Keithley 4200A-SCS User manual

Reference Manual
4200A-901-01 Rev. C / February 2017
*P4200A-901-01C*
4200A-901-01C
Model 4200A-SCS
Parameter Analyzer
www.tek.com/keithley

Parameter Analyzer
Reference Manual
© 2017, Keithley Instruments
Cleveland, Ohio, U.S.A.
All rights reserved.
Any unauthorized reproduction, photocopy, or use of the information herein, in whole or in part,
without the prior written approval of Keithley Instruments is strictly prohibited.
All Keithley Instruments product names are trademarks or registered trademarks of Keithley
Instruments. Other brand names are trademarks or registered trademarks of their respective
holders.
Actuate®
Copyright © 1993-2003 Actuate Corporation.
All Rights Reserved.
Microsoft, Visual C++, Excel, and Windows are either registered trademarks or trademarks of
Microsoft Corporation in the United States and/or other countries.
Document number: 4200A-901-01 Rev. C / February 2017
Model 4200A-SCS

Safety precautions
The following safety precautions should be observed before using this product and any associated instrumentation. Although
some instruments and accessories would normally be used with nonhazardous voltages, there are situations where hazardous
conditions may be present.
This product is intended for use by qualified personnel who recognize shock hazards and are familiar with the safety precautions
required to avoid possible injury. Read and follow all installation, operation, and maintenance information carefully before using
the product. Refer to the user documentation for complete product specifications.
If the product is used in a manner not specified, the protection provided by the product warranty may be impaired.
The types of product users are:
Responsible body is the individual or group responsible for the use and maintenance of equipment, for ensuring that the
equipment is operated within its specifications and operating limits, and for ensuring that operators are adequately trained.
Operators use the product for its intended function. They must be trained in electrical safety procedures and proper use of the
instrument. They must be protected from electric shock and contact with hazardous live circuits.
Maintenance personnel perform routine procedures on the product to keep it operating properly, for example, setting the line
voltage or replacing consumable materials. Maintenance procedures are described in the user documentation. The procedures
explicitly state if the operator may perform them. Otherwise, they should be performed only by service personnel.
Service personnel are trained to work on live circuits, perform safe installations, and repair products. Only properly trained
service personnel may perform installation and service procedures.
Keithley Instruments products are designed for use with electrical signals that are measurement, control, and data I/O
connections, with low transient overvoltages, and must not be directly connected to mains voltage or to voltage sources with high
transient overvoltages. Measurement Category II (as referenced in IEC 60664) connections require protection for high transient
overvoltages often associated with local AC mains connections. Certain Keithley Instruments measuring instruments may be
connected to mains. These instruments will be marked as category II or higher.
Unless explicitly allowed in the specifications, operating manual, and instrument labels, do not connect any instrument to mains.
Exercise extreme caution when a shock hazard is present. Lethal voltage may be present on cable connector jacks or test
fixtures. The American National Standards Institute (ANSI) states that a shock hazard exists when voltage levels greater than
30 V RMS, 42.4 V peak, or 60 VDC are present. A good safety practice is to expect that hazardous voltage is present in any
unknown circuit before measuring.
Operators of this product must be protected from electric shock at all times. The responsible body must ensure that operators
are prevented access and/or insulated from every connection point. In some cases, connections must be exposed to potential
human contact. Product operators in these circumstances must be trained to protect themselves from the risk of electric shock. If
the circuit is capable of operating at or above 1000 V, no conductive part of the circuit may be exposed.
Do not connect switching cards directly to unlimited power circuits. They are intended to be used with impedance-limited
sources. NEVER connect switching cards directly to AC mains. When connecting sources to switching cards, install protective
devices to limit fault current and voltage to the card.
Before operating an instrument, ensure that the line cord is connected to a properly-grounded power receptacle. Inspect the
connecting cables, test leads, and jumpers for possible wear, cracks, or breaks before each use.
When installing equipment where access to the main power cord is restricted, such as rack mounting, a separate main input
power disconnect device must be provided in close proximity to the equipment and within easy reach of the operator.
For maximum safety, do not touch the product, test cables, or any other instruments while power is applied to the circuit under
test. ALWAYS remove power from the entire test system and discharge any capacitors before: connecting or disconnecting
cables or jumpers, installing or removing switching cards, or making internal changes, such as installing or removing jumpers.
Do not touch any object that could provide a current path to the common side of the circuit under test or power line (earth)
ground. Always make measurements with dry hands while standing on a dry, insulated surface capable of withstanding the
voltage being measured.

For safety, instruments and accessories must be used in accordance with the operating instructions. If the instruments or
accessories are used in a manner not specified in the operating instructions, the protection provided by the equipment may be
impaired.
Do not exceed the maximum signal levels of the instruments and accessories. Maximum signal levels are defined in the
specifications and operating information and shown on the instrument panels, test fixture panels, and switching cards.
When fuses are used in a product, replace with the same type and rating for continued protection against fire hazard.
Chassis connections must only be used as shield connections for measuring circuits, NOT as protective earth (safety ground)
connections.
If you are using a test fixture, keep the lid closed while power is applied to the device under test. Safe operation requires the use
of a lid interlock.
If a screw is present, connect it to protective earth (safety ground) using the wire recommended in the user documentation.
The symbol on an instrument means caution, risk of danger. The user must refer to the operating instructions located in the
user documentation in all cases where the symbol is marked on the instrument.
The symbol on an instrument means caution, risk of electric shock. Use standard safety precautions to avoid personal
contact with these voltages.
The symbol on an instrument shows that the surface may be hot. Avoid personal contact to prevent burns.
The symbol indicates a connection terminal to the equipment frame.
If this symbol is on a product, it indicates that mercury is present in the display lamp. Please note that the lamp must be
properly disposed of according to federal, state, and local laws.
The WARNING heading in the user documentation explains dangers that might result in personal injury or death. Always read
the associated information very carefully before performing the indicated procedure.
The CAUTION heading in the user documentation explains hazards that could damage the instrument. Such damage may
invalidate the warranty.
Instrumentation and accessories shall not be connected to humans.
Before performing any maintenance, disconnect the line cord and all test cables.
To maintain protection from electric shock and fire, replacement components in mains circuits — including the power
transformer, test leads, and input jacks — must be purchased from Keithley Instruments. Standard fuses with applicable national
safety approvals may be used if the rating and type are the same. The detachable mains power cord provided with the
instrument may only be replaced with a similarly rated power cord. Other components that are not safety-related may be
purchased from other suppliers as long as they are equivalent to the original component (note that selected parts should be
purchased only through Keithley Instruments to maintain accuracy and functionality of the product). If you are unsure about the
applicability of a replacement component, call a Keithley Instruments office for information.
Unless otherwise noted in product-specific literature, Keithley Instruments instruments are designed to operate indoors only, in
the following environment: Altitude at or below 2,000 m (6,562 ft); temperature 0 °C to 50 °C (32 °F to 122 °F); and pollution
degree 1 or 2.
To clean an instrument, use a damp cloth or mild, water-based cleaner. Clean the exterior of the instrument only. Do not apply
cleaner directly to the instrument or allow liquids to enter or spill on the instrument. Products that consist of a circuit board with
no case or chassis (e.g., a data acquisition board for installation into a computer) should never require cleaning if handled
according to instructions. If the board becomes contaminated and operation is affected, the board should be returned to the
factory for proper cleaning/servicing.
Safety precaution revision as of March 2016.

