Lintec MC-3300 Series User manual

LN0360E2103C0
Mass Flow Controller
Instruction Manual
MC-3300/3400L Series
Safety Precautions
Incorrect handling may cause death or injury
(1) Before connecting the fittings, check that no damage or defects are found on
the fittings. Make connections properly and make sure that a leak test is
conducted before actual operation to prevent fluid from leaking into the
atmosphere (Hereafter, the measured fluid is called “gas” or “fluid”).
(2) DO NOTapply any fluidscorrosive to materials exposedto gas. Corrosion may
cause fluid to leak into the atmosphere. Check the gas type to be used in advance.
(3) This device is not designed as an explosion proof structure. DO NOT use this
device in a place where explosion-proof structures are required. Doing so may
cause fire or explosion.
Incorrecthandlingmayleadtomedium orslightinjuryor may
causedamage to,orlossof,facilitiesorequipment
(1) Observe the precautions listed in the WARNING (above)
(2) Strictly observe the electrical specifications. Not doing so may cause fire,
damage to sensors or malfunction.
(3) This device is not designed to be waterproof. DO NOT locate this device
outdoors orin a place where it may be splashedwith water.Doing so maycause
fire, trouble, or malfunction of the device.
(4) DO NOT modify this device. It may cause fire or other problems.
(5) This device is not designed to handle hot swap. Please avoid attaching and
removing the power supply connector and interface connector with the power
switched on. Attachment and/or removal with the power on may result in
failure of the device.
(6) While a power supply is applied to MFC, ±15VDC must be applied
simultaneously. If only +15VDC or -15VDC is applied, electronic circuits will
become unstable and it may cause a malfunction of MFC.
(7) This device is a precious device, please handle it carefully. Dropping down or
handling it carelessly will cause damage. Please use assist instrument while
moving or setting the device.
(8) Regular maintenance is recommended for steady use of this device
(Recommended proofreading frequency is once a year).
1. Introduction
This manual explains basic operation of the MC-3300/3400L series (Hereafter, it is
called "MFC"). Please read through this manual and other separate volumes (Digital
Interface Manual, Special Function Manual, Command Chart) carefully to
familiarize yourself with the features of this device.
2. Summary
The MFC is high performance mass flow controller for gas using thermal flow
sensor and high response piezoelectric valve, excluding MC-3302L.
3. Features
The MFC is the following features.
(1) LINTEC’s proprietary ambient temperature compensation type flow sensor is carried.
· Low sensor temperature, long-time steady monitor, and few problems such
as degradation of gas to be monitored.
·The effect of ambient temperature is less because the sensor temperature is
kept at the ambient temperature.
·Steady temperature distribution of sensor and high-speed response.
(2)Digital computing system with microprocessor and high-resolution A/D, D/A
converter is carried
· High functionality
·By setting of device number (address), multiple devices can be controlled
through a single interface
· Many additional are provided as standard, e.g., totalizer function, zero adjust,
ramping function
(3) Universal digital Interface (RS-485)
(4) Small dead space structure using a diaphragm valve
(5) Superior corrosion resistant sealing materials make maintenance easy. Metal
seals (Au)
(6) Particle-free structure (MC-3400L)
(7) By using a metal case and various types of filters, steady operation can achieve
even in an environment of high-frequency noise and stationary magnetic field
(8) Based on RoHS
4. Structure
The MFC consists of sensors, bypass, valves, and a microcomputer for signal
processing. A digital PID feedback control system controls the valve action so that
flow rate output from the sensor agrees with flow rate setting value.
5. Specification / Dimensions
(1) Specification
·Connect the MFC to the frame ground.
(2) Dimensions
6. Ordering information
MC-3302L –NC –6JR3 AA0A0 –dd –ee –ff
[1] [2] [3] [4] [5] [6] [7]
[1] Series model
MC: Mass Flow Controller Series
MC-3302L, MC-3452L, MC-3462L, MC-3472L
[2] Valve mode
NC, RC: Normally closed (No treatment), MC: Normally closed (LEP)
[3] Fitting
6JR3: 9.52UJR163, 4JR4: 6.35UJR156, 6SW3: 9.52SWL162
※ Please consult for more information.
[4] Optional
If no option is specified, it is “AA0A0”
※Default setting is labeled “AA0A0”. Please consult for more information.
[5] Gas type
[6] Full scale flow rate
[7] Flow rate unit SLM (0 ºC standard)
Name
Mass Flow Controller
Model
MC-3302L
MC-3452L
MC-3462L
MC-3472L
Standard flow rate
in nitrogen (Full scale)
100SLM
150SLM
50 SLM
100 SLM
150 SLM
200 SLM
Valve operation mode
Normally closed valve
Internal surface treatment
No treatment/ Precision polishing (LEP)
Minimum controllable flow rate
2%F.S.
Analog flow rate setting signal
Proportional to flow rate 0 to 5VDC
Analog flow rate output signal
Proportional to flow rate 0 to 5VDC
Accuracy
±2.0%F.S.
100%F.S. to 35%F.S.
