Inficon Pirani Gauge Enhanced 500 User manual

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Pir
a
PG
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1 (2016-06)
a
ni Gaug
E
500
e Enhan
c
Op
e
Incl.
c
ed
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rating Manu
EU Declaration o
1
al
f Conformit
y

2tinb21e1 (2016-06)
Product Identification
In all communications with INFICON, please specify the infor-
mation given on the product nameplate. For convenient refer-
ence copy that information into the space provided below.

tinb21e1 (2016-06) 3
Validity
This document applies to products with part numbers:
1) →67
2) →48, 53
3) →57, 61
4) →68. Analog output 0 … 10 V is available on all devices by
default on pin 9.
The part number (PN) can be taken from the product nameplate.
If not indicated otherwise in the legends, the illustrations in this
document correspond to the product with vacuum connection
DN 25 ISO-KF. They apply to the other products by analogy.
We reserve the right to make technical changes without prior
notice.

4tinb21e1 (2016-06)
Important User Information
There are operational characteristic differences between solid
state equipment and electromechanical equipment. Because of
these differences, and because there are a variety of uses for
solid state equipment, all persons that apply this equipment must
take every precaution and satisfy themselves that the intended
application of this equipment is safe and used in an acceptable
manner.
In no event will INFICON be responsible or liable for indirect or
consequential damages that result from the use or application of
this equipment.
Any examples or diagrams included in this manual are provided
solely for illustrative purposes. Because of the many variables
and requirements imposed on any particular installation,
INFICON cannot assume responsibility or liability for any actual
use based on the examples and diagrams.
No patent liability is assumed by INFICON with respect to use of
information circuits, equipment, or software described in this
manual.
Throughout this manual we use notes, notices and apply inter-
nationally recognized symbols and safety messages to make
you aware of safety considerations.

tinb21e1 (2016-06)
Identifies infor
m
cause electric
a
taken, could r
e
or economic l
o
Identifies infor
m
cause electric
a
taken, could r
e
or economic l
o
Identifies infor
m
understanding
Labels may b
e
that dangerou
s
C
A
N
O
S
m
ation about pra
c
a
l or physical haz
a
e
sult in death or s
e
o
ss.
m
ation about pra
c
a
l or physical haz
a
e
sult in minor or
m
o
ss.
m
ation that is criti
c
of the product.
e
located on or ins
s
voltages may b
e
A
UTION
O
TIC
E
S
HOCK H
A
c
tices or circumst
a
a
rds which, if pre
c
e
rious injury, pro
p
c
tices or circumst
a
a
rds which, if pre
c
m
oderate injury, pr
o
c
al for successful
ide the device to
a
e
present.
A
ZARD
5
a
nces that can
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autions are not
erty damage,
a
nces that can
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autions are not
o
perty damage,
application and
a
lert people

6tinb21e1 (2016-06)
General Safety Instructions
•Adhere to the applicable regulations and take the necessary
precautions for the process media used.
Consider possible reactions with the product materials.
Consider possible reactions (e.g. explosion) of the process
media due to the heat generated by the product.
•Adhere to the applicable regulations and take the necessary
precautions for all work you are going to do and consider the
safety instructions in this document.
•Before beginning to work, find out whether any vacuum com-
ponents are contaminated. Adhere to the relevant regulations
and take the necessary precautions when handling contamin-
ated parts.
Communicate the safety instructions to all other users.
Liability and Warranty
INFICON assumes no liability and the warranty becomes null
and void if the end-user or third parties
•disregard the information in this document
•use the product in a non-conforming manner
•make any kind of interventions (modifications, alterations etc.)
on the product
•use the product with accessories not listed in the product
documentation.
The end-user assumes the responsibility in conjunction with the
process media used.
Gauge failures due to contamination or wear and tear, as well as
expendable parts (e.g. Pirani filament), are not covered by the
warranty.

