Lintec HX-0100C Series User manual

LN0573E2111A0
Heat Exchanger
Instruction Manual
HX-0100C, HX-0300C Series
Safety precautions
Incorrect handling may cause death or injury.
(1) Before connecting with thefittings, check if no damage or problems are found on
the fittings. Connect properly and make sure that leak test is conducted before
actual operation to prevent fluid from leaking into the atmosphere (Hereinafter,
the fluid used is referred as "gas" or "fluid").
(2) DO NOT apply any fluids corrosive to materials exposed to gas. Corrosion
may cause fluid to leak into the atmosphere. Please confirm the physical
properties of fluid before using.
(3) Thisdeviceisnotdesigned asanexplosion-proofstructure.
DO NOTuse this device inaplace where explosion-proof structure are required.
Doingso may cause fire or explosion.
(4) Prepare temperature controller unit when operating Vaporizer/Heat
Exchanger and do not set the temperature over than maximum operating
temperature. Wring temperature setting may cause fire or destruction of the
device. It is recommended to add abnormal overheating detector if
necessary.
(5) This device must be earthed before use. Otherwise, there is the risk of
electric shock.
(6) Thermal switch is equipped in Vaporizer/Heat Exchanger to prevent
overheating. However, the operating temperature of thermal switch would
vary due to operating conditions and ambient temperature.
(7) Attach/remove connector and terminals, please make sure that power supply
turning off. It may cause fire or shock hazard.
Incorrecthandlingcancausemediumor slightinjuryor
maycause damage to,orlossof, facilitiesorequipment.
(1) Observe the listed in the WARNING (above).
(2) Use out-of-spec power supply will cause electric shock, fire, and
malfunction of device.
(3) This device is not designed to be waterproof. DO NOT locate this device
outdoors or in a place where it may be splashed with water. Doing so may
cause fire, trouble, or malfunction of the device.
(4) DO NOT modify this device. Modification may result in fire or failure of
the device.
(5) A warm-up period of 60 minutes is recommended after reaching the set
temperature. Otherwise, the output gas temperature will be low.
(6) This device is a precious device, please handle it carefully. Dropping down
or handing it carelessly will cause damage. Please use assist instrument
while moving or setting the device.
(7) The surface of device gets high temperature while heating up. Please wrap
up the device to prevent careless touch. Please be careful to deal with the
device while it is working because of the risk of burning from high
temperature. Please conduct replacement after checking that the device has
cooled down.
1. Introduction
This manual explains basic operation of the HX-0100C, HX-0300C Series
(Hereinafter referred as "HX"). Please read through this manual carefully to
familiarize yourself with the features of HX.
.
2. Summary
HX is an ultra-clean high efficiency fluid heat exchanger unit employing Lintec’s
high efficiency liquid vaporization technology with maximum operating
temperature up to HX-0100C:300°C, HX-0300C:250°C and maximum heat
exchange rate up to HX-0100C:N2 100SLM, HX-0300C:N2 300SLM. This
apparatus is employed over a wide range of applications from semiconductor
industries to other major manufacturing sectors.
3. Features
RoHS compliant.
4. Specification/ Dimensions
(1) Specification
Product name
Heat Exchanger
Model
HX-0100C
HX-0300C
Flow rate (N2)
100SLM
300SLM
Pressure loss(N2)
9.8kPa(100SLM)
30kPa(300SLM)
Withstand pressure
(Gauge pressure)
1 MPa(G)
Leak integrity
Less than 1×10-11Pa·m3/sec (He)
Operating condition
Continuous operation
Operating temperature
15 to 50ºC (Without dew condensation)
Maximum
operating temperature
300 ºC Max
250 ºC Max
Recommended
temperature control
method
PID control
Material exposed to gas
Stainless steel 316L
Fitting
Inlet: 12.7mm (1/2”) VCR male
Outlet: 12.7mm (1/2”) VCR female
Heater
D05
Outer block:
120V 400W
Inner block:
120V 300W
D06
Outer block:
240V 1200W
Inner block:
240V 900W
D06
Outer block:
240V 500W
Inner block:
240V 375W
Power source
D05
AC100 to 120V
D06
AC200 to 240V
D06
AC200 to 240V
Thermocouple
K type 2pcs
Thermalswitch
Specification(Note1)
350 ºC ± 9ºC OPEN
Mounting position
Free
Weight
Approx.5.5kg
Standard accessories
Heater/Thermal switch connector: SRCN6A16-7S (JAE)
Thermocouple connector: CMP01-K (RKC)
Note1) In actual operation, there may be a difference between the temperature at the
temperature control point and the temperature at which the thermal switch operates.
