ibss Group, Inc. GV10 Downstream Asher Series Use and care manual

ibss Group, Inc.
©2015
GV10x Downstream Asher
Operation and Safety Manual

Rev 2015-03-02 2
ibss Group, Inc.
1559B Sloat Blvd. 270
San Francisco, CA 94132
1.415.566.5774
1.415.566.9779 Fax
www.ibssgroup.com

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Warnings
The GV10x Controller and Source contain warning labels where appropriate
to identify potentially hazardous areas. Operation, installation and
maintenance should be performed by qualified personnel.
SHOCK
FIRE
High voltage is present.
To avoid possible shock or fire hazards, connection
of this product should be performed in compliance
with the ANSI electrical code.
RF
If the system is operated with open or loosely
attached panels and covers, RF radiation can be
emitted at unacceptable levels.
UV
When observing the plasma emission from the
plasma tube, one should wear UV-filtering glasses
since UV light is emitted.
NOTE: If the GV10x Source and/or Controller are used in a manner
not specified in this manual, the safety protection provided by the
equipment may be impaired.

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Warranty Statement
All ibss Group, Inc. products are warranted to the original purchaser against
defective materials or workmanship for a period of 3 (three) years from the
date of delivery. ibss Group, Inc. will, at its own option, repair or replace all
defective material returned [freight prepaid] during the warranty period,
provided the unit is properly repackaged and returned without damage from
abuse or mishandling. See repacking instructions in Section 2, Unpacking the
GV10x.
Proprietary Notice
This document is considered proprietary and confidential. For further
information please contact ibss Group, Inc.
GV10x System Certifications
The GV10x Downstream Asher has undergone rigorous testing and review for
the following certifications:
CB Test Certificate Ref. Number: US/5120/ITS-M1
Issued: 2015-02-25
SEMI S2-0706 / S8-0307 Certificate of Compliance
Document Number: 500158379F Issued: 2009-08-31
(Report Update: Document Number 101924218MPK-007, 2015-01-26)

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TABLE OF CONTENTS
Sections
1. Introduction ............................................................................................................................. 7
1.1 About the GV10x......................................................................................................................... 7
1.2 GV10x System Models................................................................................................................. 8
1.3. GV10x Controller Models ............................................................................................................ 9
1.4 GV10x Source Models ................................................................................................................. 9
2. Unpacking the GV10x........................................................................................................... 11
2.1. Unpacking and Inspection......................................................................................................... 11
2.2. Repacking for Shipping.............................................................................................................. 11
2.3. Recycling ................................................................................................................................... 11
3. Installing................................................................................................................................ 12
3.1. Facilities Requirements ............................................................................................................. 12
3.2. Connect GV10x Source to Vacuum Chamber ............................................................................ 12
3.3. Connect GV10x Source to Controller......................................................................................... 13
3.4. Select Ashing Gas ...................................................................................................................... 13
4. Operating............................................................................................................................... 14
4.1. How to Set Operating Parameters ............................................................................................ 14
4.2. How to Run the GV10x Downstream Asher .............................................................................. 19
4.3. How to Tune the GV10x Source ................................................................................................ 22
4.4. Changing the GV10x Asher Operating Pressure ........................................................................ 23
5. Shutting Down / Locking Out ............................................................................................... 25
5.1. Shutdown Procedure ................................................................................................................ 25
5.2. Lockout Procedure .................................................................................................................... 25
5.3. Release Procedure .................................................................................................................... 26
Appendices
Appendix A: Technical Specifications ..................................................................................... 27
A.1. GV10x Plasma Source (P3, P4, P5 models) ................................................................................ 27

