Inficon PSG550 User manual

tina60e1-a (2011-04) 1
Pirani Standard Gauge
PSG550
PSG552
PSG554
Operating Manual
Incl. EC Declaration of Conformity

2tina60e1-a (2011-04)
Product Identification
In all communications with INFICON, please specify the infor-
mation given on the product nameplate. For convenient refer-
ence copy that information into the space provided below.
Model:
PN:
SN:
V W; LPS
INFICON AG, LI-9496 Balzers

tina60e1-a (2011-04) 3
Validity
This document applies to products of the PSG55x series.
Part numbers of standard products are indicated below. OEM
products have other part numbers and different parameter
settings (e.g. factory setting of setpoint) as defined in the
corresponding ordering information.
Flange 1 ⇒DN 16 ISO-KF
2 ⇒DN 16 ISO-KF long tube
4 ⇒DN 16 CF-F
5 ⇒DN 16 CF-R long tube
6 ⇒DN 25 ISO-KF
D ⇒4 VCR female
E ⇒8 VCR female
F ⇒1/8" NPT
K ⇒Flange 29×29 mm
M ⇒4 VCR 90° female
N ⇒7/16-20 UNF male
0 ⇒mbar
1 ⇒Torr
2 ⇒Pa
3 ⇒micron
Unit
1 ⇒Tungsten
2 ⇒Nickel
3 ⇒Al2O3coated
6 ⇒Tungsten, galvanically isolated
7 ⇒Nickel, galvanically isolated
8 ⇒Al2O3coated, galvanically isolated
Filament
3PIx-0xx-xxxx

4tina60e1-a (2011-04)
0 ⇒0.61 ... 10 V
1 ⇒1.2 ... 8.5 V
2 ⇒0.375 ... 5.529 V
3 ⇒1.57 ... 8.875 V
Measuring
signal
Interface
Receptacle
0 ⇒None (analoge)
1 ⇒DeviceNet
2 ⇒Profibus
3PIx-0xx-xxxx
0 ⇒None
1 ⇒Display
2 ⇒2 switching functions *)
4 ⇒Display & 2 switching functions *)
6 ⇒2 switching functions **)
*) Solid state relays
**) Mechanical relays
Display
Switching function
0 ⇒FCC
1 ⇒D-Sub, 9-pin
2 ⇒D-Sub, 15-pin HD
4⇒D-Sub, 15-pin HD, RS485 INF
The part number (PN) can be taken from the product nameplate.
If not indicated otherwise in the legends, the illustrations in this
document correspond to gauges with the DN 16 ISO-KF vacuum
connection and display. They apply to gauges with other vacuum
connections by analogy.
We reserve the right to make technical changes without prior
notice.

tina60e1-a (2011-04) 5
Intended Use
The Pirani Standard Gauge PSG55x has been designed for
vacuum measurement of gases in the pressure range of
5×10-5 … 1000 mbar.
They must not be used for measuring flammable or combustible
gases in mixtures containing oxidants (e.g. atmospheric oxygen)
within the explosion range.
The gauge is intended for operation in connection with an
INFICON Vacuum Gauge Controller VCG401, 402, 403 or with
another suitable controller.
Trademark
VCR®Swagelok Marketing Co.
Patents
EP 0689669 B1, 0689670 B1
US Patent 5608168
Scope of Delivery
1× gauge
1× pin for adjusting settings via buttons
1× Operating Manual English
1× Operating Manual German

6tina60e1-a (2011-04)
Contents
Product Identification 2
Validity 3
Intended Use 5
Trademark 5
Patents 5
Scope of Delivery 5
1Safety 8
1.1 Symbols Used 8
1.2 Personnel Qualifications 8
1.3 General Safety Instructions 9
1.4 Liability and Warranty 9
2Technical Data 10
2.1 Output Signal vs. Pressure 18
2.2 Gas Type Dependence 23
3Installation 24
3.1 Vacuum Connection 24
3.2 Power Connection 27
3.2.1 FCC 68, 8-pin Connector 28
3.2.2 D-Sub, 9-pin Connector 29
3.2.3 D-Sub, 15-pin HD Connector 30
3.2.4 D-Sub, 15-pin HD, RS485 INF Connector 31
3.2.5 DeviceNet Connector 32
3.2.6 Profibus Connector 33
4Operation 34
4.1 Status Indication and Displays 34
4.2 Gas Type Dependence 38
4.3 Switching Functions SP1, SP2 38
4.4 Diagnostic Port (RS232C Interface) 44
4.5 DeviceNet Operation 45
4.6 Profibus Operation 48
5Deinstallation 49

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6Maintenance, Repair 51
6.1 Adjusting the Gauge 51
6.2 Replacing the Sensor 53
6.3 Troubleshooting 54
7Returning the Product 55
8Disposal 56
9Accessories 57
10 Spare Parts 58
Further Information 61
ETL Certification 62
EC Declaration of Conformity 63
For cross-references within this document, the symbol (→XY)
is used, for cross-references to further documents, listed under
"Further Information", the symbol (→[Z]).

