Edwards EXT200/200H LCMS User manual

B756-01-880
Issue J Original
Instruction Manual
EXT Split Flow Compound Turbomolecular Pumps
Description Item
Number Description Item Number
24 Volt EXT Compound Turbomolecular Pumps: 80 Volt EXT Compound Turbomolecular Pumps:
EXT200/200H B756-01-991 EXT200/200H B756-01-000
EXT200/200Hi B756-02-991 EXT200/200Hi B756-02-000
EXT70/200H B756-03-991 EXT70/200H B756-03-000
EXT200/200H B756-24-991 EXT200/200H ICPMS B756-30-000
EXT200/200H GCMS (Reversed Body) B756-41-991 80 Volt EXT system (comprising Compound
Turbomolecular Pump and EXDC160)
EXT200/200H LCMS (Reversed Body) B756-43-991 EXT200/200H
EXT200/200Hi B756-21-000 B756-22-000
24 Volt EXT system (comprising Compound
Turbomolecular Pump and EXDC160): EXT70/200H B756-23-000
EXT200/200H B756-21-991
EXT200/200Hi B756-22-991
EXT70/200H B756-23-991
EXT200/200H ICPMS B756-30-991
EXT200/200H GCMS B756-40-991
EXT200/200H GCMS (Reversed Body) B756-42-991
EXT200/200H LCMS (Reversed Body) B756-44-991

This product has been manufactured under a quality system registered to ISO9001
Declaration of Conformity
We, Edwards,
Manor Royal,
Crawley,
West Sussex, RH10 9LW, UK
declare under our sole responsibility, as manufacturer and person within the EU authorised to assemble the
technical file, that the product(s)
SPLIT-FLOW EXT Compound Turbomolecular Pump (24 Volts):
EXT200/200H B756-01-991 EXT200/200Hi B756-25-991 † *
EXT200/200Hi B756-02-991 EXT200/200H B756-26-991 † *
EXT70/200H B756-03-991 EXT200/200H ICPMS B756-30-991 *
EXT200/200Hi B756-05-991 † EXT200/200H GCMS B756-40-991 *
EXT200/200H B756-21-991 * EXT200/200H GCMS (Reversed body) B756-41-991 ‡
EXT200/200Hi B756-22-991 * EXT200/200H GCMS (Reversed body) B756-42-991 ‡ *
EXT70/200H B756-23-991 * EXT200/200H LCMS (Reversed body) B756-43-991 ‡
EXT200/200H B756-24-991 EXT200/200H LCMS (Reversed body) B756-44-991 ‡*
SPLIT-FLOW EXT Compound Turbomolecular Pump (80 Volts):
EXT200/200H B756-01-000 EXT200/200Hi B756-22-000
EXT200/200Hi B756-02-000 EXT70/200H B756-23-000
EXT70/200H B756-03-000 EXT200/200Hi B756-25-000 †
EXT200/200H B756-05-000 † EXT200/200H B756-28-000 †
EXT200/200H B756-07-000 EXT200/200H ICPMS B756-30-000
EXT200/200H B756-21-000
to which this declaration relates is in conformity with the following standard(s) or other normative document(s)
EN ISO 12100-2: 2003 Safety of Machinery. Basic Concepts, General Principles for
+ A1: 2009 Design. Technical Principals
EN1012-2:1996, A1: 2009 Compressors and Vacuum Pumps. Safety Requirements. Vacuum Pumps
EN61010-1: 2001 Safety Requirements for Electrical Equipment for Measurement,
Control and Laboratory Use. General Requirements
EN 61326-1: 2006 Electrical equipment for measurement, control and laboratory
Use. EMC requirements. General requirements.
C22.2 61010-1-04: 2004#Safety requirements for electrical equipment for measurement,
Control and laboratory use – Part 1: General requirements
UL61010-1: 2002#Safety requirements for electrical equipment for measurement,
Control and laboratory use – Part 1: General requirements
† Cartridge variants are incomplete machines. They are not covered by the Machinery Safety Directive
under this Declaration of Conformity, all other Directives apply.
The pumps comply with EN61010-1: 2001 when installed in accordance with the instruction manual
supplied with the pumps.
* Including EXDC160 Controller.
‡ Including extended vent port adaptor.
#80V Pumps only comply with the Canadian Standard Authority and Underwriters Laboratory when used
with EXC100E, EXC100L controllers and EXDC 80V family of controllers.
24V Pumps only comply with the Canadian Standard Authority and Underwriters Laboratory when used
with EXDC 24V family of controllers.
and fulfils all the relevant provisions of
2006/42/EC Machinery Directive
2006/95/EC Low Voltage Directive
2004/108/EC Electromagnetic Compatibility (EMC) Directive
Note: This declaration covers all product serial numbers from the date this Declaration was signed onwards.
B. D. Brewster, Technical Manager,
Burgess Hill Products Date and Place
P200-00-380 Issue G
02-06-2010

