Edwards Diffstak 63/150 User manual

B344-21-880
Issue N Original
Instruction Manual
Diffstak®Mk2 Diffusion Pumps
Diffstak 63/150, 100/300, 160/700
and 250/2000, M-, P-, C- and F-models

Declaration of Conformity
We, Edwards,
Innovation Drive,
Burgess Hill,
West Sussex,
RH15 9TW, UK
declare under our sole responsibility, as manufacturer and person within the EU authorised to
assemble the technical file, that the product(s)
Diffstak 63 Diffstak 100
B34431976
B34431977
B34431978
B34432976
B34432977
B34432978
B34433976
B34433977
B34433978
B34442220
B34442240
B34455200
B34455220
B34455277
B34456220
B34456240
B34631976
B34631977
B34631978
B34632976
B34632977
B34632978
B34633976
B34633977
B34633978
B34637976
B34637977
B34637978
B34638976
B34638977
B34638978
B34640976
B34640977
B34640978
to which this declaration relates is in conformity with the following standard(s) or other
normative document(s)
EN1012-2:1996+A1:2009 Compressors and Vacuum Pumps. Safety Requirements.
Vacuum Pumps
EN60204-1:2006+A1:2009 Safety of machinery. Electrical equipment of machines.
General Requirements
and fulfils all the relevant provisions of
2014/35/EU Low Voltage Directive
Note: This declaration covers all product serial numbers from the date this Declaration was
signed onwards.
11.05.2016, Burgess Hill
P200-02-400 Issue E
Mr Peter Meares
Senior Technical Support Manager, General Vacuum Date and Place

Declaration of Conformity
We, Edwards,
Innovation Drive,
Burgess Hill,
West Sussex,
RH15 9TW, UK
declare under our sole responsibility, as manufacturer and person within the EU authorised to
assemble the technical file, that the product(s)
Diffstak 160 Diffstak 250
B34831976
B34831977
B34831978
B34832976
B34832977
B34832978
B34833976
B34833977
B34833978
B34837976
B34837977
B34837978
B34838976
B34838977
B34838978
B34840976
B34840977
B34840978
B35031976
B35031977
B35031978
B35032976
B35032977
B35032978
B35033976
B35033977
B35033978
to which this declaration relates is in conformity with the following standard(s) or other
normative document(s)
EN1012-2:1996, A1: 2009 Compressors and Vacuum Pumps. Safety Requirements. Vacuum
Pumps
EN60204-1:2006+A1:2009 Safety of machinery. Electrical equipment of machines. General
Requirements
and fulfils all the relevant provisions of
2006/42/EC Machinery Directive
2014/35/EU Low Voltage Directive
Note: This declaration covers all product serial numbers from the date this Declaration was
signed onwards.
11.05.2016,BurgessHill
Mr Peter Meares
Senior Technical Support Manager, General Vacuum
P200-02-420 Issue D
This product has been manufactured under a quality management system certified to ISO 9001:2008
Date and Place

P200-10-036
IssueA
Materials Declaration
In accordance with the requirements of the Chinese regulatory requirement on the Management Methods for the
Restriction of the Use of Hazardous Substances in Electrical and Electronic Products Order No. 32 (also known as
‘China RoHS2’) and SJ/T 11364 Marking for the Restricted Use of Hazardous Substances in Electronic and Electrical
Products:
Product Labels
Product Product Label Meaning
All pumps in the
list below
2020
This product contains hazardous substances in at least one of the
homogeneous materials used which are above the limit requirement
in GB/T 26572 as detailed in the declaration table below.
These parts can safely be used for the environmental protection use
period as indicated.
Pump Type Pump Size
Diffusion Pumps Diffstak 63, 100, 160, 250
Vapour Boosters 30B5, 18B4
High Throughput Pumps HT10, 16, 20
材料成分声明
Materials Content Declaration
部件名称
Part name
危险物质
Hazardous Substances
铅
Lead
(Pb)
汞
Mercury
(Hg)
镉
Cadmium
(Cd)
六价铬
Hexavalent
Chromium
(Cr VI)
多溴联苯
Polybrominated
biphenyls (PBB)
多溴二苯醚
Polybrominated
diphenyl ethers
(PBDE)
铸铝
Cast Aluminium X O O OOO
铜管管件
Brass pipe Fittings XOOOOO
铜接头
Brass Connectors XOOOOO
O：表示该有害物质在该部件的所有均质材料中的含量低于 GB/T 26572 标准规定的限量要求。
O: Indicates that the hazardous substance contained in all of the homogeneous materials for this part is below
the limit requirement in GB/T 26572.
X：表示该有害物质在该部件的至少一种均质材料中的含量超出 GB/T26572 标准规定的限量要求。
X: Indicates that the hazardous substance contained in at least one of the homogeneous materials used for
this part is above the limit requirement of GB/T26572.
NOTES: These products are EU RoHS compliant, the following Exemptions apply:
6(b) Lead as an alloying element in aluminium containing up to 0.4% by weight.
6(c) Copper alloy containing up to 4% lead by weight
Packaging Information
Pallet Over-shipper Protection Pieces Support Braces
NWNW
Recyclable Natural Wood Recyclable Cardboard Recyclable Polypropylene Recyclable Mild Steel