±1.0%S.P.
35%F.S. to 2%F.S.
±0.35%F.S.
±1.0%F.S.
Repeatability
±0.5%F.S.
Response time
1second
(Typical)
1.5 seconds
(Total flow control range)
1second (Typical)
1second
(Typical)
Operating differential
pressure
250 to 500kPa
150 to 500kPa
250 to 500kPa
350 to 500kPa
Maximum operating pressure
500kPa(G)
Withstanding pressure
1MPa(G)
Operating temperature
& Humidity
5 to 50℃·0 to 80%RH
(Condensation should be avoided)
Temperature
coefficient
(Standard Temp.25℃)
Zero
±0.1%F.S./℃
Span
Storage temperature
& Humidity
0 to 60℃·0 to 80%RH
(Condensation should be avoided)
Leak integrity
Less than 1.0×10-11Pa·m3/sec (He)
(RC: Less than 1.0×10-8Pa·m3/sec (He))
Mounting direction
Free
Materials exposed to gas
Stainless steel 304, Stainless steel 316L, Teflon, Viton, Au
Seal materials
NC, MC: Au RC: Au, Viton
Actuator
Solenoid
actuator
Piezoelectric actuator
Fittings
6.35UJR, 9.52UJR, 9.52SWL type
Power supply
+15VDC: 100mA
-15VDC: 200mA
+15VDC: 100mA
-15VDC: 50mA
Digital interface
RS-485 (2-wire)
Weight
Approx. 1.7kg
Approx. 1.4kg

7. Connection
(1) Analog interface connector
Mounted connector : D-Sub 9 pin(male)
Pair connector : D-Sub 9 pin(female) (Fixed size of screw : M3)
Pin No.
Single name
Function
1
Valve on-off input (Note1)
+15VDC: OPEN,-15VDC: CLOSE
2
Flow rate output signal 0 to 5VDC
Flow rate output voltage plus side 0 to 5VDC
3
Power supply input +15VDC±3%
Power supply (plus) 100mA
4
Power supply COMMON (Note2)
COMMON ±15VDC
5
Power supply input -15VDC±3%
Power supply (minus)
3300L: 200mA 3400L: 50mA
6
Flow rate setting signal 0 to 5VDC
(Note1)
Flow rate setting voltage plus side 0 to 5VDC
7
Flow rate output COMMON (Note2)
Flow rate output voltage COMMON
8
Flow rate setting COMMON (Note2)
Flow rate setting voltage COMMON
9
N.C.
N.C.
Note1) Input impedanceof flow ratesettingsignal is 100kΩ. Valve override impedance is 100kΩ.
Note2) Pin No.4,7,8 are connected internally.
Wirings should be done as shown below in order to remove the effect of potential difference
among the COMMON.
Do not connect. Flow rate setting signal COMMON[8], Flow rate output signal COMMON[7],
and Power supply COMMON[4] in the power supply unit.
(2) Digital interface connector
Mounted connector : RJ-45 Modular jack
Pair connector : RJ-45 Modular plug
Pin No.
Signal name
Function
1
Signal COMMON
RS-485 Signal COMMON
2
Signal COMMON
RS-485 Signal COMMON
3
N.C.
N.C.
4
Signal [- Txd / Rxd ]
RS-485 2-wire system transmitter. receiver minus signal
5
Signal [+ Txd / Rxd ]
RS-485 2-wire system transmitter. receiver plus signal
6
N.C.
N.C.
7
N.C.
N.C.
8
N.C.
N.C.
8. Alarm functions
This MFC featurestwo alarm modes: alarmA and alarmB. Using a digital interface,
alarm output of the digital connector or LED indicator located on top of the MFC
housing can monitor the alarm status. As alarm settings can only be changed using
digital communication, please carry out necessary changes using this method. For
details, please refer to the Interface Instruction Manual.
Alarm
Set off
LED indicator
A
Setting value≠ flow rate output
Continuous Red
Flow totalizer Alarm level 2
Power supply voltage (+15VDC) drop
Off
B
Voltage of valve control change
Red (every 0.5sec flashing)
Abnormal zero offset (Note3)
Flow totalizer Alarm level 1
Other
Command error
Continuous Red (every 0.5sec flashing)
Normal
-
Green (every 1sec flashing)
9. Software switch (factory shipped value)
This MFC is provided with a software switch for operation mode setting. Before
operation, input the necessary data for various functions by using the digital
interface. Details of the functions are described in the special function manual.