This product has been manufactured under a qualit
y
system registered to ISO9001
Declaration of Incorporation
We, Edwards,
Manor Royal,
Crawley,
West Sussex, RH10 9LW, UK
declare under our sole responsibility, as manufacturer and person within the EU authorised
to assemble the technical file, that the machine(s)
SPLIT-FLOW EXT Compound Turbomolecular Pump (24 Volts):
EXT200/200Hi B756-05-991
EXT200/200Hi B756-25-991
EXT200/200H B756-26-991
SPLIT-FLOW EXT Compound Turbomolecular Pump(80 Volts):
EXT200/200H B756-05-000
EXT200/200Hi B756-25-000
EXT200/200H B756-28-000
to which this declaration relates is intended to be incorporated into other equipment and not to
function independently. The machine(s) must not be put into service until the equipment into
which it is incorporated has been brought into conformity with the provisions of the Machinery
Directive, 2006/42/EC.
The machine(s) is in conformity with the following standard(s) or other normative
document(s)
EN ISO 12100-2: 2003 Safety of Machinery. Basic Concepts, General Principles for
+ A1: 2009 Design. Technical Principals
EN1012-2:1997, A1: 2010 Compressors and Vacuum Pumps. Safety Requirements.
VacuumPumps
The relevant essential requirements of the Machinery Directive 2006/42/EC Annex 1 have been applied
and fulfilled so far as practicable for this partly completed machinery. The relevant technical
documentation has been compiled in accordance with Annex VII Part B. In response to a reasoned request
by the national authorities, Edwards Ltd undertakes to provide relevant information on the partly
completed machinery (via email).
Note: This declaration covers all product serial numbers from the date this Declaration was
signed onwards.
Date and Place
P200-00-520 Issue C
B. D. Brewster, Technical Manager – Burgess Hill Products
22 December 2009

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Contents
B756-01-880 Issue J
Contents
Section Page
1 Introduction .......................................................................................1
1.1 Scope and definitions ................................................................................................... 1
2 Technical data ....................................................................................3
2.1 General .................................................................................................................... 3
2.2 Pumping media ........................................................................................................... 3
2.3 Vent gas specification and vent control data ....................................................................... 4
2.4 Water-cooling ............................................................................................................ 5
2.5 Materials exposed to gases pumped .................................................................................. 9
3 Installation ....................................................................................... 13
3.1 Unpack and inspect .....................................................................................................13
3.2 Typical installation .....................................................................................................13
3.3 Connection to the vacuum system ...................................................................................14
3.3.1 Mechanical fixing .......................................................................................................15
3.3.2 Inlet-screens (supplied fitted) or integral mesh centering ring (supplied separate from the pump) ......16
3.3.3 Inlet connection and orientation .....................................................................................16
3.3.4 Backing connection .....................................................................................................17
3.3.5 Interstage connection (Hi pump variants only) ....................................................................18
3.4 Vent options, vent valve connection and control ..................................................................18
3.5 Electrical installation ..................................................................................................18
3.5.1 EXDC controllers ........................................................................................................19
3.5.2 EXC controllers ..........................................................................................................19
3.6 Cooling ...................................................................................................................19
3.6.1 Introduction .............................................................................................................19
3.6.2 Forced-air cooling ......................................................................................................20
3.6.3 Water-cooling ...........................................................................................................20
4 Operation ........................................................................................ 21
4.1 Start-up ..................................................................................................................21
4.2 Shut-down ................................................................................................................21
4.3 Safety interlocks and control system ................................................................................22
4.3.1 EXDC controllers ........................................................................................................22
4.3.2 EXC controllers ..........................................................................................................22
5 Maintenance ..................................................................................... 23
5.1 Introduction .............................................................................................................23
5.2 Bearing maintenance ...................................................................................................23
5.3 Rotor life .................................................................................................................23
5.4 Cleaning the pump ......................................................................................................24
5.5 Fault finding .............................................................................................................24
6 Storage and disposal ........................................................................... 27
6.1 Storage ...................................................................................................................27
6.2 Disposal ...................................................................................................................27
7 Service, spares and accessories .............................................................. 29
7.1 Introduction .............................................................................................................29
7.2 Service ....................................................................................................................29
dcs/8658/04/10

