Keithley 4200A-SCS User manual

Reference Manual
4200A-901-01 Rev. C / February 2017
*P4200A-901-01C*
4200A-901-01C
Model 4200A-SCS
Parameter Analyzer
www.tek.com/keithley

Parameter Analyzer
Reference Manual
© 2017, Keithley Instruments
Cleveland, Ohio, U.S.A.
All rights reserved.
Any unauthorized reproduction, photocopy, or use of the information herein, in whole or in part,
without the prior written approval of Keithley Instruments is strictly prohibited.
All Keithley Instruments product names are trademarks or registered trademarks of Keithley
Instruments. Other brand names are trademarks or registered trademarks of their respective
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Document number: 4200A-901-01 Rev. C / February 2017
Model 4200A-SCS

Safety precautions
The following safety precautions should be observed before using this product and any associated instrumentation. Although
some instruments and accessories would normally be used with nonhazardous voltages, there are situations where hazardous
conditions may be present.
This product is intended for use by qualified personnel who recognize shock hazards and are familiar with the safety precautions
required to avoid possible injury. Read and follow all installation, operation, and maintenance information carefully before using
the product. Refer to the user documentation for complete product specifications.
If the product is used in a manner not specified, the protection provided by the product warranty may be impaired.
The types of product users are:
Responsible body is the individual or group responsible for the use and maintenance of equipment, for ensuring that the
equipment is operated within its specifications and operating limits, and for ensuring that operators are adequately trained.
Operators use the product for its intended function. They must be trained in electrical safety procedures and proper use of the
instrument. They must be protected from electric shock and contact with hazardous live circuits.
Maintenance personnel perform routine procedures on the product to keep it operating properly, for example, setting the line
voltage or replacing consumable materials. Maintenance procedures are described in the user documentation. The procedures
explicitly state if the operator may perform them. Otherwise, they should be performed only by service personnel.
Service personnel are trained to work on live circuits, perform safe installations, and repair products. Only properly trained
service personnel may perform installation and service procedures.
Keithley Instruments products are designed for use with electrical signals that are measurement, control, and data I/O
connections, with low transient overvoltages, and must not be directly connected to mains voltage or to voltage sources with high
transient overvoltages. Measurement Category II (as referenced in IEC 60664) connections require protection for high transient
overvoltages often associated with local AC mains connections. Certain Keithley Instruments measuring instruments may be
connected to mains. These instruments will be marked as category II or higher.
Unless explicitly allowed in the specifications, operating manual, and instrument labels, do not connect any instrument to mains.
Exercise extreme caution when a shock hazard is present. Lethal voltage may be present on cable connector jacks or test
fixtures. The American National Standards Institute (ANSI) states that a shock hazard exists when voltage levels greater than
30 V RMS, 42.4 V peak, or 60 VDC are present. A good safety practice is to expect that hazardous voltage is present in any
unknown circuit before measuring.
Operators of this product must be protected from electric shock at all times. The responsible body must ensure that operators
are prevented access and/or insulated from every connection point. In some cases, connections must be exposed to potential
human contact. Product operators in these circumstances must be trained to protect themselves from the risk of electric shock. If
the circuit is capable of operating at or above 1000 V, no conductive part of the circuit may be exposed.
Do not connect switching cards directly to unlimited power circuits. They are intended to be used with impedance-limited
sources. NEVER connect switching cards directly to AC mains. When connecting sources to switching cards, install protective
devices to limit fault current and voltage to the card.
Before operating an instrument, ensure that the line cord is connected to a properly-grounded power receptacle. Inspect the
connecting cables, test leads, and jumpers for possible wear, cracks, or breaks before each use.
When installing equipment where access to the main power cord is restricted, such as rack mounting, a separate main input
power disconnect device must be provided in close proximity to the equipment and within easy reach of the operator.
For maximum safety, do not touch the product, test cables, or any other instruments while power is applied to the circuit under
test. ALWAYS remove power from the entire test system and discharge any capacitors before: connecting or disconnecting
cables or jumpers, installing or removing switching cards, or making internal changes, such as installing or removing jumpers.
Do not touch any object that could provide a current path to the common side of the circuit under test or power line (earth)
ground. Always make measurements with dry hands while standing on a dry, insulated surface capable of withstanding the
voltage being measured.

