Lauda Semistat S 1200 User manual

Rev D - 2/19/19
Temperature Control System
MODELS Semistat S 1200, S 2400, S 4400
POU 3300, POU 3500
OPERATION MANUAL
LAUDA
-
Noah, LP.
2501 SE Columbia Way Ste 140
Vancouver, WA 98661
USA

Models S 1200, S 2400, S 4400, POU 3300, POU 3500
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COPYRIGHT
This manual and the information contained herein is the proprietary property of LAUDA-Noah,
LP.
No part of this manual may be reproduced or copied without the express written permission of
LAUDA-Noah, LP. Any unauthorized use of this manual or its contents is strictly prohibited.
Copyright © 2004-2008, 2018 LAUDA-Noah, LP. All Rights Reserved.
DISCLAIMER AND LIMITATION OF LIABILITY
The information contained in this manual is subject to change by LAUDA-Noah, LP, without prior
notice. LAUDA-Noah, LP, makes no warranty of any kind whatsoever, either expressed or
implied, with respect to the information contained herein. LAUDA-Noah, LP, shall not be held
liable for damages, of whatever kind, as a result of the reliance on or use of the information
contained herein.
INTENDED USE
The intended use for this product is for semiconductor temperature control applications. Desired
temperature is achieved by heating/cooling a recirculating perfluorinated fluid, and rejecting
heat to the facility’s water loop. Each module is intended for installation with a LAUDA-Noah
Power Supply Controller (PSC)
PRODUCT USAGE STATEMENT
DANGER:
Read this entire manual and all other publications pertaining to the work to be
performed before installing, operating, or maintaining this equipment. Practice all
plant and product safety instructions and precautions. Failure to follow
instructions can cause personal injury and/or property damage. If the equipment
is used in a manner not specified by the manufacturer, the protection provided by
the equipment may be impaired. All personnel who work with or who are exposed
to this equipment must take precautions to protect themselves against serious or
possibly fatal bodily injury. LAUDA-Noah, LP, provides information on its products
and associated hazards, but it assumes no responsibility for the after-sale
operation of the equipment or the safety practices of the owner or user. This
equipment produces or uses potentially lethal high-voltage, high-current,
electrical power.
NEVER DEFEAT INTERLOCKS OR GROUNDS.

Models S 1200, S 2400, S 4400, POU 3300, POU 3500
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Table of Contents
________________________________________________________________________________ 1
1. INTRODUCTION __________________________________________________________ 3
1.1. General Information _________________________________________________________ 3
1.2. Safety and Certification ______________________________________________________ 4
1.3. Risk of Burns _______________________________________________________________ 4
2. Installation ______________________________________________________________ 6
2.1. Conditions of Use ___________________________________________________________ 6
2.2. Unpacking and Handling ______________________________________________________ 7
2.3. Site and Climate ____________________________________________________________ 7
2.4. Identification of Ports and Connections _________________________________________ 9
2.5. Fluid Connections __________________________________________________________ 10
2.6. Electrical Connections _______________________________________________________ 15
3. Startup ________________________________________________________________ 17
3.1. Fill Procedure _____________________________________________________________ 17
3.2. System Startup ____________________________________________________________ 18
4. Operation ______________________________________________________________ 19
4.1. PSC Panel _________________________________________________________________ 19
4.2. Basic Module Operation _____________________________________________________ 20
5. Maintenance____________________________________________________________ 21
5.1. Basic Maintenance _________________________________________________________ 21
5.2. Unit Removal _____________________________________ Fehler! Textmarke nicht definiert.
5.3. Service ___________________________________________________________________ 21
6. Troubleshooting _________________________________________________________ 22
6.1. List of Alarms and Warnings __________________________________________________ 22
6.2. Troubleshooting ___________________________________________________________ 24
7. Technical Features ________________________________________________________ 0

