Inficon Cube CDGsci User manual

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Capacitance Diaphragm Gauge
Cube CDGsci
Operating Manual
Incl. EC Declaration of Conformity

2tina88e1 (2014-01)
Product Identification
In all communications with INFICON, please specify the infor-
mation given on the product nameplate. For convenient refer-
ence copy that information into the space provided below.
Model:
SN:
PN:
MAC:
V W;LPS
Validity
This document applies to products of the CDGsci series.
Flange 1
3
E
DN 16 ISO-KF
DN 16 CF-R
8VCR female
3
6
9
C
F
0.1
1
10
100
1000
Measurement range
(F.S.)
3CS1-
3
1
1
-2300
The part number (PN) can be taken from the product nameplate.

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If not indicated otherwise in the legends, the illustrations in this
document correspond to gauges with DN 16 ISO-KF vacuum
connection. They apply to the other gauges by analogy.
We reserve the right to make technical changes without prior
notice.
Intended Use
The temperature compensated Capacitance Diaphragm Gauges
of the CDGsci series are intended for absolute pressure mea-
surement of gases in their respective pressure ranges.
Functional Principle
A ceramic diaphragm is deflected by pressure. The deflection is
measured capacitively and converted into an analog linear out-
put signal by the digital electronics.
The output signal is independent of the gas type.
Very accurate pressure measurement is achieved by heating the
sensor to a constant temperature of 45°C which results in a
compensation of changes in the ambient conditions and a re-
duced deposition of process products and by-products in pro-
cess applications. An integrated baffle protects the sensor
against coating.
Trademarks
SKY®INFICON GmbH
VCR®Swagelok Marketing Co.
Cube™ INFICON GmbH
Windows CE Microsoft
Patents
EP 1070239 B1, 1040333 B1
US Patents 6528008, 6591687, 7107855, 7140085

4tina88e1 (2014-01)
Scope of Delivery
1× gauge CDGsci
1× pin for adjusting settings via buttons
1× Calibration Test Report
1× Operating Manual English
1× Damping unit
2× LEMO connector
1× WLAN USB adapter IEEE822.11g
1× Swagelok 8VCR adapter (gauge with VCR connection only)
1× Swagelok 8VCR seal (gauge with VCR connection only)
1× Swagelok 4VCR seal (gauge with VCR connection only)

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Contents
Product Identification 2
Validity 2
Intended Use 3
Functional Principle 3
Trademarks 3
Patents 3
Scope of Delivery 4
1Safety 7
1.1 Symbols Used 7
1.2 Personnel Qualifications 7
1.3 General Safety Instructions 8
1.4 Liability and Warranty 8
2Technical Data 9
3Installation 17
3.1 Vacuum Connection 17
3.2 Power Connection 24
3.2.1 D-Sub, 15-pin Connector 25
3.2.2 RJ45, 8-pin Connector 26
3.2.3 LEMO, 2-pin Connector 26
3.2.4 USB, Typ A Connector 26
4Operation 27
4.1 Status Indication 27
4.2 Configuring the network interface 28
4.2.1 Changing IP Address of the Wired Network 28
4.2.2 Activating the Wireless Network 28
4.2.3 Changing IP Address of the Wireless Network 29
4.3 Websites 31
4.4 Zeroing the Gauge 32
4.4.1 <ZERO>Adjustment 32
4.5 Switching Functions 36
4.6 Activating the Factory Setting (Factory Reset) 39
4.7 Diagnostic Port (RS232C Interface) 39

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5Deinstallation 39
6Maintenance, Repair 42
7Returning the Product 42
8Disposal 43
9Accessories 44
Further Information 44
EC Declaration of Conformity 46
For cross-references within this document, the symbol (→XY)
is used, for cross-references to further documents, listed under
"Further Information", the symbol (→[Z]).

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1 Safety
1.1 Symbols Used
DANGER
Information on preventing any kind of physical injury.
WARNING
Information on preventing extensive equipment and environ-
mental damage.
Caution
Information on correct handling or use. Disregard can lead to
malfunctions or minor equipment damage.
Notice
<…> Labeling
1.2 Personnel Qualifications
Skilled personnel
All work described in this document may only be carried out by
persons who have suitable technical training and the neces-
sary experience or who have been instructed by the end-user
of the product.

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1.3 General Safety Instructions
•Adhere to the applicable regulations and take the necessary
precautions for the process media used.
Consider possible reactions with the product materials.
•Adhere to the applicable regulations and take the necessary
precautions for all work you are going to do and consider the
safety instructions in this document.
•Before beginning to work, find out whether any vacuum com-
ponents are contaminated. Adhere to the relevant regulations
and take the necessary precautions when handling contamin-
ated parts.
Communicate the safety instructions to all other users.
1.4 Liability and Warranty
INFICON assumes no liability and the warranty becomes null
and void if the end-user or third parties
•disregard the information in this document
•use the product in a non-conforming manner
•make any kind of interventions (modifications, alterations etc.)
on the product
•use the product with accessories not listed in the product
documentation.
The end-user assumes the responsibility in conjunction with the
process media used.
Gauge failures due to contamination or wear and tear are not
covered by the warranty.