B756-01-880 Issue J
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Edwards and the Edwards logo are trademarks of Edwards Limited.
Contents
7.3 Spares .....................................................................................................................29
7.3.1 ISX inlet-screens ........................................................................................................29
7.3.2 Inlet-strainer (interstage pumps only) ...............................................................................30
7.3.3 Inlet-flange seals ........................................................................................................30
7.4 Accessories ...............................................................................................................30
7.4.1 Installation ...............................................................................................................30
7.4.2 EXDC drive modules ....................................................................................................30
7.4.3 EXC controllers ..........................................................................................................30
7.4.4 Pump-to-controller cables .............................................................................................31
7.4.5 EXT water cooling block assembly ...................................................................................31
7.4.6 TAV vent-valve and vent-port adaptor ..............................................................................31
7.4.7 ACX air-cooler ...........................................................................................................31
7.4.8 VRX vent-restrictor .....................................................................................................32
Index .............................................................................................. 33
For return of equipment, complete the HS Forms at the end of this manual.
Illustrations
Figure Page
1 Dimensions of the EXT 200/200H split flow pump system (units in mm) ....................................... 9
2 Dimensions of the EXT 200/200H GCMS split flow pump system (units in mm) ...............................10
3 Dimensions of the EXT 200/200H ICPMS split flow pump system (units in mm) ...............................11
4 Dimensions of the EXT 200/200H GCMS/LCMS (reversed body) .................................................12
5 A typical vacuum system using a turbomolecular pump ..........................................................14
6 Correct installation of inlet screen ..................................................................................16
7 Mounting attitude range of an EXT split flow pump ...............................................................17
8 Installation of optional accessories ..................................................................................32
Tables
Table Page
1 General .................................................................................................................... 3
2 Vent gas and vent control data ........................................................................................ 4
3 Water-cooling ............................................................................................................ 5
4 Technical data ........................................................................................................... 6
5 List of items supplied ..................................................................................................15
6 Vent-restrictor orifice diameter (with atmospheric pressure at the inlet of the vent-valve) ..............18
7 Fault finding .............................................................................................................25
8 ISX inlet-screens ........................................................................................................29
9 Inlet-strainer (interstage pumps only) ...............................................................................30
10 Inlet-flange seals ........................................................................................................30
11 EXDC drive modules ....................................................................................................30
12 EXC controllers ..........................................................................................................30
13 Pump-to-controller cable ..............................................................................................31
14 EXT water cooling block assembly ...................................................................................31
15 TAV vent-valve and vent-port adaptor ..............................................................................31
16 ACX air-cooler ...........................................................................................................31
17 VRX vent-restrictor .....................................................................................................32

