Lintec MC-7000D Series User manual

LN0575E2202A1
High Response
Mass Flow Controller for DeviceNet™
Instruction Manual
MC-7000D Series
Safety Precautions
Incorrect handling may cause death or injury
(1) Before connecting the fittings, check that no damage or defects are found on
the fittings. Make connections properly and make sure that a leak test is
conducted before actual operation to prevent fluid from leaking into the
atmosphere (Hereinafter, the fluid used is referred as “gas” or “fluid”).
(2) DO NOT apply any corrosive fluid tomaterials exposed to gas. Corrosion may
cause gas to leakinto the atmosphere. Checkthegas type to be used in advance.
(3) Thisdeviceisnotdesignedasan explosionproofstructure.DONOTusethisdeviceina
placewhereexplosion-proofstructuresarerequired.Doingsomaycausefireorexplosion.
Incorrecthandlingmay leadtomediumorslightinjury or may
causedamageto,orlossof,facilitiesorequipment
(1) Observe the precautions listed in the WARNING (above).
(2) Strictly observe the electrical specifications. Not doing so may cause fire,
damage to sensors or malfunction.
(3) This device is not designed to be waterproof. DO NOT locate this device
outdoors or in a place where it may besplashed with water. Doing so may cause
fire, trouble, or malfunction of the device.
(4) DO NOT modify this device. It may cause fire or other problems.
(5) This device is notdesigned to handle hot swap. Please avoid attaching and removingthe
powersupplyconnectorandinterfaceconnectorwiththe powerswitchedon. Attachment
and/orremovalwiththepoweronmayresultinfailureofthedevice.
(6) This device is a precious device, please handle it carefully. Dropping down or
handling it carelessly will cause damage. Please use assist instrument while moving
or setting the device.
(7) Regular maintenance is recommended for steady use of this device
(Recommended proofreading frequency is once a year).
1. Introduction
This manual explains basic operation of the MC-7000D series (Hereinafter referred
as "MFC"). MFC is equipped with a network interface, and can be operated by
connecting to a network environment of DeviceNet ™.
Since MFC is a slave device, please prepare a master device of DeviceNet ™
network interface.
The device profile follows the MFC profile in ODVA specification.
Please go through the ODVA specification and MC-7000D device profile manual
for proper use.
2. Summary
The MFC is high performance mass flow controller for gas using high response
thermal flow sensor and high response piezoelectric valve. Valve operation mode
is normally closed type. Also, MFC interface employs Device Net™ network, so
MFC is compatible with other makers.
3. Features
The MFC is the following features.
(1) LINTEC’s proprietary ambient temperature compensation type flow sensor is carried.
· Low sensor temperature, long-time steady monitor, and few problems such
as degradation of gas to be monitored.
·The effect of ambient temperature is less because the sensor temperature is
kept at the ambient temperature.
·Steady temperature distribution of sensor and high-speed response.
(2) Digital computing system with microprocessor and high-resolution A/D, D/A
converter is carried.
· High functionality.
·By setting of device number (address), multiple devices can be controlled
through a single interface.
· Many additional are provided as standard, e.g., totalizer function, zero adjust,
ramping function.
(3) MFC employs DeviceNet™ network protocol.
(4) Small dead space structure using a diaphragm valve.
(5) Single power supply 24VDC (Recommended).
(6) Superiorcorrosion resistant sealing materials make maintenance easy. Metal seals (Au).
(7) Particle-free structure.
(8) By using a metal case and various types of filters, steady operation can achieve
even in an environment of high-frequency noise and stationary magnetic field.
(9) Based on RoHS.
4. Structure
The MFC consists of sensors, valves, and a microcomputer for signal processing.
A digital PID feedback control system controls the valve action so that flow rate
output from the sensor agrees with flow rate setting value.
5. Specification / Dimensions
(1) Specification
Name
Mass Flow Controller
Model
MC-7100D
MC-7200D
Flow rate range
(N2 conversion)
10 SCCM ~5 SLM
~20SLM
Valve operation mode
Normally closed
Internal surface treatment
Precision polishing (LEP)
Minimum controllable flow rate
2%F.S.
Accuracy
100%F.S. to 25%F.S. ±1.0%S.P.
25%F.S. to 2%F.S. ±0.25%F.S.
Repeatability
±0.2%F.S.
Response time
0.2 second (Typical)
Operating differential
pressure
50 to 300kPa
100 to 300kPa (~10SLM)
200 to 300kPa (~20SLM)
Maximumoperating pressure
300kPa(G)
Withstanding pressure
1MPa(G)
Operating temperature &
Humidity
5 to 50ºC·0 to 80%RH (Condensation should be avoided)
Storage temperature &
Humidity
0 to 60ºC·0 to 80%RH (Condensation should be avoided)
Leak integrity
Less than 1×10-11Pa · m3/sec (He)
Mounting direction
Free
Wetted materials
Stainless steel 316L, PCTFE, PTFE, Au
Seal Materials
Au
Actuator
Piezoelectric actuator
Fittings
6.35VCR (106mm, 124mm)
1.125 W-Seal (79.8mm), 1.125 W-Seal (92mm)
Power supply
24VDC (Recommended) (Note1)
Digital interface
DeviceNet™
Weight
Approx. 1kg
Note1) Using 24VDC power supply for high response.