tinb21e1 (2016-06) 7
Contents
Product Identification 2
Validity 3
Important User Information 4
General Safety Instructions 6
Liability and Warranty 6
1Introduction / General Information 9
1.1 Description 9
1.2 Specifications 9
1.3 Dimensions 12
1.4 Options & Accessories 13
2Important Safety Information 14
2.1 Safety Precautions - General 14
2.2 Safety Precautions - Service and Operation 15
2.3 Electrical Conditions 16
2.3.1 Proper Equipment Grounding 16
2.3.2 Electrical Interface and Control 17
2.4 Overpressure and use with hazardous gases 17
2.5 Gases other than Nitrogen / air 18
3Installation 19
3.1 Mechanical Installation 19
3.2 Electrical Installation 21
3.2.1 Grounding 21
3.2.2 Electrical Connections 22
4Setup and Operation 25
4.1 Initial Setup 25
4.2 User Interface Basics 26
4.3 Programming 27
4.4 Return to Factory Default Settings 33
5Using the gauge with different gases 34
6Display 37
6.1 Display - Torr / mTorr 37
6.2 Display - mbar 41

8tinb21e1 (2016-06)
7Analog Output 46
7.1 Non-Linear Analog Output - 0.375 to 5.659 V,
Torr / mTorr 48
7.2 Non-Linear Analog Output - 0.375 to 5.659 V, mbar 53
7.3 Log-Linear Analog Output - 1-8 V, Torr 57
7.4 Log-Linear Analog Output - 1-8 V, mbar 61
7.5 Log-Linear Analog Output - 1.15-10.215 V,
mbar / Torr / Pa 67
7.6 Linear Analog Output 0-10 V, Torr 68
8RS485 / RS232 serial communications 70
8.1 Device Specific Serial Communication Info 70
8.2 RS485 / RS232 Command Protocol Summary 71
9Service 74
9.1 Calibration 74
9.2 Maintenance 74
9.3 Troubleshooting 75
9.4 Contamination 77
9.5 Module and sensor replacement 79
10 Factory Service and Support 80
11 Returning the Product 80
12 Disposal 81
EU Declaration of Conformity 82
For cross-references within this document, the symbol (→XY)
is used.

tinb21e1 (2016-06) 9
1 Introduction / General Information
1.1 Description
Thermal conductivity gauges measure pressure indirectly by
sensing the loss of heat from a sensor to the surrounding gases.
The higher the pressure of the surrounding gas, the more heat is
conducted away from the sensor. Pirani thermal conductivity
gauges maintain a sensor (usually a wire) at some constant tem-
perature, and measure the current or power required to maintain
that temperature. A standard Pirani gauge has a useful measur-
ing range of about 10-4 Torr to 10 Torr. By taking advantage of
convection currents that are generated above 1 Torr, convection-
enhanced Pirani gauges increase the measuring range to just
above atmosphere.
The INFICON PGE500 Pirani Gauge Enhanced module provides
the basic signal conditioning required to turn a convection
vacuum gauge into a complete measuring instrument. The mod-
ule provides linear, non-linear or log-linear analog outputs, two
setpoint relays and RS232/485 serial communications. In addi-
tion, a built-in display provides a convenient user interface for
setup and operation of the vacuum gauge.
1.2 Specifications
Measurement range 1.3×10-4 … 1333 mbar
1×10-4 … 1000 Torr
1.3×10-2 Pa … 133 kPa
Accuracy - N2(typical)
1.3×10-4 … 1.3×10-3 mbar
1.3×10-3 … 530 mbar
530 … 1333 mbar
0.1 ×10-3 mbar resolution
±10% of reading
±2.5% of reading
1×10-4 … 1×10-3 Torr
1×10-3 … 400 Torr
400 … 1000 Torr
0.1 mTorr resolution
±10% of reading
±2.5% of reading
Repeatability - N2(typical) ±2% of reading

10 tinb21e1 (2016-06)
Display bright OLED, 4 digits, user-
selectable mbar, Torr or Pa
1100 Torr … 1000 Torr 4 digits
999 Torr… 10.0 mTorr 3 digits
9.9 mTorr … 1.0 mTorr 2 digits
0.9 mTorr… 1.0 mTorr 2 digits
Materials exposed to vacuum gold-plated tungsten, 304 & 316
stainless steel, glass, nickel,
Teflon®
Housing (electronics) aluminum extrusion
Internal volume 26 cm3(1.589 in3)
Internal surface area 59.7 cm2(9.25 in2)
Weight 340 g (12 oz.)
Permissible temperature
Operating 0 … +40 °C
Storage –40 … +70 °C
Bakeout temperature ≤150 °C (gauge only - electro-
nics removed)
Relative humidity 0 … 95%, non-condensing
Use
Operating altitude up to 2500 m (8200 ft.)
Storage altitude up to 12500 m
(41000 ft.)
Mounting orientation horizontal recommended
(orientation has no effect on
measurements below 1.3 mbar
(1 Torr))