© Edwards Limited 2007. All rights reserved. Page i
Edwards and the Edwards logo are trademarks of Edwards Limited.
Contents
B344-21-880 Issue N
Contents
Section Page
1 Introduction ....................................................................................... 1
1.1 Scope and definitions ................................................................................................... 1
1.2 Description ................................................................................................................ 2
1.3 Construction .............................................................................................................. 3
1.4 Principle of operation ................................................................................................... 3
2 Technical data .................................................................................... 9
2.1 General .................................................................................................................... 9
2.1.1 M-model and P-model pumps .......................................................................................... 9
2.1.2 C-model and F-model pumps ..........................................................................................10
2.2 Pump fluid data .........................................................................................................10
2.3 Construction materials .................................................................................................11
2.4 Item Numbers ...........................................................................................................11
3 Installation ....................................................................................... 15
3.1 Safety ..................................................................................................................... 15
3.2 Unpack and inspect .....................................................................................................15
3.3 Locate the pump ........................................................................................................16
3.4 Vacuum connections ...................................................................................................16
3.4.1 Diffstak inlet .............................................................................................................16
3.4.2 Backing and roughing connections ...................................................................................21
3.5 Cooling-water connections ............................................................................................22
3.6 Electrical connections ..................................................................................................22
3.6.1 Connect the electrical supply to the pump .........................................................................22
3.6.2 Connect the cooling-fail thermal snap-switch (optional) .........................................................24
3.6.3 Connect the pump-ready thermal snap-switch (optional) ........................................................24
3.6.4 Connect the high-vacuum isolation-valve position indicators
(63/150P and 100/300P only) .........................................................................................25
3.6.5 Connect the high-vacuum isolation-valve position indicators
(160/700P and 250/2000P pumps only) .............................................................................25
3.7 Connect the compressed-air supplies (P-model pumps only) ....................................................26
3.8 Leak-test the system ...................................................................................................26
3.9 Fill the pump with fluid ................................................................................................27
3.9.1 Safety of vapour pump fluids .........................................................................................27
3.9.2 Recommended pump fluids ...........................................................................................28
3.9.3 Filling procedure ........................................................................................................ 29
4 Operation ........................................................................................ 31
4.1 Introduction .............................................................................................................31
4.2 Pump start-up ...........................................................................................................31
4.3 Re-admission of air to your vacuum system ........................................................................34
4.4 Re-evacuation of your vacuum system ..............................................................................34
4.5 Pump shut-down ........................................................................................................34
ITR 20450

