Inficon IRG080 User manual

Operating Manual
Incl. EU Declaration of Conformity
tinb74e1 (2023-01) 1
Ion Reference Gauge
IRG080

2tinb74e1 (2023-01) IRG080.om
In all communications with INFICON, please specify the information on the product
nameplate.
This document applies to products with part number
399-874 Ion Reference Gauge IRG080 with BNC and multipin connector
(DN 63 CF-R)
The part number (PN:) can be taken from the product nameplate.
We reserve the right to make technical changes without prior notice.
All dimensions in mm.
The references to diagrams, e.g. (2/3), consist of the fig. no. and the item no. in
that order.
The IRG080 is a vacuum gauge developed for precise total pressure measurement in
vacuum systems. This passive sensor is based on an innovative concept of ioniza-
tion vacuum gauge, whereby a hot cathode emits electrons travelling on a straight
path into a Faraday cup. The IRG080 is operated by the Ion Reference gauge
Controller IRC081.
The IRG080 gauge may only be used for the measurement of total pressures in
vacuum systems and this only in connection with the Ion Reference gauge
Controller IRC081.
The IRG080 is designed and built exclusively for the purpose mentioned in the
section "Intended Use" and may only be used in this manner. Any use for purposes
that deviate from the above mentioned, in particular in connection with controller
units other than IRC081, is considered unintended use.
Any unintended use is forbidden. If any damage results from this, any liability and
warranty claims will expire. The operator or user solely bear the risk for this.
1 × IRG080 gauge
1 × Operating Manual
Product Identification
Validity
Description
Intended Use
Unintended use
Scope of Delivery

tinb74e1 (2023-01) IRG080.om 3
Contents
Product Identification 2
Validity 2
Description 2
Intended Use 2
Unintended use 2
Scope of Delivery 2
1Safety 4
1.1 Symbols Used 4
1.2 Personnel Qualifications 4
1.3 General Safety Instructions 4
1.4 Liability and Warranty 4
2Technical Data 5
3Installation 7
3.1 Installation 7
3.2 Dismounting the gauge head connection unit 8
4Operation 11
5Maintenance 13
5.1 Cathode replacement 14
6Spare Parts, Accessories 17
7Storage 17
8Returning the Product 18
9Disposal 18
Appendix 19
A: Conversion Table 19
B: Further Information 19
EU Declaration of Conformity 20
For cross-references within this document, the symbol (→XY) is used; for cross-
references to further documents listed under ‘Literature’, use is made of the symbol
(→[Z]).

4tinb74e1 (2023-01) IRG080.om
1 Safety
DANGER
Information on preventing any kind of physical injury.
WARNING
Information on preventing extensive equipment and environmental damage.
Caution
Information on correct handling or use. Disregard can lead to malfunctions or
minor equipment damage.
Notice
Skilled personnel
All work described in this document may only be carried out by persons who
have suitable technical training and the necessary experience or who have been
instructed by the end-user of the product.
•Adhere to the applicable regulations and take the necessary precautions for the
process media used.
Consider possible reactions with the product materials (→5).
•Adhere to the applicable regulations and take the necessary precautions for all
work you are going to do and consider the safety instructions in this document.
•Before beginning to work, find out whether any vacuum components are conta-
minated. Adhere to the relevant regulations and take the necessary precautions
when handling contaminated parts.
Communicate the safety instructions to all other users.
INFICON assumes no liability and the warranty is rendered null and void if the end-
user or third parties
•disregard the information in this document
•use the product in a non-conforming manner
•make any kind of interventions (modifications, alterations etc.) on the product
•use the product with accessories not listed in the corresponding product docu-
mentation.
1.1 Symbols Used
Symbols for residual risks
1.2 Personnel Qualifications
1.3 General Safety
Instructions
1.4 Liability and Warranty

