Kobold MAS User manual

Operating Instructions
for
Electronic Mass Flow Meter
Model: MAS

MAS
page 2 MAS K05/0722
1. Contents
1. Contents........................................................................................................2
2. Note ..............................................................................................................3
3. Instrument Inspection....................................................................................3
4. Regulation Use .............................................................................................4
5. Application ....................................................................................................4
6. Operating Principle........................................................................................5
6.1 Measuring principle..............................................................................5
7. Mechanical Installation..................................................................................6
8. Electrical Connection ....................................................................................7
8.1 Power supply.......................................................................................8
8.2 Output signals......................................................................................9
8.3 Display.................................................................................................9
9. Operation....................................................................................................10
10. Totalizer......................................................................................................12
11. Maintenance ...............................................................................................13
12. Technical Information..................................................................................14
13. Conversion to other Working Conditions.....................................................15
14. Order Codes ...............................................................................................19
15. Dimensions.................................................................................................20
16. Disposal......................................................................................................21
17. Supplement.................................................................................................21
18. EU Declaration of Conformance .................................................................25
Sold by:
Kobold Messring GmbH
Nordring 22-24
D-65719 Hofheim
Tel.: [phone]
Fax: [phone]
E-Mail: [e-mail]
Internet: www.kobold.com

MAS
MAS K05/0722 page 3
2. Note
Please read these operating instructions before unpacking and putting the unit
into operation. Follow the instructions precisely as described herein.
The instruction manuals on our website www.kobold.com are always for currently
manufactured version of our products. Due to technical changes, the instruction
manuals available online may not always correspond to the product version you
have purchased. If you need an instruction manual that corresponds to the
purchased product version, you can request it from us free of charge by email
([e-mail]) in PDF format, specifying the relevant invoice number and
serial number. If you wish, the operating instructions can also be sent to you by
post in paper form against an applicable postage fee.
The devices are only to be used, maintained and serviced by persons familiar
with these operating instructions and in accordance with local regulations
applying to Health & Safety and prevention of accidents.
When used in machines, the measuring unit should be used only when the
machines fulfil the EC-machine guidelines.
as per PED 2014/68/EU
In acc. with Article 4 Paragraph (3), "Sound Engineering Practice", of the PED
2014/68/EU no CE mark.
3. Instrument Inspection
Instruments are inspected before shipping and sent out in perfect condition.
Should damage to a device be visible, we recommend a thorough inspection of
the delivery packaging. In case of damage, please inform your parcel service /
forwarding agent immediately, since they are responsible for damages during
transit.
Scope of delivery:
The standard delivery includes:
•Electronic Mass Flow Meter model: MAS
•Connector

MAS
page 4 MAS K05/0722
4. Regulation Use
Any use of the Electronic Mass Flow Meter, model: MAS, which exceeds the
manufacturer’s specifications, may invalidate its warranty. Therefore, any
resulting damage is not the responsibility of the manufacturer. The user assumes
all risk for such usage.
5. Application
The KOBOLD Electronic Mass Flow Meter, model: MAS, makes very precise
measurements of the Mass Flow Rate of gases in different measuring ranges
from 0 - 10 Ncm³/min up to 0 - 500 NI/min nitrogen. The operation of the meter is
based on the calorimetric principle.
The measuring accuracy is ±1,5% of full scale including linearity over 15 to 25 °C
and 0.3 to 4 bar absolute. Its response time is 800 ms. The typical response time is
6 seconds to display 98% of the full scale value. This can be realised in between
25 to 100% of the full scale value.
Compared to most of the volume flow meters there is no temperature- or
pressure-correction necessary. This means that the MAS is ideally suited for
almost every gas flow application. Typical industrial applications are process
control, laboratory measuring tasks, OEM applications, gas indication panels,
leakage and filter monitoring.
Display rotatable

MAS
MAS K05/0722 page 5
6. Operating Principle
6.1 Measuring principle
The operation of the Mass Flow Meter, model: MAS, is based on the principle of
heat transport (first law of thermodynamic).
The medium flows through the bypass measuring system. Gas enters the MAS
flow body and divides into two flow paths. Part of the flow goes through the
laminar flow bypass the other part flows through the above located measuring
pipe.
Due to the differential pressure between P1 and P2 which is generated by the
laminar flow bypass element a part flow (m1) is separated from the main flow (m)
and guided through the sensor tube.
Two resistance temperature detectors (RTD elements) transferring a constant
amount of heat to the gas stream are mounted on the measuring tube. Under flow
conditions, the gas molecules absorb and transport the heat away from one to the
other coil. The resulting temperature difference is detected by the RTD-sensors
and evaluating by the measuring electronic into an output signal or a display
value. Since the heat is transported by gas molecules, the output signal is linear
proportional to the gas mass flow.