For safety, instruments and accessories must be used in accordance with the operating instructions. If the instruments or
accessories are used in a manner not specified in the operating instructions, the protection provided by the equipment may be
impaired.
Do not exceed the maximum signal levels of the instruments and accessories. Maximum signal levels are defined in the
specifications and operating information and shown on the instrument panels, test fixture panels, and switching cards.
When fuses are used in a product, replace with the same type and rating for continued protection against fire hazard.
Chassis connections must only be used as shield connections for measuring circuits, NOT as protective earth (safety ground)
connections.
If you are using a test fixture, keep the lid closed while power is applied to the device under test. Safe operation requires the use
of a lid interlock.
If a screw is present, connect it to protective earth (safety ground) using the wire recommended in the user documentation.
The symbol on an instrument means caution, risk of danger. The user must refer to the operating instructions located in the
user documentation in all cases where the symbol is marked on the instrument.
The symbol on an instrument means caution, risk of electric shock. Use standard safety precautions to avoid personal
contact with these voltages.
The symbol on an instrument shows that the surface may be hot. Avoid personal contact to prevent burns.
The symbol indicates a connection terminal to the equipment frame.
If this symbol is on a product, it indicates that mercury is present in the display lamp. Please note that the lamp must be
properly disposed of according to federal, state, and local laws.
The WARNING heading in the user documentation explains dangers that might result in personal injury or death. Always read
the associated information very carefully before performing the indicated procedure.
The CAUTION heading in the user documentation explains hazards that could damage the instrument. Such damage may
invalidate the warranty.
Instrumentation and accessories shall not be connected to humans.
Before performing any maintenance, disconnect the line cord and all test cables.
To maintain protection from electric shock and fire, replacement components in mains circuits — including the power
transformer, test leads, and input jacks — must be purchased from Keithley Instruments. Standard fuses with applicable national
safety approvals may be used if the rating and type are the same. The detachable mains power cord provided with the
instrument may only be replaced with a similarly rated power cord. Other components that are not safety-related may be
purchased from other suppliers as long as they are equivalent to the original component (note that selected parts should be
purchased only through Keithley Instruments to maintain accuracy and functionality of the product). If you are unsure about the
applicability of a replacement component, call a Keithley Instruments office for information.
Unless otherwise noted in product-specific literature, Keithley Instruments instruments are designed to operate indoors only, in
the following environment: Altitude at or below 2,000 m (6,562 ft); temperature 0 °C to 50 °C (32 °F to 122 °F); and pollution
degree 1 or 2.
To clean an instrument, use a damp cloth or mild, water-based cleaner. Clean the exterior of the instrument only. Do not apply
cleaner directly to the instrument or allow liquids to enter or spill on the instrument. Products that consist of a circuit board with
no case or chassis (e.g., a data acquisition board for installation into a computer) should never require cleaning if handled
according to instructions. If the board becomes contaminated and operation is affected, the board should be returned to the
factory for proper cleaning/servicing.
Safety precaution revision as of March 2016.

Introduction.................................................................................................................1-1
Introduction .......................................................................................................................... 1-1
4200A-SCS system overview .............................................................................................. 1-2
Source-Measure Unit (SMU).....................................................................................................1-3
Preamplifier...............................................................................................................................1-3
Pulse source-measure hardware ..............................................................................................1-3
Ground unit (GNDU) .................................................................................................................1-3
Capacitance-voltage (CVU) hardware.......................................................................................1-3
Software features......................................................................................................................1-4
Embedded computer policy ................................................................................................. 1-4
Connections and configuration.................................................................................2-1
Introduction .......................................................................................................................... 2-1
Basic source-measure connections..................................................................................... 2-1
Maximum signal limits...............................................................................................................2-1
Shielding and guarding .............................................................................................................2-2
Signal integrity...........................................................................................................................2-4
SMU connections......................................................................................................................2-4
Preamplifier connections...........................................................................................................2-7
Using the ground unit................................................................................................................2-8
SMU circuit COMMON connections........................................................................................2-12
4200-SMU and 4210-SMU overview....................................................................................... 2-13
Test equipment connections.............................................................................................. 2-17
Recommended connecting cables..........................................................................................2-18
Test fixture and device under test (DUT) connections ............................................................2-18
Prober connections .................................................................................................................2-20
Configuring safety interlock operation................................................................................ 2-20
Control and data connections............................................................................................ 2-22
GPIB connections ...................................................................................................................2-22
Pulse cards ........................................................................................................................ 2-23
Standard pulse........................................................................................................................2-24
Configuring the system ...................................................................................................... 2-25
Source-measure hardware.........................................................................................3-1
Source-measure units.......................................................................................................... 3-1
4200-SMU and 4210-SMU overview ................................................................................... 3-1
Source-measure hardware overview.........................................................................................3-2
Basic SMU circuit configuration.................................................................................................3-2
Compliance limits......................................................................................................................3-3
Source or sink ...........................................................................................................................3-4
I-Source operating boundaries..................................................................................................3-6
I-Source operation examples ....................................................................................................3-7
V-Source operating boundaries.................................................................................................3-8
V-Source operation examples...................................................................................................3-8
Source I measure I and source V measure V..........................................................................3-10
SMU terminals and connectors...............................................................................................3-10
Table of Contents