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A.2. GV10x RF Controller (BT and 2U models).................................................................................. 27
Appendix B: Safety Considerations.......................................................................................... 28
B.1. Hazards Inherent in Equipment ................................................................................................ 28
B.2. Hazard Alerts: Location on Equipment and Meaning................................................................ 28
B.3. Inspection of System Equipment (GV10x Source and Controller) ............................................. 29
B.4. Safety Interlocks........................................................................................................................ 29
B.5. Training Requirements.............................................................................................................. 30
B.6. Emergency Contact Information ............................................................................................... 30
B.7. Applicable Laws and Regulations .............................................................................................. 30
Appendix C: GV10x Remote Control Specifications............................................................... 31
Appendix D: GV10x Remote Control Test Report................................................................... 33
Cables ................................................................................................................................................... 33
Operating Systems ................................................................................................................................ 33
Appendix E: GV10x Asher Source Patents.............................................................................. 34
Appendix F: Tables and Figures .............................................................................................. 35
Appendix G: Revision History.................................................................................................. 36
Appendix H: CB Test Certificate (copy) .................................................................................. 38

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1. Introduction
1.1 About the GV10x
The GV10x Downstream Asher is intended to be used on any analytical high vacuum tool where
hydrocarbon or carbon contamination prevents satisfactory quantitative and qualitative analysis.
When used with an oxygen containing gas such as room air, the GV10x Downstream Asher
oxidizes hydrocarbon [HC] contamination in these analytical chambers. The Downstream (DS)
Process can also be used with hydrogen gas if oxygen sensitive materials are present. It removes
gas phase HC contamination quickly and ashes surface HC contamination more slowly.
Analytical systems that examine samples of various material types with electron and ion beams
at high magnification, such as CDSEM, SEMs, FIBs, and TEMs, must be HC free to prevent the
HC contamination from obscuring sample details and preventing other spurious effects. Other
applications include XPS, Synchrotron mirror deposit cleaning, etc.
Energetic ions and electrons produced within the GV10x Source by an inductively coupled RF
field recombine and neutralize approximately 4 to 6 inches from the Source exhaust. Beyond
this point, in the downstream, there are no ionic species. The long-lived oxygen radicals react
with hydrocarbons to form CO, CO2and H2O, and these residual molecules are pumped out of
the vacuum chamber. Unlike cold trapping, hydrocarbons are permanently removed from the
chamber, not merely captured on a cold surface.
The GV10x Downstream Ashing process is not “plasma cleaning” as commonly understood.
These standard plasma cleaners typically create kinetic bombardment or sputtering to clean
samples; this process can heat and damage specimens, detectors, mirrors or other delicate

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surfaces. With Downstream Ashing, surfaces and specimens are quickly cleaned and remain free
of spurious artifacts frequently seen with typical “plasma cleaning”.
Oxygen [O] radicals are the active species produced using ambient air or oxygen gas mixtures as
the plasma gas. The vacuum chamber on which the Source is mounted will be cleaned as the O
radicals are transported downstream from the Source to the pumping port. The steady-state
pressure in the chamber during GV10x operation depends upon both the pumping speed and the
conductance of gas through the Source. This conductance can be controlled by a Variable
Constriction Needle Valve on the Source. Elevated surface temperatures volatize bound HC
contamination, so baking before or during the DS Process is suggested for heavily contaminated
surfaces.
The unique GV10x Source yields high concentration of reactive O neutrals over an operating
pressure of 2.0 Torr to <5 mTorr. At low pressures, O neutrals are transported more uniformly
throughout the chamber. Low pressure also permits the operation of the GV0x while the turbo
molecular pump (TMP) is rotating at full speed, without pump damage or shut down. RF power
from 10 to 99 Watts can be change while operating. As the RF power delivered to the Source is
increased, more O neutrals are developed in the downstream for greater HC ashing efficiency.
1.2 GV10x System Models
The GV10x System is an in situ plasma device consisting of two physical components:
1) a Source that generates plasma used for downstream ashing and
2) a Controller that generates up to 100 Watts of RF power that is fed to the Source.
SYSTEM
MODEL NAME
COMPONENTS
GV10x B3 System
GV10x -B3
GV10x BT Controller + GV10x P3 Source
GV10x B4 System
GV10x –B4
GV10x BT Controller + GV10x P4 Source
GV10x B5 System
GV10x –B5
GV10x BT Controller + GV10x P5 Source
GV10x R3 System
GV10x -R3
GV10x 2U Controller + GV10x P3 Source
GV10x R4 System
GV10x –R4
GV10x 2U Controller + GV10x P4 Source
GV10x R5 System
GV10x –R5
GV10x 2U Controller + GV10x P5 Source
(B for benchtop, R for rack mount)