MAS
page 6 MAS K05/0722
7. Mechanical Installation
In order to ensure a successful installation, inlet and outlet tubing or piping should
be in a clean state prior to plumbing your MAS to the system. MAS is applicable
to clean gas only because particles and other foreign matter may pollute the
sensor tube and laminar flow element and cause wrong measurement results. In
case of doubt, we recommend to use filters.
The following working pressures and/or medium temperatures may not be
exceeded:
•10 bar or 50 °C for devices with nylon casing (MAS-1xxx and MAS-2xxx)
•35 bar or 50 °C for devices with stainless steel casing
(MAS-3xxx and MAS-4xxx)
Be sure that the arrow on the side of the transducer points in the direction of flow.
With the nylon casing you must take care not to the turn the thread too far
(maximum 1.5 turns).
Attention! Over-tightening will crack the fittings and shift
calibration.
The preferred mounting position is horizontal. A vertical installation is possible,
but this must be considered during factory-calibration, since one has to count on
a zero-point movement depending on the operating pressure.
Swagelok and NPT screw connections must not be removed from the casing nor
should their position be altered since they form a unit with the laminar element
and could alter the calibration.
Swagelock-connections:
For the first installation of compression fittings, simply insert the tubing into the
fitting. Make sure that the tubing rests firmly on the shoulder of the fitting and that
the nut is hand-tight. Mark the nut at the six o’clock position. While holding the
fitting body steady with a back-up wrench, tighten the nut 11/4 turns. Watching the
mark on the nut, make one complete revolution and continue to the nine o’clock
position. After this, the fitting can be reconnected by tightening with a wrench. Do
not fail to use a back-up wrench or the inlet fitting may be damaged.

MAS
MAS K05/0722 page 7
8. Electrical Connection
The standard MAS is provided with a 9-pin “D” sub type connector located on the
side of the MAS.
Attention! Ensure that the voltage of your installation corresponds
with the voltage of the measuring device.
Attention! A wrong terminal assignment may lead to a damage of the
electronic. If a power supply is connected, do not supply with any
additional voltage on the 9-pin-Sub-D-connector.
When the MAS is configured for a remote display, the display is supplied via the
9-pin “D” connector.
Attention! Please note that opening the device cancels the
guarantee. We therefore recommend that you let such work be done
by KOBOLD Messring GmbH.

MAS
page 8 MAS K05/0722
Pin No. Function
1 No Connection
2 Flow Signal Ground
3 0 to +5 VDC Flow Signal
4 + Power Supply
(12 VDC) *1, *2
5 Remote Display Flow Signal
6 Remote Display Ground
7 Power Supply Ground
8 Analogue output 4 to 20 mA
Ground
9 Analogue output 4 to 20 mA
signal
*1Power supply voltage must be specified
at time of order. Operating a 12 VDC
meter at 24 VDC will cause damage.
Running a 24 VDC meter at 12 VDC will
result in faulty operation.
*2Do not supply + DC power at the “D”
connector while using a power supply at
the DC power jack. Both supplies may be
damaged.
8.1 Power supply
If you use a KOBOLD MAS-5000 or MAS-5015 power pack, insert the jack plug in
the foreseen socket on the Mass Flow Meter MAS. Then simply connect the
power unit to the mains.
If not using a MAS-5000 or MAS-5015 power pack, supply the MAS via the 9-Pin
Sub-D-Connector with a voltage of 12-15 VDC. MAS Flow Meters require a single
+12 to +15 VDC power supply capable of providing a minimum current of 100
mA. The MAS can also be configured for +24 VDC power at 100 mA.
After the power has been switched on the output signal is initially maximum for a
short time (c. 10-20 seconds). It then returns to 0 Volt (or 4 mA, depending on the
model provided). Please note that the warming up period for the MAS should be
about 15 minutes.
After the warming up phase the MAS indicates the measured flow values on the
display.
connector

MAS
MAS K05/0722 page 9
8.2 Output signals
The output signal is obtained from the 9-pin “D” connector. A 0 to 5 VDC output
signal linearly proportional to gas mass flow rate is standard. A 4-20 mA current
loop signal is optionally available.
8.3 Display
KOBOLD Mass Flow Meters, model MAS, for gases are available with an
integrated digital display, a remote digital display and without a digital display.
The decimal point on the version with digital display is set at the factory. It is
always a 3 ½-digit display.
Attention! KOBOLD Messring accepts no liability for any damage,
claims or faults resulting from operation with oxygen. MAS devices
can be manufactured oil and grease free if desired.