(2) Dimensions

5. Ordering Information
HX-0100C - 88 VR1 N D05 T35 NNN
[1] [2] [3] [4] [5] [6] [7]
[1] HX: Heat Exchanger Series
0100C: 100SLM, 0300C: 300SLM
[2] Fitting size
88: IN 12.7mm, OUT 12.7mm
[3] Fitting type
VR1: VCR [IN male, OUT female]
[4] Internal treatment
N: No polishing
[5] Heater type
HX-0100C (Selectable)
D05: AC120V 700W, D06: AC240V 875W
HX-0300C
D06: AC240V 2100W
[6] Thermal switch
T35: 350 ºC ± 9ºC
[7] Option
NNN: Standard specification
6. Connection
(1) Heater/ Thermal switch Connectors
Equipped Connector : SRCN6A16-7P (JAE)
Applicable Connector (plug) : SRCN6A16-7S (JAE)
Pin No.
Signal name
1
Inner block Heater
2
3
Outer block Heater
4
5
Case Gnd.
6
Thermalswitch
7
(2) Inner block Connectors
Equipped Connector : CMP03-K (RKC Instrument Inc.)
Applicable Connector : CMP01-K (RKC Instrument Inc.)
Pin No.
Signal name
K
K Type Thermocouple (-)
+
K Type Thermocouple (+)
(3) Outer block Connectors
Equipped Connector : CMP03-K (RKC Instrument Inc.)
Applicable Connector : CMP01-K (RKC Instrument Inc.)
Pin No.
Signal name
K
K Type Thermocouple (-)
+
K Type Thermocouple (+)
7. Preparation and Operational Procedure
(1) Please prepare two temperature control units. There are two points which
require temperature control.
[HX-0100C]
D05:120V Outer block 400W, Inner block 300W
D06:240V Outer block 500W, Inner block 375W
[HX-0300C]
D06:240V Outer block 1200W, Inner block 900W
Please take care with respect to the heater capacities. In addition,
temperature control unit with built-in safety mechanisms is recommended
for temperature control point. As the built-in thermocouple is K type, please
select unit which is compatible with this type of thermocouple.
(2) Please be sure to use safety devices such as circuit breakers to prevent surge
currents and short circuits.
(3) Please be careful to attach this device in the direction of the gas flow. In
order to prevent a decrease in the gas temperature after heat exchange has
taken place, please heat the piping between the gas outlet and the next piece
of machinery.
(4) Please carry out connections according to the connector table. This device
has a built-in 350 ºC thermal switch.
(5) The heater can be affected by humidity during storage. Ensure that
insulation resistance is above 20M ohm. If the insulation resistance drops
below 20M ohm, dry the HX and ensure that insulation resistance is above
20M ohm.
(6) Supply power, set the temperature to the desired value using the
temperature control units and allow 60 minutes for the device to stabilize
after the set temperature has been reached. Even though the temperature
control unit display temperature may be stable the temperature of the body
of the device is not. In order to achieve good heat exchange efficiency
please allow this device to stabilize before use.
(7) Estimated gas temperatures can be found from the graphs in the upper right.
However, this data is for nitrogen gas and should not be applied as is to
gases other than nitrogen. Please use this data only as a guide.
·Gas: N2
·Operating temperature: 20ºC
8. Product Warranty
(1) Period
This product is guaranteed for 1 year from the date of shipment.
Defects are repaired according to the following regulations.
(2) Scope
Warranty coverage is restricted to this product only. Any other damage caused
by this product is not covered.
(3) Disclaimer facts
The following repairs are not covered by the warranty:
1) Failure caused by product of gas or liquid used.
2) Failurecausedbymisuse(includingcarelessoperation),incorrectrepairormodification.
3) Failure cause by falling or dropping after purchase.
4) Failure causedby fire, earthquake, flood, lightning, or othernatural disasters.
Even if the warranty period is still in effect, repair service may not be provided
in the following cases.
1) When the kind of fluid used in the product is unclear.
2) Theproductisreturned with fluid remaining inside, andsafety cannot beconfirmed.
This instruction manual is subject to revision without notice.
http://www.lintec-mfc.co.jp
CorporateHeadquarters
4-1-23Sekinotsu,OtsuCity, ShigaPref.520-2277,Japan
TEL. [phone]FAX.[phone]
TokyoBranchOffice
3FHattoriBuild.,4-30-14Yotsuya Shinjyuku-kuTokyo160-0004,Japan
TEL. [phone]FAX.[phone]
ｶﾞｽ加熱器HX-101温度特性
Temperature characteristics of HX101
50
70
90
110
130
150
170
190
210
230
250
270
290
50 100 150 200 250 300 350
設定温度(Set temperature) ℃
出口ｶﾞｽ温度(Gas temperature at exit)
℃
10slm 20slm 30slm 40slm 50slm
60slm 70slm 80slm 90slm 100slm
ガス加熱器 HX-0100C 温度特性
Temperature characteristics of HX-0100C
ガス加熱器ＨＸ－１０１温度特性
Temperature characteristics of HX-101-L300
50
100
150
200
250
300
50 100 150 200 250 300
設定温度 ℃
Set temperature
出口ガス温度 ℃
Temperature at exit
10slm 20slm 50slm 100slm
200slm 300slm
ガス加熱器 HX-0300C 温度特性
Temperature characteristics of HX-0300C