© Edwards Limited 2010. All rights reserved. Page 1
Edwards and the Edwards logo are trademarks of Edwards Limited.
Introduction
B756-01-880 Issue J
1Introduction
1.1 Scope and definitions
This manual provides installation, operation, maintenance and storage instructions for the Edwards EXT70/200H and
EXT200/200H Split Flow Compound Molecular Pumps, abbreviated to EXT Split Flow Pump in the remainder of this
manual. Covering both the 24 V and 80 V variants. Please read and follow all instructions in this manual.
The EXT Split Flow Pumps are designed for use with an Edwards EXDC or EXC Controller. Read this manual and the
instruction manual supplied with your controller before you attempt to install or operate the equipment. The
controller manual contains details of electrical installation.
Important safety information in this manual is highlighted as WARNING and CAUTION instructions; please obey these
instructions. The use of WARNINGS and CAUTIONS is defined below.
CAUTION
Cautions are given where failure to observe the instruction could result in damage to the equipment, associated
equipment and process.
In accordance with the recommendations of EN61010, the following warning symbols may appear on the pump or its
accessories:
The units used throughout this manual conform to the SI international system of units of measurement. Also
throughout this manual, wherever flow rates are specified, the abbreviation 'sccm' is used to mean standard
cm3min-1: this is a flow of 1cm3min-1 at an ambient temperature of 0 °C and a pressure of 1013 mbar (1.013 x 105Pa).
WARNING
Warnings are given where failure to observe the instruction could result in injury or death to
people.
Warning - refer to accompanying documentation.
Warning - risk of electric shock.
Warning - hot surfaces.

B756-01-880 Issue J
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Edwards and the Edwards logo are trademarks of Edwards Limited.
This page has been intentionally left blank.

© Edwards Limited 2010. All rights reserved. Page 3
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Technical data
B756-01-880 Issue J
2Technicaldata
2.1 General
2.2 Pumping media
Table 1 - General
Performance See Table 4
Dimensions See Figure 1, 2, 3and 4
Maximum inlet-flange temperature 70°C
Maximum magnetic field 3.5 mT Horizontal field
Installation category EN61010 part 1, Category 1
Pollution degree CAN/CSA, UL, EN610101 part 1
Altitude 2000 m
Humidity 10 to 90% non condensing
Electrical supply
BXXX-XX-991 24 V d.c.
BXXX-XX-000 80 V d.c.
Equipment type Fixed equipment, for indoor use only
WARNING
Vent dangerous gases and gas mixtures safely. Do not expose people to these gases.
WARNING
Do not use Split Flow Pumps to pump explosive gas mixtures as the pumps are not suitable for this
purpose.
WARNING
If pyrophoric gases are pumped then the customer must supply adequate dilution with an inert gas.
WARNING
It is the customers responsibility to leak check their system to ensure any process gases cannot
escape to the atmosphere and cause a hazard.
WARNING
Gases pumped from different inlets may combine to cause dangerous mixtures.

B756-01-880 Issue J
Page 4 © Edwards Limited 2010. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
Technical data
CAUTION
Do not use an EXT Split Flow Pump to pump gases containing more than 20% oxygen. If you do, the lubricant will
polymerise and the pump will fail prematurely.
Note: Concentrations of gases may be modified by the compression of the pump.
The pumps are designed to pump the following residual gases normally used in high-vacuum systems:
You can use the pumps to pump oxygen and water vapour, subject to the following conditions:
zOxygen – The oxygen concentration must be less than 20% by volume.
zWater vapour - You must ensure that vapour does not condense inside the pump; refer to Section 3.6.3.
If you wish to pump a gas not in the list above, contact your supplier for advice. If you do not contact your supplier,
you may invalidate the warranty on the pump. The pumps are not suitable for pumping aggressive or corrosive gases.
2.3 Vent gas specification and vent control data
Although the pump may be vented to atmosphere, high relative humidity of the air may greatly increase the
subsequent pump-down time. To reduce pump-down times you should vent the pump with dry, clean gases.
* If you wish to use vent pressures in excess of this value, please consult Edwards
WARNING
If pumping hazardous gases or vapours, the customer must observe the safety recommendations
of the supplier of the gas or vapour.
zAir zNitrogen zHelium
zCarbon monoxide zKrypton zHydrogen
zNeon zArgon zButane
zEthane zPropane
zMethane zCarbon dioxide
Table 2 - Vent gas and vent control data
Vent gas Dry air, nitrogen, argon or other inert gases
Maximum dew point at atmospheric pressure -22 °C
Maximum size of particulate 1 µm
Maximum concentration of oil 0.1 parts per million
Time for rotational speed to reach 50% > 15 sec
Maximum vent gas pressure < 0.5bar gauge (7 psig, 0.5x105 Pa gauge)*

