Edwards iXL120 User manual

A541-11-880
Issue A Original
Inst ruct ion Manual
iXL120 Dry Pump Syst em

iXL Dry Pump Numbering
Speed
1
Application
1
2
3
4
Clean
N2 purge (N)
Clean
N2 purge (N)
OEM
OEM
End User
End User
Other Accessories
0
1
None
Wat er Const ant Flow Valve (1 l/ m)
Tool Interface
0
1
2
3
4
5
6
7
None
MicroTIM C3
MicroTIM SPI
MicroTIM E73
MicroTIM TEL
MicroTIM LAM
MicroTIM Hit achi
MicroTIM MCM
Wat e r Fi t t ings
0
1
2
3
5
None
3/ 8 Quick Connect
1/ 4 Quick Connect
9/ 16 JIC
1/ 4 NPT Male 90°
120 m3/ hr
A541

Thi s product has been manuf act ur ed under a quali t y syst em regist er ed t o ISO9001
Declarat ion of Conf ormit y
We, Edwards,
Manor Royal ,
Crawley,
West Sussex, RH10 9LW, UK
declare under our sol e responsibilit y, as manuf act urer and person wit hin t he EU aut horised t o assemble
t he t echnical file, t hat t he product (s)
iXL120 A5411wxyz
where w is 1, 2,3 or 4 depending on t he appl icat ion
where x = 0, 1,2, 3, 4,5,6 or 7 depending on t he Tool Int erf ace t ype supplied
where y = 0, 1,2, 3 or 5 depending on t he t ype of wat er f it t ings suppl ied
where z = 0 if no addit ional accessories are supplied and 1 if a cool ing wat er const ant f low valve
is f it t ed.
And t heir accessories:
Disconnect Box 200-460 V 50-60 Hz A50806000
EMS but t on D37491500
t o which t his declarat ion relat es is in conf ormit y w it h t he f ol lowing st andard(s) or ot her normat ive
document (s)
EN1012-2:1997 Compressors and Vacuum Pumps Safet y Requirement s.
Part 2 - Vacuum Pumps.
EN61010-1: 2001 Safet y Requirement s f or Elect rical Equipment f or Measurement ,
Cont rol and Laborat ory Use. Part 1 General Requirement s.
EN 61326-1: 2006 Elect rical Equipment f or Measurement , Cont rol and Laborat ory Use
- EMC Requirement s. (Indust rial Locat i on Immunit y – Class A Emissions)
ANSI/ UL61010-1:2004 Safet y Requirement s f or Elect rical Equipment f or Measurement ,
+ Rev 2008 Cont rol and Laborat ory Use – Part 1: General Requirement s.
SEMI S2-0709 Environment al , Heal t h and Safet y Guideline f or Semiconduct or
Manuf act uring Equipment .
and f ulf ils all t he relevant provisions of
2006/ 42/ EC Machinery Di rect ive
2006/ 95/ EC Low Vol t age Direct ive
2004/ 108/ EC El ect r omagnet i c Compat ibilit y (EMC) Direct ive
2002/ 95/ EC* Rest rict ion of Cert ain Hazardous Subst ances (RoHS) Direct ive
* i . e. The pr oduct (s) cont ain less t han - 0. 1wt %f or hexaval ent chr omium, lead, mer cury, PBB and PBDE; 0.01wt %f or
cadmium - in homogeneous mat erials (subj ect t o t he exempt ions al lowed by t he Di rect ive). This i nformat ion r el at es
onl y t o product s sol d on or aft er t he dat e of t his cert if icat e. Edwards has t aken al l reasonabl e st eps t o conf i rm t hi s
st at ement , which is based mainl y on inf ormat ion f r om our suppl i ers. Whi l st t he RoHS Direct ive does not legal ly apply
t o t his vacuum equipment , we recognize t hat component compl i ance is r elevant t o many of our cust omers.
Not e: This declarat ion covers al l product ser ial numbers f rom t he dat e t his Declarat ion was si gned
onwards.
19.08.2010 Shoreham
Sia Abbaszadeh, Chief Techni cal Of f ice
r
Dat e and Pl ace
P200-05-020 Issue A

This page has been int ent ional ly lef t bl ank.

