Guildline 6530 Series User manual

OPERATORS MANUAL
FOR
6530 SERIES
DIGITAL TERAOHM BRIDGE-METER
NOTICE
The contents and information contained in this manual are proprietary to Guildline
Instruments Limited. They are to be used only as a guide to the operation and
maintenance of the equipment with which this manual was issued and may not be
duplicated or transmitted by any means, either in whole or in part, without the written
permission of Guildline Instruments Limited.
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TABLE OF CONTENTS
1. INTRODUCTION...................................................................................................1-1
1.1. FUNCTION DESCRIPTION...............................................................................................................1-1
1.1.1. PHYSICAL DESCRIPTION..............................................................................................................1-2
1.1.2. PRINCIPLE OF OPERATION...........................................................................................................1-3
1.1.3. MODES OF OPERATION.................................................................................................................1-4
1.1.4. CIRCUIT DISCUSSION....................................................................................................................1-5
2. INSTALLATION....................................................................................................2-1
2.1. INSTALLATION ..................................................................................................................................2-1
2.2. PRELIMINARIES ................................................................................................................................2-1
2.3. PRECAUTIONS....................................................................................................................................2-3
2.4. CONTROLS AND INDICATORS.......................................................................................................2-3
2.4.1. SWITCH FUNCTIONS......................................................................................................................2-4
2.4.1.1. Rear Panel POWER Entry.........................................................................................................2-4
2.4.1.2. Front Panel KEYPAD...............................................................................................................2-4
2.4.1.3. Front Panel Menu Navigation Keys..........................................................................................2-4
2.4.1.4. Front Panel Programmable Function Keys................................................................................2-4
2.4.2. DISPLAY ...........................................................................................................................................2-4
2.4.3. CONNECTORS..................................................................................................................................2-4
2.4.3.1. SOURCE CONNECTOR..........................................................................................................2-5
2.4.3.2. INPUT CONNECTOR..............................................................................................................2-5
2.4.4. REAR PANEL CONTROLS..............................................................................................................2-6
2.4.4.1. IEEE-488 INTERFACE............................................................................................................2-6
2.4.4.2. RS232 INTERFACE.................................................................................................................2-6
2.4.4.3. Ground Terminal.......................................................................................................................2-6
2.4.4.4. PRESSURE...............................................................................................................................2-6
2.4.4.5. RH/TEMP .................................................................................................................................2-7
2.4.4.6. LINE INPUT CONNECTOR....................................................................................................2-7
2.4.4.7. EXTERNAL TRIGGER CONNECTOR..................................................................................2-7
2.4.4.8. INTERLOCK CONNECTOR...................................................................................................2-7
3. QUICK MEASUREMENT GUIDE.........................................................................3-1
3.1. RESISTANCE MEASUREMENT.......................................................................................................3-1
3.1.1. RESISTANCE MEASUREMENT PROCEDURE ............................................................................3-1
3.1.2. 2-TERMINAL RESISTANCE CONNECTION SCHEMATIC.........................................................3-2
3.1.3. 3-TERMINAL RESISTANCE CONNECTION SCHEMATIC.........................................................3-3
3.2. BRIDGE VS DIRECT MEASUREMENT..........................................................................................3-4
3.3. CURRENT MEASUREMENT.............................................................................................................3-7
3.3.1. CURRENT MEASUREMENT PROCEDURE..................................................................................3-7
3.3.2. CURRENT SOURCE CONNECTION SCHEMATIC ......................................................................3-8