Introduction.................................................................................................................1-1
Introduction .......................................................................................................................... 1-1
4200A-SCS system overview .............................................................................................. 1-2
Source-Measure Unit (SMU).....................................................................................................1-3
Preamplifier...............................................................................................................................1-3
Pulse source-measure hardware ..............................................................................................1-3
Ground unit (GNDU) .................................................................................................................1-3
Capacitance-voltage (CVU) hardware.......................................................................................1-3
Software features......................................................................................................................1-4
Embedded computer policy ................................................................................................. 1-4
Connections and configuration.................................................................................2-1
Introduction .......................................................................................................................... 2-1
Basic source-measure connections..................................................................................... 2-1
Maximum signal limits...............................................................................................................2-1
Shielding and guarding .............................................................................................................2-2
Signal integrity...........................................................................................................................2-4
SMU connections......................................................................................................................2-4
Preamplifier connections...........................................................................................................2-7
Using the ground unit................................................................................................................2-8
SMU circuit COMMON connections........................................................................................2-12
4200-SMU and 4210-SMU overview....................................................................................... 2-13
Test equipment connections.............................................................................................. 2-17
Recommended connecting cables..........................................................................................2-18
Test fixture and device under test (DUT) connections ............................................................2-18
Prober connections .................................................................................................................2-20
Configuring safety interlock operation................................................................................ 2-20
Control and data connections............................................................................................ 2-22
GPIB connections ...................................................................................................................2-22
Pulse cards ........................................................................................................................ 2-23
Standard pulse........................................................................................................................2-24
Configuring the system ...................................................................................................... 2-25
Source-measure hardware.........................................................................................3-1
Source-measure units.......................................................................................................... 3-1
4200-SMU and 4210-SMU overview ................................................................................... 3-1
Source-measure hardware overview.........................................................................................3-2
Basic SMU circuit configuration.................................................................................................3-2
Compliance limits......................................................................................................................3-3
Source or sink ...........................................................................................................................3-4
I-Source operating boundaries..................................................................................................3-6
I-Source operation examples ....................................................................................................3-7
V-Source operating boundaries.................................................................................................3-8
V-Source operation examples...................................................................................................3-8
Source I measure I and source V measure V..........................................................................3-10
SMU terminals and connectors...............................................................................................3-10
Table of Contents

Table of Contents
Model 4200A-SCS Parameter Analyzer
Reference Manual
Source-measure unit (SMU) with 4200-PA overview ........................................................ 3-11
Basic SMU/preamplifier circuit configuration...........................................................................3-12
Compliance limit for a SMU with a 4200-PA............................................................................3-12
Using minimum compliance .................................................................................................... 3-12
Operating boundaries..............................................................................................................3-13
Preamplifier terminals and connectors....................................................................................3-14
FORCE terminal......................................................................................................................3-14
SENSE terminal......................................................................................................................3-15
Preamplifier CONTROL connector..........................................................................................3-15
Preamplifier mounting .............................................................................................................3-16
SMU circuit COMMON connections........................................................................................3-18
Ground unit (GNDU) overview........................................................................................... 3-19
Basic characteristics ...............................................................................................................3-19
Ground unit connections .........................................................................................................3-20
Ground unit DUT connections.................................................................................................3-20
Ground unit terminals and connectors ....................................................................................3-21
FORCE terminal......................................................................................................................3-21
SENSE terminal......................................................................................................................3-21
COMMON terminal..................................................................................................................3-22
Chassis ground .......................................................................................................................3-22
Source-measure concepts................................................................................................. 3-23
Guarding .................................................................................................................................3-23
Local and remote sensing.......................................................................................................3-27
Sink overview..........................................................................................................................3-30
Source-measure considerations..............................................................................................3-31
Sweep concepts......................................................................................................................3-34
Operation mode timing diagrams............................................................................................3-36
Multi-frequency capacitance-voltage unit................................................................4-1
Introduction .......................................................................................................................... 4-1
Measurement overview........................................................................................................ 4-1
Measurement functions.............................................................................................................4-2
Test signal.................................................................................................................................4-3
DC bias function and sweep characteristics..............................................................................4-3
Force-measure timing ...............................................................................................................4-4
4210-CVU connections........................................................................................................ 4-5
Connection notes......................................................................................................................4-5
Typical 4210-CVU test connections to a DUT...........................................................................4-6
Test connections to a probe card..............................................................................................4-7
Typical CVU matrix card connections .......................................................................................4-7
Connection compensation ................................................................................................. 4-10
Generate open connection compensation data.......................................................................4-11
Generate short connection compensation data.......................................................................4-13
Generate load connection compensation data........................................................................4-15
Compensation data.................................................................................................................4-16
Enable compensation.............................................................................................................. 4-17
ABB unbalance errors............................................................................................................. 4-18
CVU Real-Time Measure Mode......................................................................................... 4-18
Confidence Check.............................................................................................................. 4-19
Run an open check and short check.......................................................................................4-20
4210-CVU project example................................................................................................ 4-21
Select a project .......................................................................................................................4-21
Configure the test....................................................................................................................4-23