· Connect the MFC to the frame ground.
(2) Dimensions
MC-7100D, MC-7200D (6.35VCR, 106mm)
MC-7100D, MC-7200D (1.125W-Seal, 79.8mm)
28.6
2×M4 Depth 5mm
1
71
14.8
17.9
14.3
DeviceNet
Connector
101.6
113
79.8±0.3
18.5
38
25.4
STATUS
ZERO ADJ. NET MOD
RATEMSD LSD
28.6
6.9
4ｘφ4.4
21.8±0.2
INLET
OUTLET
24.4
Ｓ/Ｎ ********* GAS ***SLM
126
112
18.5
38
Ｓ/Ｎ ********* GAS ***SLM
28.6
2×M4 Depth 5mm
71
14.8
17.9
14.3
DeviceNet
Connector
28.6
6.9
12.7
STATUS
ZERO ADJ. NET MOD
RATEMSD LSD
77.4
106±0.5

6. Ordering information
MC-710*D –MC –4VR1 JA0A0 –dd –ee –ff
[1] [2] [3] [4] [5] [6] [7]
[1] Series model MC: Mass Flow Controller Series
MC-7100D, MC-7200D
*Power connector orientation 0: Side direction, 1: Upper direction
[2] Valve mode
MC: Normally close (Precision polishing)
[3] Fitting size
4VR1:6.35VCR106, 4VR2:6.35VCR124, 4SWL:6.35SWL
SPW3: Surface mount 1.1.25W-Seal 92mm, SPW4: Surface mount 1.125W-Seal 79.8mm
※ Please consult for more information.
[4] Optional
J: Valve is closed at below 2% setting (Required option)
※ Default setting is labeled “JA0A0”. Please consult for more information.
[5] Gas type
[6] Full scale flow rate
[7] Flow rate unit
SCCM (0 ºC standard), SLM (0 ºC standard)
7. Connection
(1) DeviceNet™ connector: 5 Pin type micro connector (IEC60947-5-2)
Pin No.
Signal name
Function
1
Drain
Shield
2
V+
Power supply 11 to 25VDC (+)
3
V-
Power supply (-)
4
CAN_H
CAN interface HI
5
CAN_L
CAN interface LO
(2) Rotary switch, LED (on top of the MFC)
8. Operation
Procedure
(1) This product is packed in a clean room before shipment. Please break the
seals in a clean room after taking it out of its box.
(2) Check the gas type and flow rate, and check the direction of the gas flow and
the MFC before installation.
(3) Check for gas leaks from the tubing with a helium (He) leak detector.
(4) Prepare a master for DeviceNet™ and connect with specified power, cable
and connector.
(5) Connect with the network.
(6) Turn on power supply and let the equipment warm up for at least 5 minutes
(Recommended time: 30min).
(7) Please power on the MFC for 30 mins, then conduct zero-point adjustment
without gas flowing by pressing the button on the top of device or software.
(8) Within the specific pressure range, MFC will start to control the flow rate
after input the setting.
(9) Complete shut off cannot be achieved with the mass flow controller. If
complete shut off is desired, a shut-off valve should be installed.
(10)When a highly reactive gas is used, thoroughly purge all foreign matter from
the tubing and the MFC before operation.
(11)When contaminated gas is used, install a filter at the equipment inlet.
9. Product warranty
(1) Period
This product is guaranteed for a period of 1 year from date of shipment. Defects
are repaired according to the following regulations.
(2) Scope
Warranty coverage is restricted to this product only. Any other damage caused
by this product is not covered.
(3) Disclaimer facts
The following repairs are not covered by the warranty:
1) Failure caused by by-product of fluid used.
2) Failure caused by misuse (including careless operation) or incorrect repair or
modification.
3) Failure caused by dropping after purchasing.
4) Failure caused by a natural disaster.
Even if the warranty period is still in effect, thefollowing itemsmay not be repaired.
1) When the kind of fluid used in the product is unclear.
2) The product is returned with fluid remaining inside and safety cannot be
confirmed.
The MFC is a precision instrument. Control may become unstable if electric
noise, temperature change of fluid, pulsation of fluid pressure etc. occurs.
Please be forewarned.
This instruction manual is subject to revision without notice.
http://www.lintec-mfc.co.jp
CorporateHeadquarters
4-1-23Sekinotsu, OtsuCity,ShigaPref.520-2277,Japan
TEL. [phone]FAX.[phone]
TokyoBranchOffice
3FHattoriBuild.,4-30-14YotsuyaShinjyuku-kuTokyo160-0004,Japan
TEL. [phone]FAX.[phone]
NET
Network Status
Network Status LED
MOD
Module Status
Module Status LED
ZERO ADJ.
Zero Adjustment
Zero Adjustment button
Display
Name
Description
Default
MSD
LSD
Node Address
Decimal setting:
MSD: a digit in tens place
LSD: a digit in ones place
The setting number above 64 will be Software
Set Mode.
63
RATE
Data Rate
Baud rate switch
1: 125 kbps
2: 250 kbps
5: 500 kbps
Otherwise: Software set mode
5