tinb21e1 (2016-06) 11
Output signal analog (measurement signal)
3PE5-0xx-B7F0log-linear
1.15 … 10.215 V (dc),
1.286 V/decade
p = 100.778(U-c) (→67)
-B7F2non-linear S-curve
0.375 … 5.659 V (dc)
Granville-Phillips®Mini-Con-
vectron®compatible
(→48, 53)
-B7F5log-linear
1 … 8 V (dc)
1 V/decade
P = 10(V - 5), (→57, 61)
-B7F–linear
0 … 10 V (dc)
(→68)
RS232C / RS485 interface ASCII protocol
Supply voltage 12 … 28 V (dc), 2 W protected
against power reversal and
transient overvoltages
Setpoint relays two, single-pole double-throw
relays (SPDT), 1 A at 30 V (dc)
resistive, or V (ac) non-induc-
tive
Electrical connection 9-pin D-sub male and
15-pin HD D-sub male (with
RS485)

12
1.3 Dimensio
n
F
i
D
N
D
N
D
N
D
N
D
N
4
8
1
/
n
s
i
tting
N
16 ISO-KF
N
25 ISO-KF
N
40 ISO-KF
N
16 CF-R
N
40 CF-R
VCR female
VCR female
/
8" NPT male
tin
b
Dimension
A
mm (in
c
25.9 (1.
1
25.9 (1.
1
25.9 (1.
1
34 (1.
3
34 (1.
3
43.7 (1.
7
40.9 (1.
6
21.8 (0.
8
b
21e1 (2016-06)
A
c
h)
1
6)
1
6)
1
6)
3
4)
3
4)
7
2)
6
1)
8
6)

tinb21e
1.4
1 (2016-06)
Options &
Power supply
f
Input: 100 …
2
Output: 24 V (
d
Cable Length:
This variation
o
plug that is no
t
IEC60320 AC
supplied AC m
Accessories
f
or PGE300/500
2
40 V (ac)
d
c) @ 2.5 A (60
W
2 m (6 ft.)
o
f the power sup
p
t
listed above is r
e
power entry rece
p
ains power cord
s
W
)
p
ly may be used
w
e
quired. The conv
e
p
tacle allows use
w
s
et available worl
d
13
Ordering No.
352-525
w
hen an AC
e
ntional
w
ith any user
d
wide.

14
2
2.1
Importan
t
INFICON has
d
and reliable s
e
the strict safet
y
and follow all
To avoid seri
o
tion in this d
o
procedures c
o
death, and or
Failure to com
p
ards of installa
disclaims all li
a
these instructi
o
Although ever
y
ble installation
s
that arises fro
m
of the module.
tion and use o
f
Safety Pre
c
The product s
h
moved.
WARNI
N
adjustments in
inside the pro
d
service trained
W
t
Safety Inf
o
d
esigned and tes
t
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rvice, provided it
y
guidelines provi
d
warnings and i
n
o
us injury or de
a
o
cument. Failure
o
uld result in se
r
property damag
p
ly with these wa
r
tion and intended
a
bility for the cust
o
o
ns.
y
attempt has bee
s
, INFICON cann
o
m
various installat
If you have any
q
f
this product, ple
a
c
autions - G
e
h
ould never be op
N
G! There are n
o
side the product
e
d
uct enclosure is
r
personnel.
W
ARNING
tin
b
o
rmation
t
ed this product t
o
is installed and o
p
d
ed in this manu
a
n
structions.
a
th, follow the sa
f
to comply with
t
r
ious bodily har
m
e.
r
nings violates th
e
use of this instru
m
o
mer’s failure to c
n made to consid
e
o
t anticipate ever
y
ions, operation, o
r
q
uestions about th
a
se contact INFI
C
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neral
erated with the e
n
o
operator servic
e
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nclosure. Howev
r
eplaceable. Refe
r
b
21e1 (2016-06)
provide safe
p
erated within
l. Please read
f
ety informa-
hese safety
m
, including
e
safet
y
stand-
m
ent. INFICON
o
mply with
e
r most possi-
y
contingency
r
maintenance
e safe installa-
C
ON.
n
closure re-
able parts or
e
r, the sensor
r
servicing to

