Inficon BPG402-SE User manual

Operating Manual
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Bayard-Alpert Pirani Gauge
Dual Filament Bayard-Alpert Pirani Gauge
BPG402-S
BPG402-SD
BPG402-SE
BPG402-SL
BPG402-SP

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In all communications with INFICON, please specify the information on the product
nameplate. For convenient reference copy that information into the space provided
below.
Model:
PN:
SN:
V W
INFICON AG, LI-9496 Balzers
This document applies to products with the following part numbers:
BPG402-S (without display, one switching function)
353-570 (vacuum connection DN 25 ISO-KF)
353-571 (vacuum connection DN 40 CF-R)
BPG402-S (with display, one switching function)
353-572 (vacuum connection DN 25 ISO-KF)
353-573 (vacuum connection DN 40 CF-R)
BPG402-SL (without display, one switching function)
353-571 (vacuum connection DN 40 CF-R, long tube)
BPG402-SD (with DeviceNet interface and two switching functions)
353-576 (vacuum connection DN 25 ISO-KF)
353-577 (vacuum connection DN 40 CF-R)
BPG402-SE (with EtherCAT interface and two switching functions)
353-590 (DN 25 ISO-KF)
353-591 (DN 40 CF-R)
BPG402-SP (with Profibus interface and two switching functions)
353-574 (vacuum connection DN 25 ISO-KF)
353-575 (vacuum connection DN 40 CF-R)
The part number (PN) can be taken from the product nameplate.
If not indicated otherwise in the legends, the illustrations in this document
correspond to gauge with part number 353-572. They apply to the other gauges by
analogy.
We reserve the right to make technical changes without prior notice.
All dimensions in mm.
The BPG402-Sx gauges have been designed for vacuum measurement of gases
and gas mixtures in a pressure range of 5×10-10 … 1000 mbar.
They must not be used for measuring flammable or combustible gases in mixtures
containing oxidants (e.g. atmospheric oxygen) within the explosion range.
The gauges can be operated in connection with the INFICON Vacuum Gauge
Controller VGC40x / VGC50x or with other control devices.
Product Identification
Validity
Intended Use

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Over the whole measuring range, the gauge has a continuous characteristic curve
and its measuring signal is output as logarithm of the pressure.
The gauge functions with a Bayard-Alpert hot cathode ionization measurement
system (for p < 2.0×10-2 mbar) and a Pirani measurement system (for
p > 5.5×10-3 mbar). In the overlapping pressure range of
2.0×10-2 … 5.5×10-3 mbar, a mixed signal of the two measurement systems is
output. The hot cathode is switched on by the Pirani measurement system only
below the switching threshold of 2.4×10-2 mbar (to prevent filament burn-out). It is
switched off when the pressure exceeds 3.2×10-2 mbar.
BPG402-Sx sensors are equipped with two hot cathodes. The identical filaments
are monitored by the gauge electronics. In case of a filament failure, the gauge will
switch over to the second (undamaged) filament and continue to operate. The
filament status is displayed on the gauge or can be read via the interfaces
(RS232C, DeviceNet, EtherCAT or Profibus).
Functional Principle

