Keithley 590 CV User manual

Model 590 CV Analyzer
Instruction Manual
A GREATER MEASURE OF CONFIDENCE

WARRANTY
Keithley Instruments, Inc. warrants this product to be free from defects in material and workmanship for a period of 1 year
from date of shipment.
Keithley Instruments, Inc. warrants the following items for 90 days from the date of shipment: probes, cables, rechargeable
batteries, diskettes, and documentation.
During the warranty period, we will, at our option, either repair or replace any product that proves to be defective.
To exercise this warranty, write or call your local Keithley representative, or contact Keithley headquarters in Cleveland, Ohio.
You will be given prompt assistance and return instructions. Send the product, transportation prepaid, to the indicated service
facility. Repairs will be made and the product returned, transportation prepaid. Repaired or replaced products are warranted for
the balance of the original warranty period, or at least 90 days.
LIMITATION OF WARRANTY
This warranty does not apply to defects resulting from product modification without Keithley’s express written consent, or
misuse of any product or part. This warranty also does not apply to fuses, software, non-rechargeable batteries, damage from
battery leakage, or problems arising from normal wear or failure to follow instructions.
THIS WARRANTY IS IN LIEU OF ALL OTHER WARRANTIES, EXPRESSED OR IMPLIED, INCLUDING ANY
IMPLIED WARRANTY OF MERCHANTABILITY OR FITNESS FOR A PARTICULAR USE. THE REMEDIES PRO-
VIDED HEREIN ARE BUYER’S SOLE AND EXCLUSIVE REMEDIES.
NEITHER KEITHLEY INSTRUMENTS, INC. NOR ANY OF ITS EMPLOYEES SHALL BE LIABLE FOR ANY DIRECT,
INDIRECT, SPECIAL, INCIDENTAL OR CONSEQUENTIAL DAMAGES ARISING OUT OF THE USE OF ITS
INSTRUMENTS AND SOFTWARE EVEN IF KEITHLEY INSTRUMENTS, INC., HAS BEEN ADVISED IN ADVANCE
OF THE POSSIBILITY OF SUCH DAMAGES. SUCH EXCLUDED DAMAGES SHALL INCLUDE, BUT ARE NOT LIM-
ITED TO: COSTS OF REMOVAL AND INSTALLATION, LOSSES SUSTAINED AS THE RESULT OF INJURY TO ANY
PERSON, OR DAMAGE TO PROPERTY.
Keithley Instruments, Inc. 28775 Aurora Road • Cleveland, Ohio 44139 • 440-248-0400 • Fax: [phone]
1-888-KEITHLEY (534-8453) • www.keithley.com
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FINLAND: Tietäjäntie 2 • 02130 Espoo • Phone: [phone] • Fax: [phone]
FRANCE: 3, allée des Garays • 91127 Palaiseau Cédex • 01-64 53 20 20 • Fax: [phone]
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GREAT BRITAIN: Unit 2 Commerce Park, Brunel Road • Theale • Berkshire RG7 4AB • 0118 929 7500 • Fax: [phone]
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2/03

-
Model 590 CV Analyzer
Instruction Manual
01987, KeithleyInstruments,Inc.
All rightsreserved.
Cl&elind, Ohio, U.S.A.
Fourth Printing,February 1999
Document Number: 590-901-01 Rev. D

Manual Print History
The print history shown belowlists the printing dates of %I1Revisions and Addenda created for this manual. The Revision
Level letter increases alphabetically as the manual undergoes subsequent updates. Addenda, which are released between Revi-
sions, contain important change information that the user should incorporate immediately into the manual. Addenda are nun- ~~
bered sequentially. When a new Revision is Mzated, all Addenda associated with the previous Revision of the manual ax
incorporated into the new Revision of the manual. Each new Revision includes a revised copy of this print history page.
Revision A (Document Number590-901-01) ...........................I...............Y....I......1......................._.................... .1987
Revision B (Document Number590-901-01) .................................... .I.................................................~.~ ...............
Revision C (Doc~umcntNumber590-90 I-01)............................................. ..~.........................................~..~....-..~ ..