B344-21-880 Issue N
Page ii © Edwards Limited 2007. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
Contents
5 Maintenance ..................................................................................... 35
5.1 Safety ..................................................................................................................... 35
5.2 Maintenance plan .......................................................................................................36
5.3 Check the pump fluid-level ...........................................................................................36
5.4 Inspect the pump fluid (and drain if necessary) ...................................................................37
5.5 Inspect and clean the pump ...........................................................................................37
5.5.1 Preparation .............................................................................................................. 37
5.5.2 Remove the high-vacuum isolation-valve (M-model pumps) .....................................................37
5.5.3 Remove the high-vacuum isolation-valve (P-model pumps) .....................................................38
5.5.4 Dismantle the pump ....................................................................................................38
5.5.5 Inspect and clean the interior ........................................................................................40
5.5.6 Reassemble the pump ..................................................................................................40
5.6 Clean the radiation shield .............................................................................................42
5.7 Lubricate/inspect the high-vacuum isolation-valve (M- and P-model pumps) ................................43
5.8 Replace the pump heater(s) ..........................................................................................44
5.8.1 Diffstak 63/150 and 100/300 pumps .................................................................................44
5.8.2 Diffstak 160/700 and 250/2000 pumps ..............................................................................45
5.9 Check the heater securing nuts ......................................................................................46
5.10 Clean the cooling-coil ..................................................................................................46
5.11 Adjust or replace the position indicators ...........................................................................46
5.11.1 Adjust the position indicators ........................................................................................46
5.11.2 Replace the position indicators .......................................................................................46
5.12 Fault finding ............................................................................................................. 48
6 Storage and disposal ........................................................................... 49
6.1 Storage ...................................................................................................................49
6.2 Disposal ................................................................................................................... 49
7 Service, spares and accessories .............................................................. 51
7.1 Introduction .............................................................................................................51
7.2 Service .................................................................................................................... 51
7.3 Spares ..................................................................................................................... 51
7.3.1 Pump fluids .............................................................................................................. 51
7.3.2 Spares common to all Diffstak pumps ...............................................................................52
7.3.3 Spares for Diffstak M- and P-model pumps .........................................................................52
7.4 Accessories ...............................................................................................................53
For return of equipment, complete the HS Forms at the end of this manual.

© Edwards Limited 2007. All rights reserved. Page iii
Edwards and the Edwards logo are trademarks of Edwards Limited.
Contents
B344-21-880 Issue N
Illustrations
Figure Page
1 Sectional view of valved Diffstak 63/150 pump ..................................................................... 4
2 Sectional view of valved Diffstak 100/300 pump ................................................................... 5
3 Sectional view of valved Diffstak 160/700 pump ................................................................... 6
4 Part sectional view of valved Diffstak 250/2000 pump ............................................................ 7
5 Dimensions of M-model Diffstak pumps (mm) ......................................................................12
6 Dimensions of P-model Diffstak pumps (mm) ......................................................................13
7 Dimensions of C-model Diffstak pumps (mm) ......................................................................14
8 Inlet-flange fitting details .............................................................................................17
9 M- and P-model Diffstak inlet connection ..........................................................................18
10 F-model Diffstak inlet connection ....................................................................................18
11 C-model Diffstak inlet connection ...................................................................................18
12 Diffstak 63/150, 100/300 and 160/700 installation detailsn .....................................................19
13 Diffstak 250/2000 installation details ...............................................................................20
14 Heater electrical connections ........................................................................................23
15 Cooling-fail thermal snap-switch electrical connections .........................................................24
16 Position indicator connections (160/700P and 250/2000P only) ................................................ 25
17 Schematic diagram of typical pneumatic circuit (P-model pumps only) .......................................28
18 Typical pumping system: Diffstak 63/150, 100/300 and 160/700 pumps ......................................32
19 Typical pumping system: Diffstak 250/2000 pumps ...............................................................33
20 High-vacuum isolation-valve: Diffstak 63/150, 100/300 and 160/700 pumps .................................39
21 High-vacuum isolation-valve: Diffstak 250/2000 pumps ..........................................................39
22 Pneumatic actuator for the isolation-valve: Diffstak 63/150P and 100/300P pumps ........................41
23 Pneumatic actuator for the isolation-valve: Diffstak 160/700P pumps ........................................41
24 Pneumatic actuator for the isolation-valve: Diffstak 250/2000P pumps .......................................41
25 Heater assembly: Diffstak 63/150 and 100/300 pumps ...........................................................44
26 Heater assembly: Diffstak 160/700 and 250/2000 pumps ........................................................45
27 Adjust or replace the position indicators ...........................................................................47
Tables
Table Page
1 Inlet-flange details (M-, P- and F-model pumps only) ............................................................17
2 Pump fluid thermal breakdown .......................................................................................27
3 Maintenance plan .......................................................................................................36
4 Fault finding .............................................................................................................48
Trademark credits
Fomblin®is a registered trademark of Ausimont SpA.
Viton™ is trademark of DuPont Dow Elastomers L.L.C.
Diffstak®is a registered trademark of Edwards.