© Edwards Limit ed 2010. All right s reserved. Page i
Edwards and t he Edwards logo are t rademarks of Edwards Limit ed.
Cont ent s
A541-11-880 Issue A
Contents
Section Page
1 Int r oduct ion . . . . . . .. . . . . . . . . . .. . . . . . . . . .. . . . . .. . . . . . . . . . . .. . . . . . . . . .. . . . . .. . . . . . . . . . .. . . . . . . . . .. . . . 1
1.1 Scope and definitions ................................................................................................... 1
1.2 Applications ............................................................................................................... 2
1.3 The iXL120 system ....................................................................................................... 3
1.4 Priority of control ........................................................................................................ 4
2 Techni cal dat a . . . . .. . . . . . . . . . .. . . . . . . . . .. . . . . . .. . . . . . . . . .. . . . . .. . . . . . . . . .. . . . . .. . . . . . . . . .. . . . . .. . . 5
2.1 Technical data ........................................................................................................... 5
2.2 Loading .................................................................................................................... 6
2.3 Electrical data ............................................................................................................ 7
2. 4 Elect rical connect ions and cabl es .. .. .. .. .. .. .. .. ... .. .. .. .. .. .. .. .. .. ... .. .. .. .. .. .. .. .. ... .. .. .. .. .. .. .. .. .. ... .. .. . 9
2. 5 Cooling wat er dat a . .. .. .. .. .. .. .. .. .. ... .. .. .. .. .. .. .. .. ... .. .. .. .. .. .. .. .. .. .. ... .. .. .. .. .. .. .. ... .. .. .. .. .. .. .. .. .. .. 11
2. 6 Nit rogen purge syst em (iXL120N series pumps) .. . . . . . . . . . .... . . . . . . . . . . . . . . . .... . . . . . . . . . . . .... . . . . . . . . . . . . . . . .... 11
3 Inst al lat ion . . . . . . . . . .. . . . . .. . . . . . . . . .. . . . . . .. . . . . . . . . .. . . . . .. . . . . . . . . .. . . . . .. . . . . . . . . .. . . . . .. . . . . . 13
3.1 Safety ..................................................................................................................... 13
3. 2 Removing t he iXL120 syst em from t he packaging .. .. .. .. .. .. .. .. ... .. .. .. .. .. .. .. .. .. ... .. .. .. .. .. .. .. .. .... .. .. . 14
3.3 Locate the iXL120 .......................................................................................................15
3. 4 St acking t he iXL120 syst em .. ... .. .. .. .. .. .. .. .. .. ... .. .. .. .. .. .. .. .. ... .. .. .. .. .. .. .. .. .. ... .. .. .. .. .. .. .. .. .. ... .. .. 16
3. 5 Connect t he iXL120 syst em t o your vacuum/ exhaust syst em and int erst age connect ion (if f it t ed) .. .. .. . 17
3. 6 Leak t est t he iXL120 system ..........................................................................................18
3. 7 Connect t he nit rogen suppl y .. .. .. .. .. .. .. .. .. .. .. ... .. .. .. .. .. .. .. .... .. .. .. .. .. .. .. .. .. .. ... .. .. .. .. .. .. .. ... .. .. .. . 18
3. 7. 1 Flammable/ pyrophoric materials ....................................................................................18
3.7.2 Gas purges ............................................................................................................... 19
3. 8 Connect t he elect rical suppl y t o t he dry pumping syst em . .. .. .. .. .. .. .. .. .. .. ... .. .. .. .. .. .. .. ... .. .. .. .. .. .. .. 19
3. 8.1 Elect rical connect or l ocking mechanism .. . . . . . . . . . . .... . . . . . . . . . . . . . . . .... . . . . . . . . . . . . . . .. . . . . . . . . . . . . . . .... . . . . . . . 21
3. 9 Connect t o your emergency st op circuit . ... .. .. .. .. .. .. .. ... .. .. .. .. .. .. .. .. .. .. .. ... .. .. .. .. .. .. .. ... .. .. .. .. .. .. . 22
3. 10 Connect t o your cont rol equipment .. .. .. ... .. .. .. .. .. .. .. .. ... .. .. .. .. .. .. .. .. .. .. ... .. .. .. .. .. .. .. ... .. .. .. .. .. .. . 22
3.10.1 Inputs ................................................................................................................... . . 23
3. 11 Connect t he cooling-wat er hoses .. .. .. .. .. .. .. .. .. ... .. .. .. .. .. .. .. .. .. ... .. .. .. .. .. .. .. .. ... .. .. .. .. .. .. .. .. .. .. ... . 23
3. 12 Commission t he iXL120 system ....................................................................................... 24
4 Operat ion . . . . . . . . . .. . . . . . . . . . .. . . . . . . . . .. . . . . . . . . . .. . . . . . . . . . . .. . . . . . . . . .. . . . . . . . . . .. . . . . . . . . .. . . 25
4.1 Start-up ..................................................................................................................25
4.2 Status indicators ........................................................................................................26
4.3 Manual shut-down ......................................................................................................26
4.4 Automatic shut-down ..................................................................................................27
4. 5 Unplanned shut down and alarms . .... . . . . . . . . . . . . ... . . . . . . . . . . . . . . . .... . . . . . . . . . . . . . . . .... . . . . . . . . . . .... . . . . . . . . . . . . 27
4. 6 Emergency st op (EMS) . ... .. .. .. .. .. .. .. .. .. .. ... .. .. .. .. .. .. .. .... .. .. .. .. .. .. .. .. .. .. ... .. .. .. .. .. .. .. ... .. .. .. .. .. .. . 28
4. 7 Rest art t he pump af t er an emergency st op or aut omat ic shut -down . .. .. .. ... .. .. .. .. .. .. .. .. ... .. .. .. .. .. .. . 28
5 Mai nt enance . . . . . . .. . . . . . . . . .. . . . . .. . . . . . . . . .. . . . . .. . . . . . . . . .. . . . . . .. . . . . . . . . .. . . . . .. . . . . . . . . .. . . 29
5. 1 Safet y and maint enance f requency . .. .. .. .. ... .. .. .. .. .. .. .. .. ... .. .. .. .. .. .. .. .. .. .. ... .. .. .. .. .. .. .. .... .. .. .. .. .. 29
5. 2 Rel ocat e t he syst em for maint enance . .. .. .. .. .. .. .. ... .. .. .. .. .. .. .. .. .. .. ... .. .. .. .. .. .. .. ... .. .. .. .. .. .. .. .. .. .. . 30
5. 3 Dr aining t he cooling wat er . .. .. .. .. .. .. ... .. .. .. .. .. .. .. .. ... .. .. .. .. .. .. .. .. .. .. ... .. .. .. .. .. .. .. .. ... .. .. .. .. .. .. .. . 31
5.4 General maintenance ..................................................................................................32
5. 5 Inspect t he connect ions, pipelines, cables and f it t ings .. .. .. ... .. .. .. .. .. .. .. .. .. .. ... .. .. .. .. .. .. .. ... .. .. .. .. . 32
6 Tr ansport at i on, st orage and di sposal . . . . .. . . . . . . . . . . .. . . . . . . . . . .. . . . . . . . . . .. . . . . . . . . . .. . . . . . 33
6.1 Transportation ..........................................................................................................33
dcs/8604/04/2010