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4. INSTRUMENT OPERATION ................................................................................4-1
4.1. BASIC MENU OPERATION...............................................................................................................4-1
4.1.1. Menu System......................................................................................................................................4-1
4.1.2. Key functions......................................................................................................................................4-1
4.1.2.1. Navigation keys (up/down, left/right arrow).............................................................................4-2
4.1.3. Select Mode........................................................................................................................................4-3
4.1.4. Edit Mode ...........................................................................................................................................4-4
4.2. MAIN MENU.........................................................................................................................................4-4
4.3. Measurement Menu...............................................................................................................................4-5
4.4. Ohms Measurement Menu ...................................................................................................................4-5
4.4.1. Ohms Setup.........................................................................................................................................4-7
4.4.2. Ohms Parameters Menu......................................................................................................................4-9
4.4.3. RESISTANCE, MANUAL RANGING ...........................................................................................4-10
4.4.4. Control Menu....................................................................................................................................4-12
4.4.5. Trace.................................................................................................................................................4-13
4.4.6. Timers...............................................................................................................................................4-14
4.4.7. Profiles..............................................................................................................................................4-14
4.4.8. View..................................................................................................................................................4-16
4.4.8.1. Summary.................................................................................................................................4-16
4.4.8.2. Detail Graph............................................................................................................................4-17
4.4.8.3. Detail.......................................................................................................................................4-18
4.4.8.4. Window...................................................................................................................................4-18
4.5. Current - MEASURING PICOAMPERES.......................................................................................4-19
4.5.1. AUTORANGING - Current .............................................................................................................4-20
4.5.2. MANUAL RANGING - Current......................................................................................................4-20
4.6. Surface Resistivity...............................................................................................................................4-22
4.6.1. Surface Resistivity Configure...........................................................................................................4-23
4.7. Volume Resistivity...............................................................................................................................4-23
4.7.1. Volume Resistivity Thickness Setup ................................................................................................4-24
4.7.2. Volume Resistivity Configure ..........................................................................................................4-24
4.8. Configure..............................................................................................................................................4-25
4.8.1. GPIB.................................................................................................................................................4-26
4.8.2. RS232 ...............................................................................................................................................4-27
4.8.3. Sensors..............................................................................................................................................4-28
4.8.4. Sys Time...........................................................................................................................................4-28
4.9. Sofcal.....................................................................................................................................................4-28
4.9.1. User...................................................................................................................................................4-29
4.9.1.1. Calibration Coefficients ..........................................................................................................4-29
4.9.1.2. Self Test ..................................................................................................................................4-30
4.9.2. Calibrate............................................................................................................................................4-31
4.9.2.1. Utilities....................................................................................................................................4-31
4.9.2.2. Calibration Coefficient Values................................................................................................4-36
4.9.2.3. Reference Values.....................................................................................................................4-39
4.9.2.4. Sensors ....................................................................................................................................4-43

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4.9.3. Diagnostics .......................................................................................................................................4-45
4.9.3.1. Digital PS................................................................................................................................4-45
4.9.3.2. Analog PS................................................................................................................................4-46
4.9.3.3. Relay Test................................................................................................................................4-46
4.9.3.4. Voltage Test............................................................................................................................4-46
4.9.3.5. External Input..........................................................................................................................4-47
4.9.3.6. DAC7548 Calibrate.................................................................................................................4-47
4.9.4. Password...........................................................................................................................................4-47
4.10. Menu System Hierarchy Diagrams....................................................................................................4-48
5. REMOTE CONTROL............................................................................................5-1
5.1. INTERFACES .......................................................................................................................................5-1
5.2. IEEE-488 (GPIB) INTERFACE ..........................................................................................................5-1
5.2.1. CONTROLLER..................................................................................................................................5-2
5.2.2. IEEE-488 RESPONSES.....................................................................................................................5-2
5.2.3. INTERCONNECTING CABLE AND IEEE-488 CONNECTOR.....................................................5-2
5.2.4. TYPICAL SYSTEM...........................................................................................................................5-2
5.2.5. ADDRESS AND TALK/LISTEN SELECTION................................................................................5-3
5.2.6. IEEE-488 ELECTRICAL INTERFACE............................................................................................5-3
5.2.7. IEEE-488 INPUT BUFFERING.........................................................................................................5-4
5.2.8. IEEE-488 OUTPUT BUFFERING.....................................................................................................5-4
5.2.9. IEEE-488 DEADLOCK .....................................................................................................................5-5
5.3. RS-232C INTERFACE .........................................................................................................................5-5
5.3.1. RS-232C RESPONSES ......................................................................................................................5-6
5.4. COMMAND LANGUAGE...................................................................................................................5-6
5.4.1. GENERAL SYNTAX FOR COMMANDS .......................................................................................5-6
5.4.2. GENERAL SYNTAX FOR NUMBERS............................................................................................5-7
5.4.3. REMOTE AND LOCAL OPERATION.............................................................................................5-7
5.4.4. LOCAL...............................................................................................................................................5-7
5.4.5. REMOTE............................................................................................................................................5-7
5.4.6. REMOTE WITH LOCKOUT.............................................................................................................5-8
5.5. PROGRAMMING COMMAND SUMMARY....................................................................................5-9
5.5.1. Standard System Commands ............................................................................................................5-10
5.5.2. Calibration Commands.....................................................................................................................5-12
5.5.3. Configuration Commands.................................................................................................................5-13
5.5.4. Measurement Commands .................................................................................................................5-13
5.5.5. Trace Commands..............................................................................................................................5-15
5.5.6. Trigger Commands...........................................................................................................................5-16
5.6. REMOTE COMMANDS....................................................................................................................5-17
5.6.1. *CLS - CLEAR STATUS COMMAND ..........................................................................................5-17
5.6.2. *ESE <u> - SET EVENT STATUS ENABLE REGISTER.............................................................5-17
5.6.3. *ESE? - EVENT STATUS ENABLE QUERY................................................................................5-17
5.6.4. *ESR? - EVENT STATUS REGISTER QUERY............................................................................5-17
5.6.5. *IDN? - IDENTIFICATION QUERY..............................................................................................5-18
5.6.6. *OPC - OPERATION COMPLETE.................................................................................................5-18
5.6.7. *OPC? - OPERATION COMPLETE QUERY ................................................................................5-18
5.6.8. *OPT? - REPORT AVAILABLE OPTIONS...................................................................................5-19
5.6.9. *RST - DEVICE RESET..................................................................................................................5-19