Models S 1200, S 2400, S 4400, POU 3300, POU 3500
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1. INTRODUCTION
1.1. General Information
To ensure safe operation, read and understand this manual before attempting to install or
operate this unit. Read the safety instructions and follow the safety practices under “Safety”.
Interpreting the Manual
The following sections explain the type conventions, icons, and symbols that appear in
this manual.
Type Conventions
To identify certain words and phrases in type that differ from the rest of the text quickly, please
note the following type conventions:
 Pin and signal names appear in capitalized italics (DUTY CYCLE.A).
 Technical terms appear in italicized text when first introduced.
 Unit labels (switches, indicators, etc.) generally appear in boldface letters as they are
labeled on the unit (MODIFY).
 Commands (162) and command names (setpoint) appear in boldface lowercase letters.
Icons (Symbols)
This symbol represents important notes concerning potential harm to this unit, or
associated equipment.
DANGER:
This box identifies hazards or unsafe practices that could result in severe
personal injury or death.
WARNING:
This box identifies hazards or unsafe practices that could result in personal
injury.
CAUTION:
This box identifies hazards or unsafe practices that could result in product or
property damage.

Models S 1200, S 2400, S 4400, POU 3300, POU 3500
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The following symbols may appear on labels on the unit:
Electrical Hazard
CE label
Heat Hazard
1.2. Safety and Certification
 Do not attempt to install or operate this equipment without proper training.
 Ensure that this unit is properly grounded.
 Ensure that all cables are properly connected.
 Verify that input line voltage and current capacity are within specifications before turning
on the power supplies.
 Use proper electrostatic discharge (ESD) precautions.
 Do not attempt to operate product outside of its specified electrical range.
1.3. Risk of Burns
Avoid areas of the unit marked with the heat hazard label to reduce the risk of burns.
Additionally, use insulation on process hose/tubing and fittings to reduce the exposure of
potentially high temperature areas.
Product Safety/Compliance
Certain options of this product will be tested for and comply with Electromagnetic Compatibility
(EMC) standards. Certification is pending.

Models S 1200, S 2400, S 4400, POU 3300, POU 3500
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Certification
Certain options of this product are pending certification by:
 CE certification
 EMC measurements
 SEMI S2
For more information, refer to the letter of conformance (US) or declaration of conformity (EU)
accompanying the product.

Models S 1200, S 2400, S 4400, POU 3300, POU 3500
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2. Installation
2.1. Conditions of Use
Install this unit according to the following requirements.
DANGER:
Operating and maintenance personnel must receive proper training before
installing, troubleshooting, or maintaining high-energy electrical equipment.
Potentially lethal voltages could cause death, serious personal injury, or damage to
the equipment. Ensure that all appropriate safety precautions are taken.
DANGER:
RISK OF DEATH OR BODILY INJURY. Disconnect all sources of input power before
working on this unit or anything connected to it.
To be in compliance with the stated directives and standards, the following conditions of use
must be met:
 Operate the point-of-use module only within a system configuration that contains
accessory components authorized and provided by LAUDA-Noah, LP, or one of its
authorized agents.
 Install and operate this device in an over voltage category II installation only.
 Install and operate this device only in a pollution degree 2 or better environment (an
indoor location such as a computer room, office, or factory floor), where only non-
conductive pollution occurs during operation.
 To prevent toppling, the point-of-use module must also be securely mounted by a
bracket or in a subfloor tile mount.
 When dealing with any fluids such as coolant or facility water, utilize PPE such as gloves
and protective eyewear to avoid direct contact with skin or eyes.

Models S 1200, S 2400, S 4400, POU 3300, POU 3500
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2.2. Unpacking and Handling
WARNING:
Heavy Load. The 3300 /2400 module weighs 25 kg (55 lb). The 3500/4400 module
weighs 38 kg (84 lbs). The power supply/ controller weighs up to 30 kg (66 lbs).
Lifting can cause muscle strain or back injury. Use lifting aids and proper lifting
techniques when installing, removing or replacing.
Unpack the unit carefully. Verify that all items checked on the packing slip are in the crate.
Inspect the unit for obvious physical damage. Contact LAUDA-Noah, LP Customer Support and
the carrier immediately if there are signs of shipping damage. Save the shipping container for
submitting necessary claims to the carrier.
Utilize the handles on the top of the unit for transport, and use a 2 person lift for the POU 3500
and S 4400.
2.3. Site and Climate
The unit must be installed vertically, according to the markings on the side of the unit. We
recommend that the unit be located no more than 3.8m (12.5 ft) away from the temperature
control target.
The electrical protection degree of the unit is IP2X, indicating the unit is for indoor use only, with
no protection against water droplets.
Since the unit is liquid cooled, there are no requirements for spacing and ventilation. However,
accommodations must be made for the unit’s fluid and electrical connections. Do not position
the equipment so that it is difficult to access these connections.
Additionally, avoid installing the unit’s process loop through areas where someone may come
into contact with tubing/hose in order to reduce risk of burns.