8tina60e1-a (2011-04)
1 Safety
1.1 Symbols Used
DANGER
Information on preventing any kind of physical injury.
WARNING
Information on preventing extensive equipment and environ-
mental damage.
Caution
Information on correct handling or use. Disregard can lead to
malfunctions or minor equipment damage.
Notice
<…> Labeling
1.2 Personnel Qualifications
Skilled personnel
All work described in this document may only be carried out by
persons who have suitable technical training and the neces-
sary experience or who have been instructed by the end-user
of the product.

tina60e1-a (2011-04) 9
1.3 General Safety Instructions
•Adhere to the applicable regulations and take the necessary
precautions for the process media used.
Consider possible reactions with the product materials.
Consider possible reactions (e.g. explosion) of the process
media due to the heat generated by the product.
•Adhere to the applicable regulations and take the necessary
precautions for all work you are going to do and consider the
safety instructions in this document.
•Before beginning to work, find out whether any vacuum com-
ponents are contaminated. Adhere to the relevant regulations
and take the necessary precautions when handling contamin-
ated parts.
Communicate the safety instructions to all other users.
1.4 Liability and Warranty
INFICON assumes no liability and the warranty becomes null
and void if the end-user or third parties
•disregard the information in this document
•use the product in a non-conforming manner
•make any kind of interventions (modifications, alterations etc.)
on the product
•use the product with accessories not listed in the product
documentation.
The end-user assumes the responsibility in conjunction with the
process media used.
Gauge failures due to contamination or wear and tear, as well as
expendable parts (e.g. filament) are not covered by the warranty.

10 tina60e1-a (2011-04)
2 Technical Data
For further technical data for gauges with serial inter-
faces →[3], [4], [5].
Measurement principle thermal conductance acc. to
Pirani
Measurement range 5×10-5 … 1000 mbar
Accuracy (N2)
5×10-4 … 1×10-3 mbar
±50% of reading
1×10-3 … 100 mbar ±15% of reading
100 … 1000 mbar ±50% of reading
Resolution (at 1000 mbar) ±0.15% of reading
Repeatability (N2)
1×10-3 … 100 mbar
±2% of reading
Output signal (measurement signal)
Voltage range
3PIx-0xx-xxx0 0 … +10 V
3PIx-0xx-xxx1 0 … +8.5 V
3PIx-0xx-xxx2 0 … +5.529 V
3PIx-0xx-xxx3 0 … +8.875 V
Measurement range
3PIx-0xx-xxx0 +0.61 … +10 V
3PIx-0xx-xxx1 +1.2 … +8.5 V
3PIx-0xx-xxx2 +0.375 … +5.529 V
3PIx-0xx-xxx3 +1.57 … +8.875 V
Error signal 0 … 0.05 V
Voltage vs. pressure
3PIx-0xx-xxx0 1.286 V/decade, logarithmic
3PIx-0xx-xxx1 1 V/decade, logarithmic
3PIx-0xx-xxx3 1 V/decade, logarithmic
3PIx-0xx-xxx2 →20

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Output impedance 2 × 4.7 Ω, short circuit-proof
Load impedance ≥10 kΩ
Response time <10 ms
Gauge identification
FCC 68 (+0.61 … +10 V)
27 kΩ
HV adjustment at <10-5 mbar
Solid state relays switching functions SP1,
SP2, ATM
Setting range (N2) 5.0×10-5 … 1000 mbar
Hysteresis 1) 10% of threshold
Switching characteristics 1) Low Trip Point
Contact rating <30 VAC/DC, ≤0.3 A
resistive
closed LED lit solid
open LED off
Switching time <30 ms
Mechanical relays switching functions SP1,
SP2, ATM
Setting range (N2) 5.0×10-5 … 1000 mbar
Hysteresis 1) 10% of threshold
Switching characteristics 1) Low Trip Point
Type 1 floating contact (n.o.) per
switching function
Contact rating <30 VAC/DC, ≤1 A
resistive
closed LED lit solid
open LED off
Switching time <30 ms
Diagnostic port Jack connector 2.5 mm,
3-pin
1)The hysteresis and the switching characteristics can be
programmed via the serial interface or the diagnostic port.