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5.6.10. *SRE <u> - SERVICE REQUEST ENABLE COMMAND.......................................................5-19
5.6.11. *SRE? - SERVICE REQUEST ENABLE QUERY ....................................................................5-19
5.6.12. *STB? - STATUS BYTE QUERY..............................................................................................5-19
5.6.13. *TST? - QUERY RESULTS OF SELF TEST.............................................................................5-20
5.6.14. *WAI - WAIT-TO- CONTINUE COMMAND ..........................................................................5-21
5.6.15. SYSTem:ATMospheric:PRESsure? –DISPLAY ATMOSPHERIC PRESSURE......................5-21
5.6.16. SYSTem:CHECk:SUM? –DISPLAY CHECKSUMS................................................................5-21
5.6.17. SYSTem:COMMunications:GPIB –UPDATE GPIB CONFIG .................................................5-21
5.6.18. SYSTem:COMMunications:GPIB?.............................................................................................5-21
5.6.19. SYSTem:COMMunications:SERial ............................................................................................5-21
5.6.20. SYSTem:COMMunications:SERial?...........................................................................................5-22
5.6.21. SYSTem:DATE –UPDATE SYSTEM DATE ...........................................................................5-22
5.6.22. SYSTem:DATE? –DISPLAY SYSTEM DATE ........................................................................5-22
5.6.23. SYSTem:HUMidity? –DISPLAY HUMIDITY..........................................................................5-22
5.6.24. SYSTem:KEY? –DISPLAY LAST KEY STROKE...................................................................5-22
5.6.25. SYSTem:MODE –SET SYSTEM MODE..................................................................................5-22
5.6.26. SYSTem:MODE? –DISPLAY SYSTEM MODE......................................................................5-22
5.6.27. SYSTem: SERial:NUMBer –SET SYSTEM SERIAL NUMBER.............................................5-22
5.6.28. SYSTem:SERial:NUMBer? –DISPLAY SYSTEM SERIAL NUMBER ..................................5-23
5.6.29. SYSTem:STATe - UPDATE SYSTEM STATE........................................................................5-23
5.6.30. SYSTem:STATe? –DISPLAY SYSTEM STATE......................................................................5-23
5.6.31. SYSTem:TEMPerature? –DISPLAY TEMPERATURE............................................................5-23
5.6.32. SYSTem:TERSe –SET SYSTEM TO TERSE...........................................................................5-24
5.6.33. SYSTem:TIME –SET SYSTEM TIME......................................................................................5-24
5.6.34. SYSTem:TIME? –DISPLAY SYSTEM TIME..........................................................................5-24
5.6.35. SYSTem:VERSion? –DISPLAY SYSTEM VERSION.............................................................5-24
5.6.36. SYSTem:VERBose –SET SYSTEM TO VERBOSE.................................................................5-24
5.6.37. CALibration:CAPacitor –UPDATE COEFFICIENT .................................................................5-24
5.6.38. CALibration:CAPacitor? –DISPLAY COEFFICIENTS............................................................5-24
5.6.39. CALibration:DATE –UPDATE LAST CALIBRATION DATE ...............................................5-24
5.6.40. CALibration:DATE? –DISPLAY LAST CALIBRATION DATE.............................................5-25
5.6.41. CALibration:OUTPut:VOLTage –UPDATE COEFFICIENTS.................................................5-25
5.6.42. CALibration:OUTPut:VOLTage? –DISPLAY COEFFICIENTS ..............................................5-25
5.6.43. CALibration:PARameters:PROTection.......................................................................................5-25
5.6.44. CALibration:PARameters:PROTection?.....................................................................................5-25
5.6.45. CALibration:PARameters:RESistor ............................................................................................5-26
5.6.46. CALibration:PARameters:RESistor?...........................................................................................5-26
5.6.47. CALibration:PROTection:RESistor.............................................................................................5-26
5.6.48. CALibration:PROTection:RESistor?...........................................................................................5-27
5.6.49. CALibration:REFerence:RESistor...............................................................................................5-27
5.6.50. CALibration:REFerence:RESistor?.............................................................................................5-27
5.6.51. CALibration:SERial:NUMBer.....................................................................................................5-27
5.6.52. CALibration:SERial:NUMBer?...................................................................................................5-27
5.6.53. CALibration:SPEC:CLEar...........................................................................................................5-27
5.6.54. CALibration:SPEC?.....................................................................................................................5-27
5.6.55. CALibration:SYSTem:COEFficient............................................................................................5-27
5.6.56. CALibration:SYSTem:COEFficient? ..........................................................................................5-28
5.6.57. CALibration:SYSTem:PARameters ............................................................................................5-28
5.6.58. CALibration:SYSTem:PARameters?...........................................................................................5-28
5.6.59. CALibration:SYSTem:REV ........................................................................................................5-28
5.6.60. CALibration:SYSTem:REV?.......................................................................................................5-28
5.6.61. CALibration:THReshold:VOLTage ............................................................................................5-28
5.6.62. CALibration:THReshold:VOLTage?...........................................................................................5-28
5.6.63. CONFigure:TEST:VOLTage.......................................................................................................5-28
5.6.64. MEASure –START/STOP MEASUREMENT...........................................................................5-29
5.6.65. MEASure?....................................................................................................................................5-29