Model 4200A
-SCS Parameter Analyzer Reference Manual Table
of Contents
Run the test and review results...............................................................................................4-24
Timing diagrams................................................................................................................. 4-25
CVU using voltage bias...........................................................................................................4-25
CVU using voltage sweep.......................................................................................................4-26
CVU using voltage list sweep..................................................................................................4-27
CVU using frequency sweep - DC bias...................................................................................4-29
CVU frequency sweep - DC step ............................................................................................4-30
CVU Terminal Settings Advanced settings and circuits..................................................... 4-31
C-V projects ....................................................................................................................... 4-33
Capacitor I-V and C-V Measurements with Series 700 Project (cap-iv-cv-matrix) ..................4-34
BJT Capacitance Tests (cvu-bjt) .............................................................................................4-38
BJT I-V and C-V Tests Using 4200A-CVIV Multi-Switch Project (cvu-bjt-cviv)........................4-42
High-Voltage C-V Tests Project (cvu-highv)............................................................................4-43
MOS Capacitor C-V Project (cvu-moscap)..............................................................................4-44
MOS Capacitor Lifetime Test Project (moscap-lifetime)..........................................................4-64
MOSFET I-V and C-V Tests Using 4200A-CVIV Multi-Switch Project (mosfet-cviv)...............4-70
Capacitor Measurements (cap-measurements)......................................................................4-70
Interconnect Capacitance C-V Sweep test (cv-sweep)...........................................................4-72
MOS Capacitor Mobile Ion Project (moscap-mobile-ion) ........................................................4-73
MOSFET Project (mosfet).......................................................................................................4-80
Nanowire tests ........................................................................................................................4-86
Diode Project (diode-project)...................................................................................................4-88
Solar Cell Project (solarcell)....................................................................................................4-93
Demo project (default)...........................................................................................................4-100
Carbon Nanotube Transistor Characterization Project (cntfet-characterization) ...................4-100
Pulse measure and pulse generator units................................................................5-1
Models 4220-PGU and 4225-PMU...................................................................................... 5-1
PGU and PMU connectors........................................................................................................5-2
PMU block diagram...................................................................................................................5-3
Pulse modes .............................................................................................................................5-3
Pulse measurement types (PMU) .............................................................................................5-4
Measure modes ........................................................................................................................5-4
Sample rate...............................................................................................................................5-5
Model 4225-RPM................................................................................................................. 5-6
RPM input, output, and top panels............................................................................................5-6
Using the RPM as a switch .......................................................................................................5-8
Waveform capture................................................................................................................ 5-9
Connections ......................................................................................................................... 5-9
PMU common connections .....................................................................................................5-10
Shield connections..................................................................................................................5-11
Cable length............................................................................................................................5-11
High frequency connections....................................................................................................5-11
Prober chuck connections.......................................................................................................5-12
Two-terminal device connections............................................................................................5-12
Three-terminal device connections .........................................................................................5-14
Four-terminal device connections ...........................................................................................5-15
Connections to prober or test fixture bulkhead connectors .....................................................5-16
Using an SMA to SSMC adapter cable to connect pulse card to DUT....................................5-16
4225-RPM connections...........................................................................................................5-17
Configure the PGU, PMU, and RPM using tests............................................................... 5-20
PMU pulse timing preview ................................................................................................. 5-20
PMU amplitude sweep example (one-channel).......................................................................5-22
PMU amplitude sweep and step example (two-channel) ........................................................5-24

Table of Contents
Model 4200A-SCS Parameter Analyzer
Reference Manual
Higher channel count test example.........................................................................................5-27
PMU connection compensation......................................................................................... 5-30
Perform connection compensation..........................................................................................5-32
Enabling connection compensation.........................................................................................5-33
Load-line effect compensation (LLEC) for the PMU.......................................................... 5-34
Methods to compensate for load-line effect.............................................................................5-34
How LLEC adjusts pulse output to the target levels................................................................5-35
Coping with the load-line effect...............................................................................................5-36
LLEC maintains even voltage spacing ....................................................................................5-37
Test considerations................................................................................................................. 5-38
LPT functions used to configure LLEC....................................................................................5-38
Enable LLEC...........................................................................................................................5-39
Disable LLEC and set the output impedance..........................................................................5-40
Pulse parameter definitions ............................................................................................... 5-40
PMU minimum settling times versus current measure range............................................ 5-41
PMU capacitive charging/discharging effects.................................................................... 5-42
PMU and RPM measure ranges are not source ranges.................................................... 5-44
4220-PGU and 4225-PMU output limitations..................................................................... 5-45
4200A-SCS power supply limitations................................................................................. 5-46
Basic troubleshooting procedure ....................................................................................... 5-48
Step 1. Verify prober connections from the PMU or RPM to the DUT.....................................5-48
Step 2. Verify the pulse shape ................................................................................................5-49
Step 3. Is the pulse level correct for each channel?................................................................ 5-50
Step 4. Is the pulse I-V curve suspect?...................................................................................5-50
Pulse source-measure concepts........................................................................................ 5-55
Ultra-fast I-V tests ...................................................................................................................5-55
Segment Arb waveform...........................................................................................................5-56
Full arb waveform....................................................................................................................5-59
Pulse waveforms for nonvolatile memory testing .................................................................... 5-60
DUT resistance determines pulse voltage across DUT...........................................................5-61
Triggering................................................................................................................................5-66
Pulse source-measure connections ........................................................................................5-69
Measurement types............................................................................................................ 5-70
Spot mean measurements......................................................................................................5-70
Spot mean discrete readings...................................................................................................5-70
Spot mean average readings..................................................................................................5-71
Waveform measurements.......................................................................................................5-72
Waveform discrete readings....................................................................................................5-73
Waveform average readings...................................................................................................5-73
Measurement timing................................................................................................................5-74
Clarius..........................................................................................................................6-1
Get started with Clarius........................................................................................................ 6-1
Clarius interface........................................................................................................................6-2
Additional Clarius+applications.................................................................................................6-9
Set up a simple project......................................................................................................... 6-9
Select project components......................................................................................................6-10
Add a device and test to the project........................................................................................6-11
Rearrange items in the project tree.........................................................................................6-12
Delete objects in the project tree.............................................................................................6-12
Configure a simple test ...................................................................................................... 6-13