12 tina60e1-a (2011-04)
Supply
DANGER
The gauge may only be connected to power sup-
plies, instruments, or control devices that conform
to the requirements of a grounded protective extra-
low voltage (SELV) and limited power source
(LPS), Class 2. The connection to the gauge has to
be fused. 2)
Supply voltage
at the gauge
Class 2 / LPS
+15 … +30 VDC
Ripple ≤1 Vpp
Power consumption
without fieldbus
DeviceNet
Profibus
≤2.5 W
≤3 W
≤3 W
Fuse to be connected 2) 1 AT
Electrical connection
3PIx-0xx-x0xx FCC 68
3PIx-0xx-x1xx D-Sub 9-pin, male
3PIx-0xx-x2xx D-Sub 15-pin HD, male
3PIx-0xx-x4xx D-Sub 15-pin HD, RS485
INF, male
Sensor cable shielded
0.14 mm2/conductor
Cable length
RS232C operation
≤100 m
≤30 m
Grounding concept →"Power Connection"
Vacuum connection to
signal common
connected via 10 kΩ, 10 nF
2) INFICON controllers fulfill this requirement.

tina60e1-a (2011-04) 13
RS232C / RS485 interface
Transmission rate
Data format
57600 baud (default)
binary
8 data bits
one stop bit
no parity bit
no handshake
→"Power Connection"
For further information on the RS232C / RS485C interface
→[3].
DeviceNet interface
Specification, data format,
communication protocol
→[6]
Interface, physical CAN bus
Data rate (adjustable via <RATE>
switch)
125 kBaud
250 kBaud
500 kBaud (default)
<P> (125 kBaud,
250 kBaud, 500 kBaud
programmable via
DeviceNet, →[4])
Node address (MAC ID)
(Adjustable via <ADDRESS>,
<MSD>, <LSD> switches)
0 … 63dec (63dec default)
<P> (0 … 63 programmable
via DeviceNet, →[4])
DeviceNet connector Micro-Style, 5-pin, male
Cable shielded, special DeviceNet
cable, 5 conductors
→32, →[7]
Cable length, system wiring according to DeviceNet
specifications, →[6], [7]
For further information on the DeviceNet interface →[4]

14 tina60e1-a (2011-04)
Profibus interface
Specification, data format,
communication protocol
→[8]
Interface, physical RS485
Data rate ≤12 Mbaud (→[5])
Node address
Local
(Adjustable via hexadecimal
<ADDRESS>, <MSD>,
<LSD> switches)
Default setting
Via Profibus
(hexadecimal <ADDRESS>
switches set to >7Dhex
(>125dec)
00 … 7Dhex (0 … 125dec)
01Chex
00 … 7Dhex (0 … 125dec)
Profibus connection D-Sub, 9-pin, female
Cable shielded, special Profibus
cable, →33, →[9]
Cable length, system wiring according to Profibus speci-
fications, →[8], [9]
For further information on the Profibus interface →[5]
Materials exposed to vacuum
Vacuum connection
Filament
3PI1 / 6-0xx-xxxx
3PI2 / 7-0xx-xxxx
3PI3 / 8-0xx-xxxx
Feedthrough
Orifice 3)
Further materials
stainless steel 1.4435
W
Ni
ceramic coated
glass
stainless steel
Ni, NiFe, stainless steel
1.4301
3) Only versions DN 16 ISO-KF and DN 16 CF-F.

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Internal volume
DN 16 ISO-KF
DN 16 ISO-KF, long tube
DN 16 CF-F
DN 16 CF-R, long tube
DN 25 ISO-KF
4 VCR®female
8 VCR®female
1/8" NPT
Flange 29×29 mm
4 VCR®90°, female
7/16-20 UNF
4.7 cm3
14.5 cm3
8 cm3
14 cm3
5.5 cm3
5.5 cm3
7 cm3
5.2 cm3
4.9 cm3
7.9 cm3
5.2 cm3
Permissible pressure (absolute) ≤5 bar
Bursting pressure (absolute) 10 bar
Permissible temperatures
Operation
Vacuum connection 4)
long tube
4)
Filament
Storage
+10 °C … +50 °C
≤80 °C
≤250 °C
<160 °C
–20 °C … +65 °C
Relative humidity
Year's mean
During 60 days
≤65% (no condensation)
≤85% (no condensation)
Mounting orientation any
Use indoors only, altitude up to
2000 m NN
Degree of protection IP 40
Weight
without fieldbus interface
with fieldbus interface
115 g …130 g
230 g … 250 g
4) For horizontal mounting orientation only. During bakeout,
measurement range, accuracy, and repeatability may deviate from
specifications.