Addendum C (Document Numbei 590-901-02) ......................................................................... ..~..- October 1995
Addendum C (DocumenrNumber590-901-03) .................. ..~..~...~...I..I._...............~....................... F&my 1996
Addendum C (Document Number590.901-04 ...................~
................................................................. April 1996
Revision D (Documenr Number590-90 I-01) ....................I ......_.....I.. I..............................- ........... February 1999

Safety Precautions
The following safety precautions should be observed before using
this product and any associated instrumentation. Although some in-
struments and accessories would normally be used with non-haz-
ardous voltages, there are situations where hazardous conditions
may be present.
This product is intended for use by qualified personnel who recog-
nize shock hazards and are familiar with the safety precautions re-
quired to avoid possible injury. Read and follow all installation,
operation, and maintenance information carefully before using the
product. Refer to the manual for complete product specifications.
If the product is used in a manner not specified, the protection pro-
vided by the product may be impaired.
The types of product users are:
Responsible body is the individual or group responsible for the use
and maintenance of equipment, for ensuring that the equipment is
operated within its specifications and operating limits, and for en-
suring that operators are adequately trained.
Operators use the product for its intended function. They must be
trained in electrical safety procedures and proper use of the instru-
ment. They must be protected from electric shock and contact with
hazardous live circuits.
Maintenance personnel perform routine procedures on the product
to keep it operating properly, for example, setting the line voltage
or replacing consumable materials. Maintenance procedures are de-
scribed in the manual. The procedures explicitly state if the operator
may perform them. Otherwise, they should be performed only by
service personnel.
Service personnel are trained to work on live circuits, and perform
safe installations and repairs of products. Only properly trained ser-
vice personnel may perform installation and service procedures.
Keithley products are designed for use with electrical signals that
are rated Installation Category I and Installation Category II, as de-
scribed in the International Electrotechnical Commission (IEC)
Standard IEC 60664. Most measurement, control, and data I/O sig-
nals are Installation Category I and must not be directly connected
to mains voltage or to voltage sources with high transient over-volt-
ages. Installation Category II connections require protection for
high transient over-voltages often associated with local AC mains
connections. Assume all measurement, control, and data I/O con-
nections are for connection to Category I sources unless otherwise
marked or described in the Manual.
Exercise extreme caution when a shock hazard is present. Lethal
voltage may be present on cable connector jacks or test fixtures. The
American National Standards Institute (ANSI) states that a shock
hazard exists when voltage levels greater than 30V RMS, 42.4V
peak, or 60VDC are present. A good safety practice is to expect
that hazardous voltage is present in any unknown circuit before
measuring.
Operators of this product must be protected from electric shock at
all times. The responsible body must ensure that operators are pre-
vented access and/or insulated from every connection point. In
some cases, connections must be exposed to potential human con-
tact. Product operators in these circumstances must be trained to
protect themselves from the risk of electric shock. If the circuit is
capable of operating at or above 1000 volts, no conductive part of
the circuit may be exposed.
Do not connect switching cards directly to unlimited power circuits.
They are intended to be used with impedance limited sources.
NEVER connect switching cards directly to AC mains. When con-
necting sources to switching cards, install protective devices to lim-
it fault current and voltage to the card.
Before operating an instrument, make sure the line cord is connect-
ed to a properly grounded power receptacle. Inspect the connecting
cables, test leads, and jumpers for possible wear, cracks, or breaks
before each use.
When installing equipment where access to the main power cord is
restricted, such as rack mounting, a separate main input power dis-
connect device must be provided, in close proximity to the equip-
ment and within easy reach of the operator.
For maximum safety, do not touch the product, test cables, or any
other instruments while power is applied to the circuit under test.
ALWAYS remove power from the entire test system and discharge
any capacitors before: connecting or disconnecting cables or jump-
ers, installing or removing switching cards, or making internal
changes, such as installing or removing jumpers.
Do not touch any object that could provide a current path to the com-
mon side of the circuit under test or power line (earth) ground. Always
make measurements with dry hands while standing on a dry, insulated
surface capable of withstanding the voltage being measured.
The instrument and accessories must be used in accordance with its
specifications and operating instructions or the safety of the equip-
ment may be impaired.
Do not exceed the maximum signal levels of the instruments and ac-
cessories, as defined in the specifications and operating informa-
tion, and as shown on the instrument or test fixture panels, or
switching card.
When fuses are used in a product, replace with same type and rating
for continued protection against fire hazard.
Chassis connections must only be used as shield connections for
measuring circuits, NOT as safety earth ground connections.