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5.6.66. MEASure:UNITS –SET CURRENT MEASUREMENT MODE..............................................5-29
5.6.67. MEASure:UNITS? –DISPLAY MEASUREMENT MODE......................................................5-29
5.6.68. READ:RESistance? .....................................................................................................................5-29
5.6.69. READ:CURRent?........................................................................................................................5-29
5.6.70. READ:SURFace:RESistivity?.....................................................................................................5-29
5.6.71. READ:VOLume:RESistivity? .....................................................................................................5-29
5.6.72. SENSe:ATMospheric:PRESSure?...............................................................................................5-29
5.6.73. SENSe:CAPacitor –SET CURRENT CAPACITOR..................................................................5-29
5.6.74. SENSe:CAPacitor? –DISPLAY CURRENT CAPACITOR.......................................................5-30
5.6.75. SENSe:HUMidity?.......................................................................................................................5-30
5.6.76. SENSe:INTegration:TIME?.........................................................................................................5-30
5.6.77. SENSe:INTEGrator:THREShold.................................................................................................5-30
5.6.78. SENSe:INTegrator:THREShold? ................................................................................................5-30
5.6.79. SENSe:MAXimum:VOLTage.....................................................................................................5-30
5.6.80. SENSe:MAXimum:VOLTage? ...................................................................................................5-30
5.6.81. SENSe:OUTput:VOLTage ..........................................................................................................5-30
5.6.82. SENSe:OUTput:VOLTage?.........................................................................................................5-30
5.6.83. SENSe:POLarity..........................................................................................................................5-30
5.6.84. SENSe:POLarity..........................................................................................................................5-31
5.6.85. SENSe:RANGe............................................................................................................................5-31
5.6.86. SENSe:RANGe?..........................................................................................................................5-31
5.6.87. SENSe:REMote:INTerlock..........................................................................................................5-31
5.6.88. SENSe:REMote:INTerlock?........................................................................................................5-31
5.6.89. SENSe:RESistivity:THICkness ...................................................................................................5-31
5.6.90. SENSe:RESistivity:THICkness?..................................................................................................5-31
5.6.91. SENSe:RESistivity:AREA...........................................................................................................5-31
5.6.92. SENSe:RESistivity:AREA?.........................................................................................................5-31
5.6.93. SENSe:RESistivity:PERimeter....................................................................................................5-32
5.6.94. SENSe:RESistivity:PERimeter? ..................................................................................................5-32
5.6.95. SENSe:RESistivity:DISTance .....................................................................................................5-32
5.6.96. SENSe:RESistivity:DISTance?....................................................................................................5-32
5.6.97. SENSe:TEMPerature? .................................................................................................................5-32
5.6.98. TRACe:CLEar –CLEAR DETAIL TRACE BUFFER...............................................................5-32
5.6.99. TRACe:DATA? –DUMP TRACE BUFFER..............................................................................5-32
5.6.100. TRACe:DIAGnostics...................................................................................................................5-33
5.6.101. TRACe:DIAGnostics?.................................................................................................................5-33
5.6.102. TRACe:MODE............................................................................................................................5-33
5.6.103. TRACe:MODE? ..........................................................................................................................5-33
5.6.104. TRACe:ELEMents.......................................................................................................................5-33
5.6.105. TRACe:ELEMents?.....................................................................................................................5-33
5.6.106. TRACe:TRENd:DATA? –DUMP SUMMARY BUFFER.........................................................5-33
5.6.107. TRACe:TRENd:SUM? - DUMP SUMMARY STATISTICS....................................................5-33
5.6.108. TRACe:TRENd:CLEar –CLEAR SUMMARY STATISTICS ..................................................5-33
5.6.109. TRACe:TSTamp:TYPE...............................................................................................................5-34
5.6.110. TRACe:TSTamp:TYPE?.............................................................................................................5-34
5.6.111. TRIGger:SOURce........................................................................................................................5-34
5.6.112. TRIGger:SOURce?......................................................................................................................5-34
5.6.113. TRIGger:DELay ..........................................................................................................................5-34
5.6.114. TRIGger:DELay?.........................................................................................................................5-34
5.6.115. TRIGger:SOAK...........................................................................................................................5-34
5.6.116. TRIGger:SOAK? .........................................................................................................................5-35
5.6.117. TRIGger:SENSor:TIMer .............................................................................................................5-35
5.6.118. TRIGger:SENSor:TIMer?............................................................................................................5-35