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Contents
Product Identification 2
Validity 2
Intended Use 2
Functional Principle 3
1Safety 6
1.1 Symbols Used 6
1.2 Personnel Qualifications 6
1.3 General Safety Instructions 7
1.4 Liability and Warranty 7
2Technical Data 8
3Installation 13
3.1 Vacuum Connection 13
3.1.1 Removing and Installing the Electronics Unit 14
3.1.2 Using the Optional Baffle 15
3.2 Electrical Connection 17
3.2.1 Use With INFICON VGC40x / VGC50x Vacuum Gauge Controller 17
3.2.2 Use With Other Controllers 17
3.2.2.1 Making an Individual Sensor Cable 18
3.2.2.2 Making a DeviceNet Interface Cable (BPG402-SD) 21
3.2.2.3 Making two EtherCAT Interface Cables (BPG402-SE) 22
3.2.2.4 Making a Profibus Interface Cable (BPG402-SP) 23
3.2.3 Using the Optional Power Supply (With RS232C Line) 24
4Operation 26
4.1 Measuring Principle, Measuring Behavior 26
4.2 Operational Principle of the Gauge 28
4.3 Putting the Gauge Into Operation 28
4.4 Degas 28
4.5 Filament Status 29
4.5.1 Filament Status Indicator 29
4.5.2 Filament Status Relay (Only BPG402-S, SL) 29
4.5.3 Filament Status via Interface 29
4.6 Filament Control Mode 29
4.7 Emission Control Mode 30
4.8 Display (BPG402-S) 30
4.9 RS232C Interface 31
4.9.1 Description of the Functions 31
4.9.1.1 Output String (Transmit) 32
4.9.1.2 Input String (Receive) 34
4.10 DeviceNet Interface (BPG402-SD) 35
4.10.1 Description of the Functions 35
4.10.2 Operating Parameters 35
4.10.2.1 Operating Software 35
4.10.2.2 Node Address Setting 35
4.10.2.3 Data Rate Setting 36
4.10.3 Status Indicators 36
4.11 EtherCAT Interface (BPG402-SE) 37
4.11.1 Description of the Functions 37
4.11.2 Operating Parameters 37
4.11.2.1 Operating Software 37
4.11.2.2 Explicit Device Address Setting 37
4.11.3 Status Indicators 37
4.12 Profibus Interface (BPG402-SP) 38
4.12.1 Description of the Functions 38
4.12.2 Operating Parameters 38
4.12.2.1 Operating Software 38
4.12.2.2 Node Address Setting 38
4.13 Switching Functions 39
4.13.1 Setting the Switching Functions 40
5Deinstallation 41

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6Maintenance, Repair 43
6.1 Cleaning the Gauge 43
6.2 Adjusting the Gauge 43
6.2.1 Adjustment at Atmospheric Pressure 43
6.2.2 Zero Point Adjustment 44
6.3 What to Do in Case of Problems 44
6.4 Replacing the Sensor 46
7Options 47
8Spare Parts 47
9Storage 47
10 Returning the Product 48
11 Disposal 48
Appendix 49
A: Relationship Output Signal – Pressure 49
B: Gas Type Dependence 50
C: Literature 52
For cross-references within this document, the symbol (→XY) is used, for cross-
references to further documents and data sources, the symbol (→[Z]).

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1 Safety
DANGER
Information on preventing any kind of physical injury.
WARNING
Information on preventing extensive equipment and environmental damage.
Caution
Information on correct handling or use. Disregard can lead to malfunctions or
minor equipment damage.
Notice
Hint, recommendation
The result is O.K.
The result is not as expected
Optical inspection
Waiting time, reaction time
Skilled personnel
All work described in this document may only be carried out by persons who
have suitable technical training and the necessary experience or who have been
instructed by the end-user of the product.
1.1 Symbols Used
1.2 Personnel Qualifications

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•Adhere to the applicable regulations and take the necessary precautions for the
process media used.
Consider possible reactions between the materials (→11) and the process
media.
Consider possible reactions of the process media (e.g. explosion) due to the
heat generated by the product.
•Adhere to the applicable regulations and take the necessary precautions for all
work you are going to do and consider the safety instructions in this document.
•Before beginning to work, find out whether any vacuum components are con-
taminated. Adhere to the relevant regulations and take the necessary precau-
tions when handling contaminated parts.
Communicate the safety instructions to all other users.
INFICON assumes no liability and the warranty becomes null and void if the end-
user or third parties
•disregard the information in this document
•use the product in a non-conforming manner
•make any kind of interventions (modifications, alterations etc.) on the product
•use the product with accessories not listed in the corresponding product docu-
mentation.
The end-user assumes the responsibility in conjunction with the process media
used.
Gauge failures due to contamination, as well as expendable parts (e.g. filament),
are not covered by the warranty.
1.3 General Safety
Instructions
1.4 Liability and Warranty