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1.3. GV10x Controller Models
MODEL
DESCRIPTION
DIFFERENCES
BT
Benchtop unit to control Source
operation; generates RF energy at
requested power level for given time
period and sends to Source.
Original model
Operable via built-in control panel or via
PC-based remote control software
communicating over RS-232 cable.
2U
Rack-mount unit with same basic
functionality as BT.
No control (text) panel; 2U is only
operable using PC-based remote control
software communicating over RS-232
cable. Software is provided or user can
write own. PC is not part of system.
1.4 GV10x Source Models
MODEL
DESCRIPTION
DIFFERENCES
P3
6.75” long x 5” high x 3” wide.
Using RF energy from Controller,
generates plasma for the
downstream ashing process.
Original model
Most efficient of the 3 Source models.
Running at maximum watt input, the P3
generates more plasma than P4 or P5 due
to its longer tube and more windings on
the induction coil.
P4
Same basic functionality as P3.
5.25” long x 5” high x 3” wide
Due to shorter tube and fewer windings on
the induction coil, when running at
maximum watt input, the P4 generates
about 25% less plasma than the P3.
P5
Same capabilities as P4 (essentially
a P4 repackaged.)
5.5” long x 4” high x 3” wide
Same differences from P3 as shown for
P4, PLUS: valves and filters moved inside
the enclosure; has smaller cooling fan and
physically smaller toroid than P4 (but
with similar electrical properties.)
Figure 1-1. BT Model
Figure 1-2. 2U Model

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Note: The Source models P3, P4, and P5 each can be configured with one of two
types of vacuum flanges to enable mounting the Source to an ashing chamber (for
specimens / samples) or directly to laboratory equipment. The P3 and P4 both can
accept KF40 and CF (ConFlat) flanges, whereas the P5 accepts KF25 and KF40
flanges.
P3
Figure 1-3. Sources P3, P4, and P5

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2. Unpacking the GV10x
2.1. Unpacking and Inspection
Before removing the GV10x Controller and Source from the original shipping carton,
perform a visual inspection. Report any apparent damage to ibss Group if the shipping
carton is punctured or broken.
2.1.1. Unpacking: Keep all packing materials until inspection and acceptance testing is
complete. Shipping carton should be retained long term, recycled or returned to
ibss Group for credit.
2.1.2. Inspection: Perform a visual inspection of shipped items to confirm no visible
damage:
2.1.2.1. Source
2.1.2.2. Controller
2.1.2.3. Cable Bundle: RF coax & Control cables
2.1.2.4. AC line cord
2.1.2.5. Operation and Safety Manual
2.1.2.6. GV10x Remote Control Software Installation CD
2.1.2.7. Optional items as noted on the packing list
2.2. Repacking for Shipping
To return the GV10x Asher, first contact ibss Group and get a Return Merchandise
Authorization [RMA]. ibss Group will instruct you to repack one or all items depending
on your circumstances. If possible use the original shipping carton.
2.2.1. No special handling devices are required for safe shipping.
2.2.2. Repacking the Controller: place in fitted slot in packing.
2.2.3. Repacking the Source: place in fitted slot in packing.
2.2.4. If original packing materials and carton are not available, carefully pack items
with 4” shock absorbing surrounding material.
2.3. Recycling
At the end of the GV10x DS Asher life cycle, recycling should be done in a manner
approved by local regulations. Alternatively you may return the GV10x to ibss Group.