A541-11-880 Issue A
Page ii © Edwards Limit ed 2010. All r ight s reserved.
Edwards and t he Edwards logo are t rademarks of Edwards Limit ed.
Cont ent s
6.2 Storage ...................................................................................................................33
6.3 Disposal ................................................................................................................... 33
7 Ser vice, spares and accessori es .. . . . . . . . . .. . . . . . .. . . . . . . . . . .. . . . . . . . . .. . . . . .. . . . . . . . . . .. . . . . . 35
7.1 Introduction ............................................................................................................. 35
7.2 Service .................................................................................................................... 35
7.3 Accessories ...............................................................................................................35
7.3.1 Disconnect box ..........................................................................................................35
7.3.2 EMSbutton ............................................................................................................... 36
7. 3. 3 Accessory modules . . . . . . . . . .... . . . . . . . . . . . . . . . .... . . . . . . . . . . . .... . . . . . . . . . . . . . . . .... . . . . . . . . . . .... . . . . . . . . . . . . . . . .... . . . 36
7. 3. 4 Pump Displ ay Terminal (PDT) . . . . . . . . . . .... . . . . . . . . . . .... . . . . . . . . . . . . . . . .... . . . . . . . . . . . . . . . .. . . . . . . . . . . . . . .... . . . . . . . . 36
7.3.5 PDT adaptor cable ......................................................................................................36
7.3.6 PDT holster .............................................................................................................. 36
7.3.7 PDT extension cable ....................................................................................................37
7. 3.8 Lift ing / seismic / st acki ng bracket s (pair) . .. .. .. .. .. ... .. .. .. .. .. .. .. .. .. .. .... .. .. .. .. .. .. .. ... .. .. .. .. .. .. .. .. .. 37
7. 3.9 Wat er f low cont rol val ve (1 lpm) .. .. .. .. .. .. ... .. .. .. .. .. .. .. ... .. .. .. .. .. .. .. .. .. .. ... .. .. .. .. .. .. .. .. ... .. .. .. .. .. . 37
7. 3.10 St ainless st eel wat er f it t ings (pair) .. .. .. ... .. .. .. .. .. .. .. ... .. .. .. .. .. .. .. .. .. .. ... .. .. .. .. .. .. .. .. ... .. .. .. .. .. .. .. 37
7. 3.11 Main power connect or .. .. .. .. .. .. .. .. .. ... .. .. .. .. .. .. .. ... .. .. .. .. .. .. .. .. .. .. ... .. .. .. .. .. .. .. .. ... .. .. .. .. .. .. .. .. . 37
7.3.12 EMSterminator plug ....................................................................................................38
7. 3.13 Int erf ace modules . .. .. .. .. .. .. .. .. ... .. .. .. .. .. .. .. ... .. .. .. .. .. .. .. .. .. .. ... .. .. .. .. .. .. .. .. ... .. .. .. .. .. .. .. .. .. .. ... 38
Appendix A1 Pump Displ ay Terminal (PDT) . . . . . . . . . . .. . . . . . . . . . .. . . . . . . . . . . .. . . . . . . . . . .. . . . . . . . . . .. . 41
A1.1 PDT ........................................................................................................................ 41
A1.1.1 LEDs ..................................................................................................................... . . 41
A1. 1.2 Pump st art / st op and control ........................................................................................42
A1. 1.3 Warning / alarm display and acknowledgement ... . . . . . . . . . . .... . . . . . . . . . . . . . . . .... . . . . . . . . . . . .... . . . . . . . . . . . . . . . . 42
A1.1.4 Menus .................................................................................................................... . 43
Appendix A2 Tr oubl eshoot ing . . . . . .. . . . . .. . . . . . . . . . .. . . . . . . . . . . .. . . . . . . . . . .. . . . . . . . . . .. . . . . . . . . . .. . . . . . 47
A2.1 Warnings .................................................................................................................47
A2. 1.1 LED warning indicators .................................................................................................47
A2.1.2 PDT warnings ............................................................................................................ 47
A2.2 Alarms .................................................................................................................... 48
A2. 2.1 LED alarm indicat ors . .. .. .. .. .. .. .. .. .. ... .. .. .. .. .. .. .. .. ... .. .. .. .. .. .. .. .. .. .. ... .. .. .. .. .. .. .. ... .. .. .. .. .. .. .. .. .. 48
A2.2.2 PDT alarms ............................................................................................................... 48
A2. 3 Invert er warnings and alarms . .. .. .. .. .. .. .. ... .. .. .. .. .. .. .. ... .. .. .. .. .. .. .. .. .. .. ... .. .. .. .. .. .. .. .. ... .. .. .. .. .. .. 49
A2.4 Other ...................................................................................................................... 52
A2. 4.1 Pump cont roller communicat ions . .. .. ... .. .. .. .. .. .. .. .. ... .. .. .. .. .. .. .. .. .. .. ... .. .. .. .. .. .. .. .... .. .. .. .. .. .. .. .. 52
For ret urn of equipment , complet e t he HS Forms at t he end of t his manual.
Illustrations
Figure Page
1 iXL applications chart ................................................................................................... 2
2 The controls/ connectors ................................................................................................ 3
3 The f ront cont rol and indicat or panel .. .. .. .. .. .. ... .. .. .. .. .. .. .. ... .. .. .. .. .. .. .. .. .. .. ... .. .. .. .. .. .. .. .. ... .. .. .. 4
4 Cent re of gravit y and levelling f oot l oads . .. .. ... .. .. .. .. .. .. .. ... .. .. .. .. .. .. .. .. .. .. ... .. .. .. .. .. .. .. .. ... .. .. .. .. 6
5 Connect t he elect rical suppl y .. .. .. .. .. .. .. .. ... .. .. .. .. .. .. .. ... .. .. .. .. .. .. .. .. .. .. ... .. .. .. .. .. .. .. .. ... .. .. .. .. .. . 21
6 Elect rical connect or locking mechanism ............................................................................21
7 Accessories . . . . . . . .... . . . . . . . . . . . . . . . .... . . . . . . . . . . . . . . .. . . . . . . . . . . . . . .... . . . . . . . . . . . . . . . .... . . . . . . . . . . .... . . . . . . . . . . . . . . . 39