MAS
page 10 MAS K05/0722
9. Operation
Pressure- and temperature conditions
The gas flow rate output of your MAS always refers to “standard” conditions of 21 °C
(70 °F) and 760 mm of mercury (1 atmosphere), unless you have specified
otherwise. Make sure that your MAS is always calibrated on the operating
conditions.
Accuracy
The standard accuracy of the MAS is ±1.5% of full scale.
Overranging
If the flow rate exceeds the full scale range listed on your MAS’s front label, the
output signal and digital display (if available) will read a higher value.
Overrange conditions are indicated from the display and/or output by going to a
high level, above the full scale range. After the overrange condition has been
removed, it may take several seconds for the MAS to recover and resume normal
operation. This will not harm the instrument.
Zero and Span Adjustments
The zero and span potentiometers are accessed through marked ports on the
right side of your MAS. The analogue output is factory set and should only be
adjusted, when the zero point is drifting away more than 2% of the maximum
scale value and when you are absolutely sure that no gas is flowing.
Standard 0-5 VDC Output Signal
The standard 0-5 VDC output signal flows from Pin 3 (0-5 VDC Out) through the
load (1 K Ohm minimum) to Pin 7 (Power Common). The figure below is a typical
example of input power and output signal connections.

MAS
MAS K05/0722 page 11
Optional 4-20 mA output signal
As an option for all MAS Mass Flow Meters, a 4-20 mA analogue output is
available. The output signal is provided at 9-Pin Sub-D-Connector. (Attention!
Maximum load 50 to 500 Ohms)
Single unit
Multiple Installation

MAS
page 12 MAS K05/0722
10.Totalizer
The totalizer is designed to provide a totalizer function for the MAS-11/MAS-31. It
will display the totals as well as the flow.
Display:
The totalizer display has three screens which are accessed by pressing the
button as indicated below:
Screen 1 (start-up screen): Flow units are shown together with the actual flow
Screen 2: Totalizer
Screen 3: Actual flow is shown together with the totalizer
Totalizer:
A total of 8 digits can be shown by the totalizer ranging from .0000001 to
99999999. The decimal point will automatically shift position as the total
increases. Upon reaching the maximum count (99999999), the totalizer will “roll-
over” be cleared and counting starts from zero again.
The totalizer is cleared by going to screen 2 or 3 and then press the button for
more then 5 seconds. The clearing of the totalizer can be observed on the
screen.
The total count is stored in non-volatile memory every 5 minutes. If the unit is
switched off within 5 minutes from power-up then no total will be saved and the
previous total will be shown at the next power-up.
Due to the combination of the hardware/LCD it may happen that
during power up the screen remains blank. Please turn the unit off
and then back on again.

MAS
MAS K05/0722 page 13
11.Maintenance
Sensor cleaning and Inspection
Your MAS essentially requires no maintenance and has no regular maintenance
schedule, other than periodic flow path cleaning if the gas is dirty. Calibrations
may be scheduled once or twice yearly, depending on the accuracy to be
maintained, or as needed.
It is recommended that your MAS be returned to Kobold Messring if cleaning,
repair, or recalibration are necessary. This is usually your most cost-effective and
reliable alternative.
Attention! If you wish to clean your MAS purge it with a neutral
gas (e.g. nitrogen) thoroughly before disconnection from the gas
line when toxic or corrosive gases have been measured. Never
return an MAS to KOBOLD Messring or any other repair or
calibration facility without fully neutralising any toxic gases
trapped inside.
Note: A cleaning, described as follows, is only possible with
instruments made out of stainless steel (MAS-3xxx and MAS-
4xxx)
Cleaning is accomplished by simply rodding out the sensor with the Sensor
Cleaning Stylette, available from Kobold Messring for this purpose. (A 0.020 inch
to 0.028 inch diameter piano wire may also be used.) During maintenance and
cleaning please observe the following steps:
1. Remove the unit from the system.
2. Remove the two socket head access port plugs with a 6mm (¼ inch) allen
wrench.
3. Visually inspect the sensing ports and sensor concerning dirt and corrosion.
4. Use a hemostat or tweezers to push the cleaning wire into the downstream
opening of the sensor tube. Do not force the cleaning wire; move it back and
forth – Do not twist or rotate.
5. Flush the sensor tube with a non-residuous solvent. In cases where solids are
deposited on the sensor and can not be removed, units should be returned to
factory for complete cleaning and re-calibration.
6. Blow dry all parts with dry nitrogen and re-assemble the unit.
7. When the transducer is re-installed in the system, leak test the connections.
Do not use a liquid leak-search medium, instead watch the possible arising
pressure loss in your system.
8. Check transducer calibration.