tinb74e1 (2023-01) IRG080.om 5
2 Technical Data
Principle
hot cathode ionization
Electrode system configuration
according ISO/WD TS 6737
Measurement range (N2)
with IRC081 controller <1×10-8 … 1×10-4 mbar
<1×10
-6
… 1×10
-2
Pa
Sensitivity (N2) (typical)
29 mbar
-1
Accuracy (N2), typical)
±1% of reading
Repeatability (typical)
1% of reading
Mounting orientation recommended aligned with magnetic
field
1)
with mu-metal int. piece (399-891)
any
Admissible temperatures
Ambient, in operation
+20 … +80 °C
Bake-out
Max. flange temp. with temp.
resistant gauge head cable set
+165 °C
Max. bake-out temperature
without plug and connector
plate unit
+400 °C
with mu-metal intermediate
piece (399-891)
+200 °C
Storage
+20 … +50 °C
Relative humidity
≤85% (non-condensing)
Admissible external magnetic field
in the plane normal to gauge axis,
without shielding
≤50 µT
Use
indoors only
1) Orientation should be such that magnetic field is not perpendicular to the electron trajectory
DANGER
During operation, it must be ensured that the sensor voltages (anode
voltage and Faraday voltages) do not become dangerous to touch
according to EN 61010-1:2010 + A1:2019 + A1:2019/AC:2019.
For this purpose, the currents <1.1 mA and the charge <45 µC must
be complied with in normal operation. In the event of a single fault, the
limit values are 15 mA for a time of less than 30 ms and 45 µC.
By use of the Ion Reference gauge Controller IRC081 the conditions
for operation compliant to EN 61010-1:2010 + A1:2019 +
A1:2019/AC:2019 are fulfilled. If different controller units are used, the
user is responsible for a safe operation.
Collector potential
0 V
Cathode potential
+50 V
Wehnelt potential
+34 V
Anode potential
+250 V
Deflector potential
45 V
Faraday cup potential
+280 V
Emission current range
10 … 100 µA
Cathode heater current / voltage (typ.)
1.4 … 1.8 A / 2 V
Measurement system
Measurement capabilities
General gauge head data
Standard operating characteristics
with IRC081 controller

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Flange connection
DN 63 CF-R
Gauge connections
Ion collector
Bayonet (BNC)
Interface to Sensor (IS)
push-pull self-latching, 7-pin
Feedthrough pins
stainless steel (EN 1.4301)
Feedthrough caps
NiFeCo (EN 1.3981)
Feedthrough isolation
ceramic (Al2O3)
Cathode
Ta, W, Kovar, Al2O3
Anode
stainless steel (EN 1.4404, EN 1.4435)
Wehnelt cylinder
stainless steel (EN 1.4404, EN 1.4435)
Flange
stainless steel (EN 1.4435 ESU)
Internal volume
~385cm
3
Weight
4.3 kg
Fig. 1 Dimensions of the IRG080
Connections
Materials exposed to vacuum
Internal volume, weight
Dimensions [mm]
DN 63 CF-R

tinb74e1 (2023-01) IRG080.om 7
3 Installation
Caution
As a rule, all ionization measurement systems must only be operated
in connection with a properly earthed pump system.
Installation and mounting may only be carried out with the operating
unit switched off.
When connecting the vacuum gauges to the vacuum system it must be strictly ob-
served that during operation the gauges are not subjected to mechanical oscilla-
tions, impact or vibrations.
The mounting position of the gauge heads has no influence on proper operation
per se. However magnetic fields can influence the operation of the gauge. Elec-
trons may be deflected by earth’s magnetic field or nearby sources.
The mounting orientation should be such that magnetic field is not perpendicular to
the electron trajectory. This can be obtained aligning the gauge axis to the mag-
netic field.
Any other mounting orientation can be adopted using the mu-metal
intermediate piece 399-891 (Accessories →17).
Exercise caution when install a venting valve in the immediate vicinity. The then
suddenly occurring air flow may result in mechanical damage to the sensitive
cathode.
When installing several gauge heads at one common component (T-piece or cross
for example) an optical separation is required. The gauge heads may not directly
"see" each other. Interactions may cause incorrect measurements.
Humidity at the insulators, caused for example by condensing water,
can give rise to incorrect measurements due to leakage currents.
Fit the gauge head to the vacuum chamber and bolt the CF flange on.
Before connecting the gauge head, it is recommended to pump down
the system and if possible run a vacuum test or a direct leak search.
Connect the gauge head cable set (Accessories →17) to the gauge head
(Fig. 2).
•BNC plug (with metallic shell) →Collector BNC socket (“Collect.”)
•Multipin connector →Multipin socket (“IS”)
The touch-insulated BNC connector included in the the gauge head
cable set must be connected to the IRC081 controller.
Do not use force to connect the plug. When plugging in make sure first that all pins
are lined up in parallel and are straight. Otherwise the current feedthrough can
suffer damage.
3.1 Installation
Fitting the gauge head
Connecting the gauge head
cable set