© Edwards Limit ed 2010. All right s reserved. Page iii
Edwards and t he Edwards logo are t rademarks of Edwards Limit ed.
Cont ent s
A541-11-880 Issue A
Tables
Table Page
1 General technical data .................................................................................................. 5
2 General technical data .................................................................................................. 5
3 Level ling f oot l oads (ref er t o Figure 4) ............................................................................... 6
4 General electrical data ................................................................................................. 7
5 Elect rical rat ings: ult imat e vacuum and ext r act ed (700 t orr) exhaust load condit ion .. .. .. .. .. .. .. .. .. .. .. . 7
6 Elect rical rat ings: f ull l oad condit ions .. . . . . . . . . ... . . . . . . . . . . . .... . . . . . . . . . . . . . . . .... . . . . . . . . . . . .... . . . . . . . . . . . . . . . .. 8
7 Elect rical rat ings: over-load condit ion (175%full load for 60s) . . . .... . . . . . . . . . . . . . . . .. . . . . . . . . . . . . .... . . . . . . . . . . 8
8 Branch circuit prot ect ion / fusing . .. .. .. .. .. .. .. .. ... .. .. .. .. .. .. .. .. ... .. .. .. .. .. .. .. .. .. ... .. .. .. .. .. .. .. .. .. ... .. .. 9
9 Elect rical connect ions . .. ... .. .. .. .. .. .. .. .. .. .. .. ... .. .. .. .. .. .. .. ... .. .. .. .. .. .. .. .. .. .. ... .. .. .. .. .. .. .. .. ... .. .. .. .. . 9
10 Input supply wire assembly ...........................................................................................10
11 Wat er cooling syst em dat a . .. .. .. .. .. .. .. ... .. .. .. .. .. .. .. ... .. .. .. .. .. .. .. .. .. .. ... .. .. .. .. .. .. .. .. ... .. .. .. .. .. .. .. . 11
12 Nitrogen supply .........................................................................................................11
13 Tool connect or s and mat ing t ool connect or kit s .. .. .. .. .. .. .. .. ... .. .. .. .. .. .. .. .. .. .. ... .. .. .. .. .. .. .. .. ... .. .. .. 23
14 Tool input signals t o t he pump syst em .. .. .. ... .. .. .. .. .. .. .. .. ... .. .. .. .. .. .. .. .. .. .. ... .. .. .. .. .. .. .. ... .. .. .. .. .. 23
15 Pump protection sensors ..............................................................................................27
16 Disconnect box ..........................................................................................................35
17 EMSbutton ...............................................................................................................36
18 Accessories modules . . . . . . . . . . .... . . . . . . . . . . . . . . . .... . . . . . . . . . . .... . . . . . . . . . . . . . . . .... . . . . . . . . . . . .... . . . . . . . . . . . . . . . .... 36
19 PDT ........................................................................................................................36
20 PDT adaptor cable ......................................................................................................36
21 PDT holster ..............................................................................................................36
22 PDT extension cable ....................................................................................................37
23 Lif t ing / seismic / st acking bracket s .. .. .. ... .. .. .. .. .. .. .. .. ... .. .. .. .. .. .. .. .. .. .. ... .. .. .. .. .. .. .. ... .. .. .. .. .. .. 37
24 Water flow control valve ..............................................................................................37
25 Stainless steel water fittings ..........................................................................................37
26 Main power connect or .. .. .. .. .. .. .. .. .. .. .. ... .. .. .. .. .. .. .. .. ... .. .. .. .. .. .. .. .. .. .. ... .. .. .. .. .. .. .. ... .. .. .. .. .. .. . 37
27 EMSterminator plug ....................................................................................................38
28 Interface modules ...................................................................................................... 38
A1 Pump st art / st op and cont rol . .. .. .. .. .. .. .. ... .. .. .. .. .. .. .. .. ... .. .. .. .. .. .. .. .. .. .. ... .. .. .. .. .. .. .. .. ... .. .. .. .. . 42
A2 Pump st art / st op and cont rol . .. .. .. .. .. .. .. ... .. .. .. .. .. .. .. .. ... .. .. .. .. .. .. .. .. .. .. ... .. .. .. .. .. .. .. .. ... .. .. .. .. . 42
A3 Normal menu ............................................................................................................43
A4 Status menu .............................................................................................................43
A5 Setup menu ..............................................................................................................44
A6 Commands menu ........................................................................................................44
A7 Displ ay inver t er f ault hist ory menu . .. .. .. .. .. .. .. .. .. .. .. .. .. .. .. .. .. .. .. .. .. .. .. .. .. .. .. .. .. .. .. .. .. .. .. .. .. .. .. .. . 44
A8 Fit accessory menu . . . . . . . . . . . . .... . . . . . . . . . . . . . . . .... . . . . . . . . . . . .... . . . . . . . . . . . . . . . .... . . . . . . . . . . .... . . . . . . . . . . . . . . . ... 45
A9 IP configuration menu .................................................................................................. 45
A10 Display menu . . . . . . . . . .... . . . . . . . . . . . . . . . .... . . . . . . . . . . .... . . . . . . . . . . . . . . . .... . . . . . . . . . . . . . . . ... . . . . . . . . . . . .... . . . . . . . . . . 46
A11 Display menu select l ine . . . . . .... . . . . . . . . . . . . . . . .... . . . . . . . . . . .... . . . . . . . . . . . . . . . .... . . . . . . . . . . . .... . . . . . . . . . . . . . . . .... 46
A12 Display menu unit s .. .. .. .. .. .. .. .. .. .. .... .. .. .. .. .. .. .. ... .. .. .. .. .. .. .. .. .. .. ... .. .. .. .. .. .. .. .. ... .. .. .. .. .. .. .. .. .. . 46
A13 Warnings . . . . . . . .... . . . . . . . . . . . . . . . .... . . . . . . . . . . . . . . . ... . . . . . . . . . . . .... . . . . . . . . . . . . . . . .... . . . . . . . . . . .... . . . . . . . . . . . . . . . .. 47
A14 Alarms ....................................................................................................................49
A15 Hexadecimal t o digit al conversion . .. .. .. ... .. .. .. .. .. .. .. ... .. .. .. .. .. .. .. .. .. .. .. ... .. .. .. .. .. .. .. ... .. .. .. .. .. .. .. 50
A16 Invert er alarm codes . .. .. .. .. .. .. .. .. ... .. .. .. .. .. .. .. .... .. .. .. .. .. .. .. .. .. .. ... .. .. .. .. .. .. .. ... .. .. .. .. .. .. .. .. .. .. . 50
A17 Inverter warnings codes ...............................................................................................51