Software switch
Available values
Function
Default
Device number
00 to 99
MFC No. Registration
00
Alarm A range
0 to 99 [%]
Setting Alarm A range
5%
Alarm B range
0 to 99 [%]
Setting of Alarm B range
20%
Alarm timer
0 to 99 [seconds]
Setting of Alarm timer
5 seconds
Alarm A output
Enable / Disable
Setting of Alarm A output
Enable
Alarm B output
Enable / Disable
Setting of Alarm B output
Disable
(Note3)
Operation mode
Analog / Digital
Switching of Analog/digital
Analog
Power on mode
Analog / Preset
Switching of Operation mode
in power turning on
Analog
Valve control
C / O / H / S
Close / Open / Hold / Servo
Servo
Control speed
FAST / SLOW
Switching of Response speed
FAST
Control mode
2%Close/2%Hold/ Normal
Control mode switching
(at flow rate setting <2%)
2%Close: Valve Close
2%Hold: 2% Control
Normal: Normal Control
Normal
Conversion factor
0.6666 to 1.500
Conversion factor setting
1.0000
Communication
protocol
9600 to 38400bps
8bit / 7bit
Odd/Even/ None
1bit / 2bit
Baud rate
Character length
Parity
Stop bit
9600bps
7bit
None
2bit
Note3) Zero adjustment error alarms regardless of the “Enable”/ “Disable”of the alarm.
· If a zero set input of longer than 5seconds is input the Baud rate will be set to 9600bps and other
communication protocols will be returned to initial value (factory shipped value).
10. Operation
(1) Procedure
1) This product is packed in a clean room before shipment. Please break the
seals in a clean room after taking it out of its box.
2) Check the gas type and flow rate, and check the direction of the gas flow and
the MFC before installation.
3) Check for gas leaks from the tubing with a helium (He) leak detector.
4) Connect the interface connectors according to the Connector tale.
5) Power requirements are +15VDC: 100mA and -15VDC: 50mA(3300L: 200mA).
Check the voltage, polarity, and capacitance of power supply voltage.
6) Turn on power supply and let the equipment warm up for at least 5 minutes
(Recommended time: 30min).
7) Adjust the zero point by pressing the zero adjustment, switch located on the
top of the MFC. Before zero-point adjustment, check that gas is not being
supplied and the device was warmed up for 30 minutes or more in order to
ensure sensor stability.
8) Input the flow rate setting signal and supply gas with required differential
pressure to the MFC. The MFC will begin to control the gas flow in
proportion to thepreset voltage. Full-scale voltage is 5VDC. Maximum input
voltage is ±15.5VDC.
9) When the output flow rate signal is used, the tolerance voltage of the external
device shouldbe more than ±15.5VDC. When it’s connected the output valve
may be within the range of the maximum voltage ±15.5VDC.
10)Complete shut off cannot be achieved with the mass flow controller. If
complete shut off is desired, a shut-off valve should be installed.
11)When a highly reactive gas is used, thoroughly purge all foreign matter from
the tubing and the MFC before operation.
12)When contaminated gas is used, install a filter at the equipment inlet.
13)Use the MFC within the range of the operating temperature (5 to 50°C), and
keep it at the same temperature with the gas. If used in any environment that
does not meet the above-mentioned requirements, the flow rate cannot be
measured accurately and the device may fail.
14)Do not switch thepowersupplyon andoff within one second. It may cause failure.
(2) Valve control signal
The MC features a forced valve open/close input function.
The connector pin No.1 is used to input the internal valve open/close signal.
By inputting this signal, a forced opening/closing of the internal valve can be
performed without depending on the value of the flow rate preset signal.
When +15VDC is input: fully open
When –15VDC is input: fully closed.
(3) Conversion factor
The MFC is presetbased on the kind of gas and the flowrate. If a gas that isnot
specified is supplied, the controlled flow ratemay be different fromthe actual flow rate.
This difference is called a conversion factor, and is normally represented by aratio
with N2. When gas B is fed into the MFC, which was calibrated with gas A, the
controlled flow rate is shown below.
The accuracy of this value may be decreased if the character of the gas is greatly
different. Also, the value of the MFC has been adjusted based on the viscosity
and density of the gas, therefore if a gas other than the calibration gas is applied,
the operating pressure range may be altered. The conversion factor can be set at
any desired value, with an operating range of 0.6666 to 1.5000. If the
conversion factor value exceeds this range, the operation of the MFC become
unstable. The accuracy is different from the standard specifications of the MFC,
when the conversion factor is changed.

(4) Digital interface
The MFC features the RS-485 serial digital interfaces. Many special functions
can be employed using the digital interfaces. Please refer to other manuals
(Digital Interface Manual, Special Function Manual, Command Chart).
11. Product warranty
(1) Period
This product is guaranteed for a period of 1 year from date of shipment. Defects
are repaired according to the following regulations.
(2) Scope
Warranty coverage is restricted to this product only. Any other damage caused
by this product is not covered.
(3) The following repairs are not covered by the warranty:
1) Failure caused by by-product of fluid used
2) Failurecausedby misuse (includingcarelessoperation)orincorrect repairormodification
3) Failure caused by dropping after purchasing
4) Failure caused by a natural disasters
Even if the warranty period is still in effect, the following items may not berepaired.
1) When the kind of liquid or gas used in the product is unclear
2) The product is returned with liquid or gas remaining inside and
safety cannot be confirmed.
The MFC is a precision instrument. Control may become unstable if electric
noise, temperature change of fluid, pulsation of fluid pressure etc. occurs. Please
be forewarned.
This instruction manual is subject to revision without notice.
http://www.lintec-mfc.co.jp
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