Inficon Gemini MAG500 User manual

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Cold Cathode Gauge
Gemini MAG500, MAG504
Gemini MAG550, MAG554
Cold Cathode Pirani Gauge
Gemini MPG500, MPG504
Gemini MPG550, MPG554
Operating Manual
Incl. EU Declaration of Conformity

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Product Identification
In all communications with INFICON, please specify the infor-
mation given on the product nameplate. For convenient refer-
ence copy that information into the space provided below.
`
Model:
PN:
SN:
VDC W
INFICON AG, LI-9496 Balzers

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Validity
This document applies to products of the MAG5xx and MPG5xx
series:
*)EtherCAT
**)RS232/485
The part number (PN) can be taken from the product nameplate.

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If not indicated otherwise in the legends, the illustrations in this
document correspond to a MxG50x gauge with FCC receptacle
and vacuum connection DN 25 ISO-KF. They apply to the other
products by analogy.
We reserve the right to make technical changes without prior
notice.
Intended Use
Gemini MAG500, MAG504, MAG550, MAG554
The Cold Cathode Gauges Gemini MAG5xx have been designed
for vacuum measurement of gases in the pressure range of
1×10-9 … 1×10-2 mbar.
Gauges with gauge identification can be operated in connection
with an INFICON Vacuum Gauge Controller of the VGC40x /
VGC50x series.
Gemini MPG500, MPG504, MPG550, MPG554
The Cold Cathode Gauges Gemini MPG5xx have been designed
for vacuum measurement of gases in the pressure range of
1×10-9 … 1000 mbar.
They must not be used for measuring flammable or combustible
gases in mixtures containing oxidants (e.g. atmospheric oxygen)
within the explosion range.
Gauges with gauge identification can be operated in connection
with an INFICON Vacuum Gauge Controller of the VGC40x /
VGC50x series.
Functional Principle
Gemini MAG500, MAG504, MAG550, MAG554
The gauge functions with a cold cathode ionization measure-
ment circuit (according to the inverted magnetron principle).

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Over the whole measurement range, the measuring signal is
output as a logarithm of the pressure.
Gemini MPG500, MPG504, MPG550, MPG554
The gauge consists of two separate measuring systems (the
Pirani and the cold cathode system according to the inverted
magnetron principle). They are combined in such a way that for
the user, they behave like one measuring system.
Over the whole measurement range, the measuring signal is
output as a logarithm of the pressure.
Scope of Delivery
1× gauge
1× pin for adjusting settings via buttons (MPG gauges only)
1× Operating Manual German
1× Operating Manual English

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Contents
Product Identification 2
Validity 3
Intended Use 4
Functional Principle 4
Scope of Delivery 5
1Safety 8
1.1 Symbols Used 8
1.2 Personnel Qualifications 8
1.3 General Safety Instructions 9
1.4 Liability and Warranty 9
2Technical Data 10
2.1 Measuring Signal vs. Pressure 16
2.2 Gas Type Dependence MAG5xx 19
2.3 Gas Type Dependence MPG5xx 21
3Installation 24
3.1 Vacuum Connection 24
3.2 Power Connection 28
3.2.1 FCC 68, 8-pin Connector 29
3.2.2 D-sub, 9-pin Connector 30
4Operation 31
4.1 Status Indication MAG50x 31
4.2 Status Indication MPG50x 32
4.3 Put MAG5xx Into Operation 33
4.4 Put MPG5xx Into Operation 33
4.5 Gas Type Dependence 34
4.6 Ignition Delay 35
4.7 Contamination 35
5Deinstallation 37
6Maintenance, Repair 39
6.1 Adjusting the Gauge 39
6.2 Cleaning the Gauge / Replacing Parts 41
6.2.1 Troubleshooting (measuring chamber) 42
6.2.2 Replacing Ionization Chamber and Ignition Aid 44
6.2.3 Replacing Measuring Chamber 50
6.3 Troubleshooting 52

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7Returning the Product 55
8Disposal 56
9Options 57
10 Accessories 57
11 Spare Parts 57
11.1 Ignition aid for MAG5xx and MPG5xx 58
11.2 Ionization Chamber for MAG5xx and MPG5xx 58
11.3 Measuring Chamber Cpl. (Spare Sensor) 58
11.3.1 Measuring Chamber Cpl. for MAG5x0 58
11.3.2 Measuring Chamber Cpl. for MAG5x4 59
11.3.3 Measuring Chamber Cpl. for MPG5x0 59
11.3.4 Measuring Chamber Cpl. for MPG5x4 60
Literature 61
ETL Certification 61
EU Declaration of Conformity 62
For cross-references within this document, the symbol (→XY)
is used, for cross-references to further documents, listed under
literature, the symbol (→[Z]).