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2 Technical Data
Measurement range (air, O2
,
CO, N2) 5×10-10 … 1000 mbar, continuous
Accuracy
(after 10 min. stabilization)
15% of reading in the range of
1×10-8 … 10-2 mbar
Repeatability
(after 10 min. stabilization)
5% of reading in the range of
1×10-8 … 10-2 mbar
Gas type dependence →Appendix B
Switching on threshold
Switching off threshold
2.4×10-2 mbar
3.2×10-2 mbar
Emission current
p ≤7.2×10-6 mbar
7.2×10-6 mbar < p < 3.2×10-2 mbar
5 mA
25 µA
Emission current switching
25 µA 5 mA
5 mA 25 µA
7.2×10-6 mbar
3.0×10-5 mbar
Filaments
Number
Means of selection
2
Controlled by gauge (default) or via
interfaces (→34, [1] and [10])
Settling time of measurement signal
after filament change
Filament status
<4 s
LED, relay contact (→29)
Emission control mode
Automatic
Manual
Emission ON/OFF automatically
Emission ON/OFF by user via interfaces
(→30)
Current (p <7.2×10-6 mbar) ≈20 mA
Control input signal 0 V/+24 V (dc), active high
(→19, 20)
(control via RS232C →31)
Duration <3 min., followed by automatic stop
In degas mode, the BPG402-Sx gauges keep supplying pressure readings, the
tolerances of which can be higher than during normal operation.
Degas acts only upon the active filament.
Output signal (measuring signal) 0 … +10 V (dc)
Measuring range +0.774 … +10 V
(5×10-10 … 1000 mbar)
Relationship voltage-pressure logarithmic, 0.75 V/decade
(→Appendix A)
Error signal (→44)
EEPROM error
Hot cathode error
Pirani error
≈+0.1 V (dc)
≈+0.3 V (dc)
≈+0.5 V (dc)
Minimum load impedance 10 kΩ
BPG402-Sx 42 kΩresistor between Pin 10 and Pin 5
(sensor cable)
Measurement
Emission
Degas
Output signal
Gauge identification

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BPG402-S, -SL
BPG402-SD, -SE, -SP
Adjustment range
1 ("SETPOINT")
2 ("SETPOINT A, B")
1×10-9 mbar … 100 mbar
Setpoints adjustable via potentiometers,
one floating, normally open relay contact
per setpoint (→19, 20, 39).
(Adjusting the setpoints via field bus
→corresponding bus section)
Hysteresis 10% of the threshold value
Relay contact rating ≤30 V (dc), ≤0.5 A (dc)
Data rate
Data format
Connections (sensor cable connector)
TxD (Transmit Data)
RxD (Receive Data)
GND
9600 Baud
binary
8 data bits
one stop bit
no parity bit
no handshake
Pin 13
Pin 14
Pin 5
Function and communication protocol of the RS232C interface →31
Fieldbus name DeviceNet
Standard applied →[7]
Communication protocol, data format →[1], [5]
Interface, physical CAN bus
Data rate
(adjustable via "RATE" switch)
125 kBaud
250 kBaud
500 kBaud (default)
"P" (125 kBaud, 250 kBaud, 500 kBaud
programmable via DeviceNet)
(→[1])
Node address (MAC ID)
(Adjustable via "ADDRESS", "MSD",
"LSD" switches)
0 … 63dec (default = 63dec)
"P" (0 … 63 programmable via
DeviceNet, →[1])
DeviceNet connector Micro-Style, 5-pin, male
Cable shielded, special DeviceNet cable,
5 conductors (→21 and [5])
Cable length, system wiring according to DeviceNet specifications
(→[7], [5])
Fieldbus name EtherCAT
Standard applied, data format,
communication protocol
→[11], [12]
Data rate 100 Mbps
Node address explicit device identification
Physical layer 100Base-Tx (IEEE 802.3)
EtherNET connector 2×RJ45, 8-pin, socket
<IN>: EtherCAT input
<OUT>: EtherCAT output
Cable shielded, 8-pin special Ethernet Patch
cable (quality CAT5e or higher)
Cable length ≤100 m
Switching functions
RS232C interface
DeviceNet interface
(BPG402-SD)
EtherCAT interface
(BPG402-SE)