Model 4200A
-SCS Parameter Analyzer Reference Manual Table
of Contents
Set the key parameters...........................................................................................................6-14
Run a simple test ............................................................................................................... 6-15
Working with My Projects................................................................................................... 6-16
Open a project.........................................................................................................................6-16
Create a new project from My Projects ...................................................................................6-17
Export a project.......................................................................................................................6-17
Import a project.......................................................................................................................6-17
Migrate projects from 4200-SCS systems...............................................................................6-19
Duplicate a project ..................................................................................................................6-19
Delete a project.......................................................................................................................6-20
Edit project information ...........................................................................................................6-20
View My Projects.....................................................................................................................6-21
Test and terminal setting descriptions ............................................................................... 6-22
Operation Mode (SMU)...........................................................................................................6-22
SMU - all terminal parameters.................................................................................................6-36
Operation Mode (CVU) ...........................................................................................................6-47
CVU - all terminal parameters.................................................................................................6-55
Operation Mode (PMU)...........................................................................................................6-63
PMU - all terminal parameters.................................................................................................6-70
Test settings............................................................................................................................6-80
Set up a complex project.................................................................................................. 6-105
Customize tests.....................................................................................................................6-106
Link tests or actions ..............................................................................................................6-140
Add actions ...........................................................................................................................6-141
Sites......................................................................................................................................6-142
Subsites ................................................................................................................................6-142
Configure a complex test ................................................................................................. 6-143
Test and terminal settings..................................................................................................... 6-143
Step or sweep multiple device terminals in the same test.....................................................6-144
Configure actions..................................................................................................................6-146
Configure sites ......................................................................................................................6-147
Configure subsite cycling ...................................................................................................... 6-148
Run a complex test .......................................................................................................... 6-176
Run projects, subsites, devices, and tests ............................................................................6-176
Cycle a subsite......................................................................................................................6-181
Multi-site execution ...............................................................................................................6-182
Analyze data .................................................................................................................... 6-183
Spreadsheet.......................................................................................................................... 6-184
Save test results and graphs................................................................................................. 6-194
Graph.................................................................................................................................... 6-196
The Formulator................................................................................................................. 6-222
Configure Formulator calculations.........................................................................................6-222
Open the Formulator.............................................................................................................6-223
Becoming familiar with the Formulator dialog box................................................................. 6-224
Using the Formulator options................................................................................................6-226
Real-time functions, operators, and formulas........................................................................6-227
Post-test-only functions and formulas ...................................................................................6-227
Formulator function reference...............................................................................................6-228
ABS Formulator function.......................................................................................................6-228
SQRT Formulator function ....................................................................................................6-228
EXP Formulator function.......................................................................................................6-229
LOG Formulator function.......................................................................................................6-229
LN Formulator function..........................................................................................................6-230
DELTA Formulator function...................................................................................................6-230
COND Formulator function....................................................................................................6-231
Statistics................................................................................................................................6-231

Table of Contents
Model 4200A-SCS Parameter Analyzer
Reference Manual
AVG Formulator function.......................................................................................................6-231
MAVG Formulator function....................................................................................................6-232
MAX Formulator function.......................................................................................................6-232
MEDIAN Formulator function ................................................................................................6-233
MIN Formulator function........................................................................................................6-233
STDEV Formulator function ..................................................................................................6-233
Trigonometry.........................................................................................................................6-234
ACOS Formulator function....................................................................................................6-234
ASIN Formulator function...................................................................................................... 6-234
ATAN Formulator function.....................................................................................................6-235
COS Formulator function.......................................................................................................6-235
DEG Formulator function.......................................................................................................6-236
RAD Formulator function.......................................................................................................6-236
SIN Formulator function ........................................................................................................6-237
TAN Formulator function....................................................................................................... 6-237
Array .....................................................................................................................................6-238
AT Formulator function..........................................................................................................6-238
DIFF Formulator function ......................................................................................................6-238
FINDD Formulator function ...................................................................................................6-239
FINDLIN Formulator function ................................................................................................6-240
FINDU Formulator function ................................................................................................... 6-241
FIRSTPOS Formulator function ............................................................................................6-241
INDEX Formulator function ................................................................................................... 6-242
INTEG Formulator function ................................................................................................... 6-243
LASTPOS Formulator function..............................................................................................6-244
MAXPOS Formulator function...............................................................................................6-245
MINPOS Formulator function................................................................................................6-245
SUBARRAY Formulator function...........................................................................................6-245
SUMMV Formulator function.................................................................................................6-246
Line Fits ................................................................................................................................6-247
EXPFIT Formulator function..................................................................................................6-247
EXPFITA Formulator function ...............................................................................................6-248
EXPFITB Formulator function ...............................................................................................6-249
LINFIT Formulator function ................................................................................................... 6-250
LINFITSLP Formulator function.............................................................................................6-251
LINFITXINT Formulator function...........................................................................................6-252
LINFITYINT Formulator function...........................................................................................6-253
LOGFIT Formulator function .................................................................................................6-254
LOGFITA Formulator function...............................................................................................6-255
LOGFITB Formulator function...............................................................................................6-256
POLY2COEFF Formulator function.......................................................................................6-257
POLY2FIT Formulator function .............................................................................................6-258
POLYNFIT Formulator function.............................................................................................6-259
REGFIT Formulator function.................................................................................................6-260
REGFITSLP Formulator function ..........................................................................................6-261
REGFITXINT Formulator function.........................................................................................6-262
REGFITYINT Formulator function.........................................................................................6-263
TANFIT Formulator function..................................................................................................6-264
TANFITSLP Formulator function...........................................................................................6-265
TANFITXINT Formulator function..........................................................................................6-266
TANFITYINT Formulator function..........................................................................................6-267
Identify data analysis requirements.......................................................................................6-268
Calc worksheet function definitions.................................................................................. 6-272
ABS Calc worksheet function................................................................................................6-273
ACOS Calc worksheet function.............................................................................................6-273
ACOSH Calc worksheet function ..........................................................................................6-274
ASIN Calc worksheet function...............................................................................................6-274
ASINH Calc worksheet function............................................................................................6-275
ATAN Calc worksheet function..............................................................................................6-275
ATAN2 Calc worksheet function............................................................................................6-276