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B344-21-880 Issue N
Page iv © Edwards Limited 2007. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.

© Edwards Limited 2007. All rights reserved. Page 1
Edwards and the Edwards logo are trademarks of Edwards Limited.
Introduction
B344-21-880 Issue N
1Introduction
1.1 Scope and definitions
This manual provides installation, operation and maintenance instructions for the Edwards Diffstak Mk2 diffusion
pumps. You must use the Diffstak pump as specified in this manual.
Read this manual before you install and operate the pump. Important safety information is highlighted as WARNING
and CAUTION instructions; you must obey these instructions. The use of WARNINGS and CAUTIONS is defined below.
CAUTION
Cautions are given where failure to observe the instruction could result in damage to the equipment, associated
equipment or process.
In accordance with the recommendations of IEC1010, the following warning symbols may appear on the pump or its
accessories:
The units used throughout this manual conform to the SI international system of units of measurement.
WARNING
Warnings are given where failure to observe the instruction could result in injury or death to
people.
Warning - refer to accompanying documentation.
Warning - risk of electric shock.
Warning - hot surfaces.

B344-21-880 Issue N
Page 2 © Edwards Limited 2007. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
Introduction
1.2 Description
The Mk2 series of Diffstaks are compact high-performance diffusion pumps which provide exceptionally clean
pumping without the use of extra traps or baffles or the need for liquid nitrogen cooling.
The basic Diffstak consists of a diffusion pump, a water-cooled baffle, a high-vacuum isolation-valve and a roughing
connection all integrated into a water-cooled stainless steel casing. The high-vacuum isolation-valve is part of the
inlet-flange and is configured for either manual or pneumatic operation.
Pneumatic high-vacuum isolation-valves have position indicators which indicate whether the valve is open or closed.
You can connect the position indicators to your control or indicator equipment.
Four sizes of pumps are available with either a 63 mm, 100 mm, 160 mm or 250 mm diameter inlet-flange. The
largest pump has a pumping speed of up to 2000 l s-1. All four sizes of pump are available with unvalved collars and
without the backing/roughing connection, for use in applications where high ultimate vacuum is of prime importance,
or for pumping systems where a high-vacuum isolation-valve is not required.
Two unvalved versions are also available, for use in applications where the highest ultimate vacuum is required.
These unvalved versions have 6 or 8 inch diameter flanges for use with copper compression gaskets. This provides
simple, reliable, metal-to-metal sealing and is ideally suited to ultra-clean applications. An ultimate vacuum of less
than 2 x 10-10 mbar (2 x 10-8 Pa) can be achieved with a low temperature trap.
The basic models are as follows:
zM-model pumps have a manually-operated high-vacuum isolation-valve.
zP-model pumps have a pneumatically-actuated high-vacuum isolation-valve.
zC-model pumps have an unvalved collar suitable for use with a bolted rotatable flange.
zF-model pumps are unvalved and have a copper compression gasket (ConFlat) flange.
Note: Cryo-cooled Diffstak pumps are also available in the same four sizes as the valved and unvalved pumps.
These cryo-cooled pumps have a high conductance, liquid nitrogen cooled disc located above the
water-cooled baffle. The pumps are designed for use in applications which require minimum pump down
times when heavy vapour loads are pumped.

