Micronix ES-50 Series User manual

S e r i e s
Reference Manual
Elevation Stage
(Open and Closed Loop Versions)
ES-50
USA

ES-50
Elevation Stage
Reference Manual
Rev 3.05
MICRONIX USA, LLC
Tel: [phone]
Fax: [phone]
Email: [email protected]
http://micronixusa.com

ES-50 Elevation Stage
Rev: 3.05
1
Reference Manual
MICRONIX USA,LLC
www.micronixusa.com
Contents
1. Introduction 3
1.1 Product Description 3
1.2 Recommended Controllers 4
1.3 Technical Data 4
1.4 Load Characteristics 4
2. Model Configurations 5
2.1 ES-50 Order Numbers 5
3. Preparing to Install the ES-50 6
3.1 Installation Preparation 6
3.2 Package Contents 6
4. Installing the ES-50 7
4.1 ES-50 10mm Installation 7
4.1.1 Base Mounting 7
5. Connecting the ES-50 8
5.1 Atmospheric Environments 8
5.1.1 Open Loop Installation 8
5.1.2 Closed Loop Installation & Wiring Diagram 8
5.2 Vacuum Environments 9
5.2.1 Handling and Preparation 9
5.2.2 Open loop Installation & Wiring Diagram 9
5.2.3 Closed Loop/Encoder Installation & Wiring Diagram 10
5.3 Using the Encoder Module 11
5.3.1 Encoder Module Overview 11
5.3.2 Encoder Module Pinout 11
5.3.3 Operating and Electrical Specifications 12
5.3.4 Output Signals 12
6. General Technical Specifications 13
6.1 Electrical Connections 13
6.1.1 Motor Pinout & Cable 13
6.1.2 Encoder Pinout 13
6.1.3 Stepper Motor 13
6.2 Limit Switches 14
6.2.1 Mechanical Limit Switches 14
6.2.2 Limit Switch Schematic 14
6.2.3 Direction of Motion 14

ES-50 Elevation Stage
Rev: 3.05
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Reference Manual
MICRONIX USA,LLC
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6.3 Dimensions 15
6.3.1 ES-50 10mm 15
7. Stacking Configurations 16
7.1 Possible Configurations 16
8. Supplementary Information 17
8.1 Maintenance 17
8.2 Units and Conventions 17

ES-50 Elevation Stage
Rev: 3.05
3
Reference Manual
MICRONIX USA,LLC
www.micronixusa.com
1. Introduction
1.1 Product Description
The ES-50 is a compact elevation stage designed for limited space applications.
The ES-50 stage is driven by 2-phase stepper motor and is equipped with two
mechanical switches. Two steel pre-loaded ball bearings allow for loads up to 1
kg while providing high stiffness and smooth travel up to 10 mm. The ES-50 allows
for a highly rigid XZ or XYZ setup without the need for adapter brackets when
combined with the VT-50 series of linear stages. Versions capable of operation in
vacuum (10-6 mbar) are available. An optional linear encoder provides the user
with sub-micron repeatability.
Features:
▪Travel range of 10 mm
▪Load capacity up to 1 kg
▪Integrated mechanical limit switches
▪Optional linear encoder with 50 nm resolution
ES-50 Open Loop Version
(Shown at minimum travel)
ES-50 Closed Loop/Encoder Version
(Shown at maximum travel)
Payload Mounting
Surface
Side Cover
Base Plate
Encoder Head
Encoder Scale

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1.2 Recommended Controllers
The following controllers are available from MICRONIX USA:
▪MMC-200
1.3 Technical Data
Motor
SM-001
Pitch (μrad)
±300
Speed Max. (mm/sec)
5
Resolution Typical (μm)
0.5 (Open Loop); 0.05 (Closed Loop);
0.5 (Low Cost Closed Loop)
Bi-directional Repeatability (μm)
± 2 (Open Loop); ± 0.2 (Closed Loop);
±1 (Low Cost Closed Loop)
Uni-directional Repeatability (μm)
0.5 (Open Loop); 0.2 (Closed Loop); 1
(Low Cost Closed Loop)
1.4 Load Characteristics
Load
Characteristics
Fx(N)
Fy(N)
Fz(N)
Mx(Nm)
My(Nm)
Mz(Nm)
kαx
[μrad/Nm]
kαx
[μrad/Nm]
2 Phase-018
5
5
10
1
1
1
-
-