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WARNING
Especially note the pin assignment. Provide the connection with great
care. Do not subject the pin contacts to any bending forces.
(Risk: damaging of the current feedthrough/leak)
Fig. 2View of the front connector plate with the BNC socket (Collect.) and multipin
connector (IS)
Put the gauge out of operation first before working at the gauge cable.
After putting out of operation, wait for at least 15 seconds.
For bake-out above 165 °C, the gauge head connection unit shall be disconnected.
3.2 Dismounting the gauge
head connection unit

tinb74e1 (2023-01) IRG080.om 9
1 Gauge head assembly
2 Gauge head connecting unit
3 Cylinder housing
4 Slotted truss head screws M4×6 (3×)
5 Slotted cylindrical head screws M3×6 (4×)
6 Golden connection sockets (8x)
7 Hex socket set screws M3×3 (8×) (also visible in the following Fig. 3)
8 Feedthrough pins (8×)
Unscrew the 3× slotted truss head screws M4×6 (3/4) using a flat head
screwdriver.
Move the cylinder housing (3/3) away.
Unscrew the 4× slotted cylindrical head screws M3×6 (3/5) with flat head
screwdriver.
Unscrew the 8x hex socket set screws
M3×3 (3/7) with an Allen key 1.5 mm on
each golden connection socket (3/6).
Fig. 4Detail view of the hex socket set
screws (3/7) on the connection sockets (3/6)
Separate and remove the complete gauge head connecting unit (3/2) from
the gauge head assembly (3/1).
The gauge head can be baked-out up to 400 °C (200 °C with mu-metal
intermediate piece 399-891).
Disassembly of the gauge head
connecting unit for bake-out
Procedure
Fig. 3Disassembly of the gauge head connection unit

10 tinb74e1 (2023-01) IRG080.om
Move and fit the complete gauge head connecting unit (3/2) to the gauge
head assembly (3/1).
Tighten the 8x hex socket set screws M3×3 (3/7) with Allen key 1.5 mm on
each golden connection socket (3/6). Recommended torque: 1 Nm.
Tighten the 4× slotted cylindrical head screws M3×6 (3/5) with flat head
screwdriver. Recommended torque: 1 Nm.
Move the cylinder housing (3/3) in.
Tighten the 3× slotted truss head screws M4×6 (3/4) using a flat head
screwdriver. Recommended torque: 1 Nm.
Assembly of the gauge head
connecting unit after bake-out

tinb74e1 (2023-01) IRG080.om 11
4 Operation
DANGER
During operation, it must be ensured that the sensor voltages (anode
voltage and Faraday voltages) do not become dangerous to touch
according to EN 61010-1:2010 + A1:2019 + A1:2019/AC:2019.
For this purpose, the currents <1.1 mA and the charge <45 µC must
be complied with in normal operation. In the event of a single fault, the
limit values are 15 mA for a time of less than 30 ms and 45 µC.
By use of the Ion Reference gauge Controller IRC081 the conditions
for operation compliant to EN 61010-1:2010 + A1:2019 +
A1:2019/AC:2019 are fulfilled. If different controller units are used, the
user is responsible for a safe operation.
The IRG080 is a hot cathode ionization gauge with electrode system configuration
according to ISO/WD TS 6737 (see Fig. 5, 12). Electrons emitted from the
cathode are accelerated and focused with the Wehnelt cylinder into the anode
space. The electrons move in a tight electron beam straight towards the exit
aperture of the anode cage and are deflected into a Faraday cup.
Some of the residual gas in the anode space is ionized by the electrons. The
generated ions move by the electrical potential towards the ion collector where they
are captured: the ion current is measured. The resulting pressure is
p= 1
S∙Ic-Ic0
Ie
+ p0
where
p0residual pressure
S gauge sensitivity
Ic ion current measured at pressure p
Ic0ion current measured at residual pressure p0
Ie emission current
Each IRG080 gauge head is individually function factory tested upon delivery.
The Ion Reference gauge Controller IRC081 includes own calibration
data. Refer to the IRG081 operating manual for its delivery and storage
location. (→[1]).
In the presence of halogen gases like fluorine, chlorine, bromine and
iodine and their compounds, the inner components of the gauge head
may suffer rapid wear.
Humidity at the insulators caused by condensing water for example, can
give rise to incorrect measurements due to leakage currents.
Prior to venting, the cathode must be switched off and allowed to cool down to less
than 700 K.
Allow at least 1 h cool-down before venting (with N2or air) the vacuum
system including the gauge head to atmosphere.
Avoid air in-rushes or fast venting to atmosphere while the cathode is
still hot.
Calibration
Operation
Venting