If you are using a test fixture, keep the lid closed while power is ap-
plied to the device under test. Safe operation requires the use of a
lid interlock.
5/02

If or is present, connect it to safety earth ground using the
wire recommended in the user documentation.
The symbol on an instrument indicates that the user should re-
fer to the operating instructions located in the manual.
The symbol on an instrument shows that it can source or mea-
sure 1000 volts or more, including the combined effect of normal
and common mode voltages. Use standard safety precautions to
avoid personal contact with these voltages.
The WARNING heading in a manual explains dangers that might
result in personal injury or death. Always read the associated infor-
mation very carefully before performing the indicated procedure.
The CAUTION heading in a manual explains hazards that could
damage the instrument. Such damage may invalidate the warranty.
Instrumentation and accessories shall not be connected to humans.
Before performing any maintenance, disconnect the line cord and
all test cables.
To maintain protection from electric shock and fire, replacement
components in mains circuits, including the power transformer, test
leads, and input jacks, must be purchased from Keithley Instru-
ments. Standard fuses, with applicable national safety approvals,
may be used if the rating and type are the same. Other components
that are not safety related may be purchased from other suppliers as
long as they are equivalent to the original component. (Note that se-
lected parts should be purchased only through Keithley Instruments
to maintain accuracy and functionality of the product.) If you are
unsure about the applicability of a replacement component, call a
Keithley Instruments office for information.
To clean an instrument, use a damp cloth or mild, water based
cleaner. Clean the exterior of the instrument only. Do not apply
cleaner directly to the instrument or allow liquids to enter or spill
on the instrument. Products that consist of a circuit board with no
case or chassis (e.g., data acquisition board for installation into a
computer) should never require cleaning if handled according to in-
structions. If the board becomes contaminated and operation is af-
fected, the board should be returned to the factory for proper
cleaning/servicing.
!

SAFETY PRECAUTIONS
The following safety precautions should be observed before using the Model 590,
This inshment is intended for use by qualified personnel who reco&iie shock hazards and are familiar
with the safety precautions required to avoidpossible injury. Read overthis manual carefully before operating
the instrument.
Exercise extreme caution when a shock hazard is present at the instrument’s test output. The American Na-
tional Standards Institute (ANSI) states that a shock hazard exists when voltage levels greater than 3OVRMS
or 424V peak are present. A good safety practice is to expect that a hazardous voltage is present in any
unknown circuit before measurement.
Do not exceed 3OVRMS (42.4V peak) between analog common and earth ground.
Inspct YOUIconnecting cables for possible wear, sacks, or breaks before each use.
- For maximum safety, do not touch the test leads or the ins&u.mentwhile power is applied to the circuittider
test. Turn the power off and discharge all capacitors before connecting or disconnecting the instrument.
-
Do not touch any object which could provide a current path to the common side of the circuit under test
or power line (earth) ground. Always make ~easureme~nts with&y hands while standing on a dry,insulated
surface capable of withstanding the voltage being measured.
Do not exceed the instrument’s
section of this manual. xnaximumallowable bias input as defined in the specifications and operation

SPECIFICATIONS
59011OOkand 5901100kllM FRONT PANEL SPECIFICATIONS
w/zDii, ACCURACYuY.zu)'
u)vs'C F-PNOISE5
RANGE RESO‘uI?ON iflads + counts) RLFRON
2 PF O.lfF 0.12%+ (E&lx GIG, + 200) 6 fF
2&s OSIS O.lz%+ I 50 x UC, + 2wl 4ns
10 fF 0.12%+ (260x G,Grs + 5) 90 fF
10 ns o.l2%+(22xuc,+ 5) 6ons
2°F X0 fF 0.12%+~(260x GIG, + 5) SC‘7fF
2ms loo ns 0.12%+ ( 22 Y c/G, + 51 0.6s
7nlF 1 PF 0.25% + (260x GIG, + 5js 9 fF
2oms 1 $8 0.25%+ ( 22 x UC, +-m-5) 6,fi
590&i and 5901100WlM FRONT PANEL SPECIFICATIONS
WhDiil *ccuRAcY11Years
lsswc F-FNOISE’
RANGE BESOLUTION iwdg + umntsj FInm ON
20 PF 1 fF 0.29%+ (SO x G/G,, + 10) 6fF
ZCQPS 10 “s 0.29%+ (I20 x UC, + 10) 4O”S
Yr% 10 fF 0.29%t Y x GIGS + 5) x-m “s 0.29%* I20 x UC, + 5) %f:
SHUNT CAPACZTANCT
LOADINGEFFECt”
iwd8i-k)
0.1 % + (3 x G/G=)
0.1 % + (3 x UC”)
0.1 % + (3 x GIG,)
0.1 % + (3 x UC,)
0.02% + (20x GlG,s) 0.1% + (3x GIG,,.)