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2 Technical Data
Measurement range →"Validity"
Accuracy 1)
0.1 F.S.
1 … 1000 F.S.
0.05% of reading
0.025% of reading
Temperature effect on zero
0.1 F.S.
1 … 1000 F.S.
10 ppm F.S./ °C
5 ppm F.S./ °C
Temperature effect on span
0.1 F.S.
1 … 1000 F.S.
10 ppm of reading / °C
5 ppm of reading / °C
Resolution, nominal 0.95 ppm F.S.
Gas type dependence none
Output signal analog (measurement signal)
Measurement range 0 … +10 V
Voltage range –2 … +10.24 V
(limited to +10.20 V)
Relationship voltage-pressure linear
Output impedance 0 Ω(short-circuit proof)
Loaded impedance >10 kΩ
Response time2) 350 ms
Pressure unit Torr (default), mbar, Pa
(→16)
1) Non-linearity, hysteresis, repeatability in the calibrated range at 25 °C
ambient operating temperature without temperature effects after
operation of 2 h.
2) Increase 10 … 90 % F.S.R.

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Output signal analog (temperature / atmosphere)
Scaling temperature 10 °C – 0.00 V
60 °C – 10.00 V
Temp[V] = 10+5×Aout[V]
Scaling atmosphere 10 °C – 0.00 V
60 °C – 10.00 V
ATM[Torr] =
Aout[V]/5×1000/1.33322
Switchable between temperature and atmosphere via
RS232 ASCII, REST services and website (→[2], [3], [4],
[5]).
Identification
Resistance RIdent
Voltage
13.2 kΩreferenced to
supply common
≤5 V
Remote Zero Adjust
External switching contact
digital input for zero adjust-
ment (→32)
30 V (dc) / <5 mA (dc)
Switching functions SETPOINT 1, 2
Setting range 0 … 99% F.S. (0 … 9.9 V)
Hysteresis 1% F.S.
Relay contact 30 V (dc)/ ≤0.5 A (dc)
floating (NO)
closed p ≤pSP (LED lit solid)
open p ≥pSP (LED off)
Switching time ≤50 ms
Status relay
Relay contact 30 V (dc)/ ≤0.5 A (dc)
connected to supply com-
mon (pin 5)
closed measurement mode
warning
open no supply voltage
warming up
error

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RS232 ASCII interface
Transmission rate
Data format
9600 baud
binary
8 data bits
one stop bit
no parity bit
no handshake
→"Power Connection"
For further information on the RS232 ASCII interface →[2].
RS232C interface
Transmission rate
Data format
9600 baud
binary
8 data bits
one stop bit
no parity bit
no handshake
→"Power Connection"
For further information on the RS232C interface →[3].
Ethernet interface
IP address
Architecture
192.168.0.248 (default)
REST services
websites
For further information on the Ethernet interface →[1].
For further information on the REST services and websites
→[4] and [5].
Wireless interface
IP address
Architecture
DHCP
192.168.0.240 (default)
REST services, websites
DHCP capable, no server
The wireless network is factory deactivated. To activate the net-
work →28).
For further information on the REST services and websites
→[4] and [5].

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Supply
DANGER
The gauge may only be connected to power sup-
plies, instruments or control devices that conform
to the requirements of a grounded protective extra-
low voltage (SELV) and limited power source
(LPS), Class 2. The connection to the gauge has to
be fused.
Supply voltage
at the gauge
Class 2 / LPS
+14 … +30 V (dc) or
±15 V (±5%)
Ripple ≤1 Vpp
Power consumption
while being heated
at operating temperature
≤20 W
≤17 W
The gauge is protected against reverse polarity of the supply
voltage and overload.
Electrical connection 15-pin D-Sub, male
Sensor cable 15-pin plus shielding
Cable length
Supply voltage 15 V ≤4 m (0.14 mm²/conductor)
≤7 m (0.25 mm²/conductor)
Supply voltage 24 V ≤20 m (0.14 mm²/conductor)
≤35 m (0.25 mm²/conductor)
Supply voltage 30 V ≤40 m (0.14 mm²/conductor)
≤70 m (0.25 mm²/conductor)
For longer cables, larger conductor cross-sections are required
(Rcable ≤1.0 Ω).
Ethernet connection 1×RJ45, 8-pin, socket
Cable shielded Ethernet cable,
CAT5e quality or higher
Cable length ≤15 m

