INTRODUCTION ............................................................................... 5
CHECKING PACKAGE CONTENTS....................................................... 5
SECURITY INFORMATION................................................................. 7
USAGE NOTES.................................................................................. 9
CHAPTER I OVERVIEW.................................................................... 12
1.1 INTRODUCTION ............................................................................. 12
1.2 PERFORMANCE CHARACTERISTICS ..................................................... 12
1.3 NAMES OF SECTIONS AND SUMMARY OF OPERATIONS ........................... 13
1.4 DIMENSIONS ................................................................................ 15
1.5 PAGE COMPOSITION....................................................................... 16
CHAPTER II PREPARATION BEFORE TESTING .................................. 19
2.1 TEST FLOW PREVIEW ...................................................................... 19
2.2 BASIC PARAMETER SETTING PROCESS ................................................. 21
2.3 INSPECTION BEFORE MEASUREMENT.................................................. 22
2.4 METHOD FOR CONNECTING TEST LINES .............................................. 23
2.5 METHOD FOR CONNECTING ELECTRODE BOXES .................................... 25
CHAPTER III BASIC SETTINGS.......................................................... 26
3.1 SET TEST VOLTAGE.......................................................................... 26
3.2 SET TEST RANGE ........................................................................... 26
3.3 SET TEST SPEED ............................................................................ 27
3.4 COMPARATOR FUNCTION................................................................. 27
3.5 RESPONSE MODE OF SORTING RESULTS............................................... 28
3.6 SURFACE RESISTIVITY ...................................................................... 29
3.8 LEAKAGE CURRENT MEASUREMENT .................................................. 34
CHAPTER IV MEASUREMENT ......................................................... 35
4.1 START-UP TEST .............................................................................. 35
4.2 TEST RANGE................................................................................. 35