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6. VERIFICATION AND CALIBRATION ..................................................................6-1
6.1. CALIBRATION DESCRIPTION........................................................................................................6-1
6.1.1. ENVIRONMENTAL CONDITIONS ................................................................................................6-1
6.1.2. INITIAL CONDITIONS ....................................................................................................................6-1
6.1.3. RECOMMENDED TEST EQUIPMENT...........................................................................................6-1
6.1.4. CHECK CALIBRATION REPORT...................................................................................................6-1
6.1.4.1. CALIBRATION COEFFICIENTS...........................................................................................6-2
6.1.5. TEST VOLTAGE VERIFICATION..................................................................................................6-2
6.1.6. OPERATIONAL CHECK..................................................................................................................6-3
6.2. CALIBRATION PROCEDURE ..........................................................................................................6-3
6.2.1. ENVIRONMENTAL CONDITIONS ................................................................................................6-3
6.2.2. INITIAL CONDITIONS ....................................................................................................................6-3
6.2.3. RECOMMENDED TEST EQUIPMENT...........................................................................................6-4
6.2.4. OUTPUT VOLTAGE CALIBRATION.............................................................................................6-4
6.2.5. AUTO CALIBRATION.....................................................................................................................6-5
6.2.6. CAPACITOR CALIBRATION..........................................................................................................6-6
6.2.7. THRESHOLD CALIBRATION.........................................................................................................6-7
6.2.8. ZERO COEFFICIENT CALIBRATION............................................................................................6-9
6.3. CALIBRATION REPORT.................................................................................................................6-10
6.4. CALIBRATION THEORY................................................................................................................6-12
6.4.1. Rprotection COEFFICIENT.............................................................................................................6-12
6.4.2. Vtest COEFFICIENTS.....................................................................................................................6-12
6.4.3. Cintegrator COEFFICIENTS ...........................................................................................................6-13
6.4.4. Tintegrator COEFFICIENTS............................................................................................................6-13
7. TROUBLE SHOOTING AND MAINTENANCE.....................................................7-1
7.1. PREVENTATIVE MAINTENANCE..................................................................................................7-1
7.2. NON VOLATILE MEMORY CHECKSUM......................................................................................7-2
7.3. TROUBLESHOOTING........................................................................................................................7-2
7.4. ERROR MESSAGES............................................................................................................................7-3
8. APPENDICES.......................................................................................................8-1
8.1. GENERAL SPECIFICATIONS...........................................................................................................8-1
8.2. RESISTANCE MEASUREMENT SPECIFICATIONS....................................................................8-2
8.3. PICOAMMETER MEASUREMENT SPECIFICATIONS ..............................................................8-3
8.4. RESOLUTION ......................................................................................................................................8-3
8.5. SYSTEM PARAMETER......................................................................................................................8-4
8.6. SAMPLE BUS CONTROL PROGRAM.............................................................................................8-7

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8.7. MEASUREMENT TECHNIQUE......................................................................................................8-10
8.7.1. LARGE VALUE RESISTOR MEASUREMENT TECHNIQUE....................................................8-10
8.7.2. ENVIRONMENT.............................................................................................................................8-10
8.7.3. SAMPLE PREPARATION..............................................................................................................8-10
8.7.4. TEST LEAD ROUTING..................................................................................................................8-10
8.7.5. CAPACITIVE TEST SAMPLES.....................................................................................................8-10
8.8. OTHER FEATURES ..........................................................................................................................8-11
8.9. ACCESSORY EQUIPMENT.............................................................................................................8-12
8.9.1. Environmental Monitor Model 65220 ..............................................................................................8-12
8.9.1.1. Humidity .................................................................................................................................8-12
8.9.1.2. RH Sensor Specification .........................................................................................................8-12
8.9.1.3. Precision Centigrade Temperature Sensor ..............................................................................8-13
8.9.1.4. Pressure Sensor .......................................................................................................................8-13
8.9.1.5. Integrated Pressure Sensor Specifications...............................................................................8-13
8.9.2. Surface/Volume Resistivity Test Fixture Model 65221....................................................................8-14
8.9.3. Calibration Resistors.........................................................................................................................8-14
8.9.4. Small Shielded Enclosure.................................................................................................................8-16
8.9.5. Large Shielded Enclosure.................................................................................................................8-16
8.9.6. Lead Set Model 65225......................................................................................................................8-16
8.9.7. Calibration Kit Model 65226............................................................................................................8-17
8.9.8. Zero Link Model 65224....................................................................................................................8-17
8.9.9. IEEE Interface Accessories ..............................................................................................................8-17
8.9.10. Service Manual SM6530..............................................................................................................8-17
8.9.11. 6530/RC Report of Calibration....................................................................................................8-17
8.9.12. 6564 High Resistance Scanner.....................................................................................................8-17