© Edwards Limited 2010. All rights reserved. Page 5
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Technical data
B756-01-880 Issue J
2.4 Water-cooling
The following cooling-water specification corresponds to a typical high-quality drinking water specification. Check
with your water supply authority if you are in doubt about the quality of your supply.
Table 3 - Water-cooling
Quality Mechanically and optically clean with no deposits or
turbidity
pH value 6.0 to 8.0
Maximum calcium carbonate concentration 75 parts per million
Maximum chloride concentration 100 parts per million
Minimum oxygen concentration 4 parts per million
Minimum water-cooling flow rate (at 15 °C) 15 l hr-1
Water temperature See Table 4
Maximum water pressure 5 bar (gauge), 73.5 psig, 6x105Pa
Materials exposed to cooling-water Nickel plated brass

B756-01-880 Issue J
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Edwards and the Edwards logo are trademarks of Edwards Limited.
Technical data
Table 4 - Technical data
Parameter EXT70/200H EXT200/200H
and Hi EXT200/200H GCMS*
EXT 200/
200H
ICPMS Notes
Mass 9 kg 9 kg (7.5 kg†) 9 kg 9 kg mass without controller
Side inlet-flange DN100ISO DN100ISO DN100ISO DN100ISO controller
Main inlet-flange DN63ISO DN100ISO DN100ISO DN100ISO
Outlet-flange DN25NW DN25NW DN25NW DN25NW
Vent-port 1/8 inch BSP 1/8 inch BSP 1/8 inch BSP 1/8 inch BSP
Interstage-port
(optional) DN25NW DN25NW DN25NW DN25NW
Main inlet pumping
speed
N2‡** 110 l s-1 177 l s-1 155 l s-1 107 l s-1 Pb < 5 mbar (500 Pa)
He‡** 145 l s-1 190 l s-1 185 l s-1 113 l s-1 Pb < 1 mbar (100 Pa)
H2‡** 130 l s-1 163 l s-1 175 l s-1 102 l s-1 Pb < 0.5 mbar (50 Pa)
Ar‡** - - 153 l s-1 104 l s-1 Pb < 0.2 mbar (20 Pa)
Side inlet pumping
speed
N2‡** 155 l s-1 155 l s-1 155 l s-1 155 l s-1 Pb < 5 mbar (500 Pa)
He‡** 131 l s-1 131 l s-1 179 l s-1 187 l s-1 Pb < 1 mbar (100 Pa)
H2‡** 79 l s-1 79 l s-1 131 l s-1 143 l s-1 Pb < 0.5 mbar (50 Pa)
Ar‡** - - 127 l s-1 148 l s-
Interstage pumping
speed
N2‡-8.75ls
-1 N/A N/A Pb = 5 mbar (500 Pa)
He‡-10.4ls
-1 N/A N/A Pb = 5 mbar (500 Pa)
Pi= 5 x 10-1 mbar (50 Pa)
Compression ratio from
the backing port to the
main inlet
N2>5 x 107>5 x 107>5 x 107†† >5 x 107††
He 1 x 1061 x 1061 x 1072.5 x 107
H23.5 x 1043.5 x 104-5x10
5
Ar - - >5 x 107‡‡ >5 x 107‡‡
Compression ratio from
the side inlet to the
main inlet
N26 x 1036 x 1031 x 1049 x 103
He 6 x 1026 x 1021.5 x 1022.5 x 102
H22 x 1012 x 1013.3 x 1016 x 101
Ar - - 1.7 x 1047 x 103

