Edwards.
1.3.2 Item warranted
1. This warranty applies only to the product delivered from Edwards to the customer.
2. If any defect is found during this period, Edwards will, at its option, repair or recondition the
product free of charge. The costs for repair or replacement of the product after the warranty
period has passed will be at your own charge.

STP Series Turbomolecular Pump
March 10 3 Issue 1-b
INTRODUCTION
1
1.3.3 Disclaimer
Edwards makes no warranty with respect to any damage occurred due to any of the following during
the warranty period:
1. Handling, operation or maintenance other than that specified herein.
2. Failure to follow any of the warnings or cautions enumerated in this manual.
3. Installation, operation or maintenance using parts which are not specified by Edwards.
4. Maintenance personnel other than those authorized by Edwards or Service office have
disassembled, reconditioned, or tampered the product.
5. Defect resulting from the not-specified use of the product.
6. When the product is used under special conditions without obtaining the written consent of
Edwards (particular gases, strong magnetic field and the radiation are added to the product).
7. Defect resulting from deposit.
8. Water cooling system defect resulting from water quality used.
9. Defect resulting from the installation of the product (exclude the installation by authorized
personnel).
10. Deterioration in the external because of use (discoloration, scratches and so forth).
11. Product damage occurred during transport or other factors not attributable to Edwards.
12. Product breakage or damage due to natural disasters, fire or other external factors.
13. Deterioration in the basic performance due to the use of the product beyond limits of the use.
14. Any direct, incidental or consequential damage resulting from the use of the product.
15. When continuously operated without overhaul after the WARNING indication ("WARNING"
message) on the LCD.
16. Overhaul and replacement of maintenance parts.
1.3.4 Spare parts
•Touch down bearing.
(Touch down bearing should be replaced at Edwards, contact Edwards).
•Heater

STP Series Turbomolecular Pump
March 10 4 Issue 1-b
INTRODUCTION
1
1.4 Precautions for safe operation of the STP pump
1.4.1 Usable gases
1. Chlorine or fluorine system gases can be used in corrosion resistant pumps. When you use the
following gases, contact Edwards.
•Gases including alkaline metals except Li gas.
•Gases including Ga, Hg, In, or Sn.
•HBr gas.
2. Non-corrosion resistant pump cannot use the above gases including chlorine and fluorine system
gases.
WARNING
To prevent an accident, confirm the characteristics of gases to be used, referring to the
Material Safety Data Sheet (MSDS) you obtain from the gas supplier, and, keep MSDS
and a safety advice of gas supplier.
WARNING
Warn of the danger of the gas with the warning label when the use gas is hazardous
WARNINGchemical material.
WARNING
Secure safety by wearing personal protective equipment when using the gas which
might influence damage health. In addition, take appropriate measure for depending
upon the properties of the gas to be used.
CAUTION
NEVER use any gas that is not specified as usable in this Manual. The use of such gas may
CAUTION corrode the STP pump and damage it.
CAUTION
Introduce a dry N2gas (purge gas) to protect the inside of the STP pump when using reactive or
corrosive gas. The use of reactive or corrosive gas may result in product damage.
CAUTION
Cool the STP pump to prevent the STP pump from overheating when pumping gases.

STP Series Turbomolecular Pump
March 10 5 Issue 1-b
INTRODUCTION
1
1.5 Maintenance and inspection precautions
Perform any maintenance or inspection of the STP pump, following Section 6, "MAINTENANCE AND
INSPECTION".
1.6 Labels
The following labels are affixed to the STP pump. Read the contents of the labels before operation.
1. STP pump installation warning label
This label describes installation of the STP pump. Install the STP pump according to the
precautions. Install the STP pump according to the precautions of Section 2, "INSTALLATION
OF THE STP PUMP".
Figure 1 - STP pump installation warning label
2. Hot surface warning label
This label instructs operators so as not to touch the hot surface of the STP pump and the TMS
unit.
The TMS unit specification may lead to a considerable rise in temperatures outside the STP
pump. (only with TMS unit)
Figure 2 - Hot surface warning label