A541-11-880 Issue A
Page iv © Edwards Limit ed 2010. All r ight s reserved.
Edwards and t he Edwards logo are t rademarks of Edwards Limit ed.
Cont ent s
Associated publications
Publication title Publication number
Vacuum pump and vacuum syst em safet y P400-40-100
Semiconduct or pumping applicat ion guide P411-00-090
Trademark credits
Han®is a regist ered t rademark of Hart ing Elect ric GmbH
Et herCon®is a regist ered t rademark of Neut rik® AG
Fomblin®is a regist ered t rademark of Sol vay Sol exis SpA

© Edwards Limit ed 2010. All right s reserved. Page 1
Edwards and t he Edwards logo are t rademarks of Edwards Limit ed.
Int roduct ion
A541-11-880 Issue A
1Introduction
1. 1 Scope and definitions
This manual provides inst al lat ion, operat ion and maint enance inst ruct ions f or t he Edwards iXL120(N) Pump. You must
use your pump as specif ied in t his manual ot herwise t he prot ect ion provided by t he equipment may be impaired.
Read t his manual bef ore you inst all and operat e your pump. Import ant saf et y inf ormat ion is highlight ed as WARNING
and CAUTION inst ruct ions; you must obey t hese inst ruct ions. The use of WARNINGS and CAUTIONS is def ined below.
CAUTION
Cautions are given where failure to observe the instruction could result in damage to the equipment, associated
equipment and/ or process.
The unit s t hroughout t his manual conf orm t o t he SI int ernat ional syst em of unit s of measurement .
The f ollowing warning labels are on t he pump and in t his manual:
The foll owing t wo warning labels, Pressurised and Risk of explosion, only appear in t his manual :
Mat erial Saf et y Dat a Sheet s f or chemicals supplied by Edwards can be obt ained by cont act ing Edwards.
WARNING
Warnings are given where failure to observe the instruction could result in inj ury or death to
people.
Warning - Ref er t o accompanying
document at ion. Warning - Risk of el ect ric shock.
Warning - Hot surf aces. Warning - Moving part s present .
Warning - Heavy obj ect .
Warning - Use prot ect ive equipment .
Prot ect ive Eart h (ground).
Warning - Pressurised. Warning - Risk of explosion.

A541-11-880 Issue A
Page 2 © Edwards Limit ed 2010. All right s reserved.
Edwards and t he Edwards logo are t rademarks of Edwards Limit ed.
Int roduct ion
1. 2 Applications
The iXL120 is a l ow energy, compact dr y pump syst em t hat can be mount ed on t ool or remot ely. It i s designed t o give
ext remely low cost of ownership. The iXL120 is int ended onl y f or use on cl ean dut y applicat ions as def ined in Figure 1.
The iXL120 is not int ended f or use wit h pot ent ially flammable, corrosive, t oxic or ot her hazardous gases since t hese
gases or oxygen can mix wit hin t he pump syst em. Users must complet e t heir own risk assessment and implement any
necessary cont rols f or pumping pot ent ially f lammable gases. Edwards can of f er advice and assist ance in mat ching
your pump t o your applicat ion. If you use t he iXL120(N) syst em on an applicat ion f or which it is not int ended it may
invalidat e your warrant y.
Figure 1 - iXL applications chart