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1 Safety
1.1 Symbols Used
DANGER
Information on preventing any kind of physical injury.
WARNING
Information on preventing extensive equipment and environ-
mental damage.
Caution
Information on correct handling or use. Disregard can lead to
malfunctions or minor equipment damage.
Symbol printed on the product nameplate: Consultation
of operating manual required
Notice
<…> Labeling
1.2 Personnel Qualifications
Skilled personnel
All work described in this document may only be carried out by
persons who have suitable technical training and the neces-
sary experience or who have been instructed by the end-user
of the product.

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1.3 General Safety Instructions
•Adhere to the applicable regulations and take the necessary
precautions for the process media used.
Consider possible reactions with the product materials.
Consider possible reactions (e.g. explosion) of the process
media due to the heat generated by the product (MPG5xx
only: Pirani filament 120 °C).
•Adhere to the applicable regulations and take the necessary
precautions for all work you are going to do and consider the
safety instructions in this document.
•Before beginning to work, find out whether any vacuum com-
ponents are contaminated. Adhere to the relevant regulations
and take the necessary precautions when handling contamin-
ated parts.
Communicate the safety instructions to all other users.
1.4 Liability and Warranty
INFICON assumes no liability and the warranty becomes null
and void if the end-user or third parties
•disregard the information in this document
•use the product in a non-conforming manner
•make any kind of interventions (modifications, alterations etc.)
on the product
•use the product with accessories not listed in the product
documentation.
The end-user assumes the responsibility in conjunction with the
process media used.
Gauge failures due to contamination or wear and tear, as well as
expendable parts (e.g. ionization chamber, ignition aid, Pirani
filament (MPG5xx)), are not covered by the warranty.

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2 Technical Data
For further technical data for gauges with RS232C or
RS485C interface→[1], with EtherCAT interface
→[2].
Measurement range (air, N2)
MAG
MPG
1×10-9 … 1×10-2 mbar
1×10
-9
… 1000 mbar
Accuracy MAG (N2)
1×10
-8
… 1×10
-2
mbar
30% of reading
Accuracy MPG (N2)
1×10-8 … 100 mbar
100 … 1000 mbar
30% of reading
50% of reading
Repeatability (N2)
MAG, 1×10-8 … 1×10-2 mbar
MPG, 1×10
-8
… 100 mbar
5% of reading
5% of reading
Gas type dependence
MAG
MPG
→19
→21
Voltage range (analog output) 0 … +10.5 V
Measurement range
3MAx-xxx-xxxN
3MAx-xxx-xxxQ
3MBx-xxx-xxx
P
+1.5 … +8.5 V (dc)
+0.667 … +10 V (dc)
+1.398 … +8.6 V (dc)
Voltage vs. pressure
3MAx-xxx-xxxN
3MAx-xxx-xxxQ
3MBx-xxx-xxxP
1 V/decade, logarithmic
1.33 V/decade, logarithmic
0.6 V/decade, logarithmic
Status signal
14.5 … 30 V (ignited)
Error signal
3MAx-xxx-xxxN
3MAx-xxx-xxxQ
3MBx-xxx-xxxP
<+0.5 V
≤+0.3 V
+9.5 … +10.5 V