Km6 + ( 7 x CGS) 0.1’% + (7x CKn)
0.02% + (20x GIG,) 0.02%+ (2 x G/G,)
0.02%+ ( 7 x UC,,) 0.02%* (3 x UC,,)
0.1 % + (30x GIG=) 0.02%+ (2 x GIG”)
0.1 % + (10x CICrs) 0.02%+ (2 x UC,)
TEMPERATURE COEFFxaENr wuNT cAP*aTANcE
W-WC & 28%50~c LOADING EFFECT”
*&rag + counb,I~c l(%rdg+counts1
0.02%+(20xG,G,s) 0.5%+(WxGIGm)
0.02%+(8xcic,s) 0.5%+(loxCGr)
0.35%+~
0.33%+
I
40xG,G,)
16xC/CR)
2°F I‘Q fF 0.29%+ (SOIx GIG, + 51 2WfF~~ 0.02%+ (20x GIG,s) 0.35%+ (40Y.GIG,s)
2oms 1fi 0.29%+ (I20 x CIC,s +~ 5) 1PS 0.02%+ ( 8 x CICPr) 0.35%+ (16x C/Cd
Aamy is maximumlimit t-mQz20; typicalforQ<ZO.
NOTES:
1. G = conductance reading; C = capacitance reading; Gm = fuU scale
cmductance; C, = f”U scale capacitme. Range and acc”racy designa-
tions based on parallel RC model.
2. Rant panel 2Jzarq is IeIative to C.&ration same accuracy. Add front
pamI accuracy and source accuracy for total accuracy. Factcry calibration
source accumcy is 0.06% for 1COkHzand 0.08% for lMHz. CAL is to be
used to cancei initial zero, gai”, and phase error terms withi” 8 hours of
measurement or whenever ambient temperature changes by more than
2oc.
4. “Shunt Capacitance Loading’ is additional accwxy with equal shunt
load cm Output and Input, per IOOpFshunt load.
5. Noise spedfied with SOOpFshunt loading on Output and Input. Noise
on 2pF and 2OpFranges is tvpical with 1oOpFshunt load; 5oOpFwiU in-
crease noise no more than x2. Measured at 10 rdS/s rate.
CAPAClTANCE NON-LlNEAlUTYt <OS% of range, for Q>20 or
D<O.OS, 18”-28°C.
TEST VOLTAGE: lSmV nns ilO%.
TEST FRBQUBNCY:89011Wkz1CQkHz.54ollMzIMHz. Tolerance: +O.l%.
BIAS SOURCE
INTERNAL BIAS SOURCE OUTPUTz -20.00X’ to +2O.OOOVin 5mV
Step.
ACCURACY (1 Year, 18%8°0: i(O.ffi% setting + 10~1”)exdtive of
loading e*ms.
DC OurPuT RBSISTANCE: 50 madmum.
TEMPERARIRE COEFFICIBNT (Oa-180C& 28°-5000:
*(o.ws% + hv)IT.
MAXIMUM ODTPllT CuBREm f5OmA.
SETtTING TIME: <lms to 1% of f&l value.
NOISE: Typically <2OOpVF-p, O.lHz-IMHz; 3mV F-p to 75MHz
BIAS WAVEFORM:
ts the programmed value.
~~.-STAIR:output~sinincrrmMtsofBIAsS?zFVfromFIRsT
BIAS V to LAST BIAS V, the” back to FIRST BIAS V.
PULSE Outputs pulse train; amplitude increments by BIAS STEP V
from FIRST BIAS V to LAST BIAS V (eachpulseisfrom DKFAUIT
BIAS V to FIRST BIAS V for duration of SW TEwfE,then back to
DEFAULT BIAS V). Also Fqwnmable for single pulse.
EXTzAUows application of external bias sauce (via VOLTAGE BIAS
mw.