© Edwards Limit ed 2010. All right s reserved. Page 3
Edwards and t he Edwards logo are t rademarks of Edwards Limit ed.
Int roduct ion
A541-11-880 Issue A
1. 3 The iXL120 system
The iXL120 is a compact dry pump syst em t hat can be mount ed on t ool or remot ely. The pumping syst em can be
cont rol led f rom t he f ront cont rol panel, a PDT accessory or by t he t ool via a MicroTIM.
Figure 2 - The controls/ connectors
1. Nit rogen purge connect ion (if f it t ed)
2. Cooling wat er supply connect ion
3. Tr ansi t / lif t i ng/ sei smic br acket (if f i t t ed, 2 of f )
4. Cool ing wat er ret urn connect ion
5. Exhaust out l et connect ion
6. Mains power connect ion
7. Prot ect ive Eart h (ground) st ud M5
8. Elect rical connect or locking mechanism
9. Accessory int erf ace
10. Syst em cont rol/ PDT connect ion
11. Et hernet inst alled LED
12. Et hernet connect ion
13. Et hernet act ive LED
14. Indicat or LED - Tool in cont rol
15. Emergency st op (EMS) connect ion
16. Tool int erf ace connect ion (if f it t ed)
17. Pump inlet
17a. Pump inl et (NW50 connect ion)
17b. Pump inl et (ISO63 connect ion)

A541-11-880 Issue A
Page 4 © Edwards Limit ed 2010. All right s reserved.
Edwards and t he Edwards logo are t rademarks of Edwards Limit ed.
Int roduct ion
Figure 3 - The front control and indicator panel
1. 4 Priority of control
The iXL120 syst em can be cont rolled by one of a number of sources: t he f ront cont rol panel (ref er t o Figure 3), a
Pump Display Terminal (PDT) accessory or from t he t ool via t he MicroTIM. Only one of t hese can have cont rol of t he
iXL120 syst em at any one t ime. That is, once one of t hese has cont rol of t he iXL120 syst em, cont rol request s f rom
t he ot hers are denied unt il cont rol is rel eased by t he f irst .
An LED is provided on t he f ront panel, which illuminat es t o indicat e t hat t he pump is ‘ in cont rol’ . An LED is provided
on t he rear panel which illuminat es t o indicat e t hat t he t ool is ‘ in cont rol ’ . The PDT accessory can ident if y which
source is ‘ in cont rol’ and al so has an LED t o indicat e if t he PDT it self is ‘ in cont rol’ .
Item Indication
1 St art but t on/ indicat or LED (green)
2 St op but t on
3 Local cont rol but t on/ indicat or LED (green)
4 Power on indicat or LED (green)
5 Warning indicat or LED (yellow)
6AlarmindicatorLED(red)
7 Idle mode act ive indicat or LED (green)

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Edwards and t he Edwards logo are t rademarks of Edwards Limit ed.
Technical dat a
A541-11-880 Issue A
2Technicaldata
2. 1 Technical data
Table 1 - General technical data
Type Characteristics Value Units
Dimensions (L x W x H) 450 x 230 x 275 mm
Mass (excluding packaging) 59 kg
Noise level (at ult imat e) <55 dB (A)
General Vibrat ion level at inlet <1.5 mm s-1
Vibrat ion t o t he f loor (when docked) <0.05 mm s-1
Init ial f orce t o push t he pump 0.06 kN
Sust ained f orce t o push t he pump 0.04 kN
Warm up t ime t o nominal pumping performance 45 minut es
Per f or mance
Typical peak pumping speed (no gas purge/ cold
pump)
110
65
m3h-1
cf m
Ult imat e pr essure 0. 01
8
mbar
mTorr
Connect ions Pump inlet f lange ISO63/ NW50
Exhaust gas out l et NW25
Table 2 - General technical data
Item Descript ion Rating Units
Operat ing condit ions
Int ended use Indoor use
Ambient t emperat ure
range:
Operat ing 5 t o 40 ° C
St orage -45 t o 55 ° C
Maximum rel at ive
humidit y:
80%f or t emperat ures up t o 31 ° C decreasing linearly t o
50%relat ive humidit y at 40 ° C
Maximum operat ing
alt it ude
Up t o 2000 m
Pol lut ion degree II (IEC 61010) (Normally only non-conduct ive pollut ion
occurs. Occasionally, however, t emporary conduct ivit y
caused by condensat ion must be expect ed)
At mosphere Non f lammable and non-corrosive
Mat erials in cont act
wit h process gas
Pump, shaf t s and rot ors Cast iron, SG iron, aluminium and st eel
Seals PTFE, Met hacrylat e Est er and Fluoroelast omer
Gas syst em St ainless st eel, aluminium, PTFE and fluoroelast omer
Degree of prot ect ion
provided by enclosure
Encl osure prot ect ion
when inst al led
IP31D (EN60529: Degrees of prot ect ion provided by
encl osures)

A541-11-880 Issue A
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Technical dat a
2. 2 Loading
Figure 4 - Centre of gravity and levelling foot loads
Table 3 - Levelling foot loads (refer to Figure 4)
Levelling foot identifier Levelling foot load (kg)
113
212
318
416