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2. Model Configurations
2.1 ES-50 Order Numbers
* Other resolutions available upon request.
Contact MICRONIX USA for custom versions and stacking configurations.
Order No. ES-50-
1
1
1
SM-001 1
10 mm 1
Open Loop 0
Analog(1Vpp), 50nm* 2
Digital(RS-422), 50nm* 3
Digital Low Cost(RS-422), 4
Mechanical Limits 1
Non-vacuum 0
Vacuum prepared, 10-6 mbar 6

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3. Preparing to Install the ES-50
3.1 Installation Preparation
When mounting the stage, it is important to consider the flatness of the mounting
surface, as the stage will conform to the shape of that mounting surface. A
surface that is not flat can adversely affect the performance and structural
integrity of the stage.
The stage is calibrated and guaranteed to be within specification at 20°C ±5°C.
Be sure to use the stage under the following conditions:
▪Mount to a clean and flat surface which is free of debris, burrs or dings
▪An indoor atmosphere free of corrosive gasses, and condensation
▪Temperature range of 0-40°C
▪Relative humidity between 20-80%
▪Locate away from water, heat, and electrical noise
3.2 Package Contents
If product is damaged or there are missing components, contact MICRONIX USA
immediately. Do not discard product packaging in case of return shipment.
Package Should Contain:
▪ES-50 Elevation Stage
▪15 to 9 pin Dsub Connector Cable (closed loop only)
▪Reference Manual
▪Any other previously agreed upon components such as a controller and
cable

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4. Installing the ES-50
4.1 ES-50 10mm Installation
4.1.1 Base Mounting
Base Mounting requires M3 socket head cap screws for mounting and
M1.5 x 5mm dowel pins for precision alignment. It may be necessary to
move the carriage via the controller in order to access the base mounting
holes. Additional brackets may be needed for custom applications.
Requires:
2x M1.5 x 5mm Dowel Pins
4x M3 x 10mm Socket Head Cap Screws
Customer supplied
mounting surface
Move Carriage via
controller to access
mounting holes

ES-50 Elevation Stage
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5. Connecting the ES-50
5.1 Atmospheric Environments
The ES-50 is black anodized for atmospheric environments. This allows for a harder
surface finish and greater durability over the life of the stage.
5.1.1 Open Loop Installation
Connecting the ES-50 in an open loop only requires that the motor cable be
connected to a compatible controller. No other cables or components are
needed.
5.1.2 Closed Loop Installation & Wiring Diagram
Using the ES-50 stage with an encoder requires a closed loop compatible
controller that recognizes encoder feedback. Connect the stage as shown
below using the supplied 15 to 9 pin cable to connect the Encoder Module to
the Controller.
Base Mounting Pattern

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5.2 Vacuum Environments
5.2.1 Handling and Preparation
The vacuum version of the ES-50 is non-anodized and prepared for use in
vacuum environments. Take the necessary precautions (such as wearing gloves,
clean room clothing, etc.) when handling the stage as to avoid any
contaminants. The connectors that ship with the stage are for testing use only
and should be replaced with permanent connectors prior to installation.
5.2.2 Open loop Installation & Wiring Diagram
Connecting the ES-50 in an open loop requires the use of a feed through
connector at the vacuum chamber wall. Match wire colors when passing the ES-
50 motor cable through the feed through connector.
Flying leads standard.
Requires customer supplied
feed through connector

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5.2.3 Closed Loop/Encoder Installation & Wiring Diagram
Closed loop installation of the ES-50 stage in vacuum environments requires an
intermediate feed through connector at the vacuum chamber wall that can
accommodate both the motor cable, and the encoder cable.
Important: Match wire colors when connecting the Encoder Head (vacuum
side) to the Encoder Module (atmospheric side). Also, connect the shield of the
Encoder Head to the shield of the Encoder Module through the feed through
connector.
Flying leads
standard. Requires
customer supplied
feed through
connector

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5.3 Using the Encoder Module
When connected in a closed loop, the Encoder Module should display two
green LED’s indicating a power source and proper encoder alignment. A Red or
Yellow LED indicates misalignment of the Encoder Head, if this occurs contact
MICRONIX USA. Do not manually adjust the Encoder Head or scale. For more
information refer to MicroE Systems Mercury Encoders.
5.3.1 Encoder Module Overview
5.3.2 Encoder Module Pinout
*Note: Proprietary pins reserved for manufacturer programming, not required to be connected to
controller.
Pin
Description
Pin
Description
1
Reserved
9
B-
2
Transmit*
10
B+
3
Receive*
11
Alarm*
4
A-
12
+5V
5
A+
13
Ground
6
Reserved
14
Index +
7
Reserved
15
Index -
8
Reserved
Power/Calibration
Indicator
Improper Alignment
LED (Red)
Improved Alignment
LED (Yellow)
Proper Alignment
LED (Green)
15 pin D-sub
Connector