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Fieldbus name Profibus
Standard applied →[12]
Communication protocol, data format →[2], [12]
Interface, physical RS485
Data rate ≤12 MBaud (→[2])
Node address
Local
(Adjustable via hexadecimal
"ADDRESS", "MSD", "LSD"
switches)
Default setting
Via Profibus
("ADDRESS" switches set to >7Dhex
(>125dec))
00 … 7Dhex (0 … 125dec)
5Chex
00 … 7Dhex (0 … 125dec)
Profibus connection D-Sub, 9-pin, female
Cable shielded, special Profibus cable
(→23 and [6])
Cable length, system wiring according to Profibus specifications
(→[12], [6])
Display panel
Dimensions
Pressure units
Selecting the pressure unit
LCD matrix, 32×16 pixels,
with background illumination
17.0 mm × 12 mm
mbar (default), Torr, Pa
via RS232C (→31)
DANGER
The gauge must only be connected to power supplies, instruments or
control devices that conform to the requirements of a grounded extra-
low voltage (PELV). The connection to the gauge has to be fused
(INFICON controllers fulfill these requirements).
Supply voltage at the gauge +24 V (dc) (+20 … +28 V (dc)) 1)
ripple max. 2 V
pp
Power consumption
Standard
Degas
Emission start (<200 ms)
≤0.5 A
≤0.8 A
≤1.4 A
Fuse necessary 1.25 AT
(INFICON controllers fulfill these re-
quirements)
Power consumption
BPG402-S, -SL
BPG402-SD
BPG402-SE
BPG402-SP
≤18 W
≤18 W
≤21 W
≤20 W
The BPG402-SD requires an additional, separate power supply for the
DeviceNet interface (→21).
Supply voltage at the DeviceNet
connector (pin 2 and pin 3)
+24 V (dc)
(+11 … +25 V (dc))
Power consumption ≤2 W
The power supply for the DeviceNet interface is protected against
reversed polarity.
Profibus interface
(BPG402-SP)
Display (BPG402-S only)
Power supply

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For reasons of compatibility, the expression "sensor cable" is used for all
BPG402 versions in this document, although the pressure reading of the
gauges with fieldbus interface (BPG402-SD, BPG402-SE and
BPG402-SP) is normally transmitted via the corresponding bus.
Electrical connection
BPG402-S, -SL
BPG402-SD, -SE, -SP
D-Sub, 15-pin, male
→19
→20
Sensor cable shielded, number of conductors de-
pending on the functions used,
max. 15 conductors plus shielding
Cable length (supply voltage 24 V (dc)1))
Analog and fieldbus operation
For operation with RS232C interface
≤35 m, 0.25 mm²/conductor
≤50 m, 0.34 mm²/conductor
≤100 m, 1.0 mm²/conductor
≤30 m
Materials exposed to vacuum
Housing, supports, screens
Feedthroughs
Insulator
Cathode
Cathode holder
Pirani element
stainless steel
NiFe, nickel plated
glass
iridium, yttrium oxide (Y2O3)
molybdenum, platinum
tungsten, copper
Internal volume
DN 25 ISO-KF
DN 40 CF-R
≈24 cm3
≈34 cm3
Pressure max. 2 bar (absolute)
Admissible temperatures
Storage
Operation
Bakeout
Long tube
-20 … 70 °C
0 … 50 °C
+ 80 °C 2)
+150 °C 2)
Relative humidity
Year's mean
During 60 days
≤65 (no condensation)
85% (no condensation)
Use indoors only
altitude up to 2000 m NN
Mounting orientation any
Type of protection IP 30
1) Measured at gauge connector (consider the voltage drop as function of the sensor cable
length).
2) Flange temperature, electronics unit removed, horizontally mounted.
Electrical connection
Materials used
Ambiance

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4-40UNC 2B
DN 25 ISO-KF
4-40UNC 2B
DN 40 CF-R
4-40UNC 2B
DN 40 CF-R
Gauges with DeviceNet connector
are 14 mm longer.
353-570, 353-572
353-571, 353-573
353-578
≈450 g
≈710 g
≈917 g
353-574, 353-576, 353-590
353-575, 353-577, 353-591
≈490 g
≈750 g
Dimensions [mm]
Weight