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Edwards and t he Edwards logo are t rademarks of Edwards Limit ed.
Technical dat a
A541-11-880 Issue A
2. 3 Electrical data
Table 4 - General electrical data
Description Rating Units
Input supply volt age, 3-phase, a. c. , rms 200 - 460 ±10% V
Input supply f requency 50 - 60 ±5 Hz Hz
Input suppl y wiring configurat ion 3 wire pl us Eart h (ground)
Input suppl y branch circuit prot ect ion requirement s Ref er t o Ta b l e 8
Input supply volt age un-balance Volt age un-balance should NOT exceed 2%, when
assessed over any one minut e period.
%
Input supply short -circuit rat ing 30 (absol ut e maximum rat ing) kA
Syst em Eart hing 200 - 240 V: TT; TN and IT
(including corner-Eart h supplies)
380 - 460 V: TT; TN and IT
(excl uding corner-Eart h suppl ies)
Second prot ect ive Eart h (ground) conduct or Must be f it t ed wit h a cross-sect ional area at least
equal t o t he phase conduct or size.
Inst allat ion cat egory Over-volt age cat egory II (IEC 60664-1)
Typical Eart h leakage*
*Typi cal Eart h leakage val ues wer e measur ed at st eady-st at e condit ions.
Not e t hat higher l eakage cur r ent s may occur :
i) under t ransi ent condit ions such as power on or pump accel erat i on or
i i) wi t h cer t ai n suppl y conf i gur at ions such as Ear t hed phase or
ii i) wit h abnor mal suppl y conf i gur at i ons such as a missing phase or unbal anced suppl y vol t ages
Cont act Edwards f or more inf or mat ion about conf igurat i on requi rement s f or Ear t h l eakage reduct ion.
<3.5 mA
Table 5 - Electrical ratings: ultimate vacuum and extracted (700 torr) exhaust load condition
Electrical sub-system: ultimate vacuum (0.01 mbar) load rating*
*The el ect rical sub-syst em rat i ngs, det ail ed in Ta b l e 5 , assume an i nput short -circui t rat ing of 30 kA.
Input supply
voltage
Input supply
frequency Input supply current Input supply
power
Displayed power / motor
power†
†The displ ayed power consumpt ion, in Ta b l e 5 , i s a t ypi cal val ue and does NOT incl ude t he power
consumpt ion of t he pump’s int er nal auxi l iary power-suppl y. Thi s auxi l iar y power-supply i s used t o power t he
pump’s mot or-cont rol l er, pump-cont r ol l er and cust omer accessor ies.
(V) (a.c. , rms) (Hz) (A) (a. c., rms)
(A)
(Repetitive
Pe ak)
(kW) (kW)
200 50 4.0 16. 2 0.55 0. 52
200 60 3.9 15. 2 0.55 0. 52
240 50 3.3 13. 6 0.55 0. 52
240 60 3.2 12. 9 0.55 0. 52
380 50 2. 2 9. 0 0.55 0.52
380 60 2. 1 8. 8 0.55 0.52
460 50 1. 8 7. 7 0.55 0.52
460 60 1. 8 7. 5 0.55 0.52

A541-11-880 Issue A
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Edwards and t he Edwards logo are t rademarks of Edwards Limit ed.
Technical dat a
Table 6 - Electrical ratings: full load conditions
Electrical sub-system: continuous / 100% full load ratings*
*The el ect rical sub-syst em rat i ngs, det ail ed in Ta b l e 6 , assume an input short -circuit r at i ng of 30 kA.
Input supply
voltage
Input supply
frequency Input supply current Input supply
power
Displayed power / motor
power†
†The displ ayed power consumpt i on, in Ta b l e 6 , does NOT i nclude t he power consumpt ion of t he pump’s
i nt er nal auxi l i ar y pow er-suppl y. Thi s auxi l i ar y pow er-suppl y i s used t o power t he pump’s mot or-cont r ol ler,
pump-cont r oll er and cust omer accessor ies.
(V) (a.c. , rms) (Hz) (A) (a. c., rms)
(A)
(Repetitive
Pe ak)
(kW) (kW)
200 50 9.5 36. 2 1. 65 1.53
200 60 10. 4 38.9 1.65 1.53
240 50 9.3 35. 8 1. 65 1.53
240 60 9.0 33. 7 1. 65 1.53
380 50 5.8 22. 5 1. 65 1.53
380 60 5.7 21. 5 1. 65 1.53
460 50 4.8 18. 8 1. 65 1.53
460 60 4.8 18. 1 1. 65 1.53
Table 7 - Electrical ratings: over-load condition (175% full load for 60s)
Electrical sub-system: over-load ratings*
*The el ect r ical sub-syst em r at i ngs, det ail ed in Ta b l e 7 , assume an input short -circui t rat i ng of 30 kA.
Input supply
voltage
Input supply
frequency Input supply current Input supply
power Displayed power / motor power†
†The Di spl ayed Power consumpt i on, i n Ta b l e 7 , does NOT i nclude t he power consumpt i on of t he pump’s
int er nal auxil iar y power-suppl y. Thi s auxil iar y power-suppl y is used t o power t he pump’ s mot or-cont r ol ler,
pump-cont rol l er and cust omer accessori es.
(V) (a. c., rms) (Hz) (A) (a. c., rms)
(A)
(Repetitive
peak)
(kW) (kW)
200 50 15. 1 52.9 2. 85 2.62
200 60 15. 3 54.1 2. 85 2.62
240 50 13. 4 49.2 2. 85 2.62
240 60 14. 5 52.8 2. 85 2.62
380 50 9.9 36. 6 2.85 2.62
380 60 9.6 34. 6 2.85 2.62
460 50 8.2 30. 2 2.85 2.62
460 60 8.0 28. 9 2.85 2.62