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LIST OF FIGURES
FIGURE 1-1: 6530 FRONT PANEL......................................................................................................................1-2
FIGURE 1-2: 6530 REAR PANEL........................................................................................................................1-2
FIGURE 1-3: 6530 SIMPLIFIED BLOCK DIAGRAM......................................................................................1-3
FIGURE 1-4: 6530 OPERATIONAL INTEGRATOR ........................................................................................1-6
FIGURE 2-1: OPENING THE POWER RECEPTACLE...................................................................................2-2
FIGURE 2-2: 6530 FRONT PANEL......................................................................................................................2-3
FIGURE 2-3: 6530 FRONT PANEL CONNECTORS.........................................................................................2-4
FIGURE 2-4: 6530 REAR PANEL CONNECTORS ...........................................................................................2-6
FIGURE 2-5: TYPICAL EXTERNAL TRIGGER CIRCUITS..........................................................................2-8
FIGURE 2-6: TYPICAL INTERLOCK CIRCUIT CONFIGURATION..........................................................2-8
FIGURE 3-1: 2-TERMINAL RESISTANCE MEASUREMENT SCHEMATIC.............................................3-2
FIGURE 3-2: 3-TERMINAL RESISTANCE MEASUREMENT SCHEMATIC.............................................3-3
FIGURE 3-3: CURRENT SOURCE MEASUREMENT SCHEMATIC............................................................3-8
FIGURE 4-1: OHMS HIERARCHY...................................................................................................................4-49
FIGURE 4-2: CURRENT HIERARCHY............................................................................................................4-50
FIGURE 4-3: RESISTIVITY HIERARCHY......................................................................................................4-51
FIGURE 4-4: SETUP HIERARCHY ..................................................................................................................4-52
FIGURE 4-5: SOFCAL HIERARCHY...............................................................................................................4-53
FIGURE 4-6: SOFCAL CAL. VALS. HIERARCHY........................................................................................4-54
FIGURE 4-7: SOFCAL DIAGNOSTIC HIERARCHY.....................................................................................4-55
FIGURE 5-1 : EVENT STATUS BIT OPERATION.........................................................................................5-16

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LIST OF TABLES
TABLE 2-1: POWER FUSE SELECTION...........................................................................................................2-2
TABLE 5-1 : IEEE-488 DEVICE CAPABILITIES..............................................................................................5-3
TABLE 5-2 : IEEE-488 PIN DESIGNATIONS.....................................................................................................5-4
TABLE 5-3 : RS232 PIN DESIGNATIONS...........................................................................................................5-5
TABLE 5-4 : REMOTE/LOCAL STATE TRANSITIONS..................................................................................5-8
TABLE 5-5 : EVENT STATUS REGISTER .......................................................................................................5-18
TABLE 5-6 : STATUS BYTE REGISTER..........................................................................................................5-20
TABLE 6-1: RECOMMENDED VERIFICATION TEST EQUIPMENT.........................................................6-1
TABLE 6-2: RECOMMENDED CALIBRATION TEST EQUIPMENT..........................................................6-4
TABLE 6-3: SAMPLE CALIBRATION REPORT FORMAT.........................................................................6-11
TABLE 8-1: GENERAL SPECIFICATIONS.......................................................................................................8-1
TABLE 8-2: RESISTANCE MEASUREMENT UNCERTAINTY....................................................................8-2
TABLE 8-3: CURRENT MEASUREMENT UNCERTAINTY (ALL MODELS).............................................8-3
TABLE 8-4: MEASUREMENT RESOLUTIONS (DIGITS)..............................................................................8-3
TABLE 8-5: DEFAULT SYSTEM PARAMETER..............................................................................................8-6
TABLE 8-6: CALIBRATION RESISTORS.......................................................................................................8-15
TABLE 8-7: IEEE INTERFACES.......................................................................................................................8-17