Models S 1200, S 2400, S 4400, POU 3300, POU 3500
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The following table denotes the climatic specifications of the unit.
Temperature Relative Humidity Air Pressure
Operating 0°C to +50°C
(+32°F to +122°F)
10% to 90%
1
+2 g/m3 to +25g/m3
1 Atm
Storage and
Transportation
-20°C to +60°C
(-4°F to +140°F)
10% to 90%
1
+2 g/m3 to +25g/m3
1 Atm
1 Noncondensing

Models S 1200, S 2400, S 4400, POU 3300, POU 3500
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2.4. Identification of Ports and Connections
The following illustration depicts the unit’s external fittings and connectors.

Models S 1200, S 2400, S 4400, POU 3300, POU 3500
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2.5. Fluid Connections
Process Side
The following pictures depict the top view of the unit. The Process OUT and Process IN ports
have a LAUDA-Noah proprietary connector that can be adapted to either a barb fitting or a ½
Swagelok® compression/tube adapter.
WARNING:
For applications where the temperature set point of the unit is less than the dew point of the
environment, CDA (Clean Dry Air) must be used to protect the unit from condensation. Be sure to
supply this port with the recommended CDA flow rate. CDA specifications are listed in a label on the
unit.
POU 3300/S 2400

Models S 1200, S 2400, S 4400, POU 3300, POU 3500
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POU 3500
When connecting the process supply and return lines, follow the following diagram. Recall that
the unit must be installed no more than 3.8m (12.5 ft) away from the temperature control
target.

Models S 1200, S 2400, S 4400, POU 3300, POU 3500
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We strongly advise the installation of thermal insulation for all process side hoses to minimize
thermal losses and to prevent the buildup of moisture due to condensation.
Caution – Working with Perfluorinated Fluids
Contain any spills and absorb with available inorganic material.
Perfluorinated fluids are not considered hazardous, but do have high global warming potential. Care should be
taken to minimize emissions.
Check with the manufacturer’s MSDS for the specific process loop cooling fluid used for more information

Models S 1200, S 2400, S 4400, POU 3300, POU 3500
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Facility Water Side
The facility water connections are ½” Swagelok® compression fittings, illustrated below. Be sure
to follow the directionality of the water flow for optimal performance.
Using a flow meter, verify that the unit is receiving the recommended flow rate for that
particular module.
Be sure that shutoff valves for the incoming facility water are located close to the location of
install for ease of access. These valves must be lockable in the “OFF” position for proper energy
isolation.
POU 3300/S 2400

Models S 1200, S 2400, S 4400, POU 3300, POU 3500
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POU 3500

Models S 1200, S 2400, S 4400, POU 3300, POU 3500
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2.6. Electrical Connections
Install the power supply/controller (PSC) in a 19-inch rack or other appropriate location. Orient
the PSC so that the front panel and electrical connections in the back are accessible. Note that
the standard PSC AC power cable is 3 m (10’ long).
Connect the DC power cable from the 7-pin connector on the module to the connector on the
PSC. This is labeled Power to Module.
Connect the signal cable from the module to the connector on the PSC. This is a 25-pin circular
connector, female end, connecting with the module and a 25-pin, D-subminiature connector
connecting to the PSC. This is labeled Signal to Module.
Connect the PSC's AC power cable to either tool or facility power via a receptacle fed from a
circuit breaker. (Note: A hardwired power connection is NOT recommended). The power cable is
supplied with a plug and the minimum service requirements can be found in the technical
specifications table. (Note: The Short Circuit Current Rating (SCCR) of the system is dependent
on the PSCX, not the Module. The PSCX’s SCCR is 5000A.)
Additional connections, such as the RS-485 to a Remote Communication Module and the EMO
circuitry, are described in detail in the respective manuals of those products.