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3. Installing
3.1. Facilities Requirements
See Appendix A: Technical Specifications.
3.2. Connect GV10x Source to Vacuum Chamber
3.2.1. Vent host vacuum chamber to be cleaned.
3.2.2. If applicable, attach the Spooler shipped with the GV10x onto the appropriate
chamber port. ibss Group provides a variety of Spoolers which can be attached to
various ports on SEMs and other analytical vacuum systems.
3.2.3. Mount the GV10x Source to the spooler KF40 fitting.
3.2.4. Pump the chamber down to operating pressure.
3.2.5. If the pump-down time is approximately the same as usual pump-down time, then
there are no leaks and the Source and Spooler have been mounted correctly.
NOTES ON GV10x SOURCE INSTALLATION
The Source can be operated in any position to suit adjacent component geometry
on the vacuum chamber.
It is recommended to mount the Source so downstream products from the plasma
enter the vacuum chamber straight without bends.
Silver braided wires should be moved away from the downstream flow since silver
will quickly oxidize.
The volume between the Source location and the pump port is the volume most
readily cleaned.
The source can be moved to different chamber location if the volume to be cleaned
is greater than 1.5 cubic meters.
SAFETY CHECK: The electron gun isolation valve should be closed and/or all
detectors and active components shut down before turning on the GV10x.

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3.3. Connect GV10x Source to Controller
The following hazardous energies are associated with the GV10x Source:
electrical power, RF, and UV/IR. Proper care and caution should be observed
before supplying power and during use.
3.3.1. Connect RF coax cable to the Controller
and Source back panels.
3.3.2. Connect the Control cable with 15-pin
D-sub connector to Controller and Source back
panels.
3.3.3. Plug 110-240VAC line cord to power
inlet socket on Controller back panel and to an
appropriate AC power source. The AC power
source may be controlled by the host system’s
EMO circuit. Regardless of the AC power
source, be sure the Controller is oriented such that the rear panel remains accessible
for easy removal of the power cord from the Controller if and when necessary.
3.3.4. (Optional) If a Pirani or Pfeiffer gauge is supplied on the Spooler (Figure 3-2),
plug connecting pressure gauge cable into the back of the Source. The cable can be
inserted in either orientation into the matching connection slot, found directly above the
connection for the 15-pin D-sub connector.
3.3.5. (Optional) Connect a Serial-to-USB Cable from the Controller (RS232 COM
port) to a PC on which the provided Remote Control Software (GUI) has been installed.
3.4. Select Ashing Gas
Room air is commonly selected for ashing gas phase HC contamination and lightly
contaminated surfaces.
An O2/Ar (95%/5%) gas mixture is frequently necessary to remove heavily contaminated
carbon deposits on surfaces of optical components and Si mirrors. In this case connect a
S/S two-stage regulator from the gas bottle to the inlet Source filter. Set the regulator
delivery pressure between 1 to 2 psig. Additionally, hydrogen gas mixtures may be used
if oxygen sensitive samples and equipment are present in the chamber during cleaning.
It is important to clear the use of oxygen gas with your health and safety officials
before proceeding.
Figure 3-1. Source and BT (benchtop)
Controller Back Panels
Figure 3-2. Source, Spooler and Pirani Gauge Assembly.
Source shows Pirani Gauge mounted on
Spooler fitted with KF40 flanges on both
sides.