BIAS PARAMETERS: FIRSTBIASV, LASTBIAS V, DEFAULTBIAS V,
BIAS STEP V, STARTTIME, STOP TIME, STEP TIME, COIJNT.~
BIAS STEP V: Rogrammable in 5mV steps to 20V.Polarity selectable +
or -.
ST-T ~~ After transition from DEFALILT~Be V to FIRST BIAS V,
STARTTIMEmust elapse before first meas-ent. Programmable i”
inaements of 1024psfrom 1 to 65,536 increments.
Accuracy: *(O.l% + hs).
STEP TIME: The period between the ktitio” of BIAS STEPV and the
Start of the next meas”rwne”t. Programma ble in increments of 1024q
~frc!Qll to 65,536 fnaenlenis. Accuracy: ~f(O.l% +-lms).
STOP TIME: The period between the end of the final measurement and
the kawition from LASTBIASV to DEFAULTBIASV. Programmable
in increments of 1024usfrom 1 to 65,536i”aeme”ts.
Accuracy: f(O.l% + lms).
EXTERNALVOLTAGE BIAS INPUT: Rear panel input tennhuls allow
application of &emal bias source up to f2MIV, i5Gm.A.
Input Impedance: lwk0 paralkled by l$.
VOLTAGE BIAS MONITOR: Rear panel output terminals allow monitor
of the DC BIAS SOURCEoutput or extemauy applied VOLTAGEBIAS
INPUT; Level: IV = 1V wt. Output Resistance: Ikn.
VOLTAGE BIAS DISPLAY: Front panel &-digit display allows direct
readback of the DC BIAS SOURCE output or ater”aUy applied VOL
TAGEBJASINPLIT.Acnnacy *(O.O5%+ 5 aunts). Temperature Caef-
ficient: *(0.005% +~0.1 count)/T.

ANALYSIS CAPABILITY
(Rogrammiog and output an&able from front panel or IEEE-488bus)
READING BUFFERSA and B:Two data buffers allow storage and math-
ematical manipulation on up to 450mea.sluemerlt triplets: capacttance,
conductance, and voltage. In C vs. t, capxitmce and index only are
stored (up to 1350points).
1I;pefforms the inverse ofC on the capacitance data stored in reading
~6:Anows~~tionofcapadtancereadings~~~inreadingbuffer
to a user-pmgammable reference value Co.
Cm: Searches reading buffer far the maaimum capacitance value.
G-6: Sequentiauy computes the difference between comes ondin
capacitance readings stored in reading buffer A and reading B #uffer
Iv,-V.1: Calculates the corresponding difference in applied voltage for
values of capatitance in reading buffer B equal to each valve in reading
bufferA.
C vs. t: Akws fast measurement of capacitance vs. time (loo0 rdgls).
CABLE COMPENSATION
Rip to 8 setups can be stored in non-volatile memory)
CALIBRM’ION CAPAQTOR COMPENSATION: Correctsfor emxs due
tocablesorswitchingmatrixupto5metarseffe
length. nvmlleeanwmen ts are made with cables and matrix terminated
with pmision reference capacitors in place of the DUT. Model 5907
CablelMath Calibration Cqa.itor Setrequired. Bus programmable only.
MHz only. Accuracy: *(05% + appltcable front panel specification),
typical.
SINGLE-ENDED CABLE and S-PARAMETER COMPENSATION can
also be made. See manual for detailed information.
IEEE-488 BUS IMPLEMENTATION
MIJLTILmEcoMMANDs: DCL, LLO, SDC, GET, GTL, IJNT, SPR,
SPD.
UNILINE COMMANDS: lFC, REN, EOI, SRQ, ATN.
lh?TERFACEFUNCIION% S-D, AHI, TEO,LA,LEO,SRI, RLl, PFO,DC-l,
DTl, El, CO(for stand alone plotting C28 is used).
PROGRAMMABLE PARAMElXRs: Range, Function,Zero,Filter, Fre-
BiasWaveform, Bias Parameters, Plottin
~??&ger,Taminat~,4XIDataPointStorage. Plotter Parameters i!klibmiion, cable COG
r&m, Display, Status, Service Request, Self Test, Output Format.
TRANSLATOR: Up to 250bytes of deSni!dore allow v&able pass@, def-
inttin decomposition and listing.