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Technical data
B756-01-880 Issue J
Maximum backing
pressure***
N212.6 mbar
(1260 Pa) 12.6 mbar (1260 Pa) 7.3 mbar (730 Pa) -
He 7.7 mbar
(770 Pa) 7.7 mbar (770 Pa) --
H22 mbar
(200 Pa) 2 mbar (200 Pa) --
Ar - - 8 mbar
(800 Pa)
Minimum backing pump
displacement 0.6 m3h-1 0.6 m3h-1 0.6 m3h-1 0.6 m3h-1
Maximum continuous
inlet pressure - water-
cooling at 35 °C†††
No water cooling on
GCMS and ICPMS.
Main inlet 2.5 x
10-3 mbar
(2.5 x
10-1 Pa)
2.5 x
10-3 mbar
(2.5 x
10-1 Pa)
Side inlet 5 x 10-3 mbar
(5 x 10-1 Pa) 5 x 10-3 mbar (5 x 10-1 Pa)
Maximum continuous
inlet pressure - air-
cooling at 35 °C ambient
†††
Air-cooling is beneficial
to the EXDC controller.
Nitrogen unless
otherwise
Main inlet 3 x 10-3 mbar
(3 x 10-1 Pa) 3 x 10-3 mbar (3 x 10-1 Pa) 5 x 10-3 mbar (He:7.5 x10-3
mbar)
1 x 10-2 mbar
(Ar: 5 x 10-3
mbar)
stated.
Side inlet 9 x 10-3 mbar
(9 x 10-1 Pa) 9 x 10-3 mbar (9 x 10-1 Pa) 1.5 x 10-2 mbar
(He: 5 x 10-3
mbar)
1 x 10-2 mbar
(Ar: 5 x 10-3
mbar)
Operating attitude Vertical and
upright
through to
horizontal
±2 °
Vertical and
upright
through to
horizontal
±2 °
Vertical Vertical
Nominal rotational
speed 60000 r min-1 60000 r min-1 60000 r min-1 60000 r min-1
Standby rotational speed 42000 r min-1 42000 r min-1 42000 r min-1 42000 r min-1 EXC controller only
Table 4 - Technical data (continued)
Parameter EXT70/200H EXT200/200H
and Hi EXT200/200H GCMS*
EXT 200/
200H
ICPMS Notes

B756-01-880 Issue J
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Edwards and the Edwards logo are trademarks of Edwards Limited.
Technical data
Starting time to 90%
speed
EXDC160 110 se 110 sec 120 sec 150 sec
EXC100E 190 sec 190 sec
EXC100L 245 sec
EXC120 130 sec 130 sec
EXC300 100 sec 100 sec 120 sec
EXDC80 270 sec 330 sec
Cooling method Forced-air/
water Forced-air/ water
Ambientairtemperature
(forced-air cooling) 0 - 35 °C 0 - 35 °C 0 - 35 °C 0 - 35 °C
Water temperature
(water-cooling) 10 - 20 °C 10 - 20 °C - -
Noise level (at 1 metre) < 50 dB(A) < 50 dB(A) < 50 dB(A) < 50 dB(A)
Recommended
controller EXDC160 EXDC160 EXDC160 EXDC160
EXDC160 maximum VA
input 250 VA 250 VA 250 VA 250 VA
Quiescent power 25 W 25 W 40 W 40 W
Recommended backing
pump‡‡‡ RV3 RV3 RV3 RV3
*The data shown for EXT200/200H GCMS applies to pumps: B75640991, B75641991, B75642991, B75643991
and B75644991. This is because these pumps have the same internal components and the data is taken
without inlet screens fitted.
†Mass applies to products listed under the Declaration of Incorporation.
‡Pb = backing pressure,
Piinlet pressure,
** Pumping speeds are without inlet-screen or inlet-strainer (EXT200/200Hi, GCMS and ICPMS). Inlet-screens
and inlet-strainers reduce speed by approximately 10%.
†† This is a measured value. Theoretical value >109and >1011 respectively for GCMS and ICPMS.
‡‡ Theoretical values 2 x 109and 7 x 1011 respectively.
*** Inlet pressure has risen to 10-3 mbar.
††† Above this pressure, rotational speed drops below nominal.
‡‡‡ A larger backing pump may be required for maximum throughput.
Table 4 - Technical data (continued)
Parameter EXT70/200H EXT200/200H
and Hi EXT200/200H GCMS*
EXT 200/
200H
ICPMS Notes

