MKS HPS 937A Series Installation guide

HPSTM Series937A
HighVacuum
Multi-Sensor System
OPERATION AND
MAINTENANCE MANUAL

August1998
Part # 100009273 Rev. 4.0
HPSTM Series 937 A
HighVacuum
Multi-Sensor System

Part # 937A- __ __ __ __ __ __ __ __ - __ __ __ __ __ __ - __ __ __
Serial # __ __ __ __ __ __
Please fill in these numbers and have them readily available when
calling for service or additional information.
(The part number can be found on your packing slip, and the serial
number is located on the rear of the housing.)
© 1998 by MKS Instruments, Inc.,Vacuum Products Group, All rights reserved.
ALCONOX is a registered trademark of Alconox, Inc.
Baratron is a registered trademark of MKS Instruments, Inc.
Elgiloy is a registered trademark of Elgiloy Co.
HPS and IgniTorr are trademarks and I-MAG is a registered trademark of MKS Instruments,Inc.,Vacuum Products Group
Inconel is a registered trademark of Inco Alloys International, Inc.
Scotch-Brite is a trademark of 3M.
Teflon andViton are a registered trademarks of DuPont Co.
VCR is a registered trademark of Cajon Co.
For more information or literature, contact:
MKS Instruments,Inc.,Vacuum Products Group
5330 Sterling Drive
Boulder,CO 80301 USA
Phone: [phone]
800-345-1967
FAX: [phone]

TABLE OF CONTENTS
TABLE OF CONTENTS
PACKAGE CONTENTS ...................................................................... 1
SAFETY INFORMATION...................................................................... 2
Symbols............................................................................................ 2
Symbols Used in this Manual (English).............................................................. 2
Symboles utilisés dans ce manuel (Français) .................................................. 2
In dieser Betriebsanleitung vorkommende Symbole (Deutsch) ....................... 3
Símbolos Usados en el Manual (Español) ......................................................... 3
SymbolDefinitions............................................................................ 4
Definition of Symbols Found on the Unit (English) ............................................ 4
Définition des symboles apparaissant sur l’appareil (Français) .................... 4
Definitionen der am Gerät angebrachten Symbole (Deutsch) ......................... 5
Símbolos que Aparecen en la Unidad (Español)............................................... 5
Safety Precautions ........................................................................... 6
Safety Procedures and Precautions (English) .................................................. 6
Sicherheitsvorschriften und Vorsichtsmaßnahmen (Deutsch)....................... 10
Procedimientos y Precauciones de Seguridad (Español) .............................. 12
SPECIFICATIONS*.......................................................................... 14
Controller .........................................................................................14
Sensors ...........................................................................................17
FEATURE AND CONTROL LOCATIONS................................................. 22
TYPICAL APPLICATIONS FOR THE SERIES 937A .................................. 24
HPS™ Products Series 937A Multi-Sensor High
Vacuum System ...................................................................... 25
Set Points ........................................................................................26
LeakTest .........................................................................................26
AnalogOutput Signals .....................................................................26
ComputerInterface ..........................................................................26
Setting Up the Series 937A Controller .................................... 27
Removinga Module .........................................................................27