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4. Operating
The GV10x Downstream Asher can be operated from 1) GV10x-BT (benchtop)
Controller Front Panel as described in section 4.1.2 or 2) remotely via the RS232 COM
port (for either GV10x-BT or GV10x-2U Controllers) as described in section 4.1.3.
Remote operation is supported with the published application programming interface
(API) in Appendix C. You may write your own remote control application using the API
or use the included GV10x Remote Control Software to achieve remote control of the
GV10x. The fundamentals of operation, whether done via the Controller Front Panel or
via remote control software, are the same.
4.1. How to Set Operating Parameters
All parameter settings are saved in the Controller (BT and 2U models) PLC memory even
when the GV10x Controller AC power is OFF and will be used to initialize Source power
level, W, and run time: HH MM SS, when the GV10x Controller AC power is turned
back ON. Section 4.1.2 describes how to set parameters if using the BT (benchtop)
Controller. For the 2U (rackmount) Controller, parameters must be set using external
software (e.g. GV10x-RC) typically running on a PC. Refer to Appendix C for the
Remote Control Specifications (API.)
4.1.1. Allowable Parameter Settings
Minimum Value
Maximum Value
Plasma Power (watts, W)
10
99
Run Hours (HH)
0
99
Run Minutes (MM)
0
59
Run Seconds (SS)
0
59
4.1.2. Setting Parameters from GV10x-BT (benchtop) Controller Front Panel
4.1.2.1. Switch GV10x-BT AC power ON from the Controller rear panel toggle. PLC
Self-Testing will begin, as shown in Figures 4-1 and 4-2:
Figure 4-2. PLC Self-Test Screen 2
Figure 4-1. PLC Self-Test Screen 1
Table 4-1. Range of Allowed Parameter Settings

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4.1.2.2. After Self -Test screens are flashed, the first 4 lines of the Information and Setup
Screen (Figure 4-3a) will appear briefly and then the Operating Parameters Screen
(Figure 4-4) will be shown.
To review or modify Setup Parameters in Figures 4-3a, 4-3b, and 4-3c, press esc from the
Operating Parameters Screen. Scroll up/down thru the parameters by pressing ▼▲.
The first two lines display the GV10x Controller software version and text panel software
version. The third line shows Source and Controller serial numbers [SNs are also on
Source and Controller rear panels and noted in the GV10x Remote Control software].
Line 4 (Figure 4-3a) and lines 5 -10
(Figures 4-3b, 4-3c) are setup parameters:
Watt_Ign (Wmn-Wmx)
Secs_Ign. (0-9)
Watt_Max (49-99)
Watt_Min (5-20)
MKS/Pfeiffer (0/1)
Pres_Trg (0, 10-60)
PowerOnPlasma (0/1)
The setup parameters are selected by pressing ▼▲ and can be changed. Pressing enter
moves the blinking selector over selection to be changed, where ▼▲presses
increases/decreases the parameter, and pressing enter stores the final value. When
review/edits are complete, press esc to return to the Operating Parameters screen.
Factory setting for PowerOnPlasma is 0. If PowerOnPlasma is set to 0, RF power will
not be actuated when the Controller AC power is switched ON. If PowerOnPlasma is set
to 1, RF power will be actuated when the Controller AC power is switched ON.
Watt_Ign and Secs_Ign are factory set to 49 watts and three seconds, respectively.
This means 49 watts of RF Power is applied to the Source for 3 seconds to ignite the
plasma. The value of 49 watts is chosen to improve ignition at low pressure. Watt_Ign
can be adjusted down to Watt_Min or 10 watts, whichever is higher. Watt_Ign can be
Figure 4-3a. Information Screen, lines 1-4
Figure 4-3b. Information Screen, lines 5-8
Figure 4-3c. Information Screen, lines 7-10