© Edwards Limited 2007. All rights reserved. Page 3
Edwards and the Edwards logo are trademarks of Edwards Limited.
Introduction
B344-21-880 Issue N
1.3 Construction
The Diffstak is a three-stage fully fractionating diffusion pump with an ejector-type third-stage. The pump-body is
water-cooled and made of stainless steel with a mild-steel nickel-plated base.
The inlet-flange has an integral roughing pipeline into which a combined backing/ roughing-valve can be connected
in the Diffstak 63/150, 100/300 and 160/700 pumps. The Diffstak 250/2000 is designed to use separate roughing and
backing pipeline-valves. You may fit a vacuum gauge head to the coupling provided on the roughing pipeline. Housed
within the inlet-flange is the low-impedance high-vacuum isolation butterfly-valve. Sectional views of the Diffstak
pumps are shown in Figures 1to 4.
Located below the valve is a baffle which consists of a water-cooled flanged cylinder with a detachable cover. The
baffle also retains the jet assembly by spring pressure (except in the 250/2000 pump in which the interior is retained
by a tie-rod).
The interior jet system consists of a first, second and third-stage jet assembly with fractionating tubes. Above the
jet system is a detachable first-stage jet-cap. The jet system is clamped together by a central tie-rod.
The boiler is located in the base of the pump. The pump fluid is heated and vaporised by plate-type electric heater(s)
(one or two, this depends on the size of the Diffstak). The boiler has a fluid filler connection and a drain-plug. The
electrical supply cables from the heater are brought out to a terminal-box at the bottom of the pump for ease of
connection to your electrical supply.
1.4 Principle of operation
Pump fluid is heated in the boiler to produce a vapour which passes up through the interior of the jet assembly and
emerges from the jets as high-velocity vapour streams. The vapour streams condense on the cooled pump-body wall
and drain into the boiler at the bottom of the pump for recirculation.
A portion of system gas which arrives at the Diffstak pump-inlet is trapped in the vapour stream from the first-stage
jet. The gases are compressed and transferred to the next stage. This process is repeated through the pump
jet-stages until the gases are removed by the backing pump through the cooled backing-condenser.
The guard-ring above the top-jet is designed to minimise any back-streaming of pump fluid vapour. The guard-ring
traps the fluid vapour and the vapour condenses on the cooled surface of the guard-ring.
The fractionating feature of the Diffstak design provides a means of purging the fluid charge of undesirable light
fractions and foreign matter and the process helps significantly towards the attainment of a low ultimate vacuum.
The ejector jet also purges the fluid of any contaminants as it returns to the boiler and at the same time ensures a
high critical backing pressure even when you use low vapour pressure fluids.

B344-21-880 Issue N
Page 4 © Edwards Limited 2007. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
Introduction
Figure 1 - Sectional view of valved Diffstak 63/150 pump
1. High-vacuum isolation-valve
2. Inlet-flange
3. Roughing connection
4. Gauge connection (NW10)
5. Retainer strap
6. 2nd-stage jet assembly
7. Tie-rod
8. Backing connection
9. Backing condenser
10. Pump-ready switch mounting
plate
11. Backing spout
12. Ejector jet
13. Terminal-box
14. Terminal-block
15. Electrical cables
16. Heater assembly
17. Spacer
18. Heater
19. Pump-boiler
20. Radiation shield
21. Vapour-tube
22. 3rd-stage jet assembly
23. Pump-body
24. Water-cooling coil
25. Top-jet assembly
26. Baffle-cap
27. Fluid filler and dipstick
assembly
28. Fluid drain

© Edwards Limited 2007. All rights reserved. Page 5
Edwards and the Edwards logo are trademarks of Edwards Limited.
Introduction
B344-21-880 Issue N
Figure 2 - Sectional view of valved Diffstak 100/300 pump
1. High-vacuum isolation-valve
2. Inlet-flange
3. Roughing connection
4. Gauge connection
5. Retainer strap
6. 2nd-stage jet assembly
7. Tie-rod
8. Backing connection
9. Backing condenser
10. Pump-ready switch mounting
plate
11. Backing spout
12. Ejector jet
13. Terminal-box
14. Terminal-block
15. Electrical cables
16. Heater
17. Pump-boiler
18. Radiation shield
19. Vapour-tube
20. 3rd-stage jet assembly
21. Pump-body
22. Water-cooling coil
23. Top-jet assembly
24. Baffle-cap

B344-21-880 Issue N
Page 6 © Edwards Limited 2007. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
Introduction
Figure 3 - Sectional view of valved Diffstak 160/700 pump
1. Inlet-flange
2. Gauge connection
3. Roughing connection
4. Retainer strap
5. 2nd-stage jet assembly
6. Tie-rod
7. Backing connection
8. Baffle condenser
9. Backing spout
10. Ejector jet
11. Terminal-box
12. Terminal-block
13. Electrical cables
14. Heater
15. Pump-boiler
16. 3rd-stage jet assembly
17. Cooling-fail thermal switch
mounting plate
18. Vapour-tube
19. Top-jet assembly
20. Baffle cap
21. High-vacuum isolation-valve
22. Fluid filler and dipstick
assembly
23. Fluid drain