ConfiguringaModule .......................................................................27
Sensor Modules ................................................................................................. 27
Cold Cathode ............................................................................................. 28
Pirani........................................................................................................... 28
Convection Pirani....................................................................................... 29
Capacitance Manometer ........................................................................... 29
Thermocouple ............................................................................................ 30
Analog Module .................................................................................................... 30
Pressure Units – Switches 1 and 2.......................................................... 30
Control/Combination Sensor Channels– Switches 3 and 4.................... 30
Line Frequency – Switch 5 ....................................................................... 31
Cold Cathode Sensor Delay – Switch 6 ................................................... 31
Configuration-Switch 7 .............................................................................. 31
UCAL Enable/Disable ................................................................................ 31
RS-232/RS-485 Communications Module (Optional)...................................... 31
Power Supply Module ........................................................................................ 33
Installing a Module ............................................................................................. 33
Panel Labels ....................................................................................................... 34
Mounting the Controller ............................................................................. 34
AC Power Cord .......................................................................................... 35
OPERATING THE SERIES 937A CONTROLLER ..................................... 36
Power ...............................................................................................36
Display........................................................................................................ 36
Using the Front Panel Controls ................................................................ 38
Using Function Select......................................................................39
Display Test Mode ............................................................................................. 39
Reviewing Controller Setup ............................................................................... 39
Setup Review Screen 1............................................................................. 39
Cold Cathode non-Standard Configuration Codes................................. 40
Setup Review Screen 2............................................................................. 41
Setup Review Screen 3............................................................................. 41
Setup Review Screen 4............................................................................. 42
Setup Review Screen 5............................................................................. 42
Setup Review Screen 6............................................................................. 42
Setup Review Screen 7............................................................................. 43
Pressure Mode................................................................................................... 43
ColdCathode SensorHighVoltage ..................................................44
Front Panel Control Lock .................................................................................. 44
Leak Test Mode.......................................................................................... 45
Relay Set Points Mode .............................................................................. 46
Reading a Relay Set Point......................................................................... 46
Setting a Relay Set Point ........................................................................... 46
Disabling a Relay Set Point ....................................................................... 47
Relay Inductive Loads and Arc Suppression .......................................... 47
Protection and Control Set Points Mode................................................... 48
Setting a Protection Set Point .................................................................... 48
Setting a Control Set Point......................................................................... 48
Protection and Control Set Point Display Messages....................................... 49
Protection and Control Set Point Messages ............................................ 49
Disabling a Protection or Control Set Point .............................................. 50
Zero and ATM Calibration Modes ............................................................. 50
Zero Calibration Mode ............................................................................... 51
Capacitance Manometer Auto-Zero Feature........................................... 52
ATM Calibration Mode ............................................................................... 53
Calibrating the Convection Pirani Sensor for Atmosphere ..................... 54
Method 1..................................................................................................... 54
Method 2..................................................................................................... 54
Cold Cathode Operation .................................................................................... 55

C.C. On/C.C. Off Front Panel Push-Buttons............................................ 56
Cold Cathode Module Remote Connector ............................................... 56
Analog Module............................................................................................ 56
Communications Module (optional) .......................................................... 56
Using Protection and Control Set Points .................................................. 57
Determining Protection and Control Set Points........................................ 58
Information Update Rate.................................................................................... 59
Controller Analog Output ................................................................................... 60
Buffered Output ......................................................................................... 60
Logarithmic Output .................................................................................... 61
Combination Logarithmic Output .............................................................. 62
Error Messages ................................................................................................. 63
Main Program Checksum Test ................................................................. 63
Communications Module Program Checksum Test................................ 63
Nonvolatile Memory Error in Correction Factors..................................... 63
Setup Error ................................................................................................. 64
Quick ReferenceTables ...................................................................65
Table I Front Panel Operation ................................................................... 65
Table II Setpoint Values ............................................................................. 66
Relay Setpoints.......................................................................................... 66
Control Setpoints ....................................................................................... 66
Protection Setpoint..................................................................................... 66
SPARE PARTS AND ACCESSORIES .................................................... 67
PRODUCT WARRANTY ................................................................... 70
Notes....................................................................................... 71
APPENDIX A:INSTALLING ASERIES 937A SENSOR ............................A.1
Cold CathodeSensors ................................................................... A.1
General.............................................................................................................. A.1
Locating a Cold Cathode Sensor ..................................................................... A.1
Orienting a Cold Cathode Sensor .................................................................... A.1
Managing Contamination in a Cold Cathode Sensor ...................................... A.2
Testing a Cold Cathode Sensor ....................................................................... A.2
Series 423 I-MAG® Cold Cathode Sensor ..................................................... A.2
Connecting the I-MAG Sensor................................................................. A.2
Disassembling the I-MAG Sensor ........................................................... A.2
Cleaning the I-MAG Sensor ..................................................................... A.3
Assembling the I-MAG Sensor ................................................................ A.5
Preparing the Sensor for Bakeout ........................................................... A.6
Series 421 Cold Cathode Sensor .................................................................... A.6
Connecting the Series 421 Sensor.......................................................... A.6
Disassembling the Series 421 Sensor .................................................... A.6
Cleaning the Series 421 Sensor .............................................................. A.8
Assembling the Series 421 Sensor ......................................................... A.9
Preparing the Sensor for Bakeout ........................................................... A.9
Pirani Sensors ............................................................................... A.9
General.............................................................................................................. A.9
Locating a Pirani Sensor .................................................................................. A.9
Preventing Contamination in a Pirani Sensor................................................ A.10
Series315/345 PiraniSensor ...................................................... A.10
Orienting the Series 315/345 Pirani Sensor ........................................ A.10
Connecting the Series 315/345 Sensor ............................................... A.10
Cleaning the Series 315/345 Sensor..................................................... A.12
Testing the Series 315/345 Sensor ............................................................... A.12