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Output impedance 2 × 4.7 Ω, short-circuit proof
Load impedance
≥10 k
Ω
, short-circuit proof
Step response time
>1×10-6 mbar
1×10
-6
… 1×10
-8
mbar
pressure dependent
<100 ms
≈
1 s
Gauge identification
3MAx-xxx-000N1)
3MAx-xxx-000Q
3MBx-xxx-000P
–
100 kΩreferenced to supply
common
85 kΩreferenced to supply
common
Status signal (digital output)
FCC receptacle
Current rating
100 mA
High voltage is ON +14.5 … +30 V (dc)
(depending on supply voltage)
High voltage is OFF
0 V (dc)
D-sub receptacle
Supply voltage
≤30 V (dc)
Current rating
100 mA (sink)
High voltage is ON
0 V (dc)
High voltage is OFF open
High voltage cut-in, low active (digital input)
High voltage ON
High voltage OFF
<2.5 V (dc)
>4.0 V (dc)
High voltage cut-in, high active (digital input)
High voltage ON
High voltage OFF
>11.0 V (dc)
< 5.0 V (dc)
1) Not suited for operation with a VGC40x / VGC50x controller.

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Supply
DANGER
The gauge may only be connected to power sup-
plies, instruments, or control devices that conform
to the requirements of a grounded protective extra-
low voltage (PELV) and limited power source
(LPS), Class 2. The connection to the gauge has to
be fused.
2)
Supply voltage
at the gauge
3)
+14.5 … +30 V (dc)
Ripple
≤1 Vpp
Power consumption MxG50x
≤2 W
Fuse to be connected
2)
≤1 AT
High voltage in the measuring chamber
Ignition voltage
Operating voltage ≤4.5 kV ≤3.3 kV
Current in the measuring chamber
3Mxx-x0x-xxxx
3Mxx-x1x-xxxx
high current
low current
Electrical connection
3Mxx-xxx-00xx
3Mxx-xxx-0
1
xx 1)
FCC 68, 8-pin
D-sub, 9-pin
Sensor cable
FCC connector
D-sub connector
8-pin, shielded
9-pin, shielded
Cable length (FCC only) ≤50 m (0.14 mm2/conductor)
2) INFICON controllers fulfill this requirement.
3) The minimum voltage of the power supply unit must be increased
proportionally to the length of the sensor cable.

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Grounding concept →
"Power Connection"
Vacuum connection – signal
common connected via 10 kΩ
(potential difference ≤16 V)
Supply common – signal
common conducted separately;
differential measurement is
recommended
Materials exposed to vacuum
Vacuum connection
Measuring chamber
stainless steel (1.4435)
stainless steel (1.4435)
Pirani filament (
MPG5xx)
W
Feedthrough, MAG/MPG5x0
Isolation
Ring
Anode
Pin
glass, ceramic (Al2O3)
stainless steel (1.4435)
molybdenum
Ni alloy
Feedthrough, MAG/MPG5x4
ceramic coated
Anode molybdenum
Ionization chamber
3Mxx-0xx-xxxx stainless steel (1.4301, 1.4016)
3Mxx-
1
xx-xxxx Ti
Ignition aid stainless steel (1.4310)
Internal volume
DN 25 ISO-KF
DN 40 ISO-KF
DN 40 CF-F
DN 40 CF-R
≈19.9 cm3
≈20.9 cm3
≈25.2 cm3
≈
25.6 cm
3
Permissible pressure
(absolute)
10 bar, limited to inert gases
<55 °C
Bursting pressure (absolute)
>13 bar

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Permissible temperatures
Operation
Pirani filament (MPG)
Bakeout
Storage
+5 °C … +55 °C
120 °C
≤150 °C 4)
–40 °C … +70 °C
Relative humidity, year's mean
during 30 days a year
1×10-8 … 1×10-2 mbar
1×10
-7
… 1×10
-2
mbar
≤70% (non-condensing)
≤95% (non-condensing)
Mounting orientation
any
Use indoors only, altitude up to
6000 m NN
Degree of protection
IP 40
Weight
Without fieldbus interface
DN 25 ISO-KF
DN 40 ISO-KF
DN 40 CF-F und CF-R
≤280 g
≤320 g
≤570 g
With fieldbus interface
DN 25 ISO-KF
DN 40 ISO-KF
DN 40 CF-F und CF-R
≤500 g
≤530 g
≤780 g
4) Without electronics unit.