Table of Contents
Model 4200A-SCS Parameter Analyzer
Reference Manual
Source-measure unit (SMU) with 4200-PA overview ........................................................ 3-11
Basic SMU/preamplifier circuit configuration...........................................................................3-12
Compliance limit for a SMU with a 4200-PA............................................................................3-12
Using minimum compliance .................................................................................................... 3-12
Operating boundaries..............................................................................................................3-13
Preamplifier terminals and connectors....................................................................................3-14
FORCE terminal......................................................................................................................3-14
SENSE terminal......................................................................................................................3-15
Preamplifier CONTROL connector..........................................................................................3-15
Preamplifier mounting .............................................................................................................3-16
SMU circuit COMMON connections........................................................................................3-18
Ground unit (GNDU) overview........................................................................................... 3-19
Basic characteristics ...............................................................................................................3-19
Ground unit connections .........................................................................................................3-20
Ground unit DUT connections.................................................................................................3-20
Ground unit terminals and connectors ....................................................................................3-21
FORCE terminal......................................................................................................................3-21
SENSE terminal......................................................................................................................3-21
COMMON terminal..................................................................................................................3-22
Chassis ground .......................................................................................................................3-22
Source-measure concepts................................................................................................. 3-23
Guarding .................................................................................................................................3-23
Local and remote sensing.......................................................................................................3-27
Sink overview..........................................................................................................................3-30
Source-measure considerations..............................................................................................3-31
Sweep concepts......................................................................................................................3-34
Operation mode timing diagrams............................................................................................3-36
Multi-frequency capacitance-voltage unit................................................................4-1
Introduction .......................................................................................................................... 4-1
Measurement overview........................................................................................................ 4-1
Measurement functions.............................................................................................................4-2
Test signal.................................................................................................................................4-3
DC bias function and sweep characteristics..............................................................................4-3
Force-measure timing ...............................................................................................................4-4
4210-CVU connections........................................................................................................ 4-5
Connection notes......................................................................................................................4-5
Typical 4210-CVU test connections to a DUT...........................................................................4-6
Test connections to a probe card..............................................................................................4-7
Typical CVU matrix card connections .......................................................................................4-7
Connection compensation ................................................................................................. 4-10
Generate open connection compensation data.......................................................................4-11
Generate short connection compensation data.......................................................................4-13
Generate load connection compensation data........................................................................4-15
Compensation data.................................................................................................................4-16
Enable compensation.............................................................................................................. 4-17
ABB unbalance errors............................................................................................................. 4-18
CVU Real-Time Measure Mode......................................................................................... 4-18
Confidence Check.............................................................................................................. 4-19
Run an open check and short check.......................................................................................4-20
4210-CVU project example................................................................................................ 4-21
Select a project .......................................................................................................................4-21
Configure the test....................................................................................................................4-23