OM6530-C1-00
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1. INTRODUCTION
This manual provides complete information on the installation and operation of the Guildline
Instruments Model 6530 Digital TeraOhm Bridge-Meter. Also included is a general description
of the theory of operation together with instructions for calibration. The TeraOhm Bridge-Meter
is based on fundamental work performed by Dr. S. H. Tsao of the National Research Council of
Canada, and is manufactured by Guildline Instruments.
1.1. FUNCTION DESCRIPTION
The Guildline Model 6530 TeraOhm Bridge-Meter is a microprocessor based, fully automated,
high precision device for measuring high value resistances or very small DC currents. It
combines the proven technology of previous Guildline Teraohmmeters (i.e. Models 9520, 6500,
and 6520) with the latest in measurement circuitry and microprocessor technology. In bridge
operation, fully automated intercomparisons between multiple resistance standard of different
nominal values can be achieved using the 6564 High Resistance Scanner. For installation
instructions, refer to Section 2.
The main features of the model 6530 are:
- Direct reading operation with no external references required
- Bridge measurement operation allowing transfers from reference artifacts.
- Auto ranging from90 kΩ to 20 PΩ.
- Auto ranging from 10 mA to 100 fA.
- Built in GPIB and RS-232C interfaces.
- Fully controllable through the bus interfaces.
- Internal software routines for measurement error compensation.
- Extensive self-diagnostics.
-User-friendly interface.

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Figure 1-1: 6530 Front Panel
Figure 1-2: 6530 Rear Panel
1.1.1. PHYSICAL DESCRIPTION
The Guildline 6530 Digital TeraOhm Bridge-Meter is housed in a steel case for reduction
of electromagnetic emissions in compliance to CE standards, and to protect the
measurement circuitry from EMI. All indicators and frequently used controls are located
on the front panel together with two connectors for connection of the unknown resistor or
current. The power connection is made through a detachable 3-conductor power cord,
which plugs into the rear panel. Although the instrument is primarily intended for bench
top use, front panel flanges are supplied to allow it to be mounted in a standard 19-inch
cabinet.

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Figure 1-3: 6530 Simplified Block Diagram
1.1.2. PRINCIPLE OF OPERATION
The simplified block diagram of Figure 1-3 details the major components of the
TeraOhm Bridge-Meter.
When measuring resistance, a known DC test voltage is supplied by the 6530, which
causes a current to flow through the unknown resistor into an integrator. The magnitude
of this current is determined by the time required for the integrator output to pass
between two different threshold voltage points. Knowing the test voltage and magnitude
of the current, the microprocessor can determine the value of the unknown resistor. The
test voltage is selectable from 7 standard values in the range ± (1 to 1000) DC V. The
standard values are: ± (1; 3; 10; 30; 100; 300; 1000) DC V. Custom voltage values can
be provided upon request.
COMPARATO
R
CONTROL
THRESHOLD VOLTAGE
DETECTOR
+
-
27 pF
270 pF
2700 pF
10V
THRESHOLD
1V
THRESHOLD
0.1V
THRESHOLD
x
100
x
10
x
1.0
LOGIC
CONTROL
CONTROL
x -
1
INTEGRATOR
UNKNOWN RESISTANCE
OR CURRENT
MICROPROCESSOR AND MEMORY
GPIB
INTERFACE
TIME
MEASUREMENT
TEST VOLTAGE
POWER SUPPLY
DISPLA
Y
PANEL SWITCHES
RS232
INTERFACE
+/- 10 VOLT
REFERENC
E
CONTROL
CONTROL

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Unknown currents can be measured by connecting the unknown current source output
directly to the integrator input (the internal test voltage source is not used when
measuring currents).
The stability of the Model 6530 depends on the stability of the applied test voltage, the
integrator, the timing circuit and the threshold voltage detector at the integrator output.
The fixed deviations in the absolute values of these parameters are compensated during
calibration by using a software calibration routine in conjunction with a set of external
calibration resistors of known value. Guildline manufactures 9336 and 9337 calibration
resistors that are ideally suited for this purpose. Guildline also manufactures a 6636
Temperature Stabilized Resistor set that is suited to calibrate the 6530 in environments
where the temperature is not regulated to laboratory standards.
The Model 6530 is fully automated with an internal microprocessor to compute the
measurements and make the deviation compensations. The microprocessor can be
operated from the front panel manual controls or from either one of the two
communication control buses. The calculated value of the unknown resistor is displayed
on the front panel and is made available to instruments attached to either control bus.
The Model 6530 provides increased accuracy through integrated filtering options and
taking measurements with test voltage polarity alterations. The computed average is
displayed on the front panel and is made available to instruments on the control bus
(GPIB or RS-232C).
1.1.3. MODES OF OPERATION
The Model 6530 is fully automated for simplicity and convenience. When specific
measurement parameters are required the operator (or instruments on the control bus) can
manually configure the 6530.
The instrument can be set to take a continuous series of measurements or to take one
measurement for each sample request. A sample request can be made with an external
synchronizing signal fed to a rear panel connector or by the operator pressing a front
panel function key/push-button.
The number of resistance measurements made per data sample output (averaged), is user
selectable. The resistance test voltage polarity is selectable. When measuring current,
both polarities can also be accommodated by this selection.
The SOFCAL (software calibration) function permits the operator to calibrate the
instrument and edit the calibration date and the serial number of the instrument.