STP Series Turbomolecular Pump
March 10 6 Issue 1-b
INTRODUCTION
1
3. Heavy product caution label
This label is affixed to the product with a weight of 18 kg or more. Follow the precautions of
Section 2.2, "Unpacking" so as not to cause any accident during handling.
Figure 3 - Heavy product caution label
4. Connector caution label
This label describes lock of the connector. This label instructs operators to prevent the
connectors from being disconnected while the STP pump is in operation.
Figure 4 - Connector caution label
5. STP pump/control unit caution label
This label describes precautions for operating the STP pump. Follow these precautions.
Figure 5 - Caution label

STP Series Turbomolecular Pump
March 10 7 Issue 1-b
INTRODUCTION
1
6. TMS heater caution label
This label instructs operators so as not to remove the TMS heater from the STP pump. (only
with TMS unit)
Figure 6 - TMS heater caution label
7. Rotational direction instruction label
This label describes the rotational direction of the STP pump. The STP pump rotates in this
direction.
Figure 7 - Rotation instruction label

STP Series Turbomolecular Pump
March 10 8 Issue 1-b
INTRODUCTION
1
1.7 Operation principle of the STP pump
The STP series pump is a series of a magnetically-levitated turbomolecular pumps, each with the
following features:
•Oil free
•Low vibration
•High reliability
1. Rotor blade 5. Axial sensor
2. Stator blade 6. Axial electromagnet
3. Radial sensor 7. Touch down bearing
4. Radial electromagnet
Figure 8 - Cross sectional view of the STP pump

STP Series Turbomolecular Pump
March 10 9 Issue 1-b
INTRODUCTION
1
The STP pump (Figure 8) is configured so that rotor blade (1) and stator blade (2) are aligned
alternately in the axial direction. Gas molecules are pumped from the inlet port to the outlet port by
the high speed rotation of the rotor.
The STP pump is configured so that rotor blade (1) and stator blade (2) are aligned alternately in the
axial direction
The rotor blade (1) is supported by the magnetic bearing without mechanical contact. Therefore, the
STP pump requires no lubrication oil unlike conventional turbomolecular pumps using ball bearings.
The magnetic bearing consists of 5 pairs of active magnetic bearings. The rotor is supported in the
radial direction by 4 pairs of radial direction active magnetic bearings that consist of radial sensor (3)
and radial electromagnet (4). A pair of axial direction active magnetic bearings consists of axial
sensor (5) and axial electromagnet (6) to support the rotor in the axial direction. Because the rotor is
supported without mechanical contact, it can rotate at low vibration.
There is less heat generated from magnetic bearings because there is no friction. Therefore, the STP
pump requires no cooling. However, the STP pump does require water-cooling or air-cooling during
baking and gas pumping. Taking into consideration an unexpected failure of magnetic bearings,
touch down bearings (7) coated with solid lubrication have been installed. They do not contact with
the rotor during the rated operation.
A radial sensor, an axial sensor, a rotation sensor and a temperature sensor always monitor the
magnetic bearing as well as the rotor. If an abnormality/error occurs, the rotor will stop.
1.8 Temperature management system
The Temperature Management System (TMS) maintains the temperature of the turbomolecular
pump by monitoring the temperature using a thermistor in the base of the turbomolecular pump, and
performing the TMS valve and base heater ON/OFF control.

STP Series Turbomolecular Pump
March 10 10 Issue 1-b
INTRODUCTION
1
1.9 Name of the STP pump
1. Inlet port flange 4. Outlet port flange
2. TMS sensor connector 5. STP connector
3. Cooling water port 6. Purge port
Figure 9 - Configuration of the STP pump (Typical pump model)