MAS
page 14 MAS K05/0722
12.Technical Information
Field of application: suited only for dry, oil-free gases
Measuring accuracy: ±1,5 % f.s.
(with calibrated performance characteristics,
otherwise observe pressure and temperature
coefficients)
warm up time: approx. 15 min.
Option: ±1 % v. f.s.
(only up to 0-100 Ncm³/min. measuring
range with stainless steel case)
Standard calibration: 1013,25 mbar abs., +21 °C
option: to customer specification
Temperature coefficient: 0,15 % f.s. / °C
Pressure coefficient: 0,3 % f.s. / bar
Reproducibility: ± 0,5 % f.s.
Response time
(within 25 - 100 %
of measuring range): 6 s until 98 % of actual
flow rate is indicated
reaction time: 800 ms
Max. medium- and ambient
temperature: 50°C
Max. working pressure: nylon: 10 bar
stainless steel: 35 bar
Installation position: any (see factory calibration)
Gas density: 1 x 10-4cm³/s He (nylon)
1 x 10-7cm³/s He (stainless. steel case)
Wetted parts: 5 % either glass-fibre-reinforced nylon
or stainless steel material no. 1.4401
Seals: FPM (option: Kalrez, Neopren)
Supply voltage: 12-15 VDC
Output: linear 0 - 5 VDC (load min. 2000 Ω)
option: 4 - 20 mA
(load max. 500 Ω)

MAS
MAS K05/0722 page 15
13.Conversion to other Working Conditions
The flow rate of your MAS is referenced to certain “standard” Conditions of
temperature and pressure. Unless otherwise specified in your order, these
standard conditions are 21 °C (70 °F) and 760 mm of mercury (1 atmosphere). If
you wish to convert to other “standard” conditions or to find the “actual” conditions
in the pipe where your MAS is installed, use the following relationship:
1
1
2
2
1
2xQ
T
T
x
P
P
Q=
( )1= Refers to the standard conditions with which your MAS was calibrated
( )2= Refers to the new standard conditions or to the actual temperature and
pressure conditions in the pipe,
Q1 = The gas mass flow rate referenced to the calibrated standard conditions
(SCCM or SLM),
Q2 = The gas mass flow rate referenced to the new standard or actual conditions
(SCCM or SLM–“S” means “standard”; ACCM or ALM–“A” means “actual”),
P = Absolute pressure (kg/cm2 or psia), and
T = Absolute temperature (°K or °R) °K = °C + 273; °R = °F + 460)
Example 1 changing „standard“ conditions
If your MAS has a flow rate reading of 10.00 SLM and was calibrated at standard
conditions of 70 °F (21 °C) and 1 atmosphere (14.7 psia), and if you wish to
convert this reading to standard conditions of 32 °F (0 °C) and 1 atmosphere,
then you would use the equation as follows:
12 )21273( 273
.)(1 .)(1 xQ KK K
x
absbar absbar
Q+ =
min/28,9min/10928,0
2
NlNlxQ ==
So, you can see that the flow rate referenced to 0 °C will be approximately 7%
lower than when referenced to conditions of 21 °C.
Example 2 Finding the “Actual” flow rate
If the flow rate and calibrated standard conditions are as given in Example 1 and
you wish to find the actual flow rate at 100 °F and 30 psig, then you would use
equation as follows:
Q2=
307.14 7
.14
+
70460 100460 +
+
(10.00) = 3.47 slm