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3 Installation
DANGER
DANGER: overpressure in the vacuum system >1 bar
Injury caused by released parts and harm caused by escaping process
gases can result if clamps are opened while the vacuum system is
pressurized.
Do not open any clamps while the vacuum system is pressurized. Use
the type of clamps which are suited to overpressure.
DANGER
The gauge must be electrically connected to the grounded vacuum
chamber. This connection must conform to the requirements of a pro-
tective connection according to EN 61010:
•CF connections fulfill this requirement
•For gauges with a KF vacuum connection, use a conductive me-
tallic clamping ring.
Caution
Caution: vacuum component
Dirt and damages impair the function of the vacuum component.
When handling vacuum components, take appropriate measures to
ensure cleanliness and prevent damages.
Caution
Caution: dirt sensitive area
Touching the product or parts thereof with bare hands increases the
desorption rate.
Always wear clean, lint-free gloves and use clean tools when working
in this area.
The gauge may be mounted in any orientation. To keep condensates
and particles from getting into the measuring chamber, preferably
choose a horizontal to upright position. See dimensional drawing for
space requirements (→12).
The gauge is supplied with a built-in grid. For potentially contaminating
applications and to protect the electrodes against light and fast charged
particles, installation (→15) of the optional baffle is recommended
(→47).
When installing the gauge, make sure that the area around the con-
nector is accessible for the tools required for adjustment while the gauge
is mounted (→40, 43).
When installing the gauge, allow for installing/deinstalling the connectors
and accommodation of cable loops.
If you are using a gauge with display, make sure easy reading of the
display is possible.
Vacuum connection free of grease.
3.1 Vacuum Connection

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Remove the protective lid and install the gauge to the vacuum system.
Seal with centering ring
Protective lid
(keep it)
Clamp
•Allen wrench, AF 2.5
Unscrew the hexagon socket set screw (1) on the side of the electronics
unit (2).
2
1
Remove the electronics unit without twisting it.
Procedure
3.1.1 Removing and Installing
the Electronics Unit
Required tools / material
Removing the electronics unit

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Place the electronics unit (2) on the sensor (3) (be careful to correctly align
the pins and notch (4)).
4
3
2
Slide the electronics unit in to the mechanical stop and lock it with the hexa-
gon socket set screw.
In severely contaminating processes and to protect measurement electrodes opti-
cally against light and fast charged particles, replacement of the built-in grid by the
optional baffle (→47) is recommended.
Gauge deinstalled ("Deinstallation" →41).
•Baffle (→47)
•Pointed tweezers
•Pin (e.g. pencil)
•Screwdriver No 1
Carefully remove the grid with tweezers.
Installing the electronics unit
3.1.2 Using the Optional Baffle
Precondition
Required tools / material
Installation

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Carefully place the baffle onto the sensor opening.
Using a pin, press the baffle down in the center until it catches.
Carefully remove the baffle with the screwdriver.
Deinstallation

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If the gauge is used with an INFICON VGC40x / VGC50x controller, a correspond-
ing sensor cable is required (→[4]). The sensor cable permits supplying the gauge
with power, transmitting measurement values and gauge statuses, and making pa-
rameter settings.
Caution
Caution: data transmission errors
If the gauge is operated with the INFICON VGC40x / VGC50x Vacuum
Gauge Controller (RS232C) and a fieldbus interface at the same time,
data transmission errors may occur.
The gauge must not be operated with an INFICON VGC40x / VGC50x
controller and DeviceNet, EtherCAT or Profibus at the same time.
•Sensor cable (→[4]), INFICON sales literature)
Plug the sensor connector into the gauge and secure it with the locking
screws.
Connect the other end of the sensor cable to the INFICON controller and
secure it.
The gauge can also be operated with other controllers.
Especially the fieldbus versions BPG402-SD (DeviceNet), BPG402-SE (EtherCAT)
and BPG402-SP (Profibus) are usually operated as part of a network, controlled by
a master or bus controller. In such cases, the control system has to be operated
with the appropriate software and communication protocol (→[1], [2], [3]).
3.2 Electrical Connection
3.2.1 Use With INFICON
VGC40x / VGC50x
Vacuum Gauge
Controller
Required material
Procedure
3.2.2 Use With Other
Controllers