16 tina60e1-a (2011-04)
Dimensions [mm]
DN 16 ISO-KF
DN 16 ISO-KF long
130.8
14.5
1/8" NPT
36
21.531.5
24.4
36.5 34
79.5 ≈65
DN 16 CF-F
DN 16 CF-R long
130.2
30.9 42.7
46.3
4 VCR 8 VCR
45
28
DN 25 ISO-KF
29.2×29.2 mm
7/16-20 UNF
4-VCR 90°

tina60e1-a (2011-04) 17
DeviceNet Profibus
67
56
LSDMSD
ADDRESS
SP1SP2
ST
I/O
DIA
ADJ
BUS RATE STATUS
NET MOD
10.8
4
26
08
EA
C
LSDMSD
ADDRESS
4
26
08
EA
C
BUS
SP1SP2
ST
I/O
DIA
ADJ
67
56
RS485
AE
62
LSDMSD
ADDRESS
RATE
SP1 SP2 ST
DIA
BUS
ADJ
321ON
AE
62
AE
62
67
56

18 tina60e1-a (2011-04)
2.1 Output Signal vs. Pressure
Measurement range 0.61 … 10 V
Output signal U [V]
Pressure p
O
mbar
Pa
Torr
Error
0.0
0.61
3.02.52.01.51.00.5 4.03.5 5.04.5 6.05.5 7.06.5 8.07.5 9.08.5 10.09.5 10.5
1E+05
1E+04
1E+03
1E+02
1E+01
1E+00
1E–01
1E–02
1E–03
1E–04
1E+06
1E–05
p = 100.778(U-c) ⇔U = c +1.286log10 p
valid in the range 5×10-5 mbar <p< 1000 mbar
U p c U p c
[V] [mbar] 6.143 [V] [micron] 2.448
[V] [µbar] 2.287 [V] [Pa] 3.572
[V] [Torr] 6.304 [V] [kPa] 7.429
[V] [mTorr] 2.448
where p pressure
U output signal
c constant (pressure unit dependent)

tina60e1-a (2011-04) 19
Measurement range 1.2 … 8.5 V
Output signal U [V]
Pressure p
1E+05
1E+04
1E–03
1E–04
1E–05
0.0 0.5 1.0 1.5 2.5 3.5 4.5 5.5 6.5 7.5 8.52.0 3.0 4.0 5.0 6.0 7.0 8.0 9.0
1.2
mbar
Pa
Torr
1E+03
1E+02
1E+01
1E+00
1E–01
1E–02
Error
p = 10(U-c) ⇔U = c + log10 p
valid in the range 5×10-5 mbar <p< 1000 mbar
U p c U p c
[V] [mbar] 5.5 [V] [micron] 2.625
[V] [µbar] 2.5 [V] [Pa] 3.5
[V] [Torr] 5.625 [V] [kPa] 6.5
[V] [mTorr] 2.625
where p pressure
U output signal
c constant (pressure unit dependent)

20 tina60e1-a (2011-04)
Measurement range 0.375 … 5.529 V
Signal U Pressure p
[V] [mbar] [Pa] [Torr]
0.375 <5×10-5 <6.65×10-3 <5×10-5
0.376 0.000133322 0.013332237 0.0001
0.377 0.000266645 0.026664474 0.0002
0.379 0.000666612 0.066661184 0.0005
0.384 0.001333224 0.133322368 0.0010
0.392 0.002666447 0.266644736 0.0020
0.417 0.006666118 0.66661184 0.0050
0.455 0.013332237 1.33322368 0.0100
0.523 0.026664474 2.66644736 0.0200
0.682 0.066661184 6.6661184 0.0500
0.876 0.133322368 13.3322368 0.1000
1.155 0.266644736 26.6644736 0.2000
1.683 0.66661184 66.661184 0.5000
2.217 1.33322368 133.322368 1.0000
2.842 2.66644736 266.644736 2.0000
3.675 6.6661184 666.61184 5.0000
4.206 13.3322368 1333.22368 10.0000
4.577 26.6644736 2666.44736 20.0000
4.846 66.661184 6666.1184 50.0000
4.945 133.322368 13332.2368 100.0000
5.019 266.644736 26664.4736 200.0000
5.111 399.967104 39996.7104 300.0000
5.224 533.289472 53328.9472 400.0000
5.329 666.61184 66661.184 500.0000
5.419 799.934208 79993.4208 600.0000
5.495 933.256576 93325.6576 700.0000
5.529 1000 100000 750.0637