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Fig. 5 Lateral view and cross section representation of the IRG080 gauge head

tinb74e1 (2023-01) IRG080.om 13
5 Maintenance
DANGER
Contaminated parts
Contaminated parts can be detrimental to health and environment.
Before you begin to work, find out whether any parts are contami-
nated. Adhere to the relevant regulations and take the necessary
precautions when handling contaminated parts.
Caution
Vacuum component
Dirt and damages impair the function of the vacuum component.
When handling vacuum components, take appropriate measures to
ensure cleanliness and prevent damages.
Caution
Dirt sensitive area
Touching the product or parts thereof with bare hands increases the
desorption rate.
Always wear clean, lint-free gloves and use clean tools when working
in this area.

14 tinb74e1 (2023-01) IRG080.om
The cathode is supplied on a plate under a cover. The cathode must
only be exchanged in a room which is free of dust.
1 Gauge head
2 DN 63 intermediate piece
3 Hex head cap screws M8×45 (8×)
4 Washers and nuts set M8 (8×)
5 CF 63 gasket
Fig. 6 Cathode replacement, preparation, steps 5 to 7
Switch off the IRC081 operating unit.
Detach the gauge head cable set, comprising BNC plug and multipin
connector, from the gauge head.
Remove the gauge head assembly from the vacuum system.
Disassemble the gauge head connecting unit from the gauge head assembly.
For this, follow the steps described in Section 3.2, "Disassembly of the gauge
head connecting unit for bake-out".
Loosen the 8× hex head cap screws M8×45 (6/3) unscrewing the 8× M8 nuts
(6/4) with a flat wrench 13 mm.
Move carefully the DN 63 intermediate piece (6/2) upward to remove it.
Pull and remove the CF gasket (6/5).
5.1 Cathode replacement
Preparation

tinb74e1 (2023-01) IRG080.om 15
1 Gauge head
2 Hex socket head cap
screws M2.5×6 (8×)
3 Metallic bushings (2×)
4 Leads (5×)
5 Brackets (2×)
Fig. 7 Cathode replacement, steps 8 to 9
Unscrew the 8× M2.5×6 hex socket head cap screws (7/2) with an Allen key
2 mm. Remove carefully the 2× metallic bushings (7/3) and 2× brackets (7/5).
Pull upward and remove the 5× leads (7/4) from each feedthrough pin.
1 Sensor unit
2 Main gauge head
flange
3 Vented hex socket
head cap screws
M2.5×8 (6×)
4 Hex socket set
screws M3×3 (2×)
Fig. 8 Cathode replacement, steps 10 to 12
Unscrew the 2x M3x3 hex socket set screws (8/4) on the cathode connection
blocks with an Allen key 1.5 mm.
Unscrew the 6x M2.5x8 vented cylindrical head socket screws (8/3) with an
Allen key 2 mm.
Move away the sensor unit (8/1) from the main gauge head flange (8/2).
Cathode removal

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1 Hex socket head cap screws M2.5×12 (3×)
2 Ceramic bushings (3×)
3 Sensor support
4 Cathode connection blocks (2×)
5 Hex socket set screws M3×3 (2×)
6 Hex socket head cap screws M2×6 (2×)
7 Disc plate
8 Cathode
Fig. 9 Cathode replacement, steps 13 to 18
Unscrew the 3× M2.5×12 (9/1) hex socket cap screws with an Allen key 2
mm and remove carefully the 3× ceramic bushings (9/2).
Separate the sensor support (9/3) from the sensor unit.
Unscrew the 2× M3×3 hex socket set screws (9/5) with an Allen key 1.5 mm
and carefully pull up the 2× cathode connection blocks (9/4) from the cathode
legs.
Unscrew the 2× M2×6 hex socket head cap screws (9/6) with an Allen key 2
mm to free the cathode (9/8) from its retaining disc plate (9/7).
Remove the disc plate (9/7) and then the cathode (9/8).
Exchange the cathode (9/8) (Accessories →17).
To reinstall the cathode, follow the above disassembly instructions in reverse order.
Recommended torque for all screws: 1 Nm.
When mating up the DN 63 intermediate pipe to the main gauge head
flange, make sure to replace the used CF 63 seal with a new, unused
copper gasket.
Before employing the gauge head, it is recommended to pump down the
system and if possible run a vacuum test or a direct leak search.
Cathode reinstallation