© Edwards Limited 2007. All rights reserved. Page 7
Edwards and the Edwards logo are trademarks of Edwards Limited.
Introduction
B344-21-880 Issue N
Figure 4 - Part sectional view of valved Diffstak 250/2000 pump
1. Inlet-flange
2. Roughing connection
3. Gauge connection
4. Cool-cap
5. Guard-ring assembly
6. Top-jet assembly
7. Tie-rod
8. Backing connection
9. Baffle condenser
10. Backing spout
11. Ejector jet
12. Terminal-box
13. Terminal-block
14. Heater
15. Clamp
16. Radiation shield
17. Cooling-fail thermal-switch
mounting plate
18. Pump-body
19. High-vacuum isolation-valve

B344-21-880 Issue N
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Edwards and the Edwards logo are trademarks of Edwards Limited.
This page has been intentionally left blank.

© Edwards Limited 2007. All rights reserved. Page 9
Edwards and the Edwards logo are trademarks of Edwards Limited.
Technical data
B344-21-880 Issue N
2Technicaldata
2.1 General
2.1.1 M-model and P-model pumps
63/150M
63/150P
100/300M
100/300P
160/700M
160/700P
250/2000M
250/2000P
Pumping speed
nitrogen 135 l s-1 280 l s-1 700 l s-1 2000 l s-1
hydrogen 200 l s-1 500 l s-1 1300 l s-1 3000 l s-1
Minimum backing pump displacement for
maximum throughput 5 m3 h-1 5 m3h-1 12 m3 h-1 40 m3 h-1
Recommended backing pump RV3* or RV5 RV5 or RV8 RV12 or E2M18 E2M40
Maximum pump pressure 1300 mbar
1.3 x 105Pa
1300 mbar
1.3 x 105Pa
1300 mbar
1.3 x 105Pa
1300 mbar
1.3 x 105Pa
Recommended pump fluid Santovac 5 Santovac 5 Santovac 5 Santovac 5
Fluid charge (dry) 60 ml 125 ml 250 ml 500 ml
Inlet connection, compatible with ISO63 ISO100 ISO160 ISO250
Backing connection NW10 NW25 NW25 NW40
Cooling water connection 6 mm compression
couplings
10 mm compression
couplings
Minimum cooling-water flow at 20 oC42lh
-1 60 l h-1 115 l h-1 180 l h-1
Heater power 0.45 kW 0.65 kW 1.35 kW 2.25 kW
Pneumatic connections †6 mm couplings x 1/4BSP male stud
Pneumatic actuating pressure †2.4 to 6.9 bar (35 to 100 psi,
2.4 x 105to 6.9 x 105Pa)
Mass
M-model 8 kg 12 kg 26 kg 59 kg
P-model 9 kg 13 kg 27 kg 60 kg
Dimensions See Figures 5and 6
Position indicators †
Maximum voltage 48 V a.c. 48 V a.c. 48 V a.c. 48 V a.c.
Maximum current 380 mA 380 mA 5 A 5 A
Enclosure protection IP67 IP67 IP22 IP22
Mounting screw torque 0.4 Nm 0.4 Nm - -
* For applications where maximum throughput is not required, the RV3 can be used.
†P-modelpumpsonly.