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Edwards and t he Edwards logo are t rademarks of Edwards Limit ed.
Technical dat a
A541-11-880 Issue A
2. 4 Electrical connections and cables
Table 8 - Branch circuit protection / fusing
Description Rating Units
Minimum fuse current rat ing 16 - (200 – 240 V a. c. , rms / 50 – 60 Hz)
10 - (380 – 460 V a.c., rms / 50 – 60 Hz)
A
Maximum f use current rat ing 32 - (200 – 460 V a.c. , rms / 50 – 60 Hz) A
Minimum fuse current breaking capacit y 30 kA
Maximum f use current breaking capacit y 200 kA
Fuse volt age rat ing, a. c. , rms 600 V
Recommended UL f use cl ass*
*UL 248 and CSA C22. 2 No. 248 low vol t age Nor t h Amer ican Fuses: t he recommended f uses pr ovide SLOW
pr ot ect ion f rom induct ive and hi ghl y i nduct ive l oads. Thi s appl ies t o cir cui t s f or mot or s, t r ansf or mer s,
light ing and so f ort h.
CC, G, J, or RK5
Recommended IEC f use t ype†
†IEC 60269 low vol t age f uses: t he r ecommended f use t ype, gG, i s a gener al purpose f use essent ial ly f or
conduct or pr ot ect ion.
gG
Table 9 - Electrical connections
Description Mating connector description / external supply rating Internal supply
rat ing
Mains connect ion
ref er t o inst al lat ion sect ion f or
wiring diagram
Han-Modular®Compact :
40 A; 2. 5 – 8 mm2
Et hernet connect ion St andard RJ45 t ype or Neut rik®Et herCon® RJ45 (IEEE802.3i 10 Base
T Et hernet )
Syst em/ PDT int erf ace XLR t ype 5-way plug 24Vdc, 750mA*
EMS XLR t ype 6-way pl ug
Ext ernal emergency st op swit ch:
1 – supply; 2 – ret urn
24 V d. c. , 100 mA
Comms 24 V supply:
5 – supply; 6 – ret urn
24 V d. c. , 750 mA*
Accessory int erf ace 15-way D-Type socket
Analogue measurement f or wat er
f low met er:
Pi n 1 – i nput ; Pi n 5 – com m on
Act ive accessory modul e:
Pin 3 – RS485 (A); Pin 10 – RS485 (B)
Pump running st at us cont act s:
Pin 6 – Dry pump running
(normally open)
Pin 15 – Running common
30 V a.c. , 1A, 60 V d. c., 0. 55A
Gat e valve:
Pin 4 – Gat e valve drive t ransist or
(open collect or)
Gat e valve posit ion sense:
Pin 7 – ‘ Cl osed’ ; Pin 8 – ‘ Open’

A541-11-880 Issue A
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Technical dat a
Pow er sup pl i es:
Pin 12 – Accessory 24 V supply
(st andby)
Pin 13 – Accessory 24 V supply
(main)†
Pin 5 – 0 V supply common
24 V d. c. , 750 mA*
24 V d. c. , 200 mA
Serial comms:
Pin 9 – RS232 Transmit
Pin 11 – RS232 Receive
Tool int erf ace connect ion (if f it t ed) Ref er t o Sect ion 3. 10 Nominal volt age
rat ing 24 V
*The Syst em int er f ace, t he EMS int er f ace and t he Accessory int erf ace gi ve a combi ned cur r ent r at ing of
750 mA.
†Thi s suppl y wil l be disconnect ed i n t he event of an emer gency st op.
Table 10 - Input supply wire assembly
Description Rating Units
Minimum conduct or cross sect ional area
6. 0 / 10
(200 – 240 V a. c. , rms / 50 – 60 Hz)
2. 5 / 12
(380 – 460 V a. c. , rms / 50 – 60 Hz)
mm2/ AWG
Conduct or wire t ype St randed wires
Conduct or insul at ion min t emperat ure rat ing 75 °C
Ta bl e 9 - El e ct r i c al connections (continued)
Description Mating connector description / external supply rating Internal supply
rat ing

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Technical dat a
A541-11-880 Issue A
2. 5 Cooling water data
2. 6 Nitrogen purge system (iXL120N series pumps)
Table 11 - Water cooling system data
Description Rating Units
Maximum supply pressure 6.9
100
barg
psig
Minimum supply pressure 2. 5
36
barg
psig
Minimum flow rat e required*
*The t abl e specif ies minimum wat er f low rat e t hat is r equired at 30 ° C cool ing wat er. The wat er f low
rat e can be r educed if col der wat er is suppl ied. Cont act Edwar ds f or addi t i onal i nf ormat ion. Maxi mum f low
of 5 l mi n-1 t o prevent condensat ion at 10 ° C cool ing wat er.
1lmin
-1
Cooling-wat er supply t emperat ure r ange 10 – 30 °C
Wat er t ype Treat ed or non-corrosive indust rial
Maximum part icle size 0. 03 mm2
Acidit y 6. 5 t o 8.0 pH
Hardness < 100 ppm of CaCO3
(<100 mg of CaCO3per lit re)
Resist ivit y 0. 001 ≤ρ≤1Mohm-cm
Soli ds (t ur bidit y) < 100 ppm
Mat erials in cont act wit h cool ing wat er St ainless st eel, polyamide,
f luoroelast omer, nit rile, PVDF and PTFE
Wat er inlet connect ion per cust omer specif icat ion
Wat er out l et connect ion per cust omer specif icat ion
Table 12 - Nitrogen supply
Gas Module Items Reference data
Nit rogen suppl y int erf ace 1/ 4 inch (6.35 mm) t ube
Maximum supply pressure 7 barg, 7 x 105Pa, 100 psig
Minimum supply pressure 3. 0 barg, 3 x 105Pa, 45 p si g
Minimum purit y ISO 8573 solids class 1
Typical f low at 3.0 bar 4 sl m

A541-11-880 Issue A
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