Model 4200A
-SCS Parameter Analyzer Reference Manual Table of Content
s
ATANH Calc worksheet function...........................................................................................6-276
AVERAGE Calc worksheet function......................................................................................6-277
COS Calc worksheet function ...............................................................................................6-277
COSH Calc worksheet function.............................................................................................6-278
DAY Calc worksheet function................................................................................................6-278
EXP Calc worksheet function................................................................................................6-279
FIXED Calc worksheet function.............................................................................................6-279
HOUR Calc worksheet function.............................................................................................6-280
IF Calc worksheet function....................................................................................................6-280
LN Calc worksheet function...................................................................................................6-281
LOG Calc worksheet function................................................................................................6-281
LOG10 Calc worksheet function............................................................................................6-282
LOOKUP Calc worksheet function........................................................................................6-283
MATCH Calc worksheet function ..........................................................................................6-284
MAX Calc worksheet function ...............................................................................................6-285
MIN Calc worksheet function.................................................................................................6-286
MINUTE Calc worksheet function .........................................................................................6-287
MONTH Calc worksheet function..........................................................................................6-288
NOW Calc worksheet function ..............................................................................................6-289
PI Calc worksheet function....................................................................................................6-289
PRODUCT Calc worksheet function .....................................................................................6-290
ROUND Calc worksheet function..........................................................................................6-290
SECOND Calc worksheet function........................................................................................6-291
SIGN Calc worksheet function ..............................................................................................6-291
SIN Calc worksheet function.................................................................................................6-292
SINH Calc worksheet function...............................................................................................6-292
SQRT Calc worksheet function.............................................................................................6-293
STDEVP Calc worksheet function.........................................................................................6-293
SUM Calc worksheet function...............................................................................................6-294
SUMSQ Calc worksheet function..........................................................................................6-294
TAN Calc worksheet function................................................................................................6-295
TANH Calc worksheet function .............................................................................................6-295
VARP Calc worksheet function .............................................................................................6-296
YEAR Calc worksheet function .............................................................................................6-296
Tools................................................................................................................................. 6-297
Customize Clarius............................................................................................................ 6-297
Add objects to the library.......................................................................................................6-297
My Settings ...........................................................................................................................6-301
Project tree display options...................................................................................................6-304
Messages display option.......................................................................................................6-304
User library descriptions................................................................................................... 6-305
AVMControl user library........................................................................................................6-305
BeepLib user library ..............................................................................................................6-305
chargepumping user library...................................................................................................6-306
cvivulib user library................................................................................................................6-306
cvucompulib user library ....................................................................................................... 6-307
DLCP user library..................................................................................................................6-307
flashulib user library ..............................................................................................................6-308
hivcvulib user library..............................................................................................................6-309
Hotchuck_Temptronics3010B user library ............................................................................6-309
Hotchuck_Triotek user library................................................................................................6-309
HP4284ulib user library.........................................................................................................6-309
HP4294ulib user library.........................................................................................................6-310
HP8110ulib user library.........................................................................................................6-311
ki340xulib user library ...........................................................................................................6-311
KI42xxulib user library...........................................................................................................6-311
KI590ulib user library ............................................................................................................6-312
KI595ulib user library ............................................................................................................6-312
ki82ulib user library ...............................................................................................................6-313

Table of Contents
Model 4200A-SCS Parameter Analyzer
Reference Manual
LS336ulib user library ...........................................................................................................6-313
Matrixulib user library............................................................................................................6-314
nvm user library.....................................................................................................................6-314
OVPControl user library ........................................................................................................6-315
parlib user library...................................................................................................................6-316
PMU_examples_ulib user library...........................................................................................6-316
PMU_PCRAM_ulib user library.............................................................................................6-318
pmuulib user library...............................................................................................................6-318
PRBGEN user library............................................................................................................6-319
QSCVulib user library............................................................................................................6-319
RPM_ILimit_Control user library ........................................................................................... 6-319
utilities_ulib............................................................................................................................6-320
VLowFreqCV user library......................................................................................................6-320
wlrlib user library...................................................................................................................6-321
Winulib user library................................................................................................................6-321
AbortRetryIgnoreDialog user module....................................................................................6-322
InputOkCancelDialog user module........................................................................................6-323
OkCancelDialog user module................................................................................................6-325
OkDialog user module...........................................................................................................6-326
RetryCancelDialog user module............................................................................................6-328
YesNoCancelDialog user module .........................................................................................6-329
YesNoDialog user module .................................................................................................... 6-331
Demo Project overview.................................................................................................... 6-332
4-terminal n-MOSFET tests...................................................................................................6-334
3-terminal NPN BJT tests......................................................................................................6-334
Resistor tests ........................................................................................................................6-335
Diode tests............................................................................................................................ 6-335
Capacitor tests......................................................................................................................6-335
Testing flash memory....................................................................................................... 6-336
Flash connection guidelines..................................................................................................6-337
Programming and erasing flash memory ..............................................................................6-337
Endurance testing.................................................................................................................6-344
Disturb testing.......................................................................................................................6-347
Using a switch matrix ............................................................................................................6-349
Use KPulse to create and export Segment Arb waveforms ..................................................6-350
Enter Segment Arb values into UTM array parameters.........................................................6-350
Direct connections to single DUT..........................................................................................6-351
Direct connections to array DUT for disturb testing...............................................................6-353
Embedded computer policy ............................................................................................. 6-354
Keithley Configuration Utility (KCon) .......................................................................7-1
Keithley Configuration Utility (KCon).................................................................................... 7-1
KCon main window .............................................................................................................. 7-2
Configuration Navigator ....................................................................................................... 7-3
Add an external instrument.................................................................................................. 7-4
Supported external equipment..................................................................................................7-6
Add a driver for unsupported equipment...................................................................................7-7
Use KCon to add equipment to the 4200A-SCS .......................................................................7-7
Remove an external instrument........................................................................................... 7-9
Validate Configuration.......................................................................................................... 7-9
Update preamplifier, RPM, and CVIV Configurations........................................................ 7-10
Update the preamplifier configuration .....................................................................................7-10
Update the RPM configuration................................................................................................7-10