tinb21e
2.2
1 (2016-06)
Do not modify
thorization of
q
turn the produ
c
ter to ensure t
h
this product if
u
WARNI
N
product prior t
o
After servicing
made by a qu
a
required, ensu
stitutions of no
or other hazar
d
made to this p
r
To reduce the
product to rain
and careful att
e
onto these pro
d
been damage
d
of the product
Due to the po
s
mental conditi
o
compromised
o
odically inspe
c
ment groundin
g
trical insulatio
n
Safety Pre
c
Ensure that th
e
gauge is mou
n
Use an appro
p
Turn off power
module.
Turn off power
product is not
o
manual. Cont
a
service or trou
b
this operating
m
this product or su
q
ualified INFICON
c
t to an INFICON
h
at all safety feat
u
u
nauthorized mo
d
N
G! Source pow
e
o
performing any
s
this product, ens
u
a
lified service per
s
re that the parts
a
n-qualified parts
m
d
s. Use of unauth
o
r
oduct will void th
e
risk of fire or elec
t
or moisture. The
s
e
ntion must be p
a
d
ucts. Do not us
e
d
. Immediately co
n
if it is damaged.
s
sibility of corrosi
o
o
ns, it is possible
t
o
ver time. It is im
p
c
ted
f
or sound ele
c
g
. Do not use if t
h
n
has been compr
o
c
autions - S
e
e
vacuum port on
n
ted is electrically
p
riate power sour
c
r
to the unit befor
e
r
to the unit if a ca
o
perating normall
y
a
ct qualified INFI
C
b
leshooting condi
m
anual.
bstitute any parts
service trained p
e
qualified service
a
u
res are maintain
e
d
ifications have b
e
e
r must be remov
s
ervicing.
u
re that all safety
s
on. When replac
e
ar
e specified by I
N
m
ay result in fire,
e
o
rized parts or m
o
e
warranty.
t
ric shock, do not
s
e products are n
o
a
id to not spill any
e
these products i
f
n
tact INFICON to
o
n when used in c
e
t
hat the product’s
p
ortant that the pr
o
c
trical connection
s
h
e equipment gro
u
o
mised.
e
rvice and O
p
which the PGE5
0
grounded.
c
e of 12 … 28 V (
d
e
attempting to se
r
ble or plug is da
m
y
according to thi
s
C
ON service pers
o
tion that may not
15
without au-
e
rsonnel. Re-
a
nd repair cen-
e
d. Do not use
e
en made.
e
d from the
checks are
e
ment parts are
N
FICON Sub-
e
lectric shock
o
difications
expose this
o
t waterproof
type of liquid
they have
arrange return
e
rtain environ-
safety could be
o
duct be peri-
s
and equip-
u
nding or elec-
p
eration
0
0 vacuum
d
c), 2 W.
r
vice the
m
aged or the
s
operating
o
nnel for any
be covered by