© Edwards Limited 2010. All rights reserved. Page 9
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Technical data
B756-01-880 Issue J
2.5 Materials exposed to gases pumped
The following materials and component types are exposed to the gases pumped: aluminium alloys, stainless steels,
fluoroelastomer and nitrile O-rings, hydrocarbon lubricant, felt, rare earth magnets, silicon nitride, phenolic resin
and carbon-fibre reinforced epoxy resin.
Figure 1 - Dimensions of the EXT 200/200H split flow pump system (units in mm)
1. TAV5 vent valve
2. 8 slots 8.4 mm wide
3. Side inlet
4. Main inlet
5. EXDC controller
6. Backing port

B756-01-880 Issue J
Page 10 © Edwards Limited 2010. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
Technical data
Figure 2 - Dimensions of the EXT 200/200H GCMS split flow pump system (units in mm)
1. 8 slots 8.4 mm wide
2. EXDC controller
3. Backing port
4. TAV5 vent valve
5. Main inlet
6. Side inlet

© Edwards Limited 2010. All rights reserved. Page 11
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Technical data
B756-01-880 Issue J
Figure 3 - Dimensions of the EXT 200/200H ICPMS split flow pump system (units in mm)
1. 8 slots 8.4 mm wide
2. Controller connection
3. Backing port
4. Vent port
5. Main inlet
6. Side inlet

B756-01-880 Issue J
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This page has been intentionally left blank.
Figure 4 - Dimensions of the EXT 200/200H GCMS/LCMS (reversed body)
1. Extended vent-port adaptor
2. Backing port
3. EXDC controller
4. 8 slots 8.4 mm wide
5. Main inlet
6. Side inlet

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Installation
B756-01-880 Issue J
3 Installation
3.1 Unpack and inspect
Take care when you unpack the pump to avoid excessive shocks which could damage the bearings and reduce the life
of the pump. The pump is supplied with the inlet and outlet sealed to prevent entry of dust and vapour. Do not
remove these seals until you are ready to install the pump on your vacuum system.
Open the top of the packaging by disengaging the cardboard tabs and then opening the lid. Remove the top piece of
locating foam and any ancillaries included within the box. You should now be able to remove the pump from the
packaging by lifting the pump vertically from the packaging. If the pump is damaged, notify your supplier and the
carrier in writing within three days; state the Item Number of the pump together with your order number and your
supplier’s invoice number. Retain all packing materials for inspection. Do not use the pump if it is damaged.
Check that your package contains the items listed in Table 5. If any of these items is missing, notify your supplier in
writing within three days.
If the pump is not to be used immediately, store the pump in suitable conditions as described in Section 6.1.
It is advised to retain all packing materials for use should you return the pump for service.
3.2 Typical installation
CAUTION
Local legislation concerning the impact of the pump on the environment must be followed when installing the
pump.
WARNING
The pump weighs approximately 9 kg (20 lbs). Appropriate care should be taken when lifting and
moving the pump to avoid injury.

B756-01-880 Issue J
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Installation
Figure 5 - A typical vacuum system using a turbomolecular pump
The accessories available for these EXT Split Flow Pumps are detailed in Section 7.4.
3.3 Connection to the vacuum system
WARNING
Once the pump is removed from the bottom packaging, there is a danger of toppling.
WARNING
Install the pump in the vacuum system before you connect the controller to the power supply. This
will ensure that the pump cannot operate and injure people during installation.
1. Vacuum system
2. High vacuum gauge
3. Alternative position
for vent valve
4. TMP
5. Backing valve
6. Vacuum gauge
7. Foreline trap
8. Rotary backing pump
9. Mist filter
10.Cooling fan
11.EXDC controller
12.Vent valve
13.Control system