Model 4200A
-SCS Parameter Analyzer Reference Manual Table of
Contents
Update the 4200A-CVIV configuration ....................................................................................7-11
Save................................................................................................................................... 7-11
System Configuration Summary........................................................................................ 7-11
System Configuration properties........................................................................................ 7-12
KI 4200A SCS Properties........................................................................................................7-12
Instrument properties and connections ...................................................................................7-14
KXCI Settings..................................................................................................................... 7-16
Set up KXCI for GPIB control..................................................................................................7-17
Set up KXCI for ethernet control .............................................................................................7-18
Setting up KXCI as a 4145B emulator.....................................................................................7-18
Command Set.........................................................................................................................7-19
Tools................................................................................................................................... 7-20
Formulator Constants..............................................................................................................7-20
Generate Technical Support Files...........................................................................................7-21
About KCon.............................................................................................................................7-21
KCon Learning Center ....................................................................................................... 7-22
Keithley User Library Tool (KULT)............................................................................8-1
Introduction .......................................................................................................................... 8-1
KULT window............................................................................................................................8-2
Understanding the module identification area...........................................................................8-2
Understanding the module parameter display area...................................................................8-3
Understanding the module code-entry area..............................................................................8-3
Understanding the terminating brace area................................................................................8-3
Understanding the Tab area......................................................................................................8-3
Understanding the status bar....................................................................................................8-8
Understanding the menus.........................................................................................................8-9
Develop and use user libraries .......................................................................................... 8-13
Copy user libraries and modules from a 4200-SCS .......................................................... 8-13
Enabling real-time plotting for UTMs.................................................................................. 8-14
KULT Tutorials ................................................................................................................... 8-15
Tutorial 1: Creating a new user library and user module.........................................................8-16
Tutorial 2: Creating a user module that returns data arrays....................................................8-28
Tutorial 3: Calling one user module from within another .........................................................8-34
Tutorial 4: Customizing a user test module (UTM)..................................................................8-40
Advanced KULT features................................................................................................... 8-49
Managing user libraries........................................................................................................... 8-49
Working with interdependent user modules and user libraries................................................8-54
Understanding user-module locking........................................................................................8-58
Debugging user modules using Microsoft Visual C++.............................................................8-59
Format user module help to display in the Clarius Help pane.................................................8-62
Creating project prompts.................................................................................................... 8-63
Using dialog boxes..................................................................................................................8-63
Dialog box test examples........................................................................................................8-65
Keithley External Control Interface (KXCI)...............................................................9-1
Introduction .......................................................................................................................... 9-1
KXCI communications connections ..................................................................................... 9-2
GPIB connections .....................................................................................................................9-2

Table of Contents
Model 4200A-SCS Parameter Analyzer
Reference Manual
Ethernet connections ................................................................................................................9-3
Using KCon to configure KXCI............................................................................................. 9-3
Setting the remote control mode (GPIB or ethernet).................................................................9-4
Starting KXCI and the GPIB command interpreter.............................................................. 9-5
GPIB status indicators (GPIB communications only) ................................................................9-6
Graph display............................................................................................................................9-6
Using KXCI........................................................................................................................... 9-6
Logging commands, errors, and test results........................................................................ 9-6
Logging commands...................................................................................................................9-7
Logging errors...........................................................................................................................9-7
Logging test results...................................................................................................................9-8
Understanding the log file .........................................................................................................9-8
Graphing the test results...................................................................................................... 9-9
GPIB command set............................................................................................................ 9-10
Page commands .....................................................................................................................9-10
System mode commands........................................................................................................9-10
User mode commands............................................................................................................9-12
Commands common to system and user modes .................................................................... 9-12
4200A command set only........................................................................................................9-12
GPIB command reference ................................................................................................. 9-13
System mode commands........................................................................................................9-13
User mode commands (US)....................................................................................................9-39
Commands common to system and user modes .................................................................... 9-43
4200A command set only commands .....................................................................................9-48
Ethernet command reference ............................................................................................ 9-49
SMU default settings.......................................................................................................... 9-50
System Mode SMU default settings................................................................................... 9-51
Output data formats ........................................................................................................... 9-52
Data format for system mode readings ...................................................................................9-52
Data format for user mode readings........................................................................................9-53
Status byte and serial polling............................................................................................. 9-54
Status byte..............................................................................................................................9-54
Bit B0, Data Ready..................................................................................................................9-54
Bit B1, Syntax Error.................................................................................................................9-55
Bit B4, Busy.............................................................................................................................9-55
Bit B6, RQS (request for service)............................................................................................9-55
Serial polling............................................................................................................................9-55
Waiting for SRQ......................................................................................................................9-56
Sample programs............................................................................................................... 9-56
Program 1: VAR1 and VAR2 sweep (system mode)...............................................................9-56
Program 2: Basic source-measure (user mode)......................................................................9-57
Program 3: Retrieving saved data (system mode)..................................................................9-58
GPIB error messages......................................................................................................... 9-58
KXCI pulse generator commands...................................................................................... 9-59
PD...........................................................................................................................................9-59
PG...........................................................................................................................................9-60
PH...........................................................................................................................................9-60
PO...........................................................................................................................................9-61
PS...........................................................................................................................................9-61
PT ...........................................................................................................................................9-62
PV...........................................................................................................................................9-63