Model 4200A
-SCS Parameter Analyzer Reference Manual Table
of Contents
Run the test and review results...............................................................................................4-24
Timing diagrams................................................................................................................. 4-25
CVU using voltage bias...........................................................................................................4-25
CVU using voltage sweep.......................................................................................................4-26
CVU using voltage list sweep..................................................................................................4-27
CVU using frequency sweep - DC bias...................................................................................4-29
CVU frequency sweep - DC step ............................................................................................4-30
CVU Terminal Settings Advanced settings and circuits..................................................... 4-31
C-V projects ....................................................................................................................... 4-33
Capacitor I-V and C-V Measurements with Series 700 Project (cap-iv-cv-matrix) ..................4-34
BJT Capacitance Tests (cvu-bjt) .............................................................................................4-38
BJT I-V and C-V Tests Using 4200A-CVIV Multi-Switch Project (cvu-bjt-cviv)........................4-42
High-Voltage C-V Tests Project (cvu-highv)............................................................................4-43
MOS Capacitor C-V Project (cvu-moscap)..............................................................................4-44
MOS Capacitor Lifetime Test Project (moscap-lifetime)..........................................................4-64
MOSFET I-V and C-V Tests Using 4200A-CVIV Multi-Switch Project (mosfet-cviv)...............4-70
Capacitor Measurements (cap-measurements)......................................................................4-70
Interconnect Capacitance C-V Sweep test (cv-sweep)...........................................................4-72
MOS Capacitor Mobile Ion Project (moscap-mobile-ion) ........................................................4-73
MOSFET Project (mosfet).......................................................................................................4-80
Nanowire tests ........................................................................................................................4-86
Diode Project (diode-project)...................................................................................................4-88
Solar Cell Project (solarcell)....................................................................................................4-93
Demo project (default)...........................................................................................................4-100
Carbon Nanotube Transistor Characterization Project (cntfet-characterization) ...................4-100
Pulse measure and pulse generator units................................................................5-1
Models 4220-PGU and 4225-PMU...................................................................................... 5-1
PGU and PMU connectors........................................................................................................5-2
PMU block diagram...................................................................................................................5-3
Pulse modes .............................................................................................................................5-3
Pulse measurement types (PMU) .............................................................................................5-4
Measure modes ........................................................................................................................5-4
Sample rate...............................................................................................................................5-5
Model 4225-RPM................................................................................................................. 5-6
RPM input, output, and top panels............................................................................................5-6
Using the RPM as a switch .......................................................................................................5-8
Waveform capture................................................................................................................ 5-9
Connections ......................................................................................................................... 5-9
PMU common connections .....................................................................................................5-10
Shield connections..................................................................................................................5-11
Cable length............................................................................................................................5-11
High frequency connections....................................................................................................5-11
Prober chuck connections.......................................................................................................5-12
Two-terminal device connections............................................................................................5-12
Three-terminal device connections .........................................................................................5-14
Four-terminal device connections ...........................................................................................5-15
Connections to prober or test fixture bulkhead connectors .....................................................5-16
Using an SMA to SSMC adapter cable to connect pulse card to DUT....................................5-16
4225-RPM connections...........................................................................................................5-17
Configure the PGU, PMU, and RPM using tests............................................................... 5-20
PMU pulse timing preview ................................................................................................. 5-20
PMU amplitude sweep example (one-channel).......................................................................5-22
PMU amplitude sweep and step example (two-channel) ........................................................5-24

Table of Contents
Model 4200A-SCS Parameter Analyzer
Reference Manual
Higher channel count test example.........................................................................................5-27
PMU connection compensation......................................................................................... 5-30
Perform connection compensation..........................................................................................5-32
Enabling connection compensation.........................................................................................5-33
Load-line effect compensation (LLEC) for the PMU.......................................................... 5-34
Methods to compensate for load-line effect.............................................................................5-34
How LLEC adjusts pulse output to the target levels................................................................5-35
Coping with the load-line effect...............................................................................................5-36
LLEC maintains even voltage spacing ....................................................................................5-37
Test considerations................................................................................................................. 5-38
LPT functions used to configure LLEC....................................................................................5-38
Enable LLEC...........................................................................................................................5-39
Disable LLEC and set the output impedance..........................................................................5-40
Pulse parameter definitions ............................................................................................... 5-40
PMU minimum settling times versus current measure range............................................ 5-41
PMU capacitive charging/discharging effects.................................................................... 5-42
PMU and RPM measure ranges are not source ranges.................................................... 5-44
4220-PGU and 4225-PMU output limitations..................................................................... 5-45
4200A-SCS power supply limitations................................................................................. 5-46
Basic troubleshooting procedure ....................................................................................... 5-48
Step 1. Verify prober connections from the PMU or RPM to the DUT.....................................5-48
Step 2. Verify the pulse shape ................................................................................................5-49
Step 3. Is the pulse level correct for each channel?................................................................ 5-50
Step 4. Is the pulse I-V curve suspect?...................................................................................5-50
Pulse source-measure concepts........................................................................................ 5-55
Ultra-fast I-V tests ...................................................................................................................5-55
Segment Arb waveform...........................................................................................................5-56
Full arb waveform....................................................................................................................5-59
Pulse waveforms for nonvolatile memory testing .................................................................... 5-60
DUT resistance determines pulse voltage across DUT...........................................................5-61
Triggering................................................................................................................................5-66
Pulse source-measure connections ........................................................................................5-69
Measurement types............................................................................................................ 5-70
Spot mean measurements......................................................................................................5-70
Spot mean discrete readings...................................................................................................5-70
Spot mean average readings..................................................................................................5-71
Waveform measurements.......................................................................................................5-72
Waveform discrete readings....................................................................................................5-73
Waveform average readings...................................................................................................5-73
Measurement timing................................................................................................................5-74
Clarius..........................................................................................................................6-1
Get started with Clarius........................................................................................................ 6-1
Clarius interface........................................................................................................................6-2
Additional Clarius+applications.................................................................................................6-9
Set up a simple project......................................................................................................... 6-9
Select project components......................................................................................................6-10
Add a device and test to the project........................................................................................6-11
Rearrange items in the project tree.........................................................................................6-12
Delete objects in the project tree.............................................................................................6-12
Configure a simple test ...................................................................................................... 6-13