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adjusted up to Watt_Max or 70, whichever is lower. When the GV10x is mounted onto a
Gentle Asher Chamber or if samples are to be cleaned in the SEM, ignition at elevated
power may not be desirable.
4.1.2.3. The Operating Parameters screen in Figure 4-4 will allow the operator to set
plasma power in watts, W, and run time in hours, HH, minutes, MM, and seconds, SS.
Values must be within the ranges given in the table of 4.1.1.
Source Power, watts (W), can be adjusted up/down even when RF ON.The settings for
time, HH MM SS, cannot be changed while RF ON.
While the Downstream Asher Process is running, the Act row shows actual power (W)
delivered to the Source in watts, reflected power (Wr), and elapsed time (HH MM SS).
The last row reports the tuning voltage (VDC), e.g. 0.0V in Figure 4-4, and Lost, the
elapsed time (HH MM SS) that the plasma is not ignited after the Downstream Asher
Process is started by pressing the front panel ON button. The tuning voltage can also be
monitored at the Black and Red terminals on the Source rear panel.
Parameters are chosen by moving the selection cursor, >. Press the Select button
repeatedly until the cursor is in front of the parameter to be changed. Note that there
is a one second delay between pressing the Select button and movement of the cursor.
When the cursor points to W, HH, MM, or SS you can set the respective value for
watts, run time hours, minutes or seconds by pressing Increase or Decrease.
Momentarily pressing the Increase or Decrease button will change the selected
parameter value by one count at a time; holding either button down for a full second
or more will make the value jump by an amount relative to the length of time the
button is held down (10 counts/second).
The Downstream Asher Process is manually started and stopped by pressing the
ON/OFF button on the Controller Front Panel.
Figure 4-4. Operating Parameters Screen

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4.1.3. Setting Parameters with Remote Control Software
4.1.3.1. Establish physical connection between PC and GV10x (BT or 2U) Controller:
To communicate with the GV10x remotely, connect a 9-pin Serial connector from the
Controller back panel to a PC using the proper cable. A standard USB serial converter
cable can be used with laptops that do not have exposed serial ports. See Appendix D:
GV10x Remote Control Test Report for more information.
4.1.3.2. Run software that has been written to remotely communicate with and control the
GV10x:
Command documentation is shown in Appendix C: GV10x Remote Control
Specifications. Remote communications can quickly be confirmed and demonstrated
using Windows Hyper Terminal, generally found under Start->All Programs -
>Accessories (not available in Windows Vista.)
ibss Group provides Remote Control Software as shown in Figure 4-5a. Contact ibss
Group for information on other user-written or third-party control software.
For information on how to install and use GV10x-RC15, please see ReadMe.pdf that is provided
on the GV10x-RC15 installation CD or ZIP file.
Figure 4-5a. GV10x Remote Control Software

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4.1.3.3. Setting Parameters from GV10x-RC15 to Control GV10x BT and 2U Controllers
4.1.3.3.1. Control Tab
The primary parameters for GV10x operation are watts, hours, minutes, and seconds,
shown as W, HH, MM, and SS in the circled portion of Figure 4-5b.
Note: When the GV10x-RC15 software is not connected to the GV10x (as is the case
below) or when the GV10x is connected and running, only watts may be changed.
Hours, minutes, and seconds will be disabled.
4.1.3.3.2. Setup Tab
The Setup tab is used to set operating parameters that typically do not change often: Watt
Limits (Min Val / Max Val), eGun Valve Warning, Ignition Watts, Ignition Secs,
Pressure Gauge, Pressure Trigger, and RF at Power Up. Port Settings (to select com port
and required settings as specified in Appendix C) and Open/Close Port (to open the port
for communication) can also be found on the Setup tab. Once GV10x-RC15 software is
communicating with the GV10x, The parameters shown in Figure 4-5c are retrieved from
the GV10x and can be changed with the GV10x-RC15 software. Note: Watt Limits (Max
and Min), Ignition Watts, Ignition Secs, Pressure Trigger, and Pressure Gauge are only
available on GV10x Controller models manufactured after January 15, 2015.
Figure 4-5b. GV10x-RC15 Control tab
Figure 4-5c. GV10x-RC15 Setup tab