Models S 1200, S 2400, S 4400, POU 3300, POU 3500
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2.7. Secondary Containment
As a precaution, it is recommended that the user of this equipment install a secondary
containment container for potential leaks. This container shall installed under the unit to catch
any leaks, be large enough to contain the volume of each particular unit – see table below.
These secondary containment devices should not interfere with access to the PCW or drain
fittings on the bottom of the unit and be designed for easy removal of the collected fluids.
Module
Minimum volume of
Secondary Containment (L)
S
1
2
00
1.10
S
2400
1.50
S
4
4
00
2.75
POU
3300
1.50
POU
3500
2.75
As a final precaution, these secondary storage containers must have fluid detection and alarm
capabilities in order to prevent continuous leaks. This sensor must be installed at the lowest
point of the storage container, and notify the end user in the case of activation.

Models S 1200, S 2400, S 4400, POU 3300, POU 3500
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3. Startup
After the unit has had both it’s fluid and electrical connections made, the unit must be filled
before operation. The 3300 and 2400 will require ~1.6L of perfluorinated fluid and the 3500 will
require ~3.0L, not including external plumbing, as well as a pressurized fill canister.
CAUTION:
Use only approved process fluids. Do not use water or a mixture of water and ethylene
glycol.
3.1. Fill Procedure
 Fill the canister with process fluid to the 2.0 liter mark. Do not top off. Leave room for air.
 Connect the quick disconnect fitting on the fill canister's tube to the mating quick
disconnect fill port on the top of the module.
 Pressurize the fill canister with its hand pump.

Models S 1200, S 2400, S 4400, POU 3300, POU 3500
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 Open both the Fill and Service valves on the top of the module by pushing in and turning
the valves counter-clockwise to the Open position.
 Press and hold the trigger lever on the canister to begin filling the reservoir.
Continue to pressurize the canister, pumping slowly.
 Be watchful for process fluid flowing into the overflow tank (~ 500ml after the LL1 LED
goes out @ 20 ºC). Continue to fill until the fluid in the overflow tank is about 1 inch from
its bottom. When no more air bubbles come out, release the trigger and stop pumping.
The reservoir is full.
 Close both the Fill and Service valves by turning them clockwise to the Closed
position. The module is now ready for system startup.
3.2. System Startup
The system startup procedure requires that all connections between the module and its PSC are
connected and powered on, and all fluid connections are secured. Due to the small size of the
unit’s tank, an additional fill procedure is needed to purge the entire process loop of air.
 Check that the EMO button (located on the right side of the controller front panel) is
protruding. If pressed in, twist clockwise to reset. (The EMO Disable key is used during
servicing only.)
 Turn on the PSC and verify that the PSC is displaying the temperature of fluid in the
module.
 Press the START/STOP button to start the system, noting that the green LED (System On)
on top of the unit should turn on. Depending on the amount of external plumbing, the
red LED (LL1) will turn on to indicate a low tank volume. The pump continues to run if
only LL1 is active.
 If the green system LED turns off, the fluid level is at LL2 and will shut down the system
(unless in CHX mode)
 Open the Fill valve, and, using the fill canister, add process fluid. The red LED goes out
when the reservoir is half filled. Continue to fill until the fluid flows into the overflow
tank. Continue filling until the fluid level in the overflow tank is 2 inches from the bottom.
 Close the fill valve and disconnect the fill canister. Empty the excess process fluid into an
authorized storage container. The system is now ready for temperature control
operation.

Models S 1200, S 2400, S 4400, POU 3300, POU 3500
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4. Operation
4.1. PSC Panel
The PSC front panel consists of 8 buttons, 5 main LED status lights, and one LED display.
START/STOP – Switches the module between IDLE mode and the ON state (ACTIVE mode). In the
ON state, the pump turns on, and the system either activates HEAT or COOL mode, depending
on the temperature set point and the process temperature.
REMOTE/LOCAL - Switches the system’s operation mode from tool controlled (REMOTE) to front
panel controlled (LOCAL).
CHANGE SETPOINT - Press this button to initiate a change in the process setpoint while in local
mode.
ALARM SILENCE - Press this button to mute any audible alarm, as well as clear an alarm once its
condition has been rectified.
YES, NO, BACK, ENTER - In addition to confirming or denying inquiries from the PSC, these
buttons also act as navigation keys for cycling through different menu options.
Further information on the PSC operation and functionality can be found in the PSC operation
manual.