Series 317 Convection Pirani Sensor ........................................................... A.12
Orienting the Series 317 Sensor ........................................................... A.12
Connecting the Series 317 Sensor........................................................ A.13
Cleaning the Series 317 Sensor ............................................................ A.15
Testing the Series 317 Sensor............................................................... A.15
Preparing the 317 Sensor for Bakeout.................................................. A.15
CapacitanceManometer MKSBaratron® .................................... A.16
General............................................................................................................ A.16
Installing the Baratron Capacitance Manometer .......................................... A.16
Connecting the Baratron™ Capacitance Manometer .................................. A.16
Repairing the Baratron™ Capacitance Manometer ..................................... A.17
ThermocoupleSensor .................................................................. A.18
General............................................................................................................ A.18
Orienting the DV-6M Sensor .......................................................................... A.18
Connecting the DV-6M Sensor....................................................................... A.18
Cleaning the DV-6M Sensor ........................................................................... A.19
APPENDIX B:LEAK TESTING WITH THE SERIES 937A.......................... B.1
APPENDIX C: 937ASENSOR OUTPUT VS.PRESSURE CURVES.............C.1
Buffered AnalogOutput ColdCathode (Series421 and423).......... C.1
Buffered Analog Output Pirani (Series 315and 345) ...................... C.2
Buffered Analog Output Convection Pirani(Series 317)................. C.3
Buffered Analog OutputCapacitance Manometer .......................... C.4
BufferedAnalog OutputThermocouple (DV-6M) ............................. C.5
Logarithmic and Combination Output All Sensors .......................... C.6

1
937A Multi-Sensor System
Before unpacking your Series 937A HighVacuum, Multi-Sensor System,
check all surfaces of the package for shipping damage.
Please be sure that your Series 937A System package contains these items:
1Series 937AController (withselected modulesinstalled)
1 female, 9-pin "D" sub Accessory connector kit
110-foot powercord
1 HPS™Products Series 937A Multi-Sensor HighVacuum System
User'sManual.
If an optional communications module was ordered, a separate manual for the
module should also be included with the package.The Series 937A System's
sensors and their connecting cables are sold separately.Please refer to page
68for necessaryordering information.
If any items are missing from the package, call HPS™Products
CustomerServiceat 1-303-449-9861or1-800-345-1967.
Inspect the Series 937A System for visible evidence of damage. If it
has been damaged in shipping, notify the carrier immediately. Keep all
shipping materials and packaging for claim verification. Do not return
the product to MKS.
Package Contents

2937A Multi-Sensor System
SymbolsUsedinthis
Manual(English)
Safety Information
Definitions of CAUTION and NOTE
messages used throughout the
manual.
CAUTION: Risk of electrical
shock. ISO 3864, No. B.3.6
CAUTION: Refer to
accompanying documents.
ISO 3864, No. B.3.1
Thissigndenotesahazard.
It calls attention to a
procedure,practice,condition,
or the like, which, if not
correctlyperformedor
adheredto,couldresultin
injurytopersonnel.
This sign denotes a hazard.
It calls attention to an
operatingprocedure,
practice, or the like, which,
if not correctly performed
or adhered to, could result
in damage to or destruction
of all or part of the product.
This sign denotes
important information. It
calls attention to a
procedure,practice,
condition, or the like, which
is essential to highlight.
Définition des indications
ATTENTION et REMARQUE
utilisées dans ce manuel.
ATTENTION: Risque de secousse
électrique. ISO 3864, No. B.3.6
ATTENTION: Se reporter à la
documentation.ISO3864,No.B.3.1
L’indicationsignaleundangerpotentiel.
Elle est destinée àattirer l’attention sur
uneprocédure,uneutilisation,une
situationou touteautre chose
présentantunrisquedeblessureen
casd’exécutionincorrecteoude non-
respect des consignes.
L’indicationsignaleundanger
potentiel.Elleestdestinéeàattirer
l’attentionsuruneprocédure,une
utilisation,unesituationoutouteautre
choseprésentantunrisque
d’endommagementoudedégâtd’une
partie ou de la totalité de l’appareil en
casd’exécutionincorrecteoudenon-
respectdesconsignes.
L’indication REMARQUE signale
des informations importantes. Elle
est destinée à attirer l’attention sur
une procédure, une utilisation, une
situation ou toute autre chose
présentant un intérêt particulier.
Symbolesutilisésdans
cemanuel(Français)
Symbols