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4.2. How to Run the GV10x Downstream Asher
4.2.1. Steps for GV10x Downstream Asher Operation
4.2.1.1. After completing installation as described in Section 3 and any time the Source
is re-mounted onto the host chamber (see 3.2), pump down to insure that the host
chamber reaches usual operating pressure. This insures that there are no leaks from the
KF40 O-ring and the Source gas inlet. If the system does not pump down, refit the
source mounting.
4.2.1.2. Set Source RF power level to the desired RF power and cleaning time.
4.2.1.3. To ignite the plasma, press the ON/OFF button. A light will turn on above the
button. The GV10x will admit air through the filter*and gas isolation valve and apply
power to the Source. The host vacuum pressure will rise to a pressure controlled by the
Variable Constriction Valve; see Table 4-2, Variable Constriction Turns vs. Pressure. The
plasma should ignite after 30 to 60 seconds as the Source pressure stabilizes.
An alternative to pressing the ON/OFF button to manually start RF power is using a
preset pressure trigger to cause RF power to be turned on automatically based on pressure
level and pressure trigger value.
4.2.1.4. Using Pressure Trigger (Pres_Trg) to Automate RF Power ON
Automation via Pressure Trigger starts RF power on the GV10x when installed pressure
gauge (MKS Pirani or Pfeiffer) reports Pressure < a set value, Pres_Trg, and runs until
timeout (by HH MM SS setting on Operating Parameters Screen).
When Pressure Trigger is active (Pres_Trg not 00), the GV10x:
a. will start only once after descending below the set pressure
b. will not respond to the set pressure again until the chamber pressure has increased to
at least 100 (1E+2) Torr. This re-arms for the next Trigger when pressure is again low
enough.
When cleaning an electron or ion column chamber, check that the
electron gun isolation valve is closed and all detectors and active
components are shut down before turning on the GV10x.
Since the GV10x can be initiated at low vacuum, severe damage
to the system can occur if these precautions are not exercised.
*In the rare case that the 0.5 micron filter becomes clogged over time,
chamber pressure will not to rise to normal levels when the Source is
ignited. If this occurs, the filter element must be changed. See the
instructions included with spare filter element sent with your GV10x.

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After a Pressure Trigger has started the plasma, the GV10x can be stopped (and started
again if desired) from the GV10x-BT front panel or the GV10x-RC (“GUI”.)
Pressure Trigger values can be any integer value from 10 thru 60 (in increments of 1.)
The 2-digit trigger value equates to pressure readings in the 1E-5 to 1E-0 Torr range.
Selected trigger values (at increments of 10) and their resulting pressures follow:
00 Pressure Trigger is DISABLED
10 Ignition at 1E-5 Torr
20 Ignition at 1E-4 Torr
30 Ignition at 1E-3 Torr
40 Ignition at 1E-2 Torr
50 Ignition at 1E-1 Torr
60 Ignition at 1E-0 Torr
Pressure trigger (Pres_Trg) values can be set to ANY integer value from 10 to 60:
Setting Pres_Trg <10, results in Pres_Trg=00 (DISABLED)
Pres_Trg value >= 10 and <20, triggers in E-5 Torr Range (e.g. 19 ~= 9E-5, 11 ~= 2E-5)
Pres_Trg value >= 20 and <30, triggers in E-4 Torr Range (e.g. 28 ~= 8E-4, 22 ~= 3E-4)
Pres_Trg value >= 30 and <40, triggers in E-3 Torr Range (e.g. 37 ~= 7E-3, 33 ~= 4E-3)
Pres_Trg value >= 40 and <50, triggers in E-2 Torr Range (e.g. 46 ~= 6E-2, 44 ~= 5E-2)
Pres_Trg value >= 50 and <60, triggers in E-1 Torr Range (e.g. 59 ~= 9E-1, 51 ~= 2E-1)
Pres_Trg value = 60, triggers at 1E+0 Torr, (1 Torr)
4.2.1.5. If the Source does not ignite, press OFF & ON to cycle the RF power.
4.2.1.6. If the source still fails to ignite, the Source must be tuned. See 4.3: How to
Tune the GV10x Source.