Model 4200A
-SCS Parameter Analyzer Reference Manual Table
of Contents
TO...........................................................................................................................................9-64
TS ...........................................................................................................................................9-65
KXCI CVU commands........................................................................................................ 9-66
User mode...............................................................................................................................9-66
System mode..........................................................................................................................9-66
Modeless commands ..............................................................................................................9-72
Code examples.......................................................................................................................9-78
Calling KULT user libraries remotely ................................................................................. 9-81
UL ...........................................................................................................................................9-81
AB...........................................................................................................................................9-81
EX...........................................................................................................................................9-82
GN...........................................................................................................................................9-83
GP...........................................................................................................................................9-84
GD...........................................................................................................................................9-85
SystemUtil User Library ..........................................................................................................9-85
KXCI ethernet client driver ......................................................................................................9-87
Driver functions .......................................................................................................................9-88
KPulse (for Keithley Pulse Cards)...........................................................................10-1
Keithley Pulse Application.................................................................................................. 10-1
Starting KPulse .......................................................................................................................10-1
KPulse setup and help ............................................................................................................10-2
Triggering........................................................................................................................... 10-3
Standard pulse waveforms ................................................................................................ 10-4
Segment Arb waveforms.................................................................................................... 10-6
Exporting Segment Arb waveform files ...................................................................................10-8
Custom file arb waveforms (full arb).................................................................................. 10-9
Custom Arb file operation: Select and configure waveforms.................................................10-10
Custom Arb file operation: Copy waveforms into Sequencer................................................10-11
Custom Arb file operation: Load waveform and turn on output .............................................10-12
Waveform types....................................................................................................................10-13
System administration .............................................................................................11-1
System Administration introduction.................................................................................... 11-1
Embedded computer policy ............................................................................................... 11-1
Default user accounts ........................................................................................................ 11-2
Create new user accounts ................................................................................................. 11-2
System directories and files............................................................................................... 11-3
Manage projects for multiple users.................................................................................... 11-3
Enable scroll bars in Acrobat Reader ................................................................................ 11-4
System-level backup and restore software........................................................................ 11-4
Restore the drive image to factory condition...........................................................................11-5
Choose the files to be backed up............................................................................................11-5
Protect user files and system software.............................................................................. 11-6
Protect software integrity.........................................................................................................11-6
Read and write permission access to USB ports ....................................................................11-7
Add Clarius+applications to the Windows startup menu.........................................................11-8

Table of Contents
Model 4200A-SCS Parameter Analyzer
Reference Manual
Maintenance..............................................................................................................12-1
Introduction ........................................................................................................................ 12-1
Line fuses........................................................................................................................... 12-1
Front-panel display............................................................................................................. 12-2
Cleaning the front-panel display..............................................................................................12-2
Adjusting the display ...............................................................................................................12-2
Air intake ventilation screens............................................................................................. 12-2
Solid-state hard drive maintenance ................................................................................... 12-3
Repacking for shipment ..................................................................................................... 12-3
Updates to the operating system software......................................................................... 12-3
Firmware upgrade.............................................................................................................. 12-4
Accessing the release notes.............................................................................................. 12-4
Reset the hardware............................................................................................................ 12-4
Lithium battery.................................................................................................................... 12-4
Calibrate the system .......................................................................................................... 12-5
Fan operation..................................................................................................................... 12-7
Making stable measurements with SMUs.......................................................................... 12-8
Single SMU stability considerations ........................................................................................12-8
Multiple SMU stability considerations......................................................................................12-9
Eliminating oscillations.......................................................................................................... 12-10
Low-current measurements ............................................................................................. 12-11
Leakage currents ..................................................................................................................12-11
Generated currents ...............................................................................................................12-12
Voltage burden......................................................................................................................12-14
Noise and source impedance................................................................................................ 12-15
Cable capacitance.................................................................................................................12-16
Test system performance......................................................................................................12-16
Interference...................................................................................................................... 12-17
Electrostatic interference....................................................................................................... 12-17
Radio frequency interference................................................................................................12-17
Ground loops and other SMU grounding considerations.......................................................12-18
LPT library function reference.................................................................................13-1
LPT library reference.......................................................................................................... 13-1
Lists of LPT library commands........................................................................................... 13-2
General operation commands.................................................................................................13-2
Math operation commands......................................................................................................13-4
SMU commands......................................................................................................................13-4
PGU (pulse only) and PMU (pulse and measure) commands.................................................13-5
Pulse source only (PG2) commands.......................................................................................13-6
CVU commands......................................................................................................................13-7
Switch commands...................................................................................................................13-8
LPT commands for general operations.............................................................................. 13-9
clrscn.......................................................................................................................................13-9
clrtrg......................................................................................................................................13-11

Model 4200A
-SCS Parameter Analyzer Reference Manual Table
of Contents
delay .....................................................................................................................................13-12
devint ....................................................................................................................................13-13
disable...................................................................................................................................13-15
enable ...................................................................................................................................13-16
execut ...................................................................................................................................13-16
getinstattr ..............................................................................................................................13-17
getinstid.................................................................................................................................13-18
getinstname...........................................................................................................................13-18
getlpterr................................................................................................................................. 13-19
imeast ...................................................................................................................................13-19
inshld..................................................................................................................................... 13-19
kibcmd...................................................................................................................................13-20
kibdefclr.................................................................................................................................13-22
kibdefdelete...........................................................................................................................13-23
kibdefint.................................................................................................................................13-24
kibrcv.....................................................................................................................................13-25
kibsnd....................................................................................................................................13-26
kibspl.....................................................................................................................................13-27
kibsplw ..................................................................................................................................13-28
kspcfg....................................................................................................................................13-28
kspdefclr................................................................................................................................13-29
kspdefdelete..........................................................................................................................13-30
kspdefint................................................................................................................................13-31
ksprcv....................................................................................................................................13-32
kspsnd...................................................................................................................................13-32
PostDataDouble....................................................................................................................13-33
PostDataInt ...........................................................................................................................13-34
PostDataString......................................................................................................................13-35
rdelay ....................................................................................................................................13-35
rtfary......................................................................................................................................13-36
savgX....................................................................................................................................13-36
scnmeas................................................................................................................................13-38
searchX.................................................................................................................................13-38
setmode ................................................................................................................................13-42
sintgX....................................................................................................................................13-44
smeasX.................................................................................................................................13-45
trigcomp ................................................................................................................................13-47
trigXg, trigXl...........................................................................................................................13-47
tstdsl......................................................................................................................................13-50
tstsel......................................................................................................................................13-50
LPT commands for math operations................................................................................ 13-51
kfpabs ...................................................................................................................................13-51
kfpadd ...................................................................................................................................13-51
kfpdiv..................................................................................................................................... 13-52
kfpexp ...................................................................................................................................13-53
kfplog ....................................................................................................................................13-53
kfpmul ...................................................................................................................................13-54
kfpneg ...................................................................................................................................13-55
kfppwr ...................................................................................................................................13-56
kfpsqrt ...................................................................................................................................13-57
kfpsub ...................................................................................................................................13-58
LPT commands for SMUs................................................................................................ 13-59
adelay ...................................................................................................................................13-59
asweepX ...............................................................................................................................13-59
avgX......................................................................................................................................13-62
bmeasX.................................................................................................................................13-63
bsweepX ...............................................................................................................................13-65
devclr ....................................................................................................................................13-67
devint ....................................................................................................................................13-67
forceX....................................................................................................................................13-69