16
2.3
2.3.1
It is important
t
sound electric
a
use if the equi
p
compromised.
Do not use if t
h
been damage
d
instructions fo
r
Electrical
C
WARNI
N
system, a life t
h
less all expos
e
ground potenti
a
tact with the g
a
discharge with
i
high voltage di
A person coul
d
with an expos
e
age potential.
T
come in conta
c
(vacuum / pre
s
Proper Equi
WARNI
N
j
ure or cause
d
Verify that the
module is mou
Electrician if y
o
Proper ground
well as intend
e
dule vacuum g
earth ground.
U
connection / fl
a
t
hat the product b
e
a
l connections an
d
p
ment grounding
o
h
e unit has been
d
d
. Contact INFIC
O
r
returning the pro
C
onditions
N
G! When high
v
hreatening electri
c
e
d electrical cond
u
a
l. This applies t
o
a
s contained in v
a
in a gaseous envi
rectly to any ung
r
d
be seriously inju
e
d, ung
r
ounded el
T
his condition ap
p
c
t with the gas in
s
s
sure containmen
t
pment Groun
d
N
G! Hazardous
v
d
eath are present
vacuum port on
w
nted is electricall
y
o
u are in doubt a
b
ing of your equip
m
e
d operation of th
e
g
auge must be co
n
U
se a ground lug
a
nge if necessary
.
tin
b
e
periodically ins
p
d
equipment grou
n
o
r electrical insul
a
d
ropped or the en
c
O
N for return auth
o
duct to INFICON
f
v
oltage is present
c
al shock hazard
u
ctors are maintai
n
o
all products that
a
cuum chambers.
ronment may co
u
r
ounded conducto
red or killed by c
o
ectrical conducto
r
p
lies to all produc
t
s
ide the vacuum c
t
vessel).
d
ing
v
oltages that coul
d
in many vacuum
p
w
hich the PGE50
0
y
grounded. Cons
b
out your equipm
e
m
ent is essential
f
e
equipment. The
n
nected directly t
o
on the PGE500 g
.
b
21e1 (2016-06)
p
ected for
n
ding. Do not
a
tion has been
c
losure has
o
rization and
f
or evaluation.
in any vacuum
may exist un-
n
ed at earth
c
ome in con-
An electrical
ple dangerous
r of electricity.
o
ming in contact
r
at high volt-
t
s that may
h
amber
d
seriously in-
p
rocesses.
0
vacuum gauge
ult a qualified
e
nt grounding.
o
r safety as
PGE500 mo-
o
a good quality
a
uge vacuum

tinb21e
2.3.2
2.4
1 (2016-06)
WARNI
N
shock and bod
potential high
v
vacuum syste
m
Electrical In
t
It is the user’s
from this prod
u
for example, r
e
Always double
to automate y
o
sis of your sys
t
safety measur
e
age.
Overpress
u
WARNI
N
limit the level
o
than what the
v
of withstandin
g
sures exceedi
n
In cases wher
e
condition, alw
a
ample, use a
p
eration where
a
sures if the pr
e
chamber.
N
G! In order to p
ily harm, shield a
l
v
oltage electrical
d
m
.
t
erface and C
o
responsibility to
e
u
ct and any conn
e
e
lays and solenoi
d
check the syste
m
o
ur process. Perf
o
t
em design and e
n
e
s are taken to pr
e
u
re and use
w
N
G! Install suita
b
o
f pressure inside
v
acuum chamber
g
. INFICON gaug
e
n
g 1000 Torr abs
o
e
an equipment f
a
a
ys implement fail
-
p
ressure relief de
v
a
malfunction cou
e
ssure relief devic
rotect personnel
f
l
l conductors whi
c
d
ischarges in or
a
o
ntrol
e
nsure that the el
e
e
ctions made to e
x
d
s, are used in a
s
m
set-up before u
s
o
rm a hazardous
o
n
sure safeguards
e
vent injury and
p
w
ith hazardo
b
le protective devi
c
your vacuum ch
a
system compone
e
s should not be
u
o
lute pressure.
a
ilure could cause
-
safe system ope
r
v
ice in an automa
t
ld result in high i
n
e was not installe
17
f
rom electric
c
h are subject to
round the
e
ctrical signals
x
ternal devices,
s
afe manner.
s
ing any signals
o
peration anal
y
-
and personnel
p
roperty dam-
us gases
c
es that will
mber to less
nts are capable
u
sed at pres-
a hazardous
r
ation. For e
x
-
t
ic backfill op-
n
ternal pres-
d
on the