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5.3.3 Operating and Electrical Specifications
5.3.4 Output Signals
*Note: The index pulse may be aligned with A- or B- at some interpolation values.
Power Supply
5VDC ±5% @ 330mA (30mA for sensor)
Operating Temperature
0 to 70°C
Humidity
10 - 90% RH non-condensing

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6. General Technical Specifications
6.1 Electrical Connections
6.1.1 Motor Pinout & Cable
Pin
Wire Color
Description
Non-Vacuum
Vacuum Prepared
1
Green/White
Green/White
Motor Phase A+
2
Green
Green
Motor Phase A-
3
Red/White
Red/White
Motor Phase B+
4
Red
Red
Motor Phase B-
5
Brown
Brown
Limit Switch Common
6
White
White
Limit Switch –(near base)
7
Purple
Purple
Limit Switch + (away from base)
8
Not used
Not Used
9
Not used
Not Used
For vacuum prepared wiring, blue may be substituted for green/white, and black for red/white.
Limit Switch Common (pin 5) is connected to ground in MICRONIX USA controllers
6.1.2 Encoder Pinout
6.1.3 Stepper Motor
Motor Type
2 Phase Bipolar
Phase Current
0.24 A max.
Step Angle
1.8 °
Steps
200
Coil-Resistance
20.4 Ohms
Coil-Inductance
5 mH
Pitch
0.5 mm/rev
Resolution/Full step
2.5 µm
Pin
Function
Analog
1
A+/Cos+
Brown
2
B+/Sin+
Yellow
3
Index+
Violet
4
GND
Black & Inside shield
5
+5V
Red
6
A-/Cos-
Orange
7
B-/Sin-
Green
8
Index-
Blue
9
N/A
N/A
Shield
GND
Outside Shield

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6.2 Limit Switches
The limit switches are normally closed (when not activated) and should be
connected to a compatible controller that recognizes these settings. Failure to
properly set up the limit switches in the controller will result in physical damage to
the switches themselves. A hard stop is designed into the ES-50 body which will
prevent the carriage from running away should the limit switches fail.
The limit switches are factory calibrated to ensure advertised travel length and
cannot be adjusted by the customer. For custom travel lengths, please contact
MICRONIX USA.
6.2.1 Mechanical Limit Switches
Contact Rating
100 mA @ 30 V
Contact Type
Normally Closed
Operating Temperature
-25 to +70 °C
6.2.2 Limit Switch Schematic
6.2.3 Direction of Motion
Limit Switch
Common
- Limit Switch
+ Limit Switch
+ Limit
- Limit
Positive Direction

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6.3 Dimensions
6.3.1 ES-50 10mm
ES-50 shown in retracted position
*Grey parts for closed loop
version only

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7. Stacking Configurations
7.1 Possible Configurations
Using the ES-50 Elevation Stage and VT-50 Linear Stage
X-Z 55x10 mm
X-Y-Z 55x55x10 mm
X-Y-Z 100x100x10 mm
Using the ES-50 Elevation Stage and VT-21 Linear Stage
Z-X-Y 10x10x10 mm
Z-X 10x10 mm
Z-X (side) 10x10 mm

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8. Supplementary Information
8.1 Maintenance
▪The ES-50 elevation stage is a delicate mechanical device and should be
handled with care. Do not drop or mishandle the stage.
▪Keep hands clear of all moving parts while the stage is in motion to avoid
personal injury.
▪Follow the Installation Preparation requirements and use proper cable
management to ensure a clean and safe operating environment.
▪Properly wire the feedback to the controller before powering on the stage.
Failure to do so can result in damage to the stage.
▪Allow for easy access to the stage in case of servicing.
8.2 Units and Conventions
All measurements in this document are in the metric system of units.
Metric Unit
English Unit
1 millimeter
0.0394 inches
1 micron
0.0000394 inches
1 Newton
0.2248 lbs.
1 Newton-meter
8.85 in-lbs.