STP Series Turbomolecular Pump
March 10 11 Issue 1-b
INTRODUCTION
1
Item Description Function
1 Inlet port flange Connected to the vacuum equipment (at the high vacuum
side).
2 TMS sensor connector*1*2 A temperature sensor is attached for use with the TMS unit
only.
3 Cooling water port*3
(water cooling unit)
Connected to the STP pump cooling water pipe. This port is
used when water cooling the STP pump or using the TMS
unit.
4 Outlet port flange Connected to the inlet port side of the backing-pump.
5 STP connector Connected to the STP connection cable.
6 Purge port*4 Introduces a purge gas.
In order to protect the inside of the STP pump when pumping
reactive or corrosive gases.
The STP pump is delivered with a blank flange attached to this
port.
The STP pump in Figure 9 is a typical pump model. Refer to the STP Pump Instruction Manual (B).
*1 Depending upon the pump model, the TMS unit (optional accessory) is not available. Refer to the STP Pump Instruction
Manual (B) for more detailed information.
*2 Depending upon the pump model, the TMS sensor is built in the STP pump. Refer to the STP Pump Instruction Manual (B)
for more detailed information.
*3 Depending upon the pump model, the STP pump is not equipped with water cooling unit. Refer to the STP Pump
Instruction Manual (B) for more detailed information.
*4 Depending upon the pump model, the STP pump is not equipped with a purge port. Refer to the STP Pump Instruction
Manual (B) for more detailed information.

STP Series Turbomolecular Pump
March 10 12 Issue 1-b
INTRODUCTION
1
This page intentionally blank

STP Series Turbomolecular Pump
March 10 13 Issue 1-b
INSTALLATION
2
2 INSTALLATION OF THE STP PUMP
2.1 Precautions before installation
2.1.1 Operating environment
WARNING
To prevent an accident, confirm the characteristics of gases to be used, referring to
the Material Safety Data Sheet (MSDS) you obtain from the gas supplier, and, keep
MSDS and a safety advice of gas supplier.
WARNING
Take measures according to MSDS to prevent an accident when using toxic,
reactive or combustible gases. Dilute the gas to be used with the inert gas controlled
if necessary. And, take measures according to MSDS to prevent an accident caused
by exhaust gas.
CAUTION
If the STP pump is to be used in an area with radiation, contact Edwards.
CAUTION
Chlorine or fluorine system gases can be used in corrosion resistant pumps. When you use the
following gases, contact Edwards:
• Gases including alkaline metals except Li gas.
• Gases including Ga, Hg, In, or Sn.
• HBr gas.
Non-corrosion resistant pump cannot use the above gases including chlorine and fluorine system
gases.

STP Series Turbomolecular Pump
March 10 14 Issue 1-b
INSTALLATION
2
The STP pump should be installed in an area which meets the following requirements:
Ambient temperature 0 to 40 °C (32 to 104 °F)
Ambient relative humidity 30 to 95% (no dew condensing)
Environment •An area free of externally applied mechanical shock.
•A place free of a heat source (Keep clear of the heat
source or attach a thermal shield plate).
•A place free of a strong magnetic field (Range: up to 15
mT (150 G) in the axial direction, and up to 3 mT (30 G)
in the radial direction with respect to the rotational axis
of the STP pump).
•A place free of a strong electric field.
•A place free of exposure to radiation.
•No discharge of high voltage (more than 500 V) (If more
than 500V is discharged, contact Edwards).
STP pump installation
equipment conditions
Install the STP pump securely so that foreign materials
cannot fall into the STP pump (Ex.: Si wafers or samples
are positioned above the STP pump) (To prevent foreign
materials from falling into the STP pump, design a shield
plate with large conductance).
2.1.2 Installation area
Leave enough space for the following in addition to that for the STP pump:
• Space for maintenance and inspection.
• Space for connecting cables.
CAUTION
The minimum bending radius of the STP connection cable is 100 mm (see the STP Pump
Instruction Manual (B), "External Appearance of the STP pump" [bending dimensions of the
connection cable]).
DO NOT bend the cables excessively and beware of any obstacles when installing the STP pump.
In addition, leave enough space to install other cables without bending them excessively.
Note: The L-type STP connection cable is also offered. Contact Edwards if necessary.