Model 4200A
-SCS Parameter Analyzer Reference Manual Table
of Contents
Set the key parameters...........................................................................................................6-14
Run a simple test ............................................................................................................... 6-15
Working with My Projects................................................................................................... 6-16
Open a project.........................................................................................................................6-16
Create a new project from My Projects ...................................................................................6-17
Export a project.......................................................................................................................6-17
Import a project.......................................................................................................................6-17
Migrate projects from 4200-SCS systems...............................................................................6-19
Duplicate a project ..................................................................................................................6-19
Delete a project.......................................................................................................................6-20
Edit project information ...........................................................................................................6-20
View My Projects.....................................................................................................................6-21
Test and terminal setting descriptions ............................................................................... 6-22
Operation Mode (SMU)...........................................................................................................6-22
SMU - all terminal parameters.................................................................................................6-36
Operation Mode (CVU) ...........................................................................................................6-47
CVU - all terminal parameters.................................................................................................6-55
Operation Mode (PMU)...........................................................................................................6-63
PMU - all terminal parameters.................................................................................................6-70
Test settings............................................................................................................................6-80
Set up a complex project.................................................................................................. 6-105
Customize tests.....................................................................................................................6-106
Link tests or actions ..............................................................................................................6-140
Add actions ...........................................................................................................................6-141
Sites......................................................................................................................................6-142
Subsites ................................................................................................................................6-142
Configure a complex test ................................................................................................. 6-143
Test and terminal settings..................................................................................................... 6-143
Step or sweep multiple device terminals in the same test.....................................................6-144
Configure actions..................................................................................................................6-146
Configure sites ......................................................................................................................6-147
Configure subsite cycling ...................................................................................................... 6-148
Run a complex test .......................................................................................................... 6-176
Run projects, subsites, devices, and tests ............................................................................6-176
Cycle a subsite......................................................................................................................6-181
Multi-site execution ...............................................................................................................6-182
Analyze data .................................................................................................................... 6-183
Spreadsheet.......................................................................................................................... 6-184
Save test results and graphs................................................................................................. 6-194
Graph.................................................................................................................................... 6-196
The Formulator................................................................................................................. 6-222
Configure Formulator calculations.........................................................................................6-222
Open the Formulator.............................................................................................................6-223
Becoming familiar with the Formulator dialog box................................................................. 6-224
Using the Formulator options................................................................................................6-226
Real-time functions, operators, and formulas........................................................................6-227
Post-test-only functions and formulas ...................................................................................6-227
Formulator function reference...............................................................................................6-228
ABS Formulator function.......................................................................................................6-228
SQRT Formulator function ....................................................................................................6-228
EXP Formulator function.......................................................................................................6-229
LOG Formulator function.......................................................................................................6-229
LN Formulator function..........................................................................................................6-230
DELTA Formulator function...................................................................................................6-230
COND Formulator function....................................................................................................6-231
Statistics................................................................................................................................6-231