B344-21-880 Issue N
Page 10 © Edwards Limited 2007. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
Technical data
2.1.2 C-model and F-model pumps
2.2 Pump fluid data
Note: Edwards Material Safety Data Sheets for the following fluids are available on request.
63/150C 100/300C
100/300F
160/700C
160/700F 250/2000C
Pumping speed
nitrogen 150 l s-1 300 l s-1 760 l s-1 2130 l s-1
hydrogen 225 l s-1 535 l s-1 1410 l s-1 3200 l s-1
Minimum backing pump displacement for
maximum throughput 6 m3 h-1 6 m3h-1 12 m3 h-1 40 m3 h-1
Recommended backing pump RV5 RV5 or RV8 RV12 or E2M18 E2M40
Maximum pump pressure 1300 mbar
1.3 x 105Pa
1300 mbar
1.3 x 105Pa
1300 mbar
1.3 x 105Pa
1300 mbar
1.3 x 105Pa
Recommended pump fluid Santovac 5 Santovac 5 Santovac 5 Santovac 5
Fluid charge (dry) 60 ml 125 ml 250 ml 500 ml
Inlet connection, compatible with ISO63 ISO100/6 inch ISO160/8 inch ISO250
Backing connection NW10 NW25 NW25 NW40
Cooling water connection 6 mm compression
couplings
10 mm compression
couplings
Minimum cooling-water flow at 20 oC42lh
-1 60 l h-1 115 l h-1 180 l h-1
Heater power 0.45 kW 0.65 kW 1.35 kW 2.25 kW
Mass
C-model 5 kg 9 kg 18 kg 46 kg
F-model - 10 kg 20 kg -
Dimensions See Figure 7
Fluid type Critical backing pressure Ultimate vacuum
Santovac 5 0.6 mbar 6.0 x 101Pa 3 x 10-8 mbar 3 x 10-6 Pa
DC702 1.2 mbar 1.2 x 102Pa 7 x 10-6 mbar 7 x 10-4 Pa
DC704EU 0.8 mbar 8.0 x 101Pa 7 x 10-8 mbar 7 x 10-6 Pa
DC705 0.6 mbar 6.0 x 101Pa 3 x 10-8 mbar 3 x 10-6 Pa
Edwards L9 0.6 mbar 6.0 x 101Pa 3 x 10-8 mbar 3 x 10-6 Pa
Apiezon C 0.7 mbar 7.0 x 101Pa 7 x 10-8 mbar 7 x 10-6 Pa
Fluid Type Flash point °C Auto-ignition point °C Molecular weight
Santovac 5 288 590 446
DC702 193 500 530
DC704EU 221 500 484
DC705 243 500 546
Edwards L9 241 370 407
Apiezon C 246 420 479

© Edwards Limited 2007. All rights reserved. Page 11
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Technical data
B344-21-880 Issue N
2.3 Construction materials
2.4 Item Numbers
Interior assembly Nickel plated mild steel and machined aluminium
Pump-body Stainless steel unitary construction
Water-cooling coils Stainless steel
Base
63/150, 100/300, 250/2000 Mild steel
160/700 Stainless steel
Seals Viton/fluoroelastomer
Pump/Electrical supply 63/150 100/300 160/700 250/2000
M-model pumps
110 to 125 V, 1-phase, 50/60 Hz B344-31-976 B346-31-976 B348-31-976 B350-31-976
210 to 225 V, 1-phase, 50/60 Hz B344-31-977 B346-31-977 B348-31-977 B350-31-977
230 to 250 V, 1-phase, 50/60 Hz B344-31-978 B346-31-978 B348-31-978 B350-31-978
P-model pumps
110 to 125 V, 1-phase, 50/60 Hz B344-32-976 B346-32-976 B348-32-976 B350-32-976
210 to 225 V, 1-phase, 50/60 Hz B344-32-977 B346-32-977 B348-32-977 B350-32-977
230 to 250 V, 1-phase, 50/60 Hz B344-32-978 B346-32-978 B348-32-978 B350-32-978
C-model pumps
110 to 125 V, 1-phase, 50/60 Hz B344-33-976 B346-33-976 B348-33-976 B350-33-976
210 to 225 V, 1-phase, 50/60 Hz B344-33-977 B346-33-977 B348-33-977 B350-33-977
230 to 250 V, 1-phase, 50/60 Hz B344-33-978 B346-33-978 B348-33-978 B350-33-978
F-model pumps
110 to 125 V, 1-phase, 50/60 Hz - B346-40-976 B348-40-976 -
210 to 225 V, 1-phase, 50/60 Hz - B346-40-977 B348-40-977 -
230 to 250 V, 1-phase, 50/60 Hz - B346-40-978 B348-40-978 -

B344-21-880 Issue N
Page 12 © Edwards Limited 2007. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
Technical data
Figure 5 - Dimensions of M-model Diffstak pumps (mm)
1. 63/150M
2. 100/300M
3. 160/700M
4. 250/2000M