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1.1.4. CIRCUIT DISCUSSION
The Model 6530 TeraOhm Bridge-Meter measures high values of resistance by charging
a small capacitor through the resistance to be measured. An operational integrator is
shown in Figure 1-4. The equations for this integrator are as follows:
delta Vout(t) Vin (The equality is not exact
______________ = ______ but is extremely close when (1)
delta t R x C the voltage gain is high)
or:
Vin x delta t
R = _________________ (2)
C x delta Vout
Where delta t = a change in time and delta Vout = a change in output voltage Vout over time
delta t.
When current is being measured, Vin can be replaced by iR which simplifies (1) to the
form:
C x delta Vout
i = ________________
delta t (3)
In the Model 6530:
* Vin is the test voltage for resistance measurement.
* C is a stable capacitor selected from the nominal values of 27 pF, 270 pF or
2700 pF.
* delta Vout is the potential difference between two threshold voltages placed
symmetrically above and below ground (Vout = 2Vthresh where Vthresh is
selectable from 0.1 volt, 1 volt or 10 volts).
In equations (2) and (3), all terms are constant except R, i and delta t. Therefore
delta t is proportional to R or inversely proportional to the current i. During
normal operation the 6530 calculates the unknown resistance R or current i by
taking measurements of the time delta t.

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Figure 1-4: 6530 Operational Integrator

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2. INSTALLATION
2.1. INSTALLATION
This instrument was thoroughly tested and inspected before shipment and should be free from
damage when received. Inspect it carefully, verify that all items on the packing list are present
and check the instrument operation as soon as possible. Refer to the warranty card at the front of
this manual if any damage or deficiencies are found.
The 6530 TeraOhm Bridge-Meter is an instrument intended to be used in a laboratory
environment and is specified to be operated within an environmental temperature range of 23C
±5C with humidity levels in the range 40 % rH ± 10 % rH. Optimum performance is achieved
when the environmental temperature range is (23 ± 2) C. Higher humidity can degrade the
accuracy of the instrument. The 6530 must be mounted with an angle of inclination of no more
than 30. Where the TeraOhm Bridge-Meter is to be used in a rack, attach the mounting brackets
provided. To attach the rack mounting flanges (brackets), the original screws holding the
handles to the instrument are removed and the flanges attached over the handles with the longer
screws supplied. The instrument has to be supported in the rack/cabinet with adjustable support
angles or a support bar. In case of interference with other equipment mounted directly below the
instrument, the 4 feet must be removed. Install the unit in the rack.
2.2. PRELIMINARIES
The model 6530 has been shipped with the line input voltage set to 240 volts with the fuse
removed. The line input selectors must be set to the correct line voltage before power is applied
to the instrument. Remove the warning label positioned across the power entry only after setting
the proper operating voltage. The line input voltage selection must be set correctly. The settings
available are 100 V, 120 V, 220 V, and 240 V. Figure 2-1 details the line input voltage selector.
The instrument is supplied with a North American style line cord, unless otherwise specified at
time of order. Ensure that the line cord is plugged into a wall socket or extension cord that has a
protective or safety ground. Where 3-contact power supply outputs are not available, a suitable
protective ground connection must be made before switching the instrument power on. Any
interruption of the protective ground may possibly render the instrument unsafe.
To set the correct line input voltage pry open the power receptacle on the rear panel as shown in
Figure 2-1.

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100V
120V
220V
240V
100V
120V
220V
240V
EXPOSE LINE SELECTOR SLIDER
REMOVE SELECTOR (120V SHOWN)
PRY HERE TO REMOVE COVER
ROTATE SELECTOR AND REPOSITION
SLIDER TO DESIRED LINE INPUT
(240V SHOWN) AND REINSERT
REPLACE COVER
DISCONNECT POWER
Figure 2-1: Opening the Power Receptacle
Check to see that the fuses inserted in the receptacle correspond to the correct type specified in
Table 2-1.
Table 2-1: POWER FUSE SELECTION
Only fuses of the specified type are to be used. Set the voltage selector drum so that the proper
line voltage indication will be visible through the receptacle rear window when the receptacle
Line Voltage
Fuse Type Required
100 V
120 V
2 Amp (T)
(MDL_2A/250 V)
220 V
240 V
1 Amp (T)
(MDL-1A/250 V)