GENERAL
DISPLAY: Three 4~-di@t displays for capadtance, conductance, and a
voltage bias.
~~I~b~4md or autoranging (forrates up to 18Id&; 10%wermnge
OVERRANGi INDICATION: Display reads OFLQ.
AVAILABLE MEASUREMENT RATES (to tntemal buff-):
4=&D&@ 1, 10, and 18 rdgls. 3yz-D&k 75 and loo0 rdgis.
FILTERcl-pole analog; pole at 37Hz. Filters t&b capacitance and conduc-
tame signals. For FlLTER off, multiply p-p noise specification by 5.
CAL: Initiates ti&ation to intm-d reference capacttor.Used to cancel
initial zero, gain, and phase errors.
ZRRO: Allows zeroing of on range readings. Allows relative readings to
be made with respect to a baseline value.
MAXTMUMOVERLOAD: OLn’PUT, Voltage BiasInput: 20X’ internal-
ly fused at ‘@. INFUT: Clamped by diodes to f0.N. M&mum current
2wmA. Analog output% w.
MAXIMUM COMMON MODE VOLTAGE (INPWI and OUTPUT,
Volt~;~ In nt):
lNF 30Vrms, dc to 6LlHz.Rear panel switch allows con- LiTlow to chasw.
ANALOG 0LTFli-B (Capacitance and Conductance): Level: 2Voutput
at full range. Initial offset: i25mv. wt Reststance: lw. Response
Time: lms to 1% of final value with fiiter off; 25ms maximum with
filter on.
FTOlTBR: Digital plotter output centrals IU’747OAplotter or equivalent
using HPGL via IEEE-488for real-time plotting of all measure*e*ts as
well as results of math computations, with gdas and labels. Talks to
plotter on address 05. HPGL commands used are lN, Ip, IW, PA, PD,
Pu, SC, SI, SF.
PRONT PANEL SFFWS: Up to 7fmnt panel setups can be stored in non-
voL@ilememory.
EXTERNAL TRIGGER: ‘lTL compatible Fxtenul Tr@ger Input and
output.
INPUT CONNECTORS: Isolated BNCf& m and VoltageBiasInput.
OUTPUT CONNECTORS: IsolatedBNCsforOUTPUT,VoltigeBiasMont-
tar, andAnalogOutputs.Non-isokd BNCs/or ExternalMgger.
ENVRONMEN’C Opding: O”-WC, relativehumidity 70%nonamden-
sing up to 35T. storage: -250 to +wc.
WARMUP: 1 hour to rates3accu.racy.
COOLING: Internal fan and filter for foxed air cooling.
POW!% lOEl25V or ZlC-w1V (external switch selected), 5OHzto 6oHz,
loOVAmadmum. 9&llOV and ISXZOV version available upon request.
DIMENSIONS, WEIGHT: l33nvn high x 435mm wide x 44&m deep
(5’/i in. x 17%in. x 17% in.). Net weight 9.Ikg (20lbs.).
ACCESSORIES SUPPLIED: Tiko Model 70515 BNC cables.
ACCESSORIES AVAILABE
Model 5904: 2OnF/2OmSAdapta
Model 5905: Cal&ration Sources and Adaptas for 5901lM.
Model 5906: Cal&ration Source and Adapters for 5YO/lM,
59U/lOOk,590/1OOk/lM,and 5904
Model 5907: Cable/M&ix Calibration Sources
Model 7w7-1: Shielded IEEE-188Digital cable, lm (3.3 ft.)
Model 7007-2: Shielded IEEE&?8 Digital Cable, 2m (6.6 ft.)
Model 7051-2: BNC to BNC Cable, 0.5m (2 ft.)
Model 7053.5: BNC to BNC Cable, 1.5m (5 ft.)