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Diagnostic port connection Jack connector, 3-pin
Cable length ≤2.5 m
Analog output connection LEMO plug, 2-pin, with
shielding coaxial
Cable 2-pin plus shielding
Cable length ≤1 m (0.05 mm²/conductor)
Grounding concept →"Power Connection"
Materials exposed to vacuum ceramics (Al2O3≥99.5%),
stainless steel AISI 316L
Internal volume
DN 16 ISO-KF
DN 16 CF-R
8VCR
5.9 cm3
5.4 cm3
7.1 cm3
Admissible pressure (absolute)
100 / 1000 F.S.
1 / 10 F.S.
0.1 F.S.
3 bar
2 bar
1.3 bar
Bursting pressure (absolute) 6 bar
Admissible temperatures
Storage
Operation
–10 °C … +50 °C
+0 °C … +40 °C
Relative humidity ≤80% at temperatures
≤+31 °C, decreasing to 50%
at +40°C
Use indoors only, altitude up to
2000 m NN
Degree of protection IP 40

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Dimensions [mm]
110
DN 16 ISO-KF DN 16 CF-R
8VCR female
110(40.1) 4.4
105
190.1
194.5

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Damping unit [mm]
110
36
90
200
188
4×ø5.5
Magnet
Weight (without damping unit) <1.7 kg

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Analog Measurement Signal vs. Pressure
12 345678910
0
0.9×F.S.
0.5×F.S.
0.6×F.S.
1.0×F.S.
0.7×F.S.
0.8×F.S.
0.1×F.S.
0.2×F.S.
0.3×F.S.
0.4×F.S.
1.1×F.S.
Pressure p
Measuring signal Uout [V]
0.0×F.S.
p = (Uout / 10 V) × p (F.S.)
Conversion Torr ↔Pascal 3)
Torr mbar
4) Pa 4)
c 1.00 1013.25 / 760 =
1.3332…
101325 / 760 =
133.3224…
Example: Gauge with 10 Torr F.S.
Measurement signal Uout = 6 V
p = (6 V / 10 V) × 10 Torr
= 0.6 × 10 Torr = 6 Torr
3) The pressure unit can be set via RS232C/ASCII, REST services and
websites.
4) Source: NPL (National Physical Laboratory)
Guide to the Measurement of Pressure and Vacuum, ISBN 0904457x /
1998

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3 Installation
WARNING
WARNING: fragile components
The ceramic sensor may be damaged by impacts.
Do not drop the product and prevent shocks and
impacts.
3.1 Vacuum Connection
DANGER
DANGER: overpressure in the vacuum system
>1 bar
Injury caused by released parts and harm caused
by escaping process gases can result if clamps are
opened while the vacuum system is pressurized.
Do not open any clamps while the vacuum system
is pressurized. Use the type clamps which are
suited to overpressure.
DANGER
DANGER: overpressure in the vacuum system
>2.5 bar
KF flange connections with elastomer seals (e.g.
O-rings) cannot withstand such pressures. Process
media can thus leak and possibly damage your
health.
Use O-rings provided with an outer centering ring.

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DANGER
DANGER: protective ground
Products that are not correctly connected to ground
can be extremely hazardous in the event of a fault.
Electrically connect the gauge to the grounded
vacuum chamber. This connection must conform to
the requirements of a protective connection ac-
cording to EN 61010:
•CF and VCR flanges fulfill this requirement.
•For gauges with a KF flange, use a conductive
metallic clamping ring.
Caution
Caution: vacuum component
Dirt and damages impair the function of the vac-
uum component.
When handling vacuum components, take appro-
priate measures to ensure cleanliness and prevent
damages.
Caution
Caution: dirt sensitive area
Touching the product or parts thereof with bare
hands increases the desorption rate.
Always wear clean, lint-free gloves and use clean
tools when working in this area.

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Mount the gauge so that no vibrations occur. To keep
condensates and particles from getting into the measur-
ing chamber preferably choose a horizontal or upright
position. Install the gauge with the damping unit in case
of a horizontal mounting orientation (→19).
The gauge may not be installed in a suspended mount-
ing orientation.
In case of severe vibrations at the vacuum system the
gauge should be installed with the damping unit.
If adjustment should be possible after the gauge has
been installed, be sure to install it so that the buttons
can be accessed with a pin (→32).
Remove the protective lid and connect the product to the
vacuum system.
Keep the protective lid.
Mounting the damping unit
DANGER
DANGER: magnetic fields
Strong magnetic fields can disturb electronic
devices like heart pacemakers or impair their
function.
Maintain a safety distance of >5 cm between the
magnet and the heart pacemaker or prevent the
influence of strong magnetic fields by antimagnetic
shielding.
Mount the damping unit (dimensions →15).

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Carefully remove two covers with e.g. a small screwdriver.
Cover
Keep the covers.