MKS HPS I-MAG 423 Series User manual

HPSTM Products
Series 423 I-MAG®
Cold Cathode Ionization
Vacuum Sensor
OPERATION AND
MAINTENANCEMANUAL

Please Note:
MKS Instruments provides these documents as the latest version for the revision indicated.
The material is subject to change without notice, and should be verified if used in a critical
application.

Cold Cathode Ionization Vacuum Sensor
HPSTMProducts
Series 423 I-MAG®
ColdCathodeIonization
VacuumSensor
September 1997
PART #104230020 REV. B

Cold Cathode Ionization Vacuum Sensor
Part#10423000X
Serial # __ __ __ __ __ __
Please fill in these numbers and have
themreadilyavailablewhencallingfor
serviceoradditionalinformation.
(Thepartnumbercanbefoundonyour
packing slip, and both the part number
andserialnumberarelocatedonthe
bottom side of the housing.)
© 1999 by MKS Instruments, Inc., HPSTM Products Inc., All rights reserved.
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For more information or literature, contact:
MKS Instruments, Inc., HPSTM Products Inc.
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Phone: [phone]
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FAX: [phone]

Cold Cathode Ionization Vacuum Sensor
Table of Contents
Table of Contents
Package Contents ..................................................................... 1
SafetyInformation...................................................................... 2
Symbols .................................................................................................. 2
Symbols Used in this Manual (English) ....................................................................... 2
Symboles utilisés dans ce manuel (Français) ............................................................ 3
In dieser Betriebsanleitung vorkommende Symbole (Deutsch) ................................. 4
Símbolos Usados en el Manual (Español) .................................................................. 5
Safety Precautions .................................................................................. 6
English........................................................................................................................... 6
Français ........................................................................................................................ 6
Español ......................................................................................................................... 6
Deutsch......................................................................................................................... 6
Specifications............................................................................ 7
Feature Locations...................................................................... 8
About the HPSTM Series423 I-MAG®Sensor.............................. 9
Installing and Using the Series 423 I-MAG®Sensor................ 10
Locating andOrienting theSensor ..........................................................10
ConnectingtheSensor ...........................................................................10
Starting the Sensor ................................................................................10
OperatingtheSensor..............................................................................11
PreparingforBakeout .............................................................................11
Maintaining the Series 423 IMAG®Sensor .............................. 12
ContaminationoftheSensor...................................................................12
Disassembly...........................................................................................12
Cleaning .................................................................................................13
Assembly ...............................................................................................13
Accessories / Spare Parts ....................................................... 16
ProductWarranty ..................................................................... 17
NOTES.................................................................................... 18