Model 7051-10:BNC to BNC C&k, 3m (l0 ft.)
speciacaaans sub++ tochangewtdlout nolice

5901lOOK ANALOG OUTPUT PERFORMANCE
RANGE
ACCURACYti Year)
180-2vc
k(% reading + mv) P-P NOISE’ ANALOG FILTER ON
TEMPERATURE coEFFIaEwI SHLNTCAPAClT.4NCZ
00-w & 7.80-WC LOADING EPFECl”
iph lwiblg + mv) iPh readbIg + mvl
20 pF 1%+~(5OxG/G,+l)
206 1% + (20 x UC, + 1 )
2LW pF 1% + (50 x G/G, + 0.5)
2OOps 1% + (20 x c/c,s + 0.5)
2nF 2% + (50 x G/6+ 0.5) 900 fF
ZUIS 2% + (20 x UC, + 0.5) 0.6~5
2onF 3% + (50 x GIG, + 0.5)
24hS 3% + (20 x UC, + 0.5)
0.2% i (l0 x GIG, + 0.1) 0.1 % + (0.3 x G/G&
0.2% + ( 4 x UC, + 0.1) 0.1 % + (0.3x UC,)
0.2% + (l0 x GIG, + 0.1) 0.1 % + (0.3x GIG,)
0.2% + ( 4 x CGs + 0.1) 0.1 % +~(0.7x UC,)
a4% + (l0 x GIG, + 0.2) 0~2% + (0.2x GIG,)
0.4% + ( 4 x UC,, + 0.2) 0.02% + (0.3 x UC,)
0.6% + (10 x GIG, + 0.1) 0.1% + (0.2x GIG,)
0.4% C~( 4 x UC, + 0.1) 0.1 % + (0.2x UC,)
Accuracy stated for Q 220 Typical enor for Q <20 .
Wing Model 5904 2onF12Om.SINPUT ADAFTFR.
NOTES:
1. G = conductance reading; C = capacitance reading; G, = fidl scale
conductance; C, = tidl scale capacitance.
2. Range and accuracy designations based on parallel RC model.
3v”Shunt Capacitance Loading’ is additional accumcy ermr with equal
shunt load on Test Output and Test Input, per lWpF load.
4 Noise specified with 5COpFshunt loading on TestOutput and ‘I&tIn-
put. Noise on 2pF and 20pF ranges is typical with loopF shunt loading;
5tXpF will increase noise no more than x2.
5.5904 must be caliimted with a particular 59011WKto achieve this ac-
clmxy level.
TESI VOIXAGE: l5mV rms fU)%.
TEST FREQUENCY: l~33kHz.Tolerance: tOI%.
- 5901l.M ANALOG OUTPUT PERFORMANCE
RANGE
20 pF
zoog
ACCURACY (1Year) TEMPERATURE COEFFIaENT SIIUNTCAPAClTANC??
180-WC P-P NOISE’ 00-WC & ‘28”-WC WADING EFFECT
f(% reading + mvl ANALOG FIUER ON iv0 readlug +~mv) *P/o reading + m&l
2% + (75 x GIG, + 1) L2mV 0.15% + @ x GIG,) 0.5 % + (25 x GIG,)
2% C~( 30 x UC, + 1) 0.75mv O.l5% + ( 6 x CIC,) 0.5 % + (1.0 x CL)
200 PF 2% + (75 x GIG, + 1) l.4~inV
2UiS 3% + (30 x UC, + 1) 0.9~mv ~J!.E% +~U5 x GIG,) 0.35% + (4.0x GIG&
0.15% + ( 6 x UC,) 0.35% + ('I.6x C/G)
2nF UptolnF 5% + (I50 x GIG, + 1) 0.3 mv 0.15% + (l5 x GIG,) 0.35% +~(40 x GIGm)
zolns up to IGms 5% l (40x c/c,*+ 1) 0.2.mv OS%.+ (6 x~CIC;s) 0.35% + 06 x gem)
2& AbaelnF 5% + 300 x GIG, + 1)
t 03 mv
2OmS Above 1GmS 7% + 40 x UC, + 1) 0.2 mv 0.15% + (I.5x GIG,) 0.35% + (4.0x GIG,)
0.35% + ( 6 x UC,) 0.35% + 0.6 x UC,)
NOTE%
l. G = eonduaance reading C = capacitance reading; G, = full scale Input. Noise cm2pF and 2GpFranges is typic.4 with l0lpF shunt loading;
conductance; 6 = full scale capacitance. 5oOpFwill iraease noise no more than X2.
2. Range and accuracy designations based on parallel RC model.
3.“Sh&t Capacitance Loading” is additional accumcy error with equal
shunt load on Test Output and Test Input, per lwpF load. TEST VOLTAGE:l5mV rms flO%.
4. Noise specified with 5oOpFshunt loading on Test Output and Test TEST FREQUENCY: n4lj.z. ~&mnce: &u.%.