Table of Contents
Model 4200A-SCS Parameter Analyzer
Reference Manual
getstatus ...............................................................................................................................13-70
intgX......................................................................................................................................13-73
limitX .....................................................................................................................................13-75
lorangeX................................................................................................................................13-76
measX...................................................................................................................................13-78
mpulse ..................................................................................................................................13-80
pulseX...................................................................................................................................13-81
rangeX ..................................................................................................................................13-83
rtfary......................................................................................................................................13-84
setauto ..................................................................................................................................13-85
ssmeasX ...............................................................................................................................13-86
sweepX.................................................................................................................................13-88
LPT commands for PGUs and PMUs.............................................................................. 13-91
dev_abort..............................................................................................................................13-92
PostDataDoubleBuffer ..........................................................................................................13-94
pulse_chan_status ................................................................................................................13-96
pulse_conncomp...................................................................................................................13-96
pulse_exec............................................................................................................................13-98
pulse_exec_status ..............................................................................................................13-100
pulse_fetch.......................................................................................................................... 13-101
pulse_limits .........................................................................................................................13-107
pulse_meas_sm..................................................................................................................13-108
pulse_meas_timing ............................................................................................................. 13-109
pulse_meas_wfm................................................................................................................13-111
pulse_measrt.......................................................................................................................13-112
pulse_ranges.......................................................................................................................13-113
pulse_remove......................................................................................................................13-115
pulse_sample_rate..............................................................................................................13-116
pulse_source_timing ...........................................................................................................13-116
pulse_step_linear................................................................................................................13-118
pulse_sweep_linear ............................................................................................................13-120
pulse_train...........................................................................................................................13-123
rpm_config .......................................................................................................................... 13-124
seg_arb_sequence..............................................................................................................13-125
seg_arb_waveform..............................................................................................................13-128
setmode (LLEC)..................................................................................................................13-129
LPT commands for pulse source only (PG2)................................................................. 13-131
arb_array.............................................................................................................................13-131
arb_file ................................................................................................................................13-132
devclr ..................................................................................................................................13-133
devint ..................................................................................................................................13-133
getstatus .............................................................................................................................13-135
pg2_init ...............................................................................................................................13-137
pulse_burst_count...............................................................................................................13-138
pulse_current_limit.............................................................................................................. 13-139
pulse_dc_output.................................................................................................................. 13-140
pulse_delay.........................................................................................................................13-141
pulse_fall.............................................................................................................................13-142
pulse_halt............................................................................................................................13-143
pulse_init.............................................................................................................................13-144
pulse_load...........................................................................................................................13-145
pulse_output........................................................................................................................13-146
pulse_output_mode.............................................................................................................13-147
pulse_period........................................................................................................................13-148
pulse_range ........................................................................................................................13-149
pulse_rise............................................................................................................................13-150
pulse_ssrc...........................................................................................................................13-151
pulse_trig.............................................................................................................................13-152
pulse_trig_output.................................................................................................................13-153
pulse_trig_polarity............................................................................................................... 13-154

Model 4200A
-SCS Parameter Analyzer Reference Manual Table
of Contents
pulse_trig_source................................................................................................................13-155
pulse_vhigh.........................................................................................................................13-157
pulse_vlow ..........................................................................................................................13-159
pulse_width.........................................................................................................................13-161
seg_arb_define ...................................................................................................................13-162
seg_arb_file.........................................................................................................................13-165
LPT commands for the CVUs........................................................................................ 13-165
adelay .................................................................................................................................13-166
asweepv.............................................................................................................................. 13-167
bsweepX .............................................................................................................................13-168
cvu_custom_cable_comp....................................................................................................13-170
devclr ..................................................................................................................................13-170
devint ..................................................................................................................................13-171
dsweepf...............................................................................................................................13-172
dsweepv.............................................................................................................................. 13-174
forcev ..................................................................................................................................13-175
getstatus .............................................................................................................................13-176
measf ..................................................................................................................................13-177
meast ..................................................................................................................................13-177
measv .................................................................................................................................13-178
measz .................................................................................................................................13-178
rangei..................................................................................................................................13-179
rtfary....................................................................................................................................13-180
setauto ................................................................................................................................13-180
setfreq.................................................................................................................................13-181
setlevel................................................................................................................................13-182
setmode (4210-CVU) .......................................................................................................... 13-182
smeasf ................................................................................................................................13-184
smeasfRT............................................................................................................................ 13-185
smeast ................................................................................................................................13-186
smeastRT............................................................................................................................ 13-187
smeasv................................................................................................................................13-188
smeasvRT...........................................................................................................................13-189
smeasz................................................................................................................................13-189
smeaszRT...........................................................................................................................13-191
sweepf................................................................................................................................. 13-192
sweepv................................................................................................................................13-193
Programming examples ......................................................................................................13-194
LPT commands for switching......................................................................................... 13-198
addcon ................................................................................................................................13-198
clrcon ..................................................................................................................................13-199
conpin .................................................................................................................................13-199
conpth .................................................................................................................................13-200
cviv_config ..........................................................................................................................13-201
cviv_display_config .............................................................................................................13-202
cviv_display_power............................................................................................................. 13-203
delcon .................................................................................................................................13-204
devint ..................................................................................................................................13-205
LPT Library Status and Error codes............................................................................... 13-207
Customized error texts........................................................................................................13-208
Code status or error titles....................................................................................................13-208
Large number reported readings and explanations.............................................................13-214
LPT library and Clarius interaction when using UTMs................................................... 13-214
Using switch matrices................................................................................................A-1
Typical test systems using a switch matrix..........................................................................A-1
Matrix card types.......................................................................................................................A-2