tinb74e1 (2023-01) IRG080.om 17
6 Spare Parts, Accessories
When ordering spare parts, always indicate:
•all information on the product nameplate
•description and ordering number according to the spare parts list
Ordering number
Replacement cathode
399-890
Mu-metal intermediate piece, DN 63 CF-F
399-891
Protection grid for intermediate piece
399-892
Transport case
399-895
Ordering number
5 m (16.4 ft) with contact protection
399-883
10 m (10 m) with contact protection
399-884
15 m (49.5 ft) with contact protection
399-885
7 Storage
Caution
Vacuum component
Inappropriate storage leads to an increase of the desorption rate
and/or may result in mechanical damage of the product.
Cover the vacuum ports of the product with protective lids or grease
free aluminum foil. Do not exceed the admissible storage temperature
range (→5).
Spare parts
Gauge head cables, temperature
resistant (up to 165 °C)

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8 Returning the Product
WARNING
Forwarding contaminated products
Products returned to INFICON for service or repair should, if possible,
be free of harmful substances (e.g. radioactive, toxic, caustic or
microbiological). Otherwise, the type of contamination must be de-
clared.
Adhere to the forwarding regulations of all involved countries and for-
warding companies and enclose a completed contamination declara-
tion (Form under www.inficon.com).
Products that are not clearly declared as "free of harmful substances" are de-
contaminated at the expense of the customer.
Products not accompanied by a duly completed declaration of contamination are
returned to the sender at his own expense.
9 Disposal
DANGER
Contaminated parts
Contaminated parts can be detrimental to health and environment.
Before beginning to work, find out whether any parts are contami-
nated. Adhere to the relevant regulations and take the necessary pre-
cautions when handling contaminated parts.
WARNING
Substances detrimental to the environment
Products or parts thereof (mechanical and electric components,
operating fluids etc.) can be detrimental to the environment.
Dispose of such substances in accordance with the relevant local
regulations.
After disassembling the product, separate its components according to the
following criteria:
Contaminated components (radioactive, toxic, caustic or biological hazard etc.)
must be decontaminated in accordance with the relevant national regulations,
separated according to their materials, and disposed of.
Such components must be separated according to their materials and recycled.
Separating the components
Contaminated components
Other components

tinb74e1 (2023-01) IRG080.om 19
Appendix
mbar Bar Pa hPa kPa Torr
mm Hg
mbar
1
1×10
-3
100
1
0.1
0.75
Bar
1×10
3
1
1×10
5
1×10
3
100
750
Pa
0.01
1×10
-5
1
0.01
1×10
-3
7.5×10
-3
hPa
1
1×10
-3
100
1
0.1
0.75
kPa
10
0.01
1×10
3
10
1
7.5
Torr
mm Hg
1.332 1.332×10-3 133.32 1.3332 0.1332 1
1 Pa = 1 N/m2
[1] www.inficon.com
Operating Manual
Ion Reference Gauge Controller IRC081
tinb82d1 (German)
tinb82e1 (English)
INFICON AG, LI–9496 Balzers, Liechtenstein
A: Conversion Table
Pressure units
(vacuum technology)
B: Further Information

20 tinb74e1 (2023-01) IRG080.om
EU Declaration of Conformity
We, INFICON, hereby declare that the equipment mentioned below complies with
the provisions of the following directives:
•2014/35/EU, OJ L 96/357, 29.3.2014
(Low Voltage Directive; Directive relating to electrical equipment designed for use within certain
voltage limits)
•2014/30/EU, OJ L 96/79, 29.3.2014
(EMC Directive; Directive relating to electromagnetic compatibility)
•2011/65/EU, OJ L 174/88, 1.7.2011
(RoHS Directive; Directive on the restriction of the use of certain hazardous substances in electrical
and electronic equipment)
Ion Reference Gauge
IRG080
(operation with the Ion Reference Gauge Controller IRC081)
Harmonized and international/national standards and specifications:
•EN 61010-1:2010 + A1:2019 + A1:2019/AC:2019
(Safety requirements for electrical equipment for measurement, control, and laboratory use)
•EN 61326-1:2013; Group 1, Class B
(EMC requirements for electrical equipment for measurement, control and laboratory use)
INFICON AG, Alte Landstraße 6, LI-9496 Balzers
3 January 2023
3 January 2023
Dr. Christian Riesch
Head of Development
Dr. Roberto Salemme
Product Manager
Product
Standards
Manufacturer / Signatures