MAS
page 16 MAS K05/0722
K-factors, gas-tables and conversion formulas
In the following formulas and tables K-factors are used for calibrating its flow rate
values. This has two advantages:
a) Calibrating an “actual” gas with a reference gas. This is particularly useful if
the actual gas is not a common gas or if it is a so-called “nasty” gas
(i.e., toxic, flammable, corrosive, etc.).
b) Interpreting the reading of a flow meter or flow controller which has been
calibrated with a gas other than the actual gas.
Using these formulas, the following fundamental relationship is used:
2
1
Q
Q
=
2
1
K
K
(1)
Where:
Q = The volumetric flow rate of the gas referenced to standard conditions of
0°C and 760 mm Hg (SCCM or SLM)
K = The “K” factor defined in equation (6)
( )1 = Refers to the “actual” gas
( )2 = Refers to the “reference” gas
The K-factor is derived from the first law of thermodynamics applied to the sensor
tube.
NTmCp
H∆ =
(2)
where:
H = The constant amount of heat applied to the sensor tube
m = The mass flow rate of the gas (gm/min)
CP = The specific heat coefficient of the gas (Cal/gm);
CP is given in the gas tables (at 0 °C)
∆T = The temperature difference between the upstream and downstream
coils
N = A correction factor for the molecular structure of the gas given by the
following table:
Number of Atoms in the Gas Molecule N
______________________________________________________________
Monatomic 1.040
Diatomic 1.000
Triatomic 0.941
Polyatomic 0.880

MAS
MAS K05/0722 page 17
The mass flow rate can also be written as:
Qm ρ =
(3)
where:
ρ = The gas mass density at standard conditions (g/l); ρ is given in the
tables (at 0 °C, 760 mm Hg).
Furthermore, the temperature difference ΔT is proportional to the output voltage E
of the Mass Flow Meter
aE
T=
∆
(4)
where:
a = constant.
If we combine Equations (3) and (4), insert them into Equation (2), and solve for
Q, we get:
)( Cp
bN
Q
ρ
=
(5)
where:
b = H/aE = A constant if the output voltage is constant.
For our purposes, we want the ratio of the flow rate Q1, for an actual gas to the
flow rate of a reference gas Q2, to produce the same output voltage in a particular
Mass Flow Meter or controller.
We get this by combining equations (1) and (5):
)(
)(
22
2
11
1
2
1
2
1
p
p
xC
N
xC
N
K
K
Q
Q
ρ
ρ
==
(6)
Please note that the constant b cancels out. Equation (6) is the fundamental
relationship used in the accompanying tables. For convenience, the tables give
“relative” K-factors, which are the ratios K1/K2, instead of the K-factors
themselves.
In the third column of the tables, the relative K-factor is Kactual/Kreferences, where the
reference gas is a gas molecularly equivalent to the actual gas. In the fourth
column, the relative K-factor is Kactual/KN2, where the reference gas is the
commonly used gas, nitrogen (N2). The remaining columns give CP and r,
enabling you to calculate K1/K2 directly using Equation (6). In some instances,
K1/K2 from the tables may be different from that which you calculate directly. The
value from the tables is preferred because in many cases it was obtained by
experiment.

MAS
page 18 MAS K05/0722
Kobold calibrates every MAS Mass Flow Meter with primary standards using the
actual gas or a molecularly equivalent reference gas. The calibration certificate
accompanying your MAS will cite the reference gas used. When a reference gas
is used, the actual flow rate will be within 2-4% of the calculated flow rate.
Example:
A MAS is calibrated for nitrogen (N2), and the flow rate is 1000 SCCM for a
5 VDC output signal. The flow rate for carbon dioxide at a 5 VDC output is:
)2()2()2()2(
//
NCONCO
KKQQ =
)000,1/74,0(
)2( = co
Q
min/7401000
3
Ncm=
Calculating gas mixtures
Equation (6) is used for gas mixtures, but we must calculate
Cp
N
. ρ
for the
mixture.
The equivalent values of r, CP, and N for a gas mixture are given as follows:
The equivalent gas density is:
2211 )/()/(
ρρ
ρ
TT mmmm +=
where:
mT = m1 + m2 = total mass flow rate (gm/min),
( )1= Refers to gas #1, and
( )2= Refers to gas #2.
The equivalent specific heat is:
Cp= F1Cp1 + F2Cp2
where:
)/()(
11
ρρ
TT
mmF =
)/()(
222
ρρ
T
mmF =
The equivalent value of N is:
2211
)/()/( Nmm
NmmN
TT
+=
The equivalency relationships for r, CP, and N for mixtures of more than two
gases have a form similar to the dual-gas relationship given above.