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Dimensions MxG50x [mm]
DN 25 ISO-KF
15 79 60
DN 40 CF-R
23
DN 40 CF-F
23
DN 40 ISO-KF
17
DIA
ADJ
CAL
HV-ST
ST
E
C
A
024
6
8
FCC 68
8-pin
44
44
DIA
ADJ
CAL
HV-ST
ST
E
C
A
024
6
8
D-Sub
9-pin
44
44
Dimensions MxG55x →[2].

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2.1 Measuring Signal vs. Pressure
Measurement range 1.5 … 8.5 V (3MAx-xxx-xxxN)
1E–01
1E+00
1E–06
1E–07
1E–08
1E–09
1E–100.0 0.5 1.0 1.5 2.5 3.5 4.5 5.5 6.5 7.5 8.5 9.52.0 3.0 4.0 5.0 6.0 7.0 8.0 9.0 10.0
sensor error
Pressure p
Measurement signal U [V]
1E–02
1E–03
1E–04
1E–05
underrange
Pa
mbar
torr
overrange
p = 10(U-c) ⇔U = c + log10 p
valid in the range 1×10-9 mbar < p < 1×10-2 mbar
7.5×10-10 Torr < p < 7.5 ×10-3 Torr
1×10-7 Pa < p < 1 Pa
mbar Pa Torr
c
10.5
8.5
10.625
where p pressure
U measurement signal
c constant (pressure unit dependent)

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Measurement range 0.667 … 10 V (3MAx-xxx-xxxQ)
1E–01
1E+00
1E–06
1E–07
1E–08
1E–09
1E–100.0 0.5 1.0 1.5 2.5 3.5 4.5 5.5 6.5 7.5 8.5 9.5 10.52.0 3.0 4.0 5.0 6.0 7.0 8.0 9.0 10.0
Pressure p
Measurement signal U [V]
1E–02
1E–03
1E–04
1E–05
Pa
mbar
torr
0.667
sensor error underrange
overrange
p = 10(U-c)/1.33 ⇔U = c + 1.33 log p
valid in the range 1×10-9 mbar < p < 1×10-2 mbar
7.5×10-10 Torr < p < 7.5 ×10-3 Torr
1×10-7 Pa < p < 1 Pa
mbar Pa Torr
c
12.66
10
12.826
where p pressure
U measurement signal
c constant (pressure unit dependent)

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Measurement range 1.398 … 8.6 V (3MBx-xxx-xxxP)
1E+04
1E+02
1E+00
1E–02
1E–04
1E–06
1E–08
0.0 0.5 2.5 3.5 4.5 5.5 6.5 7.5 8.5 9.5 10.5
Measurement signal U [V]
Pressure p
8.6
1.397
1E–09
sensor error
Pa
mbar
torr
1.217
underrange
overrange
p = 101.667U-d ⇔U = c + 0.6 log p
valid in the range 1×10-9 mbar < p < 1000 mbar
7.5×10-10 Torr < p < 750 Torr
1×10-7 Pa < p < 1×105Pa
mbar
Pa
Torr
c 6.798 5.598 6.873
d
11.33
9.333
11.46
where p pressure
U measurement signal
c, d constant (pressure unit dependent)

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2.2 Gas Type Dependence MAG5xx
Indicated pressure (gauge calibrated for air)
4
2
10
–3
8
6
4
2
10
–4
8
6
4
2
10
–5
8
6
4
2
10
–6
8
6
4
2
10
–7
10
–7
2 4 6
10
–6
2 4 6
10
–5
2 4 6
10
–4
2 4 6
10
–3
2 4 6
10
–2
Xe Kr
Air
O
2
CO
N
2
H
2
Ne He
p
eff
[mbar]
p [mbar]
Ar
Indication range below 10-5 mbar
In the range below 10-5 the pressure indication is linear. For
gases other than air, the pressure can be determined by means
of a simple conversion formula:
peff = K × indicated pressure

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where: Gas type K
Air (N2, O2,CO)
1.0
Xe
0.4
Kr
0.5
Ar
0.8
H2
2.4
Ne
4.1
He
5.9
These conversion factors are average values.
A mixture of gases and vapors is often involved. In this
case, accurate determination is only possible with a
partial pressure measurement instrument, e.g. a
quadrupole mass spectrometer.