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For reasons of compatibility, the expression "sensor cable" is used for all
BPG402 versions in this document, although the pressure reading of the
gauges with fieldbus interface (BPG402-SD, BPG402-SE or
BPG402-SP) is normally transmitted via DeviceNet, EtherCAT or
Profibus.
The sensor cable is required for supplying all BPG402 types with power.
It also permits access to the relay contacts of the switching functions
(→19, 20).
The application and length of the sensor cable have to be considered when deter-
mining the number and cross sections of the conductors (→11).
Open the cable connector (D-Sub, 15-pin, female).
Prepare the cable and solder/crimp it to the connector as indicated in the
diagram of the gauge used:
3.2.2.1 Making an Individual
Sensor Cable
Cable type
Procedure

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8
91
15
D-Sub,15-pin,
female,
soldering side
Filament status
SP
TxD
RxD
Degas
42 kΩ
3
4
1
11
9
13
14
7
8
2
12
5
15
1.25 AT
24V
Degas
Ident.
RS232
10 --
-
1)
( )
Measuring
signal
-
VS
6
Threshold value, SP
Common (power GND 24V supply)
Ground (housing, vacuum connection)
Electrical connection
Pin 1 Relay switching function, common contact
Pin 2 Measuring signal output 0 … +10 V
Pin 3 Threshold (setpoint) 1) 0 … +10 V
Pin 4 Relay switching function, NO contact
Pin 5 Supply common 0 V
Pin 6 Not connected internally
Pin 7 Degas (active high) 0 V/+24 V
Pin 8 Supply (Vs) +24 V
Pin 9 Relay filament status, common contact 2)
Pin 10 Gauge identification
Pin 11 Relay filament status, NO contact 2)
Pin 12 Measuring signal common
Pin 13 RS232C, TxD
Pin 14 RS232C, RxD
Pin 15 Do not connect
1) Do not connect pin 3 for normal operation of the gauge. This pin is reserved for
adjustment of the setpoint potentiometers (→40).
2) →table on 29.
Sensor cable connection
BPG402-S, -SL

20 tina46e1-b (2017-12) BPG402.om
TxD
RxD
Degas
42 kΩ
4
1
11
9
13
14
7
8
2
12
5
15
1.25 AT
24V
Degas
Ident.
RS232
10 --
-
Measuring
signal
VS
6
SP A
SP B
SP A
SP B
3
6
1)
( )
-
Threshold value
8
91
15
D-Sub,15-pin,
female,
soldering side
Common (power GND 24V supply)
Ground (housing, vacuum connection)
Electrical connection
Pin 1 Relay switching function A, common contact
Pin 2 Measuring signal output 0 … +10 V
Pin 3 Threshold (setpoint) A 1) 0 … +10 V
Pin 4 Relay switching function A, NO contact
Pin 5 Supply common 0 V
Pin 6 Threshold (setpoint) B 1) 0 … +10 V
Pin 7 Degas (active high) 0 V/+24 V
Pin 8 Supply (Vs) +24 V
Pin 9 Relay switching function B, common contact
Pin 10 Gauge identification
Pin 11 Relay switching function B, NO contact
Pin 12 Measuring signal common
Pin 13 RS232C, TxD
Pin 14 RS232C, RxD
Pin 15 Do not connect
1) Do not connect pin 3 and pin 6 for normal operation of the gauge. These pins
are reserved for adjustment of the setpoint potentiometers (→40).
WARNING
The supply common (Pin 5) and the shielding must be connected at
the supply unit with protective ground.
Incorrect connection, incorrect polarity or inadmissible supply voltages
can damage the gauge.
Sensor cable connection
BPG402-SD, -SE, -SP