MAS
MAS K05/0722 page 19
14.Order Codes
Order details Nylon® version (example: MAS-1002 00 V2 0)
Measuring range
for N2
Max.
pressure lost
Model
Connection
Voltage
supply
Output
with display
with
counter
without
display
0-20 Nml/min
1 mbar
MAS-1002
MAS-1102
MAS-2002
00 = ¼“ NPT IG
C2 = Swagelok ¼“ 00 = 12 VDC 0= 0-5 VDC A= 4-20 mA
0-50 Nml/min
1 mbar
MAS-1003
MAS-1103
MAS-2003
0-100 Nml/min
1 mbar
MAS-1004
MAS-1104
MAS-2004
0-200 Nml/min
1 mbar
MAS-1005
MAS-1105
MAS-2005
0-500 Nml/min
1 mbar
MAS-1006
MAS-1106
MAS-2006
0-1 Nl/min
1 mbar
MAS-1007
MAS-1107
MAS-2007
0-2 Nl/min
6 mbar
MAS-1008
MAS-1108
MAS-2008
0-5 Nml/min
6 mbar
MAS-1009
MAS-1109
MAS-2009
0-10 Nl/min
6 mbar
MAS-1010
MAS-1110
MAS-2010
0-20 Nl/min
25 mbar
MAS-1011
MAS-1111
MAS-2011
0-30 Nml/min
47mbar
MAS-1012
MAS-1112
MAS-2012
0-40 Nml/min
88 mbar
MAS-1013
MAS-1113
MAS-2013
on customer specification
MAS-10XX
MAS-11XX
MAS-20XX
Order details stainless steel version (example: MAS-3001 C1 V2 0)
Mesuring range
for N2
Max.
pressure lost
Case size
Model
Connection
Voltage
supply
Output
with
display
with
counter
without
display
0-10 Nml/min
6 mbar
L
MAS-3001
MAS-3101
MAS-4001
C1 = Swagelok ⅛“
C2 = Swagelok ¼“
C3 = Swagelok ⅜“
00 = 12 VDC 0= 0-5 VDC
A= 4-20 mA
0-10 Nml/min
6 mbar
L
MAS-3001
MAS-3101
MAS-4001
0-20 Nml/min
6 mbar
L
MAS-3002
MAS-3102
MAS-4002
0-50 Nml/min
6 mbar
L
MAS-3003
MAS-3103
MAS-4003
0-100 Nml/min
6 mbar
L
MAS-3004
MAS-3104
MAS-4004
0-200 Nml/min
6 mbar
L
MAS-3005
MAS-3105
MAS-4005
0-500 Nml/min
6 mbar
L
MAS-3006
MAS-3106
MAS-4006
0-1 Nl/min
6 mbar
L
MAS-3007
MAS-3107
MAS-4007
0-2 Nl/min
6 mbar
L
MAS-3008
MAS-3108
MAS-4008
0-5 Nl/min
6 mbar
L
MAS-3009
MAS-3109
MAS-4009
0-10 Nl/min
105 mbar
L
MAS-3010
MAS-3110
MAS-4010
C2 = Swagelok ¼“
C3 = Swagelok ⅜“
0-15 Nl/min
105 mbar
L
MAS-3011
MAS-3111
MAS-4011
0-20 Nl/min
40 mbar
M
MAS-3012
MAS-3112
MAS-4012
C2 = Swagelok ¼“
C3 = Swagelok ⅜“
C4 = Swagelok ½“
0-30 Nl/min
60 mbar
M
MAS-3013
MAS-3113
MAS-4013
0-50 Nl/min
80 mbar
M
MAS-3014
MAS-3114
MAS-4014
0-100 Nl/min
105 mbar
M
MAS-3015
MAS-3115
MAS-4015
C3 = Swagelok ⅜“
C4 = Swagelok ½“
0-100 Nl/min
6 mbar
H
MAS-3016
MAS-3116
MAS-4016
0-200 Nl/min
6 mbar
H
MAS-3017
MAS-3117
MAS-4017
0-300 Nl/min
140 mbar
H
MAS-3018
MAS-3118
MAS-4018
0-400 Nl/min
140 mbar
H
MAS-3019
MAS-3119
MAS-4019
C4 = Swagelok ½“
0-500 Nl/min
140 mbar
H
MAS-3020
MAS-3120
MAS-4020
on customer specification
L
MAS-30LX
MAS-31LX
MAS-40LX
C1/C2/C3
on customer specification
M
MAS-30MX
MAS-31MX
MAS-40MX
C2/C3/C4
on customer specification
H
MAS-30HX
MAS-31HX
MAS-40HX
C3/C4
When placing an order, please specify detailed service conditions (type of gas, flow rate, pressure, temperature etc.)
Accessories: Connector power supply
Model
Input
Output
MAS-5000
110 VAC
12 VDC/1.9 W
MAS-5015
230 VAC
15 VDC/6 W

MAS
page 20 MAS K05/0722
15.Dimensions