18
2.5
The PGE500
v
pressures abo
v
(<2½ bars) pr
e
higher pressur
e
sure relief devi
conditions. Wi
t
tions may be l
o
pression fitting
vacuum cham
b
rected barome
CAUTI
O
device is allo
w
metric press
u
tings may rel
e
may cause le
a
tube to relea
s
vironment. T
o
amples of ha
z
vacuum/pres
s
environment,
age to equip
m
volume to pr
e
using hazard
o
Gases oth
e
WARNI
N
nitrogen (N
2
) o
tables.
INFICON gau
g
of nitrogen or
a
argon (Ar) or c
data for N
2
to
o
"Using the gau
Output" for a
m
v
acuum gauge m
o
v
e 20 psia (1000
T
e
ssure inside the
s
e
s, you should in
s
ce to protect the
g
t
h some fittings, a
c
o
wer; for example
may forcibly rele
a
b
er fitting with onl
y
tric (atmospheric
)
O
N! If the intern
a
w
ed to increase
a
u
re (atmospheric
e
ase and possib
l
a
ks that would a
l
s
e into the atmo
s
o
xic, pyrophoric
a
z
ardous gases t
h
s
ure containmen
could cause bo
d
m
ent. Never exp
o
e
ssure above loc
o
us gases.
e
r than Nitro
g
N
G! Do not atte
m
r air without refer
r
g
es and modules
a
a
ir. Do not attemp
arbon dioxide (C
O
o
ther gas is prope
u
ge with different
g
m
ore complete dis
c
tin
b
o
dule is not intend
T
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s
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g
auge tube from
o
c
tual safe overpr
e
, a quick-connect
,
a
se the gauge tu
b
y
a few psi over l
o
)
pressure.
a
l pressure of a
v
a
bove local unc
o
pressure side),
v
l
e overpressure
c
l
low the gas insi
d
s
phere of the sur
r
a
nd flammable
g
h
at if allowed to l
t vessel into the
d
ily injury and p
o
o
se the gauge tu
b
al atmospheric
p
g
en / ai
r
m
pt to use with ga
s
r
ing to correction
f
a
re calibrated for
d
t to use with othe
r
O
2
) unless accura
t
rly used. Refer to
g
ases", "Display"
a
c
ussion.
b
21e1 (2016-06)
ed for use at
x
ceed 35 psig
a
mber goes to
a
lve or pres-
o
verpressure
e
ssure condi-
,
O-ring com-
b
e from the
o
cal unco
r
-
v
acuum gauge
o
rrected baro-
v
acuum fit-
c
onditions
d
e the gauge
r
ounding en-
g
ases are ex-
e
ak out of the
atmospheric
o
ssible dam-
b
e internal
p
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s
es other than
f
actor data
d
irect readout
r
gases such as
t
e conversion
sections titled
a
nd "Analog

tinb21e
3
3.1
1 (2016-06)
WARNI
N
phere or in the
Do not use thi
s
combustible g
a
gauge normall
y
occur, the wir
e
ture of certain
c
cause an expl
o
Installati
o
Mechanic
a
Mount the PG
E
want to measu
create a press
u
the gauge. Thi
s
changes.
Mounting the
P
cause measur
e
PGE500 near
a
air conditionin
g
Mount the PG
E
gram below).
P
the unit is not
m
position has lit
t
For accurate
m
horizontally as
N
G! Do not use t
presence of flam
s
device to meas
u
a
ses or gas mixtu
r
y
operates at 125
e
temperature cou
c
ombustible gas
e
o
sion which could
o
n
a
l Installation
E
500 as close as
re. Long or restri
c
u
re difference bet
s
may cause a d
e
P
GE500 too close
e
ment and contro
a
source of heati
n
g
vents.
E
500 with its mai
n
P
ressure reading
e
m
ounted horizont
a
t
le to no effect.
m
easurements ab
o
shown below:
his device in an e
mable gases, va
p
u
re the pressure o
r
es. The sensor
w
°C, but if malfun
c
ld exceed the igni
e
s and gas mixtur
e
result in serious i
possible to the pr
e
c
ted, small diame
t
ween your proce
s
e
lay in response t
o
to a gas source i
n
l instability. Do n
o
n
g or cooling, suc
h
n
(long) axis horiz
o
e
rrors may occur
a
a
lly. Below 1 Torr
,
o
ve 1 Torr, mount
19
x
plosive atmos-
p
ors or fumes.
f
explosive or
w
ire in the
c
tion should
tion tempera-
e
. This could
njury or death.
e
ssure you
t
er tubing will
s
s chamber and
o
pressure
n
let may also
o
t mount the
h
as heaters or
o
ntal (see dia-
a
bove 1 Torr if
,
mounting
the gauge axis

20
Incorrect Orie
n
Mount the PG
E
the effect of a
n
gauge.
n
tation:
E
500 with port do
w
n
y particles or con
Vacuum ch
a
tin
b
w
n, if possible, to
densation from c
o
a
mbe
r
Vacuu
m
b
21e1 (2016-06)